Micromachines最新文献

{"title":"SPICE-Compatible Degradation Modeling Framework for TDDB and LER Effects in Advanced Packaging BEOL Based on Ion Migration Mechanism.","authors":"Shao-Chun Zhang, Sen-Sen Li, Ying Ji, Ning Yang, Yuan-Hao Shan, Li Hong, Hao-Gang Wang, Wen-Sheng Zhao, Da-Wei Wang","doi":"10.3390/mi16070766","DOIUrl":"10.3390/mi16070766","url":null,"abstract":"<p><p>The time-dependent dielectric breakdown (TDDB) degradation mechanism, governed by the synergistic interaction of multiphysics fields, plays a pivotal role in the performance degradation and eventual failure of semiconductor devices and advanced packaging back-end-of-line (BEOL) structures. This work specifically focuses on the dielectric breakdown mechanism driven by metal ion migration within inter-metal dielectric layers, a primary contributor to TDDB degradation. A SPICE-compatible modeling approach is developed to accurately capture the dynamics of this ion migration-induced degradation. The proposed model is rooted in the fundamental physics of metal ion migration and the evolution of conductive filaments (CFs) within the dielectric layer under operational stress conditions. By precisely characterizing the degradation behavior induced by TDDB, a SPICE-compatible degradation model is developed. This model facilitates accurate predictions of resistance changes across a range of operational conditions and lifetime, encompassing variations in stress voltages, temperatures, and structural parameters. The predictive capability and accuracy of the model are validated by comparing its calculated results with numerical ones, thereby confirming its applicability. Furthermore, building upon the established degradation model, the impact of line-edge roughness (LER) is incorporated through a process variation model based on the power spectral density (PSD) function. This PSD-derived model provides a quantitative characterization of LER-induced fluctuations in critical device dimensions, enabling a more realistic representation of process-related variability. By integrating this stochastic variability model into the degradation framework, the resulting lifetime prediction model effectively captures reliability variations arising from real-world fabrication non-uniformities. Validation against simulation data demonstrates that the inclusion of LER effects significantly improves the accuracy of predicted lifetime curves, yielding closer alignment with observed device behavior under accelerated stress conditions.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12299184/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742795","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Theoretical Analysis of the Frequency Response in p-i-n Photodiodes that Use InGaAs/InP Materials.","authors":"Nesrine Bakalem, Abdelkader Aissat, Samuel Dupont, Faouzi Saidi, Mohamed Houcine Dhaou, Jean Pierre Vilcot","doi":"10.3390/mi16070764","DOIUrl":"10.3390/mi16070764","url":null,"abstract":"<p><p>This investigation is centered on the analysis of frequency response characteristics of a p-i-n photodiode using InxGa_1-xAs/InP. The InGaAs/InP can be developed under three conditions: compression, tensile strain, and lattice matching. Initially, we performed calculations on strain, bandgap energy (E_g), and absorption coefficient. We then optimized the influence of indium concentration (x) on stability, critical thickness, bandgap energy, and absorption coefficient. The effects of temperature and deformation on E_g were also studied. Finally, we optimized the cutoff frequency (f_c), capacitive effects, and response frequency by considering the impact of x, active layer thickness (d), and surface area (S). For our future endeavors, we intend to explore additional parameters that may affect the p-i-n response. In future work, we can add transparent double layers in the i. InGaAs layer to reduce the transit time, leading to the development of an ultrafast photodiode.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12299745/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742736","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation of Impact-Ionization-Enhanced Effect on SiC Thyristors Triggered by Weak UV Light.","authors":"Yulei Zhang, Xi Wang, Lechen Liu, Xuan Ji, Junhui Hou, Hongbin Pu","doi":"10.3390/mi16070761","DOIUrl":"10.3390/mi16070761","url":null,"abstract":"<p><p>The impact-ionization-enhanced mechanism is introduced into a SiC light-triggered thyristor (LTT) to improve its switching speed under weak UV illumination. The effects of impact ionization on photogenerated carrier multiplication and the dynamic switching performance of the SiC LTT are investigated through TCAD simulation. The