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Development of Amorphous AlN Thin Films on ITO-Glass and ITO-PET at Low Temperatures by RF Sputtering. 低温射频溅射法制备ITO-Glass和ITO-PET非晶AlN薄膜。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-29 DOI: 10.3390/mi16090993
Miriam Cadenas, Michael Sun, Susana Fernández, Sirona Valdueza-Felip, Ana M Diez-Pascual, Fernando B Naranjo
{"title":"Development of Amorphous AlN Thin Films on ITO-Glass and ITO-PET at Low Temperatures by RF Sputtering.","authors":"Miriam Cadenas, Michael Sun, Susana Fernández, Sirona Valdueza-Felip, Ana M Diez-Pascual, Fernando B Naranjo","doi":"10.3390/mi16090993","DOIUrl":"10.3390/mi16090993","url":null,"abstract":"<p><p>Aluminum nitride (AlN) is a material of wide interest in the optoelectronics and high-power electronics industry. The deposition of AlN thin films at elevated temperatures is a well-established process, but its implementation on flexible substrates with conductive oxides, such as ITO-glass or ITO-PET, poses challenges due to the thermal degradation of these materials. In this work, the deposition and characterization of AlN thin films by reactive sputtering at a low temperature (RT and 100 °C) on ITO-glass and ITO-PET substrates are presented. The structural, optical, and electrical properties of the samples have been analysed as a function of the sputtering power and the deposition temperature. XRD analysis revealed the absence of peaks of crystalline AlN, indicative of the formation of an amorphous phase. EDX measurements performed on the ITO-glass substrate with a radiofrequency power applied to the Al target of 175 W confirmed the presence of Al and N, corroborating the deposition of AlN. SEM analyses showed the formation of homogeneous and compact layers, and transmission optical measurements revealed a bandgap of around 5.82 eV, depending on the deposition conditions. Electrical resistivity measurements indicated an insulating character. Overall, these findings confirm the potential of amorphous AlN for applications in flexible optoelectronic devices.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471360/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176286","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development and Test of a Novel High-Precision Inchworm Piezoelectric Motor. 一种新型高精度尺蠖压电电机的研制与测试。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-29 DOI: 10.3390/mi16090992
Nan Huang, Jiahao Yin, Fuyuan Feng, Lanyu Zhang, Yuheng Luo, Jian Gao
{"title":"Development and Test of a Novel High-Precision Inchworm Piezoelectric Motor.","authors":"Nan Huang, Jiahao Yin, Fuyuan Feng, Lanyu Zhang, Yuheng Luo, Jian Gao","doi":"10.3390/mi16090992","DOIUrl":"10.3390/mi16090992","url":null,"abstract":"<p><p>The inchworm piezoelectric motor, with the advantages of long stroke and high resolution, is ideally suited for precise positioning in wafer-level electron beam inspection systems. However, the large number of piezoelectric actuators and the complex excitation signal sequences significantly increase the complexity of system assembly and temporal control. A flexure-based actuation stator structure, along with simplified excitation signal sequences of a high-precision inchworm piezoelectric motor, is proposed. The alternating actuation of upper/lower clamping mechanisms and the driving mechanism fundamentally mitigates backstep effects while generating stepping linear displacement. The inchworm piezoelectric motor achieves precision linear motion operation using only two piezoelectric actuators. The actuation stator is analyzed via the compliance matrix method to derive its output compliance, input stiffness, and displacement amplification ratio. Furthermore, a kinematic model and natural frequency expression incorporating the pseudo-rigid-body method and Lagrange's equations are established. The actuation stator and inchworm piezoelectric motor are analyzed through both simulations and experiments. The results show that the maximum step displacement of the motor is 16.3 μm, and the maximum speed is 9.78 mm/s, at a 600 Hz operation frequency with a combined alternating piezoelectric voltage of 135 V and 65 V. These findings validate the designed piezoelectric motor's superior motion resolution, operational stability, and acceptable load capacity.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472064/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Laser-Induced Graphene-Based Strain Sensor Array Integrated into Smart Tires for a Load Perception. 基于激光诱导石墨烯应变传感器阵列集成到智能轮胎中的负载感知。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-29 DOI: 10.3390/mi16090994
