Micromachines最新文献_第5页

Thermal Management and Reliability Engineering of Advanced HBM Packages: Materials, Interfaces, and Integrated Design Strategies. 先进HBM封装的热管理和可靠性工程：材料、接口和集成设计策略。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-08 DOI: 10.3390/mi17091065

Hye Rin Do, Jun Ha Wee, Hwa Rim Lee, Young Chae Lee, Yunna Song, Sung Gyu Pyo

{"title":"Thermal Management and Reliability Engineering of Advanced HBM Packages: Materials, Interfaces, and Integrated Design Strategies.","authors":"Hye Rin Do, Jun Ha Wee, Hwa Rim Lee, Young Chae Lee, Yunna Song, Sung Gyu Pyo","doi":"10.3390/mi17091065","DOIUrl":"10.3390/mi17091065","url":null,"abstract":"Advances in artificial intelligence, high-performance computing, and generative AI technologies have driven a rapid increase in the memory bandwidth and data throughput required of semiconductor systems, establishing High Bandwidth Memory (HBM)-which vertically stacks multiple DRAM dies-as a key enabling memory technology. However, increasing the stack count and shrinking the interconnect pitch in HBM not only intensify vertical heat accumulation and hotspot formation but also give rise to complex reliability issues, including thermo-mechanical stress arising from coefficient-of-thermal-expansion (CTE) mismatch, package warpage, interfacial delamination, Cu protrusion, void formation, and joint degradation. This review analyzes the heat-generation and heat-transfer mechanisms of HBM packages and examines package-level thermal management strategies based on thermal interface materials, underfill, non-conductive film, epoxy molding compound, heat spreaders, and high-thermal-conductivity composites. It further summarizes the current crowding, electromigration, Cu-dielectric interfacial defects, and thermo-mechanical failure mechanisms that arise at fine-pitch interconnects and hybrid-bonding interfaces, together with the material and process design strategies developed to mitigate them. In addition, structure-based thermal management technologies-thermal TSVs, embedded cooling, and hybrid bonding-are compared. This review emphasizes that the thermal bottlenecks and reliability degradation of HBM are interconnected through interfacial thermal resistance, interfacial adhesion, residual stress, and interfacial defects, and proposes that next-generation, highly stacked HBM requires a multi-scale thermal-reliability co-design that integrally controls the heat-, stress-, and current-transfer pathways across the entire package and interconnect domain, rather than relying on the improvement of individual material properties alone.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609547/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Error State Kalman Filter for Integrated Attitude Estimation Based on Data Fusion of MIMU Inertial Array and Magnetometer. 基于MIMU惯性阵列和磁强计数据融合的综合姿态估计误差状态卡尔曼滤波。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-08 DOI: 10.3390/mi17091064

Liang Xue, Jixiang Lu, Guangbin Cai, Bo Yang, Xinguo Wang

{"title":"Error State Kalman Filter for Integrated Attitude Estimation Based on Data Fusion of MIMU Inertial Array and Magnetometer.","authors":"Liang Xue, Jixiang Lu, Guangbin Cai, Bo Yang, Xinguo Wang","doi":"10.3390/mi17091064","DOIUrl":"10.3390/mi17091064","url":null,"abstract":"Attitude estimation has increasingly relied on MEMS inertial measurement units (IMUs) owing to the low cost and miniature size, but the inherent high random noise and error accumulation limit long-term measurement accuracy. This article proposes an integrated attitude estimation algorithm based on data fusion from a MIMU inertial array and magnetometer to address this challenge. First, a redundant inertial array is constructed using homogeneous gyroscopes, and a Kalman filter (KF) is designed to fuse output signals from multiple gyroscopes to estimate true angular rate. Second, an integrated error state Kalman filter (ESKF) for the MIMU/magnetometer system is developed. Using the attitude quaternion calculated by the strapdown inertial solution as the nominal state and combining it with measurements from the accelerometer and magnetometer as observations, the attitude error is estimated and corrected. Both simulations and field experiments were conducted to validate the effectiveness of the proposed algorithm. The experimental results show that the ESKF algorithm performs best in estimation accuracy and addresses the issue of error accumulation and fluctuation. In particular, the Root Mean Square Error (RMSE) of the ESKF algorithm was significantly reduced, with the roll angle reduced by 55.34%, the pitch angle by 30.25%, and the yaw angle by 55.71%.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609159/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062371","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Phase Compensator Combined Feedback Control to Mitigate Dynamic Hysteresis in Piezoelectric Actuators. 相位补偿器联合反馈控制减轻压电执行器的动态滞后。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-08 DOI: 10.3390/mi17091063

