Micromachines最新文献_第9页

Editorial for the Special Issue on Micro- and Nanosensors: Fabrication, Applications, and Performance Enhancements, 2nd Edition. 社论对微和纳米传感器的特别问题：制造，应用和性能增强，第二版。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-24 DOI: 10.3390/mi16060614

Joanna Smajdor

引用次数: 0

Miniaturized BAW Filter for Wide Band Application Based on High-Q Factor Active Inductor. 基于高q因子有源电感的宽带小型BAW滤波器。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-24 DOI: 10.3390/mi16060616

Zhencheng Xu, Jiabei Pan, Feng Gao, Weipeng Xuan, Hao Jin, Jikui Luo, Shurong Dong

{"title":"Miniaturized BAW Filter for Wide Band Application Based on High-Q Factor Active Inductor.","authors":"Zhencheng Xu, Jiabei Pan, Feng Gao, Weipeng Xuan, Hao Jin, Jikui Luo, Shurong Dong","doi":"10.3390/mi16060616","DOIUrl":"10.3390/mi16060616","url":null,"abstract":"BAW filters have been widely used in RF circuits, and their combination with integrated passive inductors is one of the most common forms of BAW filters. However, the large size of passive inductors increases the area of the filter, making it unable to meet packaging requirements. At the same time, their low quality factor (Q) severely degrades the performance of the BAW filter. This paper presents a miniaturized wide band BAW filter with small-size high-Q active inductor. The active inductor is implemented by a circuit topology with three common-source amplifiers constructed with N-type transistors. The three-stage topology uses a small-size transistor in the middle stage to reduce the parasitic capacitance at the input node, achieving a large inductive bandwidth. The simulation results show that the active inductor has variable inductance from 1 nH to 10 nH, and a quality factor of up to 4 K from 2 to 7 GHz. The 30 × 30 μm2 active inductor is embedded in a 4.55-5.05 GHz BAW filter ladder so as to substantially decrease filter size. Simulation results indicate that the BAW filter based on the active inductor achieves a low insertion loss of -1.1 dB, out-of-band rejection of -35 dB on the left side, and out-of-band rejection of -53 dB on the right side. Compared to the traditional passive inductor, this active inductor significantly improves the performance of the BAW filter while occupying a much smaller chip size of 0.83 × 0.75 mm2.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12194924/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Biaxial Non-Resonant Electromagnetically Driven Scanning Micromirror with Large Aperture. 双轴非谐振大口径电磁驱动扫描微镜。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-23 DOI: 10.3390/mi16060610

Tong Wang, Yu Jian, Chen Liu, Manpeng Chang, Xin Wang, Weimin Wang

{"title":"Biaxial Non-Resonant Electromagnetically Driven Scanning Micromirror with Large Aperture.","authors":"Tong Wang, Yu Jian, Chen Liu, Manpeng Chang, Xin Wang, Weimin Wang","doi":"10.3390/mi16060610","DOIUrl":"10.3390/mi16060610","url":null,"abstract":"To address the challenges of small aperture size, limited scanning angles, and high fabrication costs in existing scanning micromirrors, this paper proposes a large-aperture biaxial electromagnetically driven scanning micromirror. The scanning micromirror utilizes a stainless-steel mirror structure and an actuation structure composed of arc-shaped permanent magnets (NdFeB 52), iron cores, and copper coils. By optimizing the magnet layout and coil design, it achieves large optical scanning angles in biaxial non-resonant scanning mode. Experimental results demonstrate that the optical scanning angles reach 61.4° (x-axis) under a DC driving current of ±18.1 mA and 61.1° (y-axis) under a DC driving current of ±25.2 mA with an effective mirror aperture of 9.54 mm × 10 mm. The resonant frequencies are 89 Hz (x-axis) and 63 Hz (y-axis). Experimental results verify the feasibility of biaxial independent control in non-resonant scanning mode. The design is fabricated using a low-cost computer numerical control (CNC) milling process and exhibits application potential in fields such as LiDAR, projection display, and optical communication, providing a novel approach for performance optimization of large-aperture scanning micromirrors.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12195136/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Wide-Angle and Polarization-Insensitive Rectifying Metasurface for 5.8 GHz RF Energy Harvesting. 一种用于5.8 GHz射频能量采集的广角偏振不敏感整流超表面。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-23 DOI: 10.3390/mi16060611