Shaojie Yuan, Longtao Li, Xiaopeng Du, Zhongli Li, Yijian Liu, Xingyu Ma
{"title":"Laser-Induced Graphene-Based Strain Sensor Array Integrated into Smart Tires for a Load Perception.","authors":"Shaojie Yuan, Longtao Li, Xiaopeng Du, Zhongli Li, Yijian Liu, Xingyu Ma","doi":"10.3390/mi16090994","DOIUrl":"10.3390/mi16090994","url":null,"abstract":"<p><p>Tire deformation monitoring is a critical requirement for improving vehicle safety, performance, and intelligent transportation systems. However, most existing flexible strain sensors either lack directional sensitivity or have not been validated in real-world driving environments, limiting their practical application in smart tires. In this work, we report the fabrication of a flexible piezoresistive strain sensor based on a porous laser-induced graphene (LIG) network embedded in an Ecoflex elastomer matrix, with integrated directional force recognition. The LIG-Ecoflex sensor exhibits a high gauge factor of 9.7, fast response and recovery times, and stable performance over 10,000 cycles. More importantly, the anisotropic structure of the LIG enables accurate multi-directional stress recognition when combined with a convolutional neural network (CNN), achieving an overall classification accuracy exceeding 98%. To further validate real-world applicability, the sensor was mounted inside passenger car tires and tested under different loads and speeds. The results demonstrate reliable monitoring of tire deformation with clear correlations to load and velocity, confirming robustness under dynamic driving conditions. This study provides a new pathway for the integration of direction-aware, high-performance strain sensors into intelligent tire systems, with broader potential for wearable electronics, vehicle health monitoring, and next-generation Internet of Vehicles applications.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471454/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Novel Tunable Pseudoresistor-Based Chopper-Stabilized Capacitively Coupled Amplifier and Its Machine Learning-Based Application. 新型可调谐伪电阻切波稳定电容耦合放大器及其基于机器学习的应用。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-29 DOI: 10.3390/mi16091000
Mohammad Aleem Farshori, M Nizamuddin, Renuka Chowdary Bheemana, Krishna Prakash, Shonak Bansal, Mohammad Zulqarnain, Vipin Sharma, S Sudhakar Babu, Kanwarpreet Kaur
{"title":"Novel Tunable Pseudoresistor-Based Chopper-Stabilized Capacitively Coupled Amplifier and Its Machine Learning-Based Application.","authors":"Mohammad Aleem Farshori, M Nizamuddin, Renuka Chowdary Bheemana, Krishna Prakash, Shonak Bansal, Mohammad Zulqarnain, Vipin Sharma, S Sudhakar Babu, Kanwarpreet Kaur","doi":"10.3390/mi16091000","DOIUrl":"10.3390/mi16091000","url":null,"abstract":"<p><p>This work presents a high-common-mode-rejection-ratio (CMRR) and high-gain FinFET-based bio-potential amplifier with a novel CMRR reduction technique. In this paper, a feedback buffer is used alongside a capacitively coupled chopper-stabilized circuit to reduce the common-mode signal gain, thus boosting the overall CMRR of the circuit. The conventional pseudoresistor in the feedback circuit is replaced with a tunable parallel-cell configuration of pseudoresistors to achieve high linearity. A chopper spike filter is used to mitigate spikes generated by switching activity. The mid-band gain of the chopper-stabilized amplifier is 42.6 dB, with a bandwidth in the range of 6.96 Hz to 621 Hz. The noise efficiency factor (NEF) of the chopper-stabilized amplifier is 6.1, and its power dissipation is 0.92 µW. The linearity of the parallel pseudoresistor cell is tested for different tuning voltages (V<sub>tune</sub>) and various numbers of parallel pseudoresistor cells. The simulation results also demonstrate the pseudoresistor cell performance for different process corners and temperature changes. The low cut-off frequency is adjusted by varying the parameters of the parallel pseudoresistor cell. The CMRR of the chopper-stabilized amplifier, with and without the feedback buffer, is 106.9 dB and 100.3 dB, respectively. The feedback buffer also reduces the low cut-off frequency, demonstrating its multi-utility. The proposed circuit is compatible with bio-signal acquisition and processing. Additionally, a machine learning-based arrhythmia diagnosis model is presented using a convolutional neural network (CNN) + Long Short-Term Memory (LSTM) algorithm. For arrhythmia diagnosis using the CNN+LSTM algorithm, an accuracy of 99.12% and a mean square error (MSE) of 0.0273 were achieved.