Micromachines最新文献_第9页

Glass Microbubble Encapsulation for Improving the Lifetime of a Ferrofluid-Based Magnetometer. 提高铁磁流体磁力计寿命的玻璃微泡封装。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-28 DOI: 10.3390/mi16050519

Chenchen Zhang, Srinivas Tadigadapa

{"title":"Glass Microbubble Encapsulation for Improving the Lifetime of a Ferrofluid-Based Magnetometer.","authors":"Chenchen Zhang, Srinivas Tadigadapa","doi":"10.3390/mi16050519","DOIUrl":"10.3390/mi16050519","url":null,"abstract":"In this paper, we explore the use of chip-scale blown glass microbubble structures for MEMS packaging applications. Specifically, we demonstrate the efficacy of this method of packaging for the improvement of the lifetime of a ferrofluid-based magnetoviscous magnetometer. We have previously reported on the novel concept of a ferrofluid based magnetometer in which the viscoelastic response of a ferrofluid interfacial layer on a high frequency shear wave quartz resonator is sensitively monitored as a function of applied magnetic field. The quantification of the magnetic field is accomplished by monitoring the at-resonance admittance characteristics of the ferrofluid-loaded resonator. While the proof-of-concept measurements of the device have been successfully made, under open conditions, the evaporation of the carrier fluid of the ferrofluid continuously changes its viscoelastic properties and compromises the longevity of the magnetometer. To prevent the evaporation of the ferrofluid, here, we seal the ferrofluid on top of the micromachined quartz resonator within a blown glass hemispherical microbubble attached to it using epoxy. The magnetometer design used a bowtie-shaped thin film Metglas (Fe85B5Si10) magnetic flux concentrator on the resonator chip. A four-times smaller noise equivalent, a magnetic field of 600 nT/√Hz at 0.5 Hz was obtained for the magnetometer using the Metglas flux concentrator. The ferrofluid-based magnetometer is capable of sensing magnetic fields up to a modulation frequency of 40 Hz. Compared with the unsealed ferrofluid device, the lifetime of the glass microbubble integrated chip packaged device improved significantly from only a few hours to over 50 days and continued.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12114426/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Advancements in Wearable and Implantable BioMEMS Devices: Transforming Healthcare Through Technology. 可穿戴和植入式生物医疗系统设备的进展：通过技术改变医疗保健。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-28 DOI: 10.3390/mi16050522

Vishnuram Abhinav, Prithvi Basu, Shikha Supriya Verma, Jyoti Verma, Atanu Das, Savita Kumari, Prateek Ranjan Yadav, Vibhor Kumar

{"title":"Advancements in Wearable and Implantable BioMEMS Devices: Transforming Healthcare Through Technology.","authors":"Vishnuram Abhinav, Prithvi Basu, Shikha Supriya Verma, Jyoti Verma, Atanu Das, Savita Kumari, Prateek Ranjan Yadav, Vibhor Kumar","doi":"10.3390/mi16050522","DOIUrl":"10.3390/mi16050522","url":null,"abstract":"Wearable and implantable BioMEMSs (biomedical microelectromechanical systems) have transformed modern healthcare by enabling continuous, personalized, and minimally invasive monitoring, diagnostics, and therapy. Wearable BioMEMSs have advanced rapidly, encompassing a diverse range of biosensors, bioelectronic systems, drug delivery platforms, and motion tracking technologies. These devices enable non-invasive, real-time monitoring of biochemical, electrophysiological, and biomechanical signals, offering personalized and proactive healthcare solutions. In parallel, implantable BioMEMS have significantly enhanced long-term diagnostics, targeted drug delivery, and neurostimulation. From continuous glucose and intraocular pressure monitoring to programmable drug delivery and bioelectric implants for neuromodulation, these devices are improving precision treatment by continuous monitoring and localized therapy. This review explores the materials and technologies driving advancements in wearable and implantable BioMEMSs, focusing on their impact on chronic disease management, cardiology, respiratory care, and glaucoma treatment. We also highlight their integration with artificial intelligence (AI) and the Internet of Things (IoT), paving the way for smarter, data-driven healthcare solutions. Despite their potential, BioMEMSs face challenges such as regulatory complexities, global standardization, and societal determinants. Looking ahead, we explore emerging directions like multifunctional systems, biodegradable power sources, and next-generation point-of-care diagnostics. Collectively, these advancements position BioMEMS as pivotal enablers of future patient-centric healthcare systems.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12113605/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Photonic-Electronic Modulated a-IGZO Synaptic Transistor with High Linearity Conductance Modulation and Energy-Efficient Multimodal Learning. 具有高线性电导调制和高能效多模态学习的光电子调制a-IGZO突触晶体管。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-28 DOI: 10.3390/mi16050517