Zhen Wang, Zekun Li, Hanqing Liu, Guanglu Hao, Bo Li, Kairui Cao

{"title":"Phase Compensator Combined Feedback Control to Mitigate Dynamic Hysteresis in Piezoelectric Actuators.","authors":"Zhen Wang, Zekun Li, Hanqing Liu, Guanglu Hao, Bo Li, Kairui Cao","doi":"10.3390/mi17091063","DOIUrl":"10.3390/mi17091063","url":null,"abstract":"The inherent dynamic hysteresis nonlinearity of piezoelectric actuators severely degrades the control accuracy of micropositioning systems. This paper proposes a composite control method based on a phase compensator and polynomial correction. Unlike conventional approaches that rely on hysteresis modeling and inversion, the proposed method equivalently treats the symmetric hysteresis of piezoelectric actuators as a phase-lag property of the system and employs a phase compensator to achieve feedforward compensation. For asymmetric hysteresis, a polynomial is cascaded with the phase compensator to correct the amplitude discrepancy between ascending and descending branches, effectively overcoming the inability of the phase compensator alone to accommodate asymmetric nonlinearity. This strategy circumvents the cumbersome procedures of precise hysteresis modeling and parameter identification, offering a simple structure, few parameters to be identified, and convenient engineering implementation within the investigated operating range. To further enhance disturbance-rejection capability and steady-state positioning accuracy, the phase-polynomial feedforward compensator is combined with PI feedback control, establishing a composite feedforward-feedback architecture for high-performance piezoelectric actuator control. Feedforward compensation and composite control experiments validate the effectiveness of the proposed method.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609445/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Topology-Free EM Modeling and Analysis of Pixelated Microstrip Low-Pass Filters Under Comparable Footprint. 相似封装下像素化微带低通滤波器的无拓扑EM建模与分析。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-06 DOI: 10.3390/mi17091060

Jorge Davalos-Guzman, Jose L Chavez-Hurtado, Lina M Aguilar-Lobo

{"title":"Topology-Free EM Modeling and Analysis of Pixelated Microstrip Low-Pass Filters Under Comparable Footprint.","authors":"Jorge Davalos-Guzman, Jose L Chavez-Hurtado, Lina M Aguilar-Lobo","doi":"10.3390/mi17091060","DOIUrl":"10.3390/mi17091060","url":null,"abstract":"Pixelated electromagnetic representations enable topology-free numerical exploration of microwave layouts without enforcing a predefined circuit template. This work presents a simulation-based electromagnetic modeling and analysis framework for pixelated microstrip low-pass filters within a physical footprint comparable to that of a classical stepped-impedance reference. A binary metallization encoding is embedded in a fixed microstrip domain and explored through full-wave electromagnetic optimization under consistent material, excitation, and specification conditions. The objective is not extreme miniaturization or hardware prototyping, but to assess whether topology-free pixelated layouts can produce useful low-pass responses within the same general physical scale and to analyze the structural properties of the resulting feasible layouts. Across 20 independent optimization runs, 12 specification-compliant and geometrically unique metallization layouts were identified. Aggregate analysis of 360 single-pixel perturbations reveals topology-dependent sensitivity, while finite-width regularization of ideal corner contacts preserves modeled specification compliance after refined-mesh verification, with the suitable bridge width depending on the topology. The scope is deliberately limited to full-wave EM modeling and numerical analysis; experimental fabrication and measurement are left as a subsequent validation stage. These findings support topology-free pixelated EM modeling and analysis as a route for investigating non-obvious low-pass filter layouts under comparable footprint constraints.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13608989/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062416","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and Implementation of a Quartz Cilia MEMS Vector Hydrophone. 石英纤毛MEMS矢量水听器的设计与实现。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-06 DOI: 10.3390/mi17091061

