StarJet: Pneumatic Dispensing of Nano- to Picoliter Droplets of Liquid Metal

T. Metz, G. Birkle, R. Zengerle, P. Koltay
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引用次数: 21

Abstract

In this work we present a novel, simple and robust, pneumatically actuated dispenser for nano- to picoliter sized droplets of liquid metals. The so called StarJet dispenser utilizes a star-shaped nozzle geometry that stabilizes plugs of liquid in the centre of the nozzle by capillary force. This minimizes the wall contact of the liquid plug and reduces contact line friction. Individual droplets of liquid metal can be pneumatically generated by interplay of the sheathing gas flow in the outer grooves of the nozzle and the liquid metal. The working principle was first discovered and studied by Computational Fluid Dynamic (CFD) simulations. For experimental validation silicon chips with the star-shaped geometry were fabricated by Deep Reactive Ion Etching (DRIE) and assembled into a printhead. With different nozzle chips volumes between 120 pl and 3.6 nl could be generated at natural frequencies of 90 Hz and 400 Hz. The StarJet can either be operated as drop on demand or as continuous droplet dispenser. We printed columns of metal with 0,5 to 1,0 mm width and 40 mm height (aspect ratio ≫40) to demonstrate the directional stability of the ejection.
StarJet:气动点胶纳米至皮升液滴的液态金属
在这项工作中,我们提出了一种新颖,简单且坚固的气动驱动分配器,用于纳米至皮升大小的液态金属液滴。所谓的StarJet分配器利用星形喷嘴的几何形状,通过毛细管力稳定喷嘴中心的液体塞。这最大限度地减少了液体塞的壁面接触,减少了接触线摩擦。单个液态金属液滴可以通过喷嘴外槽和液态金属的护套气流的相互作用气动产生。通过计算流体力学(CFD)模拟,首次发现并研究了其工作原理。为了实验验证,采用深度反应离子刻蚀(Deep Reactive Ion Etching, DRIE)法制备了星形硅片,并组装成打印头。使用不同的喷嘴芯片,在90 Hz和400 Hz的固有频率下可以产生120 pl和3.6 nl之间的体积。StarJet既可以按需滴滴,也可以连续滴滴。我们打印了宽0.5 ~ 1.0 mm、高40mm(长宽比> 40)的金属柱,以证明喷射的方向稳定性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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