relationships between bias voltage, UV light intensity, and key dynamic parameters are analyzed. Simulation results indicate that when the bias voltage exceeds 14 kV, the device enters the avalanche multiplication regime, leading to a significant increase in photocurrent under a given UV intensity. As the bias voltage increases, the turn-on time of the thyristor first decreases, then saturates, and finally drops rapidly. Under UV illumination of 100 mW/cm², the turn-on time decreases from 10.1 μs at 1 kV to 0.85 μs at 18 kV, while the switching energy dissipation at 18 kV is only 1292.3 mJ/cm². These results demonstrate that the impact-ionization-enhanced effect substantially improves the switching performance of SiC LTTs.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12299146/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742767","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research on Rotary Magnetorheological Finishing of the Inner Surface of Stainless Steel Slender Tubes.","authors":"Zhaoyang Luo, Chunya Wu, Ziyuan Jin, Bing Guo, Shengdong Gao, Kailei Luo, Huiyong Liu, Mingjun Chen","doi":"10.3390/mi16070763","DOIUrl":"10.3390/mi16070763","url":null,"abstract":"<p><p>316L stainless steel slender tubes with smooth inner surfaces play an important role in fields such as aerospace and medical testing. In order to solve the challenge of difficult machining of their inner surfaces, this paper introduces a novel rotary magnetorheological finishing (RMRF) method specifically designed for processing the inner surfaces of slender tubes. This method does not require frequent replacement of the polishing medium during the processing, which helps to simplify the processing technology. By combining the rotational motion of a magnetic field with the linear reciprocating movement of the workpiece, uniform material removal on the inner surfaces of 316L stainless steel tubes was achieved. Initially, a finite element model coupling the magnetic and flow fields was developed to investigate the flow behavior of the MPF under a rotating magnetic field, to examine the theoretical feasibility of the proposed polishing principle. Subsequently, experimental validation was performed using a custom-designed polishing apparatus. Through processing experiments, with surface quality designated as the index, the influences of key parameters such as the volume content and sizes of carbonyl iron particles and abrasive particles in the MPF were comprehensively evaluated, and the composition and ratio of the MPF were optimized. Based on the optimized formulation, the optimal processing time was established, reducing the inner surface roughness from an initial Sa of approximately 320 nm to 28 nm, and effectively eliminating the original defects.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12299800/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"High-Resolution DLP 3D Printing for Complex Curved and Thin-Walled Structures at Practical Scale: Archimedes Microscrew.","authors":"Chih-Lang Lin, Jun-Ting Liu, Chow-Shing Shin","doi":"10.3390/mi16070762","DOIUrl":"10.3390/mi16070762","url":null,"abstract":"<p><p>As three-dimensional (3D) printing becomes increasingly prevalent in microfluidic system fabrication, the demand for high precision has become critical. Among various 3D printing technologies, light-curing-based methods offer superior resolution and are particularly well suited for fabricating microfluidic channels and associated micron-scale components. Two-photon polymerization (TPP), one such method, can achieve ultra-high resolution at the submicron level. However, its severely limited printable volume and high operational costs significantly constrain its practicality for real-world applications. In contrast, digital light processing (DLP) 3D printing provides a more balanced alternative, offering operational convenience, lower cost, and print dimensions that are more compatible with practical microfluidic needs. Despite these advantages, most commercial DLP systems still struggle to fabricate intricate, high-resolution structures-particularly curve, thin-walled, or hollow ones-due to over-curing and interlayer adhesion issues. In this study, we developed a DLP-based projection micro-stereolithography (PμSL) system with a simple optical reconfiguration and fine-tuned its parameters to overcome limitations in printing precise and intricate structures. For demonstration, we selected an Archimedes microscrew as the target structure, as it serves as a key component in microfluidic micromixers. Based on our previous study, the most effective design was selected and fabricated in accordance with practical microfluidic dimensions. The PμSL system developed in this study, along with optimized parameters, provides a reference for applying DLP 3D printing in high-precision microfabrication and advancing microfluidic component development.