Ziming Ren, Shijie Yang, Rushan Xie, Zhonggang Zhang, Libo Gao, Chenyang Xue

{"title":"Design and Implementation of a Quartz Cilia MEMS Vector Hydrophone.","authors":"Ziming Ren, Shijie Yang, Rushan Xie, Zhonggang Zhang, Libo Gao, Chenyang Xue","doi":"10.3390/mi17091061","DOIUrl":"10.3390/mi17091061","url":null,"abstract":"The cilium avoids energy loss due to bending deformation during vibration, thereby efficiently transmitting the acoustic driving force to the cross-beam. Meanwhile, a hollow cylindrical structure is adopted instead of the traditional solid one. While maintaining the same external geometry, this hollow design not only increases the effective acoustic area to enhance the acoustic driving force but also reduces the added mass of the cilium. This material-structure synergistic optimization improves the acoustic-to-mechanical transfer efficiency of the cilium in low-frequency acoustic fields, thus enhancing the device's acoustic sensitivity in the low-frequency range. Parametric simulations are conducted using the COMSOL Multiphysics 6.3 platform to systematically optimize key geometric parameters such as the outer radius and height of the quartz cilium, and the optimal dimensions are determined. The sensitivity and directivity of the prototype are measured in the 20-1000 Hz frequency range using the standard hydrophone comparison method. Experimental results show that the quartz cilium vector hydrophone achieves a sensitivity of -179.1 dB (1 kHz, 0 dB = 1 V/μPa) at 1000 Hz. The frequency response curve exhibits good flatness in the low-frequency range and agrees well with the theoretical 6 dB per octave increase characteristic of pressure gradient sensors. Directivity tests reveal a typical figure-8 pattern at both 315 Hz and 630 Hz, with null depths exceeding 30 dB, demonstrating excellent vector detection capability. This study provides an effective approach for improving the low-frequency sensitivity of MEMS (Micro-Electromechanical System) vector hydrophones, and the designed device meets the requirements for underwater target detection with promising prospects for engineering applications.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609188/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062302","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Reliability-Oriented Multi-Class Fault-Injection Acceleration for Digital Integrated Circuits via Heterogeneous Spatio-Temporal Graph Learning. 基于异构时空图学习的数字集成电路多类故障注入加速可靠性研究。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-04 DOI: 10.3390/mi17091059

Jiaqi Lu, Changqing Xu, Huixin Peng, Guoxing Zhang, Liang Wang, Xinfang Liao, Yi Liu, Yintang Yang

{"title":"Reliability-Oriented Multi-Class Fault-Injection Acceleration for Digital Integrated Circuits via Heterogeneous Spatio-Temporal Graph Learning.","authors":"Jiaqi Lu, Changqing Xu, Huixin Peng, Guoxing Zhang, Liang Wang, Xinfang Liao, Yi Liu, Yintang Yang","doi":"10.3390/mi17091059","DOIUrl":"10.3390/mi17091059","url":null,"abstract":"The pre-silicon reliability analysis of digital integrated circuits relies on fault-injection campaigns to characterize how single-event upsets propagate into distinct system-level outcomes. Exhaustive gate-level injection is expensive, whereas most learning-based accelerators collapse failure manifestations into a single binary label, thereby providing limited support for reliability diagnosis and follow-up analysis. We present a reliability-oriented reduced-campaign framework that predicts the monitor-defined outcome type of flip-flop (FF)-level cases omitted from a fixed circuit/workload campaign. For each circuit, Cadence Xcelium first performs SA0/SA1 screening and retains an FF when at least one stuck-at polarity produces a monitored failure. Within the resulting transient campaign, FeatureCoverage selects FF-time cases using structural attributes and fault-free activity statistics without reading their transient-fault outcomes. HSTGNN then combines a 60-cycle FF logic-value window from the same fault-free waveform, netlist-derived FF-FF topology and gate-path attributes, and module hierarchy to predict five outcomes: C0 No Error, C1 Result Error, C2 Exception Error, C3 Timeout Error, and C4 Safety Error. On the I2C, SPI, FIFO, and RISC-V benchmarks, HSTGNN achieves an 81.2-99.0% macro F1 on more than 38,000 held-out FF-time cases under a 70% labeled fault-injection budget comprising 60% training and 10% validation cases. FeatureCoverage also yields the highest macro F1 across all four label-free split strategies in every evaluated circuit. The proposed framework predicts the remaining 30% of cases while preserving reliability-relevant outcome semantics that binary acceleration discards. The evidence is limited to within-campaign prediction and supports, rather than replaces, quantitative reliability and diagnostic-coverage analysis.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609364/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Investigation on FAB Morphology Evolution and Pd Redistribution Behavior in Palladium-Coated Copper Wires During Electronic Flame-Off (EFO) Process. 电子灭焰过程中镀钯铜线FAB形态演变及Pd重分布行为研究

