Micromachines最新文献

{"title":"CMOS-Compatible High-Performance Silicon Nanowire Array Natural Light Electronic Detection System.","authors":"Xin Chen, Jiaye Zeng, Mingbin Liu, Chilin Zheng, Xiaoyuan Wang, Chaoran Liu, Xun Yang","doi":"10.3390/mi15101201","DOIUrl":"https://doi.org/10.3390/mi15101201","url":null,"abstract":"<p><p>In this article, we propose a novel natural light detector based on high-performance silicon nanowire (SiNW) arrays. We achieved a highly controllable and low-cost fabrication of SiNW natural light detectors by using only a conventional micromachined CMOS process. The high activity of SiNWs leads to the poor long-term stability of the SiNW device, and for this reason, we have designed a fully wrapped structure for SiNWs. SiNWs are wrapped in transparent silicon nitride and silicon oxide films, which greatly improves the long-term stability of the detector; at the same time, this structure protects the SiNWs from breakage. In addition, the SiNW arrays are regularly distributed on the top of the detector, which can quickly respond to natural light. The response time of the detector is about 0.015 s. Under the illumination of 1 W·m^-2 light intensity, multiple SiNWs were detected together. The signal strength of the detector reached 1.82 μA, the signal-to-noise ratio was 47.6 dB, and the power consumption was only 0.91 μW. The high-intensity and highly reliable initial signal reduces the cost and complexity of the backend signal processing circuit. A low-cost and high-performance STM32 microcontroller can realize the signal processing task. Therefore, we built a high-performance SiNW natural optoelectronic detection system based on an STM32 microcontroller, which achieved the real-time detection of natural light intensity, with an accuracy of ±0.1 W·m^-2. These excellent test performances indicate that the SiNW array natural light detector in this article meey the requirements of practicality and has broad potential for application.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509308/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Design and Manufacture of 30-Degree Projection Lens for Augmented Reality Waveguide.","authors":"Wen-Shing Sun, Ying-Shun Hsu, Chuen-Lin Tien, Wen-Kai Lin, Yi-Lun Su, Jun-Yi Yu, Shao-Kui Zhou, Yuan-Yan Liang, Wan-Pin Tsai, Chi Sun, Tsung-Xian Lee, Wei-Chia Su, Shiuan-Huei Lin, Ching-Cherng Sun","doi":"10.3390/mi15101198","DOIUrl":"https://doi.org/10.3390/mi15101198","url":null,"abstract":"<p><p>A projection lens with a 30-degree field of view is developed for use in augmented reality (AR) glasses, including a waveguide combiner designed for a 0.35-inch LCoS panel. The entrance pupil diameter of the lens is 14 mm and the lens has an effective focal length of 16.443 mm; an F-number of 1.175. This paper has four key issues: optical projection lens design, lens manufacturing and assembly tolerance analysis, projection lens resolution testing, and AR glasses system resolution testing of panel images projected by the projection lens. After lens manufacture, the lens was tested, achieving a central field image quality of 57 cycles/mm, an angular resolution of 33 pixels per degree (PPD), a 0.7 field image quality of 40.3 cycles/mm, and an angular resolution of 23 pixels per degree (PPD). Imaging performance testing based on a diffraction-type waveguide shows a resolution of 57 cycles/mm in the center area and an angular resolution of 33 PPD.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509129/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microfluidic Applications in Prostate Cancer Research.","authors":"Kailie Szewczyk, Linan Jiang, Hunain Khawaja, Cindy K Miranti, Yitshak Zohar","doi":"10.3390/mi15101195","DOIUrl":"https://doi.org/10.3390/mi15101195","url":null,"abstract":"<p><p>Prostate cancer is a disease in which cells in the prostate, a gland in the male reproductive system below the bladder, grow out of control and, among men, it is the second-most frequently diagnosed cancer (other than skin cancer). In recent years, prostate cancer death rate has stabilized and, currently, it is the second-most frequent cause of cancer death in men (after lung cancer). Most deaths occur due to metastasis, as cancer cells from the original tumor establish secondary tumors in distant organs. For a long time, classical cell cultures and animal models have been utilized in basic and applied scientific research, including clinical applications for many diseases, such as prostate cancer, since no better alternatives were available. Although helpful in dissecting cellular mechanisms, these models are poor predictors of physiological behavior mainly because of the lack of appropriate microenvironments. Microfluidics has emerged in the last two decades as a technology that could lead to a paradigm