Micromachines最新文献_第7页

A Novel Isolation Approach for GaN-Based Power Integrated Devices. 氮化镓基功率集成器件的新型隔离方法

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-30 DOI: 10.3390/mi15101223

Zahraa Zaidan, Nedal Al Taradeh, Mohammed Benjelloun, Christophe Rodriguez, Ali Soltani, Josiane Tasselli, Karine Isoird, Luong Viet Phung, Camille Sonneville, Dominique Planson, Yvon Cordier, Frédéric Morancho, Hassan Maher

{"title":"A Novel Isolation Approach for GaN-Based Power Integrated Devices.","authors":"Zahraa Zaidan, Nedal Al Taradeh, Mohammed Benjelloun, Christophe Rodriguez, Ali Soltani, Josiane Tasselli, Karine Isoird, Luong Viet Phung, Camille Sonneville, Dominique Planson, Yvon Cordier, Frédéric Morancho, Hassan Maher","doi":"10.3390/mi15101223","DOIUrl":"https://doi.org/10.3390/mi15101223","url":null,"abstract":"This paper introduces a novel technology for the monolithic integration of GaN-based vertical and lateral devices. This approach is groundbreaking as it facilitates the drive of high-power GaN vertical switching devices through lateral GaN HEMTs with minimal losses and enhanced stability. A significant challenge in this technology is ensuring electrical isolation between the two types of devices. We propose a new isolation method designed to prevent any degradation of the lateral transistor's performance. Specifically, high voltage applied to the drain of the vertical GaN power FinFET can adversely affect the lateral GaN HEMT's performance, leading to a shift in the threshold voltage and potentially compromising device stability and driver performance. To address this issue, we introduce a highly doped n+ GaN layer positioned between the epitaxial layers of the two devices. This approach is validated using the TCAD-Sentaurus simulator, demonstrating that the n+ GaN layer effectively blocks the vertical electric field and prevents any depletion or enhancement of the 2D electron gas (2DEG) in the lateral GaN HEMT. To our knowledge, this represents the first publication of such an innovative isolation strategy between vertical and lateral GaN devices.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509730/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects. MEMS 微镜执行技术：趋势、创新和未来前景的全面回顾。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-30 DOI: 10.3390/mi15101233

Mansoor Ahmad, Mohamed Bahri, Mohamad Sawan

{"title":"MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects.","authors":"Mansoor Ahmad, Mohamed Bahri, Mohamad Sawan","doi":"10.3390/mi15101233","DOIUrl":"https://doi.org/10.3390/mi15101233","url":null,"abstract":"Micromirrors have recently emerged as an essential component in optical scanning technology, attracting considerable attention from researchers. Their compact size and versatile capabilities, such as light steering, modulation, and switching, are leading them as potential alternatives to traditional bulky galvanometer scanners. The actuation of these mirrors is critical in determining their performance, as it contributes to factors such as response time, scanning angle, and power consumption. This article aims to provide a thorough exploration of the actuation techniques used to drive micromirrors, describing the fundamental operating principles. The four primary actuation modalities-electrostatic, electrothermal, electromagnetic, and piezoelectric-are thoroughly investigated. Each type of actuator's operational principles, key advantages, and their limitations are discussed. Additionally, the discussion extends to hybrid micromirror designs that combine two types of actuation in a single device. A total of 208 closely related papers indexed in Web of Science were reviewed. The findings indicate ongoing advancements in the field, particularly in terms of size, controllability, and field of view, making micromirrors ideal candidates for applications in medical imaging, display projections, and optical communication. With a comprehensive overview of micromirror actuation strategies, this manuscript serves as a compelling resource for researchers and engineers aiming to utilize the appropriate type of micromirror in the field of optical scanning technology.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509184/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Quantum Interference Effects on Josephson Current through Quadruple-Quantum-Dot Molecular Inserted between Superconductors. 通过插入超导体之间的四重量子点分子对约瑟夫森电流的量子干涉效应。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-30 DOI: 10.3390/mi15101225