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471498/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultrasound-Assisted Urea-Water Solution (AdBlue) Droplets Vaporization: A Mathematical Model for Film and Volumetric Regimes with Implications in NOx Emission Control. 超声辅助尿素水溶液(AdBlue)液滴汽化:膜和体积机制的数学模型与氮氧化物排放控制的含义。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-29 DOI: 10.3390/mi16090996
Claudiu Marian Picus, Ioan Mihai, Cornel Suciu
{"title":"Ultrasound-Assisted Urea-Water Solution (AdBlue) Droplets Vaporization: A Mathematical Model for Film and Volumetric Regimes with Implications in NOx Emission Control.","authors":"Claudiu Marian Picus, Ioan Mihai, Cornel Suciu","doi":"10.3390/mi16090996","DOIUrl":"10.3390/mi16090996","url":null,"abstract":"<p><p>The vaporization of urea-water solution (AdBlue) plays a critical role in the performance of selective catalytic reduction (SCR) systems for modern diesel engines. This study presents mathematical models describing the vaporization of AdBlue droplets under ultrasonic excitation generated by a magnetostrictive effect, focusing on both film and volumetric regimes. The models rigorously incorporate heat and mass transfer equations, including acoustic cavitation effects induced by ultrasound. The influence of magnetostrictive-induced atomization and combined inductive preheating on droplet detachment and SCR catalyst efficiency was analyzed. Additionally, the impact of ultrasound frequency and amplitude on thermal vaporization efficiency and reactive mixture formation was investigated with the aim of enhancing NOx emission reduction. Model validation against literature data confirmed the practical applicability of the proposed approach, offering valuable insights for optimizing ultrasound-assisted AdBlue injection systems.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471866/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176478","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of a High-Power, High-Efficiency GaN Power Amplifier for W-Band Applications. 一种w波段大功率、高效率氮化镓功率放大器的设计。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-28 DOI: 10.3390/mi16090985
Shuai Liu, Xiaohua Ma, Yi Zhang, Chunliang Xu
{"title":"Design of a High-Power, High-Efficiency GaN Power Amplifier for W-Band Applications.","authors":"Shuai Liu, Xiaohua Ma, Yi Zhang, Chunliang Xu","doi":"10.3390/mi16090985","DOIUrl":"10.3390/mi16090985","url":null,"abstract":"<p><p>This paper presents a W-band high-efficiency and high-output-power power amplifier (PA) based on a 130 nm AlGaN/GaN-on-SiC HEMT process. The PA is designed to deliver optimal output power and gain performance across the entire W-band. A balanced architecture is adopted, combining two amplifier units through Lange couplers. High- and low-impedance microstrip lines are employed for input, output, and inter-stage matching. Each amplifier core adopts a three-stage configuration with gate width ratios of 1:2:4 to enhance gain. The bias network incorporates MIM capacitors and thin-film resistors to improve stability. Measured results indicate a small signal gain exceeding 17 dB under a gate voltage of -2.2 V and a drain voltage of +20 V. Within the 80-86 GHz frequency range, the PA achieves an output power above 34 dBm with a 22 dBm input power, corresponding to a power gain above 12 dB and a power-added efficiency (PAE) greater than 20%. The chip occupies a compact area of 2.65 mm × 3.75 mm. Compared with previously reported works, the proposed PA demonstrates the highest PAE within the 80-86 GHz band.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472057/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176326","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Numerical Simulations of 3C-SiC High-Sensitivity Strain Meters. 3C-SiC高灵敏度应变仪的数值模拟。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-28 DOI: 10.3390/mi16090989