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-04 DOI: 10.3390/mi17091058

Junling Fan, Haoyang Wang, Yongzhen Sun, Jun Cao, Weilong Liu

{"title":"Investigation on FAB Morphology Evolution and Pd Redistribution Behavior in Palladium-Coated Copper Wires During Electronic Flame-Off (EFO) Process.","authors":"Junling Fan, Haoyang Wang, Yongzhen Sun, Jun Cao, Weilong Liu","doi":"10.3390/mi17091058","DOIUrl":"10.3390/mi17091058","url":null,"abstract":"Compared with bare copper wire, palladium-coated copper (PCC) wire is widely used in microelectronic packaging due to its improved oxidation resistance and enhanced reliability. However, the formation mechanism of free air balls (FABs) and the redistribution behavior of Pd during the electronic flame-off (EFO) process, particularly under different Pd coating thicknesses and processing conditions, have not yet been fully understood. In this work, four types of 1 mil PCC wires with Pd coating thicknesses of 60, 80, 100, and 120 nm were systematically investigated to study the influence of EFO parameters on FAB morphology and Pd redistribution behavior. SEM, FIB, and EDS analyses were employed to provide experimental insights into the coupled relationship between transient thermal input, internal pore distribution and elemental segregation evolution, and Pd redistribution behavior. The results show that the preferred FAB morphology is obtained at 54 mA and 580 μs, with a diameter-to-wire ratio of approximately 2. With increasing Pd coating thickness, the exposed copper area on the FAB surface decreases from 13% to 6%, while the Pd-deficient region gradually shifts toward the bottom of the FAB. This study provides experimental insights into the Pd redistribution behavior during FAB formation under different EFO conditions, which may contribute to the optimization of Pd-coated Cu bonding wires.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609457/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Editorial for the Special Issue on Advances in Digital Manufacturing and Nano Fabrication. 数字制造和纳米制造进展特刊社论。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-04 DOI: 10.3390/mi17091057

Jian Cheng, Jianguo Zhang, Qi Liu

引用次数: 0

Mechanisms of Degradation and Damage in GaAs PHEMT Low-Noise Amplifier Under Ultra-Short Microwave Pulses. 超短微波脉冲作用下GaAs PHEMT低噪声放大器的退化与损伤机理

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-03 DOI: 10.3390/mi17091054

Tongxin Guan, Liang Cheng, Zhiyuan Zhang, Yingjian Cao, Yu Wang, Guo Liu

{"title":"Mechanisms of Degradation and Damage in GaAs PHEMT Low-Noise Amplifier Under Ultra-Short Microwave Pulses.","authors":"Tongxin Guan, Liang Cheng, Zhiyuan Zhang, Yingjian Cao, Yu Wang, Guo Liu","doi":"10.3390/mi17091054","DOIUrl":"10.3390/mi17091054","url":null,"abstract":"Ultra-short microwave pulses with durations of 1 ns or less can go through a PIN limiter with low attenuation before the limiter responds and can therefore be directly injected into the subsequent low-noise amplifier (LNA). Based on this consideration, this paper reports the first investigation of degradation and damage in the GaAs pseudomorphic high-electron-mobility transistors (pHEMT) LNA induced by high-power ultra-short microwave pulses. The effects of pulse power, frequency, and repetition rate on the degradation and damage mechanisms of the LNA are investigated. The results show that, when exposed to a 45 dBm ultra-short microwave pulse at 2 GHz, the region beneath the transistor gate on the drain side experiences the most rapid burnout within 43 ns at a repetition rate of 200 MHz. Further analysis reveals that the negative half-cycle of the high-power microwave pulse depletes the electron concentration in the transistor. Consequently, excessively high repetition rates of high-power ultra-short microwave pulses are less likely to induce transistor burnout. Furthermore, the gain of the LNA is affected by both the electron concentration and the electron mobility in the transistor. The injected high-power ultra-short microwave pulses disturb the electron concentration, while the temperature rise reduces electron mobility. As a result, the transistor performance degrades, leading to a decrease in the LNA gain.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609414/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Micro-Power Harvesting from Electromagnetic Interferences in Power Systems. 电力系统电磁干扰下的微功率采集。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-03 DOI: 10.3390/mi17091056

Moreno d'Ambrosio, Gabriele Marasca, Massimo Calvo, Aldo Romani, Carmelo Corsaro, Salvatore Patanè

{"title":"Micro-Power Harvesting from Electromagnetic Interferences in Power Systems.","authors":"Moreno d'Ambrosio, Gabriele Marasca, Massimo Calvo, Aldo Romani, Carmelo Corsaro, Salvatore Patanè","doi":"10.3390/mi17091056","DOIUrl":"10.3390/mi17091056","url":null,"abstract":"The increasing demand for real-time monitoring systems has accelerated the adoption of distributed sensors operating in the ultra-low-power regime. However, in retrofittable and hard-to-access applications, providing a continuous external power supply is challenging, while batteries are limited by their lifetime and maintenance requirements. Energy harvesting represents a promising approach to enable autonomous sensor operation by exploiting ambient energy sources, including photovoltaic, thermal, mechanical, and electromagnetic sources. In this work, different circuit topologies for near-field electromagnetic energy harvesting are investigated through simulation and experimental validation. The proposed approach exploits the electromagnetic interference generated by shielded commercial power electronics, such as drivers and power supplies, as an available energy source. The results demonstrate the capability of compact and easily deployable circuits to capture and convert near-field electromagnetic energy into usable electrical power. The proposed methodology provides a flexible solution for powering low-power monitoring systems and can be adapted to different environments by tailoring the harvesting circuit parameters to the available electromagnetic source.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609456/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062291","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0