Yumei Gao, Yaohong Shen, Feng Chi, Zichuan Yi, Liming Liu

{"title":"Quantum Interference Effects on Josephson Current through Quadruple-Quantum-Dot Molecular Inserted between Superconductors.","authors":"Yumei Gao, Yaohong Shen, Feng Chi, Zichuan Yi, Liming Liu","doi":"10.3390/mi15101225","DOIUrl":"https://doi.org/10.3390/mi15101225","url":null,"abstract":"We study theoretically the Josephson current through a junction composed of quadruple quantum dots (QDs), of which only one is coupled directly to the left and right superconductor leads (denoted by QD1). The other three QDs are side-coupled to QD1 and free from coupling to the leads. It is found that when the energy levels of all the four QDs are identical, the Josephson current varying with energy level of QD1 develops three peaks with two narrow and one wide, showing the typical Dicke lineshape. With increasing inter-dot coupling strength, the triple-peak configuration is well retained and accompanied by an obviously increased current amplitude. The critical current as a function of the energy level of QD1 shows a single resonance peak whose position and height depend on the energy levels of the side-coupled QDs and the inter-dot coupling strengths. We also find that the curve of the critical current versus energy levels of the side-coupled QDs shows a pair of Fano resonances and the same number Fano antiresonances (valleys). When the energy levels of the side-coupled QDs are different from each other, another Fano resonance and antiresonance are induced due to the quantum interference effect. The present results are compared with those in double and triple QDs systems, and may serve as unique means, such as the combination of quantum Dicke and Fano effects, to manipulate the Josehpson currents.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509800/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

FBG Interrogator Using a Dispersive Waveguide Chip and a CMOS Camera. 使用色散波导芯片和 CMOS 摄像机的 FBG 干涉仪。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101206

Zhenming Ding, Qing Chang, Zeyu Deng, Shijie Ke, Xinhong Jiang, Ziyang Zhang

{"title":"FBG Interrogator Using a Dispersive Waveguide Chip and a CMOS Camera.","authors":"Zhenming Ding, Qing Chang, Zeyu Deng, Shijie Ke, Xinhong Jiang, Ziyang Zhang","doi":"10.3390/mi15101206","DOIUrl":"https://doi.org/10.3390/mi15101206","url":null,"abstract":"Optical sensors using fiber Bragg gratings (FBGs) have become an alternative to traditional electronic sensors thanks to their immunity against electromagnetic interference, their applicability in harsh environments, and other advantages. However, the complexity and high cost of the FBG interrogation systems pose a challenge for the wide deployment of such sensors. Herein, we present a clean and cost-effective method for interrogating an FBG temperature sensor using a micro-chip called the waveguide spectral lens (WSL) and a standard CMOS camera. This interrogation system can project the FBG transmission spectrum onto the camera without any free-space optical components. Based on this system, an FBG temperature sensor is developed, and the results show good agreement with a commercial optical spectrum analyzer (OSA), with the respective wavelength-temperature sensitivity measured as 6.33 pm/°C for the WSL camera system and 6.32 pm/°C for the commercial OSA. Direct data processing on the WSL camera system translates this sensitivity to 0.44 μm/°C in relation to the absolute spatial shift of the FBG spectra on the camera. Furthermore, a deep neural network is developed to train the spectral dataset, achieving a temperature resolution of 0.1 °C from 60 °C to 120 °C, while direct processing on the valley/dark line detection yields a resolution of 7.84 °C. The proposed hardware and the data processing method may lead to the development of a compact, practical, and low-cost FBG interrogator.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509316/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Graphene-Doped Piezoelectric Transducers by Kriging Optimal Model for Detecting Various Types of Laryngeal Movements. 通过克里格最优模型检测各种喉部运动的掺石墨烯压电传感器

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101213

Ming-Chan Lee, Cheng-Tang Pan, Shuo-Yu Juan, Zhi-Hong Wen, Jin-Hao Xu, Uyanahewa Gamage Shashini Janesha, Fan-Min Lin

{"title":"Graphene-Doped Piezoelectric Transducers by Kriging Optimal Model for Detecting Various Types of Laryngeal Movements.","authors":"Ming-Chan Lee, Cheng-Tang Pan, Shuo-Yu Juan, Zhi-Hong Wen, Jin-Hao Xu, Uyanahewa Gamage Shashini Janesha, Fan-Min Lin","doi":"10.3390/mi15101213","DOIUrl":"https://doi.org/10.3390/mi15101213","url":null,"abstract":"This study fabricated piezoelectric fibers of polyvinylidene fluoride (PVDF) with graphene using near-field electrospinning (NFES) technology. A uniform experimental design table U*774 was applied, considering weight percentage (1-13 wt%), the distance between needle and disk collector (2.1-3.9 mm), and applied voltage (14.5-17.5 kV). We optimized the parameters using electrical property measurements and the Kriging response surface method. Adding 13 wt% graphene significantly improved electrical conductivity, increasing from 17.7 µS/cm for pure PVDF to 187.5 µS/cm. The fiber diameter decreased from 21.4 µm in PVDF/1% graphene to 9.1 µm in PVDF/13% graphene. Adding 5 wt% graphene increased the β-phase content by 6.9%, reaching 65.4% compared to pure PVDF fibers. Material characteristics were investigated using scanning electron microscopy (SEM), Fourier-transform infrared spectroscopy (FTIR), X-ray diffraction analysis (XRD), contact angle measurements, and tensile testing. Optimal parameters included 3.47 wt% graphene, yielding 15.82 mV voltage at 5 Hz and 5 N force (2.04 times pure PVDF). Force testing showed a sensitivity (S) of 7.67 log(mV/N). Fibers were attached to electrodes for piezoelectric sensor applications. The results affirmed enhanced electrical conductivity, piezoelectric performance, and mechanical strength. The optimized piezoelectric sensor could be applied to measure physiological signals, such as attaching it to the throat under different conditions to measure the output voltage. The force-to-voltage conversion facilitated subsequent analysis.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509151/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503697","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Control of a Micro-Electro-Mechanical System Fast Steering Mirror with an Input Shaping Algorithm. 利用输入整形算法控制微型机电系统快速转向镜

