Micromachines最新文献_第8页

Accurate Modelling of AFM Force-Indentation Curves with Blunted Indenters at Small Indentation Depths. 精确建模小压痕深度下钝压头的原子力显微镜力-压痕曲线

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101209

Stylianos Vasileios Kontomaris, Anna Malamou, Andreas Stylianou

引用次数: 0

A Miniaturized, Fuel-Free, Self-Propelled, Bio-Inspired Soft Actuator for Copper Ion Removal. 用于铜离子去除的微型、无燃料、自推进、受生物启发的软执行器。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101208

Mohammadreza Chimerad, Pouya Borjian, Pawan Pathak, Jack Fasano, Hyoung J Cho

{"title":"A Miniaturized, Fuel-Free, Self-Propelled, Bio-Inspired Soft Actuator for Copper Ion Removal.","authors":"Mohammadreza Chimerad, Pouya Borjian, Pawan Pathak, Jack Fasano, Hyoung J Cho","doi":"10.3390/mi15101208","DOIUrl":"https://doi.org/10.3390/mi15101208","url":null,"abstract":"We present a novel miniaturized, gear-shaped, fuel-free actuator capable of autonomously propelling itself in an aquatic environment to absorb heavy metals, such as copper ions. While hydrogel-based absorbents are promising solutions for cationic pollutant remediation, their stationary nature limits their effectiveness in areas where contaminants are unevenly distributed. To address this, we developed a bio-inspired soft actuator that mimics natural propulsion mechanisms. The Marangoni effect, driven by its inherent chemical properties, demonstrated a self-propelled motion without requiring external fuel. The proof-of-concept actuator generated a plane motion lasting up to 2 h and swept over an area approximately 400 times bigger than its size. By harnessing the chemical and optical properties of the hydrogel, we efficiently removed and quantitatively analyzed copper ions through a colorimetric method. This innovative integration of self-propelled movement and efficient copper ion absorption underscores its potential for advancing miniaturized devices in environmental remediation, paving the way for more active and efficient pollutant removal systems in challenging aquatic environments.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509375/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Progress in Research on Co-Packaged Optics. 共封装光学研究进展。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-29 DOI: 10.3390/mi15101211

Wenchao Tian, Huahua Hou, Haojie Dang, Xinxin Cao, Dexin Li, Si Chen, Bingxu Ma

{"title":"Progress in Research on Co-Packaged Optics.","authors":"Wenchao Tian, Huahua Hou, Haojie Dang, Xinxin Cao, Dexin Li, Si Chen, Bingxu Ma","doi":"10.3390/mi15101211","DOIUrl":"https://doi.org/10.3390/mi15101211","url":null,"abstract":"In the 5G era, the demand for high-bandwidth computing, transmission, and storage has led to the development of optoelectronic interconnect technology. This technology has evolved from traditional board-edge optical modules to smaller and more integrated solutions. Co-packaged optics (CPO) has evolved as a solution to meet the growing demand for data. Compared to typical optoelectronic connectivity technology, CPO presents distinct benefits in terms of bandwidth, size, weight, and power consumption. This study presents an overview of CPO, highlighting its fundamental principles, advantages, and distinctive features. Additionally, it examines the current research progress of two distinct approaches utilizing Vertical-Cavity Surface-Emitting Laser (VCSEL) and silicon photonics integration technology. Additionally, it provides a concise overview of the many application situations of CPO. Expanding on this, the analysis focuses on the CPO using 2D, 2.5D, and 3D packaging techniques. Lastly, taking into account the present technological environment, the scientific obstacles encountered by CPO are analyzed, and its future progress is predicted.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509299/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Research Progress on Precision Tool Alignment Technology in Machining. 机械加工中精密刀具对准技术的研究进展。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-28 DOI: 10.3390/mi15101202

Qimeng Liu, Junxiang Jiang, Wencui Xiu, Zhe Ming, Bo Cui, Liang Zheng, Jian Wang, Liyan Qi

{"title":"Research Progress on Precision Tool Alignment Technology in Machining.","authors":"Qimeng Liu, Junxiang Jiang, Wencui Xiu, Zhe Ming, Bo Cui, Liang Zheng, Jian Wang, Liyan Qi","doi":"10.3390/mi15101202","DOIUrl":"https://doi.org/10.3390/mi15101202","url":null,"abstract":"In the field of numerical control machining, tool alignment technology is a key link to ensure machining accuracy and quality. Tool alignment refers to determining the correct position of the tool relative to the workpiece, and its accuracy directly affects the precision of part machining. With the development of precision machining technology, the research and application of cutting technology are increasingly valued. Tool alignment methods are mainly divided into two categories: contact and non-contact. The contact type tool alignment method relies on direct contact between the tool and the workpiece or tool alignment instrument to measure the position. Among them, the trial cutting method is a traditional contact type tool alignment method that determines the tool position through actual cutting, which is intuitive but inefficient. The contact type tool presetter uses specialized equipment to improve the accuracy and efficiency of tool presetting through contact measurement. The non-contact tool alignment method does not rely on physical contact, while the image method uses image recognition technology to determine the tool position, making it suitable for high-precision applications. The laser diffraction method and the laser direct method use laser technology for non-contact measurement. The laser diffraction method determines the position of the tool by analyzing the diffraction mode of the laser beam, while the laser direct method directly measures the distance between the laser and the tool. This article mainly introduces the classification of tool alignment, commonly used knife alignment methods and common tool alignment devices, as well as the development status of international tool alignment instrument products.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509547/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503736","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Analysis of Signal Transmission Efficiency in Semiconductor Interconnect and Proposal of Enhanced Structures. 半导体互连中的信号传输效率分析和增强型结构建议。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-28 DOI: 10.3390/mi15101207