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12298225/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Simulation of Flow Field and Experimental Study on the Electric Discharge Machining of Small Holes in Renewable Dielectrics.","authors":"Ruili Wang, Yangjing Zhao, Binghui Dong, Shuo Sun, Na Xiao, Wuyi Ming","doi":"10.3390/mi16070767","DOIUrl":"10.3390/mi16070767","url":null,"abstract":"<p><p>Vegetable oil is regarded as a medium that can replace kerosene in electrical discharge machining (EDM) hole processing due to its renewability and environmental friendliness. Meanwhile, numerical simulation serves as an effective means to study the behavior of the gap flow field during EDM processing. Based on this, this study explored the influence of hole size and different vegetable oil dielectrics (sunflower seed oil, canola oil, and soybean oil) on the movement of electro-corrosion residues in the processing gap. The simulation results demonstrate that the viscosity of the oil affects the escape rate of the particles. In holes of 1 mm and 4 mm of size, the escape rate of canola oil at any time period is superior to that of sunflower seed oil and soybean oil. In a 1 mm hole, its average escape rate reached 19.683%, which was 0.24% and 0.19% higher than that of sunflower seed oil and soybean oil, respectively. Subsequently, experiments were conducted in combination with the simulation results to explore the influence of current, pulse width, and pulse interval on hole processing. This further confirmed the application potential of vegetable oil in electrical discharge micro-hole processing and provided theoretical support and experimental basis for optimizing the green manufacturing process.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12300489/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742788","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation of Poling for Pb(Zr, Ti)O₃/Pb(Zr, Ti)O₃ Sol-Gel Composite.","authors":"Mako Nakamura, Ryota Ono, Makiko Kobayashi","doi":"10.3390/mi16070760","DOIUrl":"10.3390/mi16070760","url":null,"abstract":"<p><p>Phased-array ultrasonic transducers using sol-gel composites face challenges in terms of polarization uniformity when using conventional corona poling. Pb(Zr, Ti)O₃ (PZT)/PZT composites with a thickness of 25 µm were fabricated on 3 mm thick titanium substrates, and the samples were poled by AC poling, DC poling, and corona discharge poling at RT. It was found that the polarization direction could be controlled by the voltage off-phase angle. When poling was performed with a voltage off-phase angle of 90°, applied voltage of 200 V (rms), 10 cycles, and frequency of 1 Hz, average values and standards of measured piezoelectric constant <i>d</i>₃₃ of -35.1 ± 0.8 pC/N and ultrasonic sensitivity of 11.4 ± 0.1 dB were obtained. Furthermore, the AC-poled samples demonstrated smaller variations in <i>d</i>₃₃ and ultrasonic sensitivity compared with the corona-poled samples, and higher values of <i>d</i>₃₃ and ultrasonic sensitivity compared with the DC-poled samples, indicating the potential of AC poling for PZT/PZT sol-gel composites with large areas.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12299729/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742768","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research on Boundary Displacement of Probe Trajectory Considering Deviations in Five-Axis Sweep Scanning Measurement.","authors":"Peng Chen, Tao Fang, Zhiyong Chang, Bowen Xue, Neng Wan","doi":"10.3390/mi16070759","DOIUrl":"10.3390/mi16070759","url":null,"abstract":"<p><p>Five-axis sweep scanning measurement technology, as a novel contact measurement technology, offers excellent reachability and high measurement efficiency for complex parts. However, deviations between the measurement instructions based on the model and the workpiece exist, leading to mismatches between the intended and actual sweep scanning areas, which manifest as displacements of the scanning boundaries and subsequently impact the acquisition of sampling points. When these sampling points are utilized to evaluate the machining quality of workpieces, the accuracy and reliability of the assessment results are compromised. Therefore, by focusing on the phenomenon of boundary displacement in a five-axis sweep scanning measurement, the sampling principle has been analyzed, the constrained sector for the probe tip trajectory in a five-axis scanning measurement has been defined, and the concept of the trajectory constrained sector effect has been proposed for the first time. The constrained sector effect reveals how deviations affect the scanning boundary positions and acquisition of sampling points. Based on the constrained sector effect, the influence of deviations on boundary displacement and sampling point acquisition in single-patch and multiple-patch measurement scenarios is discussed. Furthermore, practical engineering recommendations are provided, aiming to reduce the impact of deviations on the completeness of sampling point acquisition.