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101215

Jiapeng Hou, Haoxiang Li, Lei Qian, Huijun Yu, Wenjiang Shen

引用次数: 0

Photonic Generation of Arbitrary Microwave Waveforms with Anti-Dispersion Transmission Capability. 具有抗色散传输能力的任意微波波形的光子生成。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101214

Xinyan Zhang, Kunpeng Zhai, Sha Zhu, Huashun Wen, Yu Liu, Ninghua Zhu

{"title":"Photonic Generation of Arbitrary Microwave Waveforms with Anti-Dispersion Transmission Capability.","authors":"Xinyan Zhang, Kunpeng Zhai, Sha Zhu, Huashun Wen, Yu Liu, Ninghua Zhu","doi":"10.3390/mi15101214","DOIUrl":"https://doi.org/10.3390/mi15101214","url":null,"abstract":"We propose and demonstrate a photonic-assisted approach for generating arbitrary microwave waveforms based on a dual-polarization dual-parallel Mach-Zehnder modulator, offering significant advantages in terms of tunability of repetition rates and anti-dispersion capability. In order to generate diverse microwave waveforms, two sinusoidal radio frequency signals with distinct frequency relationships are applied to the dual-polarization dual-parallel Mach-Zehnder modulator. By adjusting the power of the applied sinusoidal radio frequency signal, the power ratio between these orthogonal polarized optical sidebands can be changed, and thereby desired radio frequency waveforms can be obtained after photoelectric conversion. In our proof-of-concept experiment, we systematically varied the repetition rate of triangular, rectangular and sawtooth waveforms. Meanwhile, we calculated the Root Mean Square Error (RMSE) to assess the approximation error in each waveform. The RMSEs are 0.1089, 0.2182 and 0.1185 for the triangular, rectangular and sawtooth microwave waveforms with repetition rate of 8 GHz, respectively. Furthermore, after passing through 25 km single mode fiber, the optical power decreased by approximately 5.6 dB, which verifies the anti-dispersion transmission capability of our signal generator.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509580/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503721","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

When-to-Loop: Enhanced Loop Closure for LiDAR SLAM in Urban Environments Based on SCAN CONTEXT. When-to-Loop：基于 SCAN CONTEXT 在城市环境中增强激光雷达 SLAM 的闭环。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101212

Xu Xu, Lianwu Guan, Jianhui Zeng, Yunlong Sun, Yanbin Gao, Qiang Li

{"title":"When-to-Loop: Enhanced Loop Closure for LiDAR SLAM in Urban Environments Based on SCAN CONTEXT.","authors":"Xu Xu, Lianwu Guan, Jianhui Zeng, Yunlong Sun, Yanbin Gao, Qiang Li","doi":"10.3390/mi15101212","DOIUrl":"https://doi.org/10.3390/mi15101212","url":null,"abstract":"Global Navigation Satellite Systems (GNSSs) frequently encounter challenges in providing reliable navigation and positioning within urban canyons due to signal obstruction. Micro-Electro-Mechanical System (MEMS) Inertial Measurement Units (IMUs) offers an alternative for autonomous navigation, but they are susceptible to accumulating errors. To mitigate these influences, a LiDAR-based Simultaneous Localization and Mapping (SLAM) system is often employed. However, these systems face challenges in drift and error accumulation over time. This paper presents a novel approach to loop closure detection within LiDAR-based SLAM, focusing on the identification of previously visited locations to correct time-accumulated errors. Specifically, the proposed method leverages the vehicular drivable area and IMU trajectory to identify significant environmental changes in keyframe selection. This approach differs from conventional methods that only rely on distance or time intervals. Furthermore, the proposed method extends the SCAN CONTEXT algorithm. This technique incorporates the overall distribution of point clouds within a region rather than solely relying on maximum height to establish more robust loop closure constraints. Finally, the effectiveness of the proposed method is validated through experiments conducted on the KITTI dataset with an enhanced accuracy of 6%, and the local scenarios exhibit a remarkable improvement in accuracy of 17%, demonstrating improved robustness in loop closure detection for LiDAR-based SLAM.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509318/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503753","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Piezoelectric Ultrasonic Local Resonant Ultra-Precision Grinding for Hard-Brittle Materials. 用于硬脆材料的压电超声局部谐振超精密研磨。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101216

