MicromachinesPub Date : 2025-09-06DOI: 10.3390/mi16091024
Wei Wang, Jinchuan Zheng, Zhe Sun, Xiaoqi Chen
{"title":"Coupling and Preload Analysis of Piezoelectric Actuator and Nonlinear Stiffness Mechanism.","authors":"Wei Wang, Jinchuan Zheng, Zhe Sun, Xiaoqi Chen","doi":"10.3390/mi16091024","DOIUrl":"10.3390/mi16091024","url":null,"abstract":"<p><p>This article presents a comprehensive investigation of the dynamic coupling between a piezoelectric actuator (PZT) and its driving nonlinear stiffness mechanism (NSM) stage for precise positioning control. Particular emphasis is placed on the preload-induced effects on the force transmission and structural separation between the PZT and NSM. To ensure continuous mechanical contact between them, we propose a no-separation criterion based on acceleration matching, from which the minimum preload requirement is analytically derived. Additionally, static and dynamic simulations reveal that increasing the preload force from 0 N to 10 N can push the first natural frequency of the holistic system from 214.21 Hz to 258.17 Hz, respectively. This beneficially enhances the displacement consistency across different geometric configurations. Moreover, an appropriate preload force can prevent separation and increase system stiffness while reducing nonlinear deformation. Experimental results verifies that a preload of 10 N can prevent the separation between the PZT and NSM stage and maintain achievable output displacement of the stage within the range from 54.35μm to 129.42μm. This article offers the analytical results of preload setting to guarantee reliable actuation for nonlinear precision positioning stages.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471393/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2025-09-05DOI: 10.3390/mi16091022
Shuli Wang, Yigang Shen
{"title":"Editorial for the Special Issue on the Application of Microfluidic Technology in Bioengineering.","authors":"Shuli Wang, Yigang Shen","doi":"10.3390/mi16091022","DOIUrl":"10.3390/mi16091022","url":null,"abstract":"<p><p>Microfluidics, also called lab-on-a-chip, is a cutting-edge technology in contemporary interdisciplinary science [...].</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472118/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2025-09-05DOI: 10.3390/mi16091023
Jibing Chen, Yanfeng Liu, Bowen Liu, Yiping Wu
{"title":"Structure and Temperature Dependence of Solder Layer and Electric Parameters in IGBT Modules.","authors":"Jibing Chen, Yanfeng Liu, Bowen Liu, Yiping Wu","doi":"10.3390/mi16091023","DOIUrl":"10.3390/mi16091023","url":null,"abstract":"<p><p>IGBT high-power devices are subjected to various extreme working conditions for long periods and are affected by multiple loading conditions, inevitably leading to various aging and failure issues. Among them, the solder layer, as one of the weakest parts in the packaging structure of IGBT modules, has rarely been studied regarding its thermal fatigue characteristics and interface structure evolution behavior. In this work, a rapid temperature test chamber was used to conduct a thermal fatigue temperature cycling experiment on IGBT modules from -40 to 150 °C. The microscopic structural evolution behavior and the growth pattern of intermetallic compounds (IMC) during the solder layer's thermal fatigue process of the IGBT modules were studied. At the same time, the changes in relevant static parameters of the IGBT after thermal cycling fatigue were tested using an oscilloscope and a power device analyzer, thereby clarifying the failure mechanism of the IGBT module. This provides a theoretical basis and data support for the thermal design and reliability assessment of IGBT modules.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471786/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176428","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2025-09-04DOI: 10.3390/mi16091021
Pengfei Zhao, Junjun Du, Jinyu Tai, Zhaoqi Shang, Xia Yuan, Yuanyuan Shi
{"title":"Integration of High-Brightness QLED-Excited Diamond Magnetic Sensor.","authors":"Pengfei Zhao, Junjun Du, Jinyu Tai, Zhaoqi Shang, Xia Yuan, Yuanyuan Shi","doi":"10.3390/mi16091021","DOIUrl":"10.3390/mi16091021","url":null,"abstract":"<p><p>The nitrogen-vacancy (NV) center magnetic sensor, leveraging nitrogen-vacancy quantum effects, enables high-sensitivity magnetic field detection via optically detected magnetic resonance (ODMR). However, conventional single-point integrated devices suffer from limitations such as inefficient regional magnetic field detection and challenges in discerning the directional variations of dynamic magnetic fields. To address these issues, this study proposes an array- based architecture that innovatively substitutes the conventional 532 nm laser with quantum-dot light-emitting diodes (QLEDs). Capitalizing on the advantages of QLEDs-including compatibility with micro/nano-fabrication processes, wavelength tunability, and high luminance-a 2 × 2 monolithically integrated magnetometer array was developed. Each sensor unit achieves a magnetic sensitivity of below 26 nT·Hz<sup>-1/2</sup> and a measurable range of ±120 μT within the 1-10 Hz effective bandwidth. Experimental validation confirms the array's ability to simultaneously resolve multi-regional magnetic fields and track dynamic field orientations while maintaining exceptional device uniformity. This advancement establishes a scalable framework for the design of large-scale magnetic sensing arrays, demonstrating significant potential for applications requiring spatially resolved and directionally sensitive magnetometry.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471638/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2025-09-03DOI: 10.3390/mi16091019
