An Electrically-Driven, Large-Deflection, High-Force, Micro Piston Hydraulic Actuator Array for Large-Scale Microfluidic Systems

This paper describes a proof-of-concept all-electrical individually-addressable micro piston actuator array that produces high displacement and force by utilizing hydraulic amplification and electrostatic control. This new class of actuator arrays can remove a critical hurdle, pneumatic control ports to lab-on-chips, and achieve fully-integrated, large-scale, and all-electrical microfluidic systems. The fabricated actuator consists of a 3×3 array of 2×2mm2 membranes and produces maximum deflections of 35, 23, and 11 ¿m when hydraulicallydriven by piezoelectric actuation at 100, 80, 60V, respectively. The corresponding hydraulic amplification ratios are 3.2, 3, and 2.5, respectively. The array functions up to a frequency of 2Hz without failing, while allowing control over individual actuators by utilizing electrostatic latching at 100V. The active device part measures as 8.4×8.4×0.65mm3.