Annamaria Muoio, Angela Garofalo, Sergio Sapienza, Francesco La Via
{"title":"Numerical Simulations of 3C-SiC High-Sensitivity Strain Meters.","authors":"Annamaria Muoio, Angela Garofalo, Sergio Sapienza, Francesco La Via","doi":"10.3390/mi16090989","DOIUrl":"10.3390/mi16090989","url":null,"abstract":"<p><p>In the simulation of 3C-SiC strain gauges in dynamic environment-particularly those involving vibrations and wave propagation-the accurate representation of energy dissipation is essential for reliable predictive modeling. This paper discusses the implementation of both isotropic and anisotropic damping models within COMSOL Multiphysics. In particular, it focuses on the use of an anisotropic loss factor, represented either as a scalar (η<sub>S</sub>) for isotropic cases or as a symmetric 6 × 6 loss factor matrix (ηD) for anisotropic dissipation. This formulation enables the directional dependence of damping behavior to be captured, which is particularly important in composite materials, layered media, and metamaterials where energy dissipation mechanisms vary with orientation. The paper also explores the numerical implications of using anisotropic damping, such as its influence on eigenfrequency solutions, frequency response functions, and transient dynamic simulations. Furthermore, it highlights how the inclusion of directional damping can improve the correlation between simulated and experimental results in scenarios where standard isotropic models fail to capture key physical behaviors.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471520/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145175613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surface Roughness Uniformity Improvement of Additively Manufactured Channels' Internal Corners by Liquid Metal-Driven Abrasive Flow Polishing. 液体金属驱动磨料流抛光提高增材制造通道内角表面粗糙度均匀性。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-28 DOI: 10.3390/mi16090987
Yapeng Ma, Kaixiang Li, Baoqi Feng, Lei Zhang
{"title":"Surface Roughness Uniformity Improvement of Additively Manufactured Channels' Internal Corners by Liquid Metal-Driven Abrasive Flow Polishing.","authors":"Yapeng Ma, Kaixiang Li, Baoqi Feng, Lei Zhang","doi":"10.3390/mi16090987","DOIUrl":"10.3390/mi16090987","url":null,"abstract":"<p><p>Additive manufacturing (AM) enables the production of complex components but often results in poor surface quality due to its layer-by-layer deposition process. To improve surface finish, postprocessing methods like abrasive flow machining (AFM) are necessary. However, conventional AFM struggles with achieving uniform polishing in intricate regions, especially at internal corners. This study proposes a liquid metal-driven abrasive flow (LM-AF) strategy designed for polishing complex internal channels in AM parts. By combining experimental and numerical simulations, the research investigates surface roughness variations, particularly focusing on the Sa (Arithmetic Average Surface Roughness) parameter. Experimental results show that conventional AFM leaves significant roughness at internal corners compared to adjacent areas. To address this, a hybrid GA-NN-GA (Genetic Algorithm-Neural Network-Genetic Algorithm) optimization model was developed. The model uses a neural network to predict Sa based on key parameters, with genetic algorithms applied for training and optimization. The optimal process parameters identified include a NaOH concentration of 1 mol/L, a voltage of 50 V, abrasive concentration of 10%, and a frequency of 428.3 Hz. With these parameters, LM-AF significantly reduced roughness at internal corners of flow channels, achieving uniformity with Sa values reduced from 25.365 μm to 15.780 μm, from 22.950 μm to 15.718 μm, and from 10.933 μm to 10.055 μm, outperforming traditional AFM methods.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471294/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electrochemical Biosensing for Antibiotic-Resistant Bacteria: Advances, Challenges, and Future Directions. 耐药细菌的电化学生物传感:进展、挑战和未来方向。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-28 DOI: 10.3390/mi16090986