shift in life sciences and, in particular, controlling cancer. Microfluidic systems, such as organ-on-chips, have been assembled to mimic the critical functions of human organs. These microphysiological systems enable the long-term maintenance of cellular co-cultures in vitro to reconstitute in vivo tissue-level microenvironments, bridging the gap between traditional cell cultures and animal models. Several reviews on microfluidics for prostate cancer studies have been published focusing on technology advancement and disease progression. As metastatic castration-resistant prostate cancer remains a clinically challenging late-stage cancer, with no curative treatments, we expanded this review to cover recent microfluidic applications related to prostate cancer research. The review includes discussions of the roles of microfluidics in modeling the human prostate, prostate cancer initiation and development, as well as prostate cancer detection and therapy, highlighting potentially major contributions of microfluidics in the continuous march toward eradicating prostate cancer.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509716/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effects of Mo Addition on Microstructure and Corrosion Resistance of Cr_25-xCo₂₅Ni₂₅Fe₂₅Mo_x High-Entropy Alloys via Directed Energy Deposition.","authors":"Han-Eol Kim, Jae-Hyun Kim, Ho-In Jeong, Young-Tae Cho, Osama Salem, Dong-Won Jung, Choon-Man Lee","doi":"10.3390/mi15101196","DOIUrl":"https://doi.org/10.3390/mi15101196","url":null,"abstract":"<p><p>Highly entropy alloys (HEAs) are novel materials that have great potential for application in aerospace and marine engineering due to their superior mechanical properties and benefits over conventional materials. NiCrCoFe, also referred to as Ni-based HEA, has exceptional low-temperature strength and microstructural stability. However, HEAs have limited corrosion resistance in some environments, such as a 3.5 wt% sodium chloride (NaCl) solution. Adding corrosion-resistant elements such as molybdenum (Mo) to HEAs is expected to increase their corrosion resistance in a variety of corrosive environments. Metal additive manufacturing reduces production times compared to casting and eliminates shrinkage issues, making it ideal for producing homogeneous HEA. This study used directed energy deposition (DED) to create Cr_25-xCo₂₅Ni₂₅Fe₂₅Mo_x (x = 0, 5, 10%) HEAs. Tensile strength and potentiodynamic polarization tests were used to assess the materials' mechanical properties and corrosion resistance. The mechanical tests revealed that adding 5% Mo increased yield strength (YS) by 20.1% and ultimate tensile strength (UTS) by 9.5% when compared to 0% Mo. Adding 10% Mo led to a 32.5% increase in YS and a 20.4% increase in UTS. Potentiodynamic polarization tests were used to assess corrosion resistance in a 3.5-weight percent NaCl solution. The results showed that adding Mo significantly increased initial corrosion resistance. The alloy with 5% Mo had a higher corrosion potential (E_corr) and a lower current density (I_corr) than the alloy with 0% Mo, indicating improved initial corrosion resistance. The alloy containing 10% Mo had the highest corrosion potential and the lowest current density, indicating the slowest corrosion rate and the best initial corrosion resistance. Finally, Cr_25-xCo₂₅Ni₂₅Fe₂₅Mo_x (x = 0, 5, 10%) HEAs produced by DED exhibited excellent mechanical properties and corrosion resistance, which can be attributed to the presence of Mo.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509674/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503680","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Self-Propelled Linear Piezoelectric Micro-Actuator Inspired by the Movement Patterns of Aquatic Beetles.","authors":"Xinjie Wang, Gen Wang","doi":"10.3390/mi15101197","DOIUrl":"https://doi.org/10.3390/mi15101197","url":null,"abstract":"<p><p>The locomotion mechanisms and structural characteristics of insects in nature offer new perspectives and solutions for designing miniature actuators. Inspired by the underwater movement of aquatic beetles, this paper presents a bidirectional self-propelled linear piezoelectric micro-actuator (SLPMA), whose maximum size in three dimensions is currently recognized as the smallest known of the self-propelled piezoelectric linear micro-actuators. Through the superposition of two bending vibration modes, the proposed actuator generates an elliptical motion trajectory at its driving feet. The size was determined as 15 mm × 12.8 mm × 5 mm after finite element analysis (FEA) through modal and transient simulations. A mathematical model was established to analyze and validate the feasibility of the proposed design. Finally, a prototype was fabricated, and an experimental platform was constructed to test the driving characteristics of the SLPMA. The experimental results showed that the maximum no-load velocity and maximum carrying load of the prototype in the forward motion were 17.3 mm/s and 14.8 mN, respectively, while those in the backward motion were 20.5 mm/s and 15.9 mN, respectively.