Satoshi Konishi, Shiho Shimizu, Katsunori Sakai
{"title":"Curling of Gel Scaffold Layer for Cell Culture by a Deformable Microactuator Mat Toward Biological Canal Formation.","authors":"Satoshi Konishi, Shiho Shimizu, Katsunori Sakai","doi":"10.3390/mi16091019","DOIUrl":"10.3390/mi16091019","url":null,"abstract":"<p><p>A gel scaffold for a biological canal is formed using a deformable soft microactuator mat. Three-dimensional cellular tissue structures are important for organ-on-a-chip in in-vitro biomimetic models. However, most traditional cellular tissues have been cultured in a dish or transwell. Furthermore, cellular culture on the inner wall of pre-manufactured channels has been recently reported. In this study, we propose a deformable actuator mat that can transform a flat structure into a tubular structure. The active mat, which is composed of pneumatic balloon actuator arrays, assembles a biological canal from a flat sheet of a gel scaffold for cell culture. The mat can return to its initial flat state so that the gel-based canal structure with cells can self-stand. A self-standing tubular gel structure is demonstrated as a biomimetic canal toward a biological canal with cells. A self-standing tubular gel structure has permeability, which is important for evaluation of pharmacokinetics. The actuator mat under the gel layers was curled into a tubular shape (approximately 1 mm diameter) and returned after the assembly. Culturing cellular tissues on a demonstrated gel structure will reproduce the biological permeability of organs such as an intestinal tract. This study confirms the gel-based canal formation process without cells as a feasibility study. The proposed technique has potential for the flexible design of biological three-dimensional structures, thereby contributing to pharmacokinetics research.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471433/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Dual-Mode Flexible Pressure Sensor Based on Ionic Electronic and Piezoelectric Coupling Mechanism Enables Dynamic and Static Full-Domain Stress Response.","authors":"Yue Ouyang, Shunqiang Huang, Zekai Huang, Shengyu Wu, Xin Wang, Sheng Chen, Haiyan Zhang, Zhuoqing Yang, Mengran Liu, Libo Gao","doi":"10.3390/mi16091018","DOIUrl":"10.3390/mi16091018","url":null,"abstract":"<p><p>Flexible pressure sensors have shown promise applications in scenarios such as robotic tactile sensing due to their excellent sensitivity and linearity. However, the realization of flexible pressure sensors with both static and dynamic response capabilities still face significant challenges due to the properties of the sensing materials themselves. In this study, we propose a flexible pressure sensor that integrates piezoelectric and ionic capacitance mechanisms for full-domain response detection of dynamic and static forces: a \"sandwich\" sensing structure is constructed by printing a mixture of multi-walled carbon nanotubes (MWCNTs) onto the surface of the upper and lower electrodes, and sandwiching a polyvinylidene fluoride (PVDF) thin film between the electrodes. The device exhibits a sensitivity of 0.13 kPa<sup>-1</sup> in the pressure range of 0-150 kPa. The sensor has a rapid dynamic response (response time 19 ms/12 ms) with a sensitivity of 0.49 mV kPa<sup>-1</sup> based on the piezoelectric mechanism and a linearity of 0.9981 based on the ionic capacitance mechanism. The device maintains good response stability under the ball impact test, further validating its potential application in static/dynamic composite force monitoring scenarios.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472059/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2025-09-03DOI: 10.3390/mi16091020
Caihong Huang, Dingrong Yi, Lichun Zhou
{"title":"Accelerated Super-Resolution Reconstruction for Structured Illumination Microscopy Integrated with Low-Light Optimization.","authors":"Caihong Huang, Dingrong Yi, Lichun Zhou","doi":"10.3390/mi16091020","DOIUrl":"10.3390/mi16091020","url":null,"abstract":"<p><p>Structured illumination microscopy (SIM) with π/2 phase-shift modulation traditionally relies on frequency-domain computation, which greatly limits processing efficiency. In addition, the illumination regime inherent in structured illumination techniques often results in poor visual quality of reconstructed images. To address these dual challenges, this study introduces DM-SIM-LLIE (Differential Low-Light Image Enhancement SIM), a novel framework that integrates two synergistic innovations. First, the study pioneers a spatial-domain computational paradigm for π/2 phase-shift SIM reconstruction. Through system differentiation, mathematical derivation, and algorithm simplification, an optimized spatial-domain model is established. Second, an adaptive local overexposure correction strategy is developed, combined with a zero-shot learning deep learning algorithm, RUAS, to enhance the image quality of structured light reconstructed images. Experimental validation using specimens such as fluorescent microspheres and bovine pulmonary artery endothelial cells demonstrates the advantages of this approach: compared with traditional frequency-domain methods, the reconstruction speed is accelerated by five times while maintaining equivalent lateral resolution and excellent axial resolution. The image quality of the low-light enhancement algorithm after local overexposure correction is superior to existing methods. These advances significantly increase the application potential of SIM technology in time-sensitive biomedical imaging scenarios that require high spatiotemporal resolution.