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12298746/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742780","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Simulation Study on 6.5 kV SiC Trench Gate p-Channel Superjunction Insulated Gate Bipolar Transistor.","authors":"Kuan-Min Kang, Jia-Wei Hu, Chih-Fang Huang","doi":"10.3390/mi16070758","DOIUrl":"10.3390/mi16070758","url":null,"abstract":"<p><p>This paper investigates 6.5 kV SiC trench gate p-channel IGBTs using Sentaurus TCAD simulations. The proposed superjunction structure is compared to conventional designs to highlight its advantages. The p-IGBT, fabricated on an n-type substrate, offers notable commercial advantages over n-IGBTs on p-type substrates. The n-shield can effectively protect the trench gate oxide in the corners of SiC. The n-shield and n-pillar can be either floating or grounded, with the floating shield condition significantly enhancing injection and improving forward conduction performance. The superjunction floating shield p-IGBT (SJFS-p-IGBT) improves forward conduction voltage (V_F) by 47% and 15% compared to conventional planar gate p-IGBT (CP-p-IGBT) and grounded shield p-IGBT (CGS-p-IGBT), respectively. For switching characteristics, the superjunction grounded shield p-IGBT (SJGS-p-IGBT) improves turn-off time (t_off) by 15% compared to the conventional floating shield p-IGBT (CFS-p-IGBT). The trade-off between V_F and turn-off energy (E_off) is analyzed, showing that the SJFS-p-IGBT offers a better trade-off. A negative temperature coefficient is observed at high buffer layer doping concentration and elevated temperatures, leading to an increase in V_F. This provides design guidance for devices operating in parallel at high temperatures. These results demonstrate the SJ's potential to enhance efficiency and performance for ultra-high voltage applications.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12299445/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Volume of Fluid (VOF) Method as a Suitable Method for Studying Droplet Formation in a Microchannel.","authors":"Felipe Santos Paes da Silva, Paulo Noronha Lisboa-Filho","doi":"10.3390/mi16070757","DOIUrl":"10.3390/mi16070757","url":null,"abstract":"<p><p>Microfluidics is a rapidly advancing field focused on optimizing microdevices for applications such as organ-on-a-chip systems and enhancing laboratory analyses. Understanding the physical parameters of droplet generation is crucial for these devices. Computational fluid dynamics (CFD) techniques are essential for providing insights into the limitations and efficiency of numerical methods for studying fluid dynamics and improving our understanding of various application conditions. However, the influence of different numerical methods on the analysis of physical parameters in problems involving droplet generation in microchannels remains an area of ongoing research. This study implements the Volume of Fluid (VOF) method to investigate key physical parameters, including droplet size and the effect of the capillary number on fluid regimes, in droplet generation within a microchannel featuring a T-junction geometry. We compare the VOF method with the widely used Level Set Method (LSM) to evaluate its suitability for this context. The results show that the VOF method agrees with the LSM in fundamental outcomes, such as the reduction in droplet diameter as the flow rate ratio increases and the identification of the capillary number's influence on fluid regime classification. The VOF method provides a clearer understanding of transitions between fluid regimes by detecting stages of non-uniformity in droplet size. It identifies a transition region between regimes with variations in droplet size, proving to be effective at mapping fluid flow regimes. This study highlights the potential of the VOF method in offering more detailed insights into instabilities and transitions between fluid regimes at the microscale.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 7","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12299916/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144742810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}