Muhib Ullah Khan, Md Munibur Rahman, Nusrat Zahan, Mostafa Kamal Masud, Subir Sarker, Md Hakimul Haque
{"title":"Electrochemical Biosensing for Antibiotic-Resistant Bacteria: Advances, Challenges, and Future Directions.","authors":"Muhib Ullah Khan, Md Munibur Rahman, Nusrat Zahan, Mostafa Kamal Masud, Subir Sarker, Md Hakimul Haque","doi":"10.3390/mi16090986","DOIUrl":"10.3390/mi16090986","url":null,"abstract":"<p><p>The rapid rise of antibiotic-resistant bacteria (ABR) presents an urgent global health challenge, necessitating the development of efficient and scalable diagnostic technologies. Electrochemical biosensors have emerged as a promising solution, offering high sensitivity, specificity, and adaptability for point-of-care applications. These innovative platforms utilize bio-recognition elements, advanced electrode materials, microbial enzymes, and redox-active metabolites to identify antibiotic resistance profiles at a molecular level. Recent progress in microfluidics and lab-on-a-chip systems has enabled real-time, high-throughput antimicrobial susceptibility testing, significantly improving diagnostic precision and speed. This review aims to critically evaluate recent advances in electrochemical biosensing strategies for detecting ABR, identify key challenges, and propose future directions to enhance clinical applicability. Key developments include bio-receptor-based detection strategies, novel electrode surfaces, and multiplexed platforms integrated with microfluidic systems. Additionally, this review examines essential biomarkers for detecting antibiotic resistance and explores key challenges, including variability in biomarker expression and sensor reproducibility. It also highlights practical barriers to clinical implementation, such as cost constraints and scalability concerns. By presenting innovative approaches, such as cost-effective material alternatives, advanced analytical techniques, and portable biosensing systems, this review outlines a strategic pathway for enhancing the accessibility and effectiveness of electrochemical biosensors in antibiotic resistance management.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471839/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preparation of Hydrophobic Glass Surfaces by Femtosecond Laser. 飞秒激光制备疏水玻璃表面。
IF 3 3区 工程技术
Micromachines Pub Date : 2025-08-28 DOI: 10.3390/mi16090988
Xuyun Peng, Xiaojun Tan, Wei Tan, Jian Huang, Chaojun Ding, Yushan Yang, Jieshun Yang, Haitao Chen, Liang Guo, Qingmao Zhang
{"title":"Preparation of Hydrophobic Glass Surfaces by Femtosecond Laser.","authors":"Xuyun Peng, Xiaojun Tan, Wei Tan, Jian Huang, Chaojun Ding, Yushan Yang, Jieshun Yang, Haitao Chen, Liang Guo, Qingmao Zhang","doi":"10.3390/mi16090988","DOIUrl":"10.3390/mi16090988","url":null,"abstract":"<p><p>Functional glass surfaces with tunable wettability are of growing interest in optical, biomedical, and architectural applications. In this study, we investigate the influence of femtosecond laser processing parameters-including power, scanning speed, and repetition rate-on the surface morphology, wettability, and optical properties of Panda glass. Laser structuring generated microscale ablation features and increased surface roughness (arithmetic mean height, Sa, rising from ~0.02 µm for pristine glass to ~1.85 µm under optimized conditions). The treated surfaces exhibited enhanced hydrophobicity, with static water contact angles up to ~82° and sliding angles exceeding 50°, indicating significant droplet pinning. Optical characterization further showed a reduction in transmittance at 550 nm from ~92% (pristine) to ~68% after laser treatment, consistent with increased scattering by surface textures. These findings demonstrate that femtosecond laser processing is an effective mask-free method to enhance the hydrophobicity of glass surfaces and establish clear process-structure-property relationships, providing guidance for future optimization toward superhydrophobic performance.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471394/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176334","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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