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509356/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Polyimide Composite-Based Electromagnetic Cantilever Structure for Smart Grid Current Sensing.","authors":"Zeynel Guler, Nathan Jackson","doi":"10.3390/mi15101189","DOIUrl":"https://doi.org/10.3390/mi15101189","url":null,"abstract":"<p><p>Polyimides (PIs) have been extensively used in thin film and micro-electromechanical system (MEMS) processes based on their excellent thermal and mechanical stability and high glass transition temperature. This research explores the development of a novel multilayer and multifunctional polymer composite electro-piezomagnetic device that can function as an energy harvester or sensor for current-carrying wires or magnetic field sensing. The devices consist of four layers of composite materials with a polyimide matrix. The composites have various nanoparticles to alter the functionality of each layer. Nanoparticles of Ag were used to increase the electrical conductivity of polyimide and act as electrodes; lead zirconate titanate was used to make the piezoelectric composite layer; and either neodymium iron boron (NdFeB) or Terfenol-D was used to make the magnetic and magnetostrictive composite layer, which was used as the proof mass. A novel all-polymer multifunctional polyimide composite cantilever was developed to operate at low frequencies. This paper compares the performance of the different magnetic masses, shapes, and concentrations, as well as the development of an all-magnetostrictive device to detect voltage or current changes when coupled to the magnetic field from a current-carrying wire. The PI/PZT cantilever with the PI/NdFeB proof mass demonstrated higher voltage output compared to the PI/Terfenol-D proof mass device. However, the magnetostrictive composite film could be operated without a piezoelectric film based on the Villari effect, which consisted of a single PI-Terfenol-D film. The paper illustrates the potential to develop an all-polymer composite MEMS device capable of acting as a magnetic field or current sensor.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509584/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503653","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Precision Electrochemical Micro-Machining of Molybdenum in Neutral Salt Solution Based on Electrochemical Analysis.","authors":"Yuqi Wu, Guoqian Wang, Moucun Yang, Yan Zhang","doi":"10.3390/mi15101191","DOIUrl":"https://doi.org/10.3390/mi15101191","url":null,"abstract":"<p><p>Molybdenum is an important material in modern industry, widely used in extreme environments such as rocket engine nozzles and microelectrodes due to its high melting point, excellent mechanical properties, and thermal conductivity. However, as a difficult-to-machine metal, traditional machining methods struggle to achieve the desired microstructures in molybdenum. Electrochemical machining (ECM) offers unique advantages in manufacturing fine structures from hard-to-machine metals. Studies have shown that molybdenum exhibits a fast corrosion rate in alkaline or acidic solutions, posing significant environmental pressure. Therefore, this study investigates the electrochemical machining of molybdenum in neutral salt solutions to achieve high-precision microstructure fabrication. First, the polarization curves and electrochemical impedance spectroscopy (EIS) of molybdenum in NaNO3 solutions of varying concentrations were measured to determine its electrochemical reaction characteristics. The results demonstrate that molybdenum exhibits good electrochemical reactivity in NaNO3 solutions, leading to favorable surface erosion morphology. Subsequently, a mask electrochemical machining technique was employed to fabricate arrayed microstructures on the molybdenum surface. To minimize interference between factors, an orthogonal experiment was used to optimize the parameter combination, determining the optimal machining process parameters. Under these optimal conditions, an array of micro-groove structures was successfully fabricated with an average groove width of 110 μm, a depth-to-width ratio of 0.21, an aspect ratio of 9000, and a groove width error of less than 5 μm.