Zhihui Guo, Juan Yu, Lin Dong

引用次数: 0

An Adaptive Three-Dimensional Self-Masking Strategy for the Micro-Fabrication of Quartz-MEMS with Out-of-Plane Vibration Units. 面外振动石英mems微加工的自适应三维自掩蔽策略。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-23 DOI: 10.3390/mi16060609

Yide Dong, Chunyan Yin, Guangbin Dou, Litao Sun

{"title":"An Adaptive Three-Dimensional Self-Masking Strategy for the Micro-Fabrication of Quartz-MEMS with Out-of-Plane Vibration Units.","authors":"Yide Dong, Chunyan Yin, Guangbin Dou, Litao Sun","doi":"10.3390/mi16060609","DOIUrl":"10.3390/mi16060609","url":null,"abstract":"Quartz crystal out-of-plane vibration units are critical components of QMEMS devices. However, the fabrication of their 3D sidewall electrode structures presents significant challenges, particularly within ultrafine etched grooves. These challenges seriously limit further miniaturization, which is critical for portable and wearable electronic applications. In this paper, we propose a novel 3D self-masking fabrication strategy that enables the precise formation of sidewall electrodes by using the etched beam structure as a self-aligned pattern transfer medium. Based solely on photolithography and wet etching processes, this approach overcomes the limitations of the conventional shadow mask technique by improving alignment accuracy, process efficiency, and fabrication yields. In addition, a predictive mathematical model was developed to guide process optimization, enabling adaptive and reliable fabrication. Sidewall electrodes were successfully achieved in etched grooves as narrow as 45 μm, closely matching the theoretical predictions. To validate the approach, an ultra-miniaturized out-of-plane vibration unit with a beam spacing of just 150 μm-the narrowest reported to date-was fabricated, representing an 80% reduction compared to previously documented structures. The unit exhibited a repeatability error below 1.13%, confirming the precision and reliability of the proposed fabrication strategy.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12195230/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Laser Fabrication and Comparative Study of Planoconcave and Planoconvex Microlenses on Fused Silica and Sapphire. 熔融石英和蓝宝石平凹凸微透镜的激光制备及对比研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-23 DOI: 10.3390/mi16060608

Narayana R Gottumukkala, Caleb Barnes, Mool C Gupta

引用次数: 0

Hybrid Energy Harvesting Applications of ZnO Nanorods for Future Implantable and Wearable Devices. ZnO纳米棒在未来可植入和可穿戴设备中的混合能量收集应用。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-22 DOI: 10.3390/mi16060605

Kathalingam Adaikalam, Hyun-Seok Kim

{"title":"Hybrid Energy Harvesting Applications of ZnO Nanorods for Future Implantable and Wearable Devices.","authors":"Kathalingam Adaikalam, Hyun-Seok Kim","doi":"10.3390/mi16060605","DOIUrl":"10.3390/mi16060605","url":null,"abstract":"The currently used electrical energy devices for portable applications are in limited life and need of frequent recharging, it is a big bottleneck for wireless and transportation systems. The scientific community is motivated to find innovative and efficient devices to convert environmental energy into useful forms. Nanogenerator can mitigate this issue by harvesting ambient energy of different forms into useful electrical energy. Particularly flexible nanogenerators can efficiently convert ambient mechanical energy into electrical energy which can be fruitfully used for self-powered sensors and electronic appliances. Zinc oxide is an interesting photosensitive and piezoelectric material that is expected to play a vital role in the synergetic harvesting of environmental thermal, sound, mechanical, and solar energies. As ZnO can be synthesized using easy methods and materials at low cost, the conversion efficiencies of solar and other energy forms can increase considerably. ZnO is a versatile material with interesting semiconducting, optical, and piezoelectric properties; it can be used advantageously to harvest more than one type of ambient energy. The coupled semiconducting and piezoelectric properties of ZnO are attractive for fabricating nanogenerators capable of harvesting both ambient optical and mechanical energies simultaneously. These nanolevel conversion devices are much required to power remote and implantable devices without the need for additional power sources. The present review briefly discusses the principles and mechanisms of different energy harvesting abilities of ZnO nanorods and their composites by consolidating available literature. In addition, the developments taking place in nanogenerators of different kinds-such as photovoltaic, piezoelectric, pyroelectric, and triboelectrics for self-powered technology-and their progress in hybrid energy harvesting application is reviewed.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12195186/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Process Development Methods in Microtechnology and the Associated Process Environment. 微技术中的工艺开发方法及相关工艺环境。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-22 DOI: 10.3390/mi16060606