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471432/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176004","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Recent Progress of Powering IoT Based on Thermoelectric Technology.","authors":"Jinhong Dai, Haitao Deng, Jingwen Huang, Xiaosheng Zhang","doi":"10.3390/mi16091017","DOIUrl":"10.3390/mi16091017","url":null,"abstract":"<p><p>With the rapid advancement of electronic devices, Internet of Things (IoT) technology has become increasingly integrated into everyday life. However, its broader development has been restricted by challenges related to long-term maintenance and the frequent need for power source replacements. Among the available power supply solutions, thermoelectric power generation has garnered significant interest due to its high reliability. Nevertheless, the widespread application of thermoelectric generators (TEGs) in IoT remains limited due to their relatively low conversion efficiency and structural fragility. This review systematically summarizes recent strategies aimed at enhancing the output performance and durability of TEGs through improvements in manufacturing processes and performance optimization techniques. It highlights several fabrication methods capable of endowing devices with superior flexibility and reliability, including screen printing, chemical vapor deposition (CVD), and electrospray deposition. Additionally, we discuss two key approaches for improving power generation performance: advanced material selection and multi-mechanism hybridization. Finally, the article explores the applications of TEGs in thermal energy harvesting from wearable devices, ambient environments, and aerospace fields, demonstrating their substantial potential to provide sustainable energy for IoT devices.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471465/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176325","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Numerical Investigation of Vortex-Induced Enhancement in the Mixing Characteristics of Double-Spiral and Serpentine Microchannels.","authors":"Litao Qin, Zhen Jiang, Dongjian Zhou, Jincai Yue, Huanong Cheng","doi":"10.3390/mi16091016","DOIUrl":"10.3390/mi16091016","url":null,"abstract":"<p><p>To enhance passive mixing in microchannels, T-shaped double-spiral and serpentine microchannels with identical curvature radii were designed and numerically analyzed across a Reynolds number (<i>Re</i>) range of 1 to 300. The double-spiral microchannel exhibited superior mixing performance at <i>Re</i> ≤ 200, which is primarily attributed to the efficient utilization of Dean vortices. In contrast, the serpentine microchannel showed better performance at <i>Re</i> ≥ 250, benefiting from the early formation of four-vortex structures induced by periodic curvature reversals. To further enhance the performance of the serpentine microchannel at low <i>Re</i>, groove structures with varying orientation angles were incorporated. The introduction of the groove structures generated lateral secondary flows that not only increased flow disturbances but also disrupted the symmetry of the Dean vortices. Among these configurations, Structure 2, with a 45° angle between the groove direction and centrifugal force, exhibited the most pronounced enhancement in vortex intensity, as the secondary flows induced by the grooves synergistically interacted with the Dean vortices. This configuration resulted in the highest mixing enhancement (>50%). This study provides valuable insights into geometry-driven mixing mechanisms and offers design guidelines for high-efficiency micromixers across a wide range of <i>Re</i>.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471724/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Design and Fabrication of Air-Coupled CMUT for Non-Contact Temperature Measurement Applications.","authors":"Xiaobo Rui, Yongshuai Ma, Chenghao He, Chi Zhang, Zhuochen Wang, Hui Zhang","doi":"10.3390/mi16091008","DOIUrl":"10.3390/mi16091008","url":null,"abstract":"<p><p>Compared with traditional piezoelectric transducers, Capacitive Micromachined Ultrasonic Transducers (CMUTs) have advantages such as better impedance matching with air, smaller size, lighter weight, higher sensitivity, and ease of array formation. Acoustic temperature measurement is a technology that utilizes the relationship between sound velocity and temperature to achieve non-contact temperature detection, with advantages such as fast response and non-invasiveness. CMUT-based acoustic temperature field measurement can achieve temperature detection in situations with narrow spaces, portability, and high measurement accuracy. This paper investigates an air-coupled CMUT device for acoustic temperature measurement, featuring a resonant frequency of 220 kHz, and composed of 16 × 8 cells. The design and fabrication of the CMUT array were completed, and the device characteristics were tested and characterized. A temperature field measurement method using mechanical scanning was proposed. A temperature measurement experimental system based on CMUT devices was constructed, achieving preliminary measurement of acoustic transmission time in both uniform and non-uniform temperature fields. Using a temperature field reconstruction algorithm, the measurement and imaging of the temperature field above an electric heating wire were accomplished and compared with the thermocouple-based temperature measurement experiment. The experimental results verified the feasibility of CMUT devices for non-contact temperature field measurement.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471811/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}