Dawei An, Jianghui Xian, Yi Zhang, Guoqiang Cheng, Yankai Huang, Zhongwei Liang, Weiqing Huang

{"title":"Piezoelectric Ultrasonic Local Resonant Ultra-Precision Grinding for Hard-Brittle Materials.","authors":"Dawei An, Jianghui Xian, Yi Zhang, Guoqiang Cheng, Yankai Huang, Zhongwei Liang, Weiqing Huang","doi":"10.3390/mi15101216","DOIUrl":"https://doi.org/10.3390/mi15101216","url":null,"abstract":"Hard-brittle materials are widely used in the optics, electronics, and aviation industries, but their high hardness and brittleness make it challenging for traditional processing methods to achieve high efficiency and superior surface quality. This study aims to investigate the application of ultrasonic local resonant grinding to sapphire to improve the efficiency and meet the requirements for the optical window in the surface roughness of the material. The resonant frequency of a piezoelectric ultrasonic vibration system and the vibration amplitude of a grinding head's working face were simulated and tested, respectively. The results of ultrasonic grinding experiments showed that the local resonant system reduced the surface roughness parameter (Ra) of sapphire to 14 nm and improved its surface flatness to 44.2 nm, thus meeting the requirements for the ultra-precision grinding of sapphire. Compared with a conventional resonant system, the surface roughness of the sapphire ground with the local resonant system was reduced by 90.79%, its surface flatness was improved by 81.58%, and the material removal rate was increased by 31.35%. These experimental results showed that ultrasonic local resonant grinding has better effects than those of conventional ultrasonic grinding in improving surface quality and increasing the material removal rate.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509595/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503723","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

On the Dynamics of a Novel Liquid-Coupled Piezoelectric Micromachined Ultrasonic Transducer Designed to Have a Reduced Resonant Frequency and Enhanced Ultrasonic Reception Capabilities. 关于一种新型液体耦合压电微机械超声换能器的动力学，该换能器的设计旨在降低谐振频率并增强超声波接收能力。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101210

Stephen Sammut, Edward Gatt, Ruben P Borg

{"title":"On the Dynamics of a Novel Liquid-Coupled Piezoelectric Micromachined Ultrasonic Transducer Designed to Have a Reduced Resonant Frequency and Enhanced Ultrasonic Reception Capabilities.","authors":"Stephen Sammut, Edward Gatt, Ruben P Borg","doi":"10.3390/mi15101210","DOIUrl":"https://doi.org/10.3390/mi15101210","url":null,"abstract":"This paper introduces a novel design for a liquid-deployed Piezoelectric Micromachined Ultrasonic Transducer (PMUT). This design was specifically developed to resonate at a lower ultrasonic frequency than a PMUT with a circular, fully clamped diaphragm with the same diameter. Furthermore, the novel design was also optimised to enhance its ultrasonic radiation reception capabilities. These parametric enhancements were necessary to develop a PMUT device that could form part of an eventual microscale sensory device used for the Structural Health Monitoring (SHM) of reinforced concrete (RC) structures. Through these two enhancements, an eventual microscale sensor can be made smaller, thus taking up a smaller die footprint and also be able to be deployed further apart from each other. Eventually, this would reduce the developed distributed sensor system's cost. The innovative design employed a configuration where the diaphragm was only pinned at particular points along its circumference. This paper presents results from Finite Element Modelling (FEM), as well as experimental work that was conducted to develop and test this novel PMUT. The experimental work presented involved both laser vibrometry and ultrasonic radiation lab work. The results show that when compared to a clamped diaphragm design, the novel device managed to achieve the required reduction in resonant frequency and presented an enhanced sensitivity to incoming ultrasonic radiation.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509536/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503715","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0