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509719/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503724","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research Progress and Current Status of Gas-Solid Two-Phase Flow Technology in the Direction of Laser Cladding.","authors":"Jianjun Peng, Erhao Zhou, Run Feng, Meng Xue, Junhua Wang, Zhidan Zhong, Xiangchen Ku","doi":"10.3390/mi15101190","DOIUrl":"https://doi.org/10.3390/mi15101190","url":null,"abstract":"<p><p>In the process of laser cladding, there are usually problems such as powder plugging and uneven delivery, which affect the quality of the final cladding layer. Therefore, powder convergence characteristics in laser cladding need to be further improved. Gas-solid two-phase flow technology has been widely used in the study of powder flow characteristics because it can precisely regulate the interaction between carrier air and powder flow. In this paper, we systematically review the current status of gas-solid two-phase flow in the field of laser cladding powder, deeply analyze the latest optimization progress of laser cladding nozzle design, and comprehensively explain the key progress of gas-solid two-phase flow technology in improving the uniformity and efficiency of powder field distribution. At the end of this paper, the research results are summarized and a series of prospective prospects are proposed, aiming to provide a valuable reference framework and directional guidance for the subsequent related research.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509878/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503735","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Highly Linear Ultra-Low-Area-and-Power CMOS Voltage-Controlled Oscillator for Autonomous Microsystems.","authors":"Javier de Mena Pacheco, Tomas Palacios, Marek Hempel, Marisa Lopez Vallejo","doi":"10.3390/mi15101193","DOIUrl":"https://doi.org/10.3390/mi15101193","url":null,"abstract":"<p><p>Voltage-controlled oscillators (VCOs) can be an excellent means of converting a magnitude into a readable value. However, their design becomes a real challenge for power-and-area-constrained applications, especially when a linear response is required. This paper presents a VCO for smart dust systems fabricated by 65 nm technology. It is designed to minimize leakage, limit high peak currents and provide an output whose frequency variation is linear with the input voltage, while allowing rail-to-rail input range swing. The oscillator occupies 592 μm2, operates in a frequency range from 43 to 53 Hz and consumes a maximum average power of 210 pW at a supply voltage of 1 V and 4 pW at 0.3 V. In addition, the proposed VCO exhibits a quasi-linear response of frequency vs. supply voltage and temperature, allowing easy temperature compensation with complementary to absolute temperature (CTAT) voltage.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509745/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Residual Vibration Suppression of Piezoelectric Inkjet Printing Based on Particle Swarm Optimization Algorithm.","authors":"Huixuan Zhu, Song Li, Runyang Zhu, Feiyang Gao, Zhenyu Yin, Lianqing Liu, Xiongfei Zheng","doi":"10.3390/mi15101192","DOIUrl":"https://doi.org/10.3390/mi15101192","url":null,"abstract":"<p><p>Piezoelectric inkjet printing technology, known for its high precision and cost-effectiveness, has found extensive applications in various fields. However, the issue of residual vibration significantly limits its printing quality and efficiency. This paper presents a method for suppressing residual vibration based on the particle swarm optimization (PSO) algorithm. Initially, an improved PI model considering the nonlinear hysteresis characteristics of piezoelectric ceramics is established, and the model is identified through a strain gauge circuit to ensure its accuracy in describing the nonlinear hysteresis characteristics. Subsequently, a dynamic model of the piezoelectric inkjet printing system is constructed, with precise parameter identification achieved using the self-induction principle. This enables precise simulation of residual vibration. Finally, the driving waveform is optimized based on the PSO algorithm, with iterative calculations employed to find the optimal combination of driving waveform parameters, effectively suppressing residual vibration while ensuring sufficient injection energy. The results indicate that this method significantly reduces the amplitude of residual vibration, thereby effectively enhancing printing quality and stability. This research offers a novel solution for residual vibration suppression in piezoelectric inkjet printing technology, potentially advancing its applications in printing and biofabrication.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"15 10","pages":""},"PeriodicalIF":3.0,"publicationDate":"2024-09-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11509680/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142503737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}