Korbinian T Metz, Faruk Civelek, André Zimmermann

{"title":"Process Development Methods in Microtechnology and the Associated Process Environment.","authors":"Korbinian T Metz, Faruk Civelek, André Zimmermann","doi":"10.3390/mi16060606","DOIUrl":"10.3390/mi16060606","url":null,"abstract":"Microsystem technology (MST) and micro-electro-mechanical systems (MEMS) are key technologies that continually introduce new application opportunities. Increasing complexity and individualization require systematic process development to avoid errors and delays. While existing methods for process development address various aspects of the manufacturing process, the systematic consideration of external factors influencing the process environment (PEnv) remains broadly inadequate. Despite extensive standards, PEnv-related influences lead to quality fluctuations in practice. A list of influencing factors and an example process illustrate these challenges. This study aims to analyze which methods exist for process development in MST and to what extent they systematically consider process environmental factors. A mixed methods design was used for the analysis. In a systematic literature review (SLR) using traditional databases and Artificial intelligence-supported search tools, a total of 75 relevant studies from the years 2005 to 2024 were identified. The methods that cover various aspects of process development are presented in an overview. An adapted GRADE (Grading of Recommendations Assessment, Development, and Evaluation) analysis was used to check the extent to which the PEnv can be included in process development using the methods currently available. The results show that existing approaches often take PEnv into account insufficiently. Efficient consideration with the use of current methods requires extensive expert knowledge, knowledge management, and project-specific supplementary methods. This study emphasizes the need for research into methods that systematically integrate environmental requirements into process development to improve the efficiency and quality of MST manufacturing in this area.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12194810/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506504","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Energy Harvesting Microelectromechanical System for Condition Monitoring Based on Piezoelectric Transducer Ring. 基于压电换能器环的能量采集微机电状态监测系统。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-22 DOI: 10.3390/mi16060602

Kaixuan Wang, Hao Long, Di Song, Hasan Shariar

{"title":"Energy Harvesting Microelectromechanical System for Condition Monitoring Based on Piezoelectric Transducer Ring.","authors":"Kaixuan Wang, Hao Long, Di Song, Hasan Shariar","doi":"10.3390/mi16060602","DOIUrl":"10.3390/mi16060602","url":null,"abstract":"For complex mechanical transmission equipment, shaft bearings are usually enclosed together with the shaft in the internal space of the housing to maintain good sealing and reliability. However, it is difficult to monitor the status of the shaft bearing through external sensors on the housing, while internal sensors face challenges in energy supply and data transmission. Therefore, a piezoelectric transducer ring-based energy harvesting microelectromechanical system (PTR-EH-MEMS) is proposed for the condition monitoring of shaft bearings. Specifically, the piezoelectric transducer ring is designed to convert mechanical vibrations into electrical energy, which simultaneously acts as a self-powered monitoring sensor through energy harvesting. In addition, the MEMS is embedded for piezoelectric data processing and condition monitoring of the shaft bearings. To verify the proposed PTR-EH-MEMS, an experimental investigation is implemented under different conditions. The experimental results demonstrate that the system can achieve the maximum DC output of 0.8 V and the root mean square power of 43.979 μW within 128 s, which can effectively identify early-stage bearing faults frequency through a self-powered mode. By combining energy harvesting with condition monitoring capability, the PTR-EH-MEMS offers a compact and sustainable approach for predictive maintenance in rotating machinery, reducing the reliance on external power sources and enhancing the reliability of industrial systems.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12194851/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

RETRACTED: Shi et al. Surface Hydrophilic Modification for Chip of Centrifugal Microfluidic Immunoassay System. Micromachines 2022, 13, 831. 撤稿：Shi et al.。离心式微流控免疫分析系统芯片表面亲水改性研究。微机械，2022,13,831。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-21 DOI: 10.3390/mi16050599

Yuxing Shi, Peng Ye, Chuang Wang, Kuojun Yang, Jinhong Guo

引用次数: 0