Zhidong Hou, Jinrong Shen, Yiming Zhong, Dongping Wu

{"title":"Photonic-Electronic Modulated a-IGZO Synaptic Transistor with High Linearity Conductance Modulation and Energy-Efficient Multimodal Learning.","authors":"Zhidong Hou, Jinrong Shen, Yiming Zhong, Dongping Wu","doi":"10.3390/mi16050517","DOIUrl":"10.3390/mi16050517","url":null,"abstract":"Brain-inspired neuromorphic computing is expected to overcome the von Neumann bottleneck by eliminating the memory wall between processing and memory units. Nevertheless, critical challenges persist in synaptic device implementation, particularly regarding nonlinear/asymmetric conductance modulation and multilevel conductance states, which substantially impede the realization of high-performance neuromorphic hardware. This study demonstrates a novel advancement in photonic-electronic modulated synaptic devices through the development of an amorphous indium-gallium-zinc oxide (a-IGZO) synaptic transistor. The device demonstrates biological synaptic functionalities, including excitatory/inhibitory post-synaptic currents (EPSCs/IPSCs) and spike-timing-dependent plasticity, while achieving excellent conductance modulation characteristics (nonlinearity of 0.0095/-0.0115 and asymmetric ratio of 0.247) and successfully implementing Pavlovian associative learning paradigms. Notably, systematic neural network simulations employing the experimental parameters reveal a 93.8% recognition accuracy on the MNIST handwritten digit dataset. The a-IGZO synaptic transistor with photonic-electronic co-modulation serves as a potential critical building block for constructing neuromorphic architectures with human-brain efficiency.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12114391/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144159888","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology. 基于湿法蚀刻技术的硅压力传感器设计与制造。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-28 DOI: 10.3390/mi16050516

Fengchao Li, Shijin Yan, Cheng Lei, Dandan Wang, Xi Wei, Jiangang Yu, Yongwei Li, Pengfei Ji, Qiulin Tan, Ting Liang

{"title":"Design and Fabrication of Silicon Pressure Sensors Based on Wet Etching Technology.","authors":"Fengchao Li, Shijin Yan, Cheng Lei, Dandan Wang, Xi Wei, Jiangang Yu, Yongwei Li, Pengfei Ji, Qiulin Tan, Ting Liang","doi":"10.3390/mi16050516","DOIUrl":"10.3390/mi16050516","url":null,"abstract":"This paper presents a novel silicon-based piezoresistive pressure sensor composed of a silicon layer with sensing elements and a glass cover for hermetic packaging. Unlike conventional designs, this study employs numerical simulation to analyze the influence of varying roughness levels of the sensitive membrane on the sensor's output response. Simulation results demonstrate that pressure sensors with smoother sensitive membranes exhibit superior performance in terms of sensitivity (5.07 mV/V/MPa), linearity (0.67% FS), hysteresis (0.88% FS), and repeatability (0.75% FS). Furthermore, an optimized process for controlling membrane roughness was achieved by adjusting the concentration of the etchant solution. Experimental results reveal that a membrane roughness of 35.37 nm was attained under conditions of 80 °C and 25 wt% TMAH. Additionally, the fabrication process of this piezoresistive pressure sensor was significantly simplified and cost-effective due to the adoption of a backside wet etching technique. The fabricated sensor demonstrates excellent performance metrics, including a sensitivity of 5.07 mV/V/MPa, a full-scale (FS) output of 101.42 mV, a hysteresis of 0.88% FS, a repeatability of 0.75% FS, and a nonlinearity of 0.67% FS. These results indicate that the proposed sensor is a promising tool for precise pressure measurement applications, offering both high performance and cost efficiency. This study not only advances the understanding of the impact of membrane roughness on sensor performance but also provides a practical and scalable fabrication approach for piezoresistive pressure sensors.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12113606/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144159940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

ZnFe₂O₄/GQDs Nanoparticles as Peroxidase Mimics for Sensitive and Selective Colorimetric Detection of Glucose in Real Samples. ZnFe2O4/GQDs纳米颗粒作为过氧化物酶模拟物用于真实样品中葡萄糖的灵敏和选择性比色检测。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-28 DOI: 10.3390/mi16050520

Claudia Cirillo, Mariagrazia Iuliano, Maria Sarno

{"title":"ZnFe2O4/GQDs Nanoparticles as Peroxidase Mimics for Sensitive and Selective Colorimetric Detection of Glucose in Real Samples.","authors":"Claudia Cirillo, Mariagrazia Iuliano, Maria Sarno","doi":"10.3390/mi16050520","DOIUrl":"10.3390/mi16050520","url":null,"abstract":"Glucose detection is critical in addressing health and medical issues related to irregular blood levels. Colorimetry, a simple, cost-effective, and visually straightforward method, is often employed. Traditional enzymatic detection methods face drawbacks such as high costs, limited stability, and operational challenges. To overcome these, enzyme mimics or artificial nano-enzymes based on inorganic nanomaterials have garnered attention, but their cost and susceptibility to inactivation limit applications. This study presents a ZnFe2O4/GQDs nanocomposite as an innovative enzyme mimic, addressing key requirements like low cost, high stability, biocompatibility, and wide operational range. Synthesized using a simple and inexpensive method, the composite benefits from the synergistic interaction between ZnFe2O4 nanoparticles and graphene quantum dots (GQDs), resulting in excellent magnetic properties, high surface area, and functional versatility. The material demonstrated remarkable sensitivity with a detection limit of 7.0 μM across a range of 5-500 μM and achieved efficient peroxidase-like activity with Km values of 0.072 and 0.068 mM and Vmax of 4.58 × 10⁻8 and 8.29 × 10⁻8 M/s for TMB and H2O2, respectively. The nanocomposite also exhibited robust recyclability, retaining performance over six reuse cycles.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12113822/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Research Progress on Micromachining Technologies Used to Fabricate Terahertz Micro-Metallic Rectangular Cavity Structures. 制备太赫兹微金属矩形腔结构的微加工技术研究进展。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-28 DOI: 10.3390/mi16050518

Xiaolei Bi, Xuemin Li, Bin Li, Xueli Cheng

{"title":"Research Progress on Micromachining Technologies Used to Fabricate Terahertz Micro-Metallic Rectangular Cavity Structures.","authors":"Xiaolei Bi, Xuemin Li, Bin Li, Xueli Cheng","doi":"