Tae Yeong Hong, Sarah Eunkyung Kim, Jong Kyung Park, Seul Ki Hong

{"title":"Analysis of Signal Transmission Efficiency in Semiconductor Interconnect and Proposal of Enhanced Structures.","authors":"Tae Yeong Hong, Sarah Eunkyung Kim, Jong Kyung Park, Seul Ki Hong","doi":"10.3390/mi15101207","DOIUrl":"https://doi.org/10.3390/mi15101207","url":null,"abstract":"As the demand for high-density, high-performance technologies in semiconductor systems increases, efforts are being made to mitigate and optimize the issues of high current density and heat generation within interconnects to ensure reliability. While interconnects are the most fundamental pathways for transmitting current signals, there has been relatively little research conducted on them compared to individual unit devices from the perspective of overall system performance. However, as integration density increases, the amount of loss in interconnects also rises, necessitating research and development to minimize these losses. In this study, we propose a method to analyze power efficiency by utilizing the differences between simulation results and measured results of interconnect structures. We confirmed that the difference between theoretical resistance values and actual measured values varies with the contact area ratio between metal lines and vias, and we analyzed the power efficiency based on these differences. Using the findings, we proposed and validated a structure that can improve power efficiency. This study presents a method to analyze power efficiency and suggests ways to achieve higher power efficiency within the limited specifications of interconnects. This contributes to enhancing power efficiency and ensuring reliability, thereby preserving the performance of the overall system in highly integrated semiconductor systems.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509340/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Equivalent Circuit of a Stacked Piezoelectric Cymbal Vibrator. 叠层压电铙钹振动器的等效电路。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-28 DOI: 10.3390/mi15101205

Zhaohan Gong, Yajun Zheng, Shuhan Yao, Xinhu Liu, Ningdong Hu, Hongping Hu

引用次数: 0

Development of a Compact NDIR CO₂ Gas Sensor for a Portable Gas Analyzer. 为便携式气体分析仪开发紧凑型近红外二氧化碳气体传感器。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-28 DOI: 10.3390/mi15101203

Maosen Xu, Wei Tian, Yuzhe Lin, Yan Xu, Jifang Tao

{"title":"Development of a Compact NDIR CO2 Gas Sensor for a Portable Gas Analyzer.","authors":"Maosen Xu, Wei Tian, Yuzhe Lin, Yan Xu, Jifang Tao","doi":"10.3390/mi15101203","DOIUrl":"https://doi.org/10.3390/mi15101203","url":null,"abstract":"A carbon dioxide (CO2) gas sensor based on non-dispersive infrared (NDIR) technology has been developed and is suitable for use in portable devices for high-precision CO2 detection. The NDIR gas sensor comprises a MEMS infrared emitter, a MEMS thermopile detector with an integrated optical filter, and a compact gas cell with high optical coupling efficiency. A dual-ellipsoid mirror optical system was designed, and based on optical simulation analysis, the structure of the dual-ellipsoid reflective gas chamber was designed and optimized, achieving a coupling efficiency of up to 54%. Optical and thermal simulations were conducted to design the sensor structure, considering thermal management and light analysis. By optimizing the gas cell structure and conditioning circuit, we effectively reduced the sensor's baseline noise, enhancing the overall reliability and stability of the system. The sensor's dimensions were 20 mm × 10 mm × 4 mm (L × W × H), only 15% of the size of traditional NDIR gas sensors with equivalent detection resolution. The developed sensor offers high sensitivity and low noise, with a sensitivity of 15 μV/ppm, a detection limit of 90 ppm, and a resolution of 30 ppm. The total power consumption of the whole sensor system is 6.5 mW, with a maximum power consumption of only 90 mW.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509328/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Capacitance-Voltage Fluctuation of Si_xN_y-Based Metal-Insulator-Metal Capacitor Due to Silane Surface Treatment. 硅烷表面处理导致的六镍基金属绝缘体-金属电容器的电容-电压波动。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-28 DOI: 10.3390/mi15101204

Tae-Min Choi, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee, Sung-Gyu Pyo

{"title":"Capacitance-Voltage Fluctuation of SixNy-Based Metal-Insulator-Metal Capacitor Due to Silane Surface Treatment.","authors":"Tae-Min Choi, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee, Sung-Gyu Pyo","doi":"10.3390/mi15101204","DOIUrl":"https://doi.org/10.3390/mi15101204","url":null,"abstract":"In this study, we analyze metal-insulator-metal (MIM) capacitors with different thicknesses of SixNy film (650 Å, 500 Å, and 400 Å) and varying levels of film quality to improve their capacitance density. SixNy thicknesses of 650 Å, 500 Å, and 400 Å are used with four different conditions, designated as MIM (N content 1.49), NEWMIM (N content 28.1), DAMANIT (N content 1.43), and NIT (N content 0.30). We divide the C-V characteristics into two categories: voltage coefficient of capacitance (VCC) and temperature coefficient of capacitance (TCC). There was an overall increase in the VCC as the thickness of the SixNy film decreased, with some variation depending on the condition. However, the TCC did not vary significantly with thickness, only with condition. At the same thickness, the NIT condition yielded the highest capacitance density, while the MIM condition showed the lowest capacitance density. This difference was due to the actual thickness of the film and the variation in its k-value depending on the condition. The most influential factor for capacitance uniformity was the thickness uniformity of the SixNy film.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509476/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503664","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Advancements and Future Prospects in Ocean Wave Energy Harvesting Technology Based on Micro-Energy Technology. 基于微能源技术的海洋波浪能收集技术的进展和未来展望。

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-27 DOI: 10.3390/mi15101199

Weihong Yang, Jiaxin Peng, Qiulin Chen, Sicheng Zhao, Ran Zhuo, Yan Luo, Lingxiao Gao

{"title":"Advancements and Future Prospects in Ocean Wave Energy Harvesting Technology Based on Micro-Energy Technology.","authors":"Weihong Yang, Jiaxin Peng, Qiulin Chen, Sicheng Zhao, Ran Zhuo, Yan Luo, Lingxiao Gao","doi":"10.3390/mi15101199","DOIUrl":"https://doi.org/10.3390/mi15101199","url":null,"abstract":"Marine wave energy exhibits significant potential as a renewable resource due to its substantial energy storage capacity and high energy density. However, conventional wave power generation technologies often suffer from drawbacks such as high maintenance costs, cumbersome structures, and suboptimal conversion efficiencies, thereby limiting their potential. The wave power generation technologies based on micro-energy technology have emerged as promising new approaches in recent years, owing to their inherent advantages of cost-effectiveness, simplistic structure, and ease of manufacturing. This paper provides a comprehensive overview of the current research status in wave energy harvesting through micro-energy technologies, including detailed descriptions of piezoelectric nanogenerators, electromagnetic generators, triboelectric nanogenerators, dielectric elastomer generators, hydrovoltaic generators, and hybrid nanogenerators. Finally, we provide a comprehensive overview of the prevailing issues and challenges associated with these technologies, while also offering insights into the future development trajectory of wave energy harvesting technology.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509528/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503659","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Euler Force-Driven Siphon Valve Control for Precise Sequential Release in Centrifugal Microfluidic Chips. 欧拉力驱动虹吸阀控制，实现离心微流控芯片的精确顺序释放

IF 3 3区工程技术

Micromachines Pub Date : 2024-09-27 DOI: 10.3390/mi15101200

Yu Lu, Hao Shen, Guangyao Chen, Kaichao Yang, Jing Zhang, Liwei Xue, Jianzhen Ou, Liguo Chen

{"title":"Euler Force-Driven Siphon Valve Control for Precise Sequential Release in Centrifugal Microfluidic Chips.","authors":"Yu Lu, Hao Shen, Guangyao Chen, Kaichao Yang, Jing Zhang, Liwei Xue, Jianzhen Ou, Liguo Chen","doi":"10.3390/mi15101200","DOIUrl":"https://doi.org/10.3390/mi15101200","url":null,"abstract":"Controlling the fluids in centrifugal microfluidic chips for precise sequential release is critical for multi-step reactions and immunoassays. Currently, the traditional methods of liquid sequential release mainly rely on various types of microvalves, which face the problems of complex operation and high costs. Here, this work presents a method for driving liquid release using the Euler force. Under continuous acceleration and deceleration, the centrifugal and Euler forces can transfer the liquid from the sample chamber to the collection chamber. The liquid sequential release mechanism based on the Euler force was analyzed, which showed that the angular acceleration is key to the liquid release. Then, the geometrical parameters affecting the angular acceleration of complete release were investigated and simulated. Finally, based on the relationship between the geometrical parameters of the connecting channels and the angular acceleration of complete release, a simple and precise sequential release structure was designed, which allowed for a sequential and stable transfer of the liquid into the reaction chamber. The results showed that the proposed method is capable of transferring liquid, and its simple structure, low manufacturing cost, and ease of operation enable precise sequential liquid release in centrifugal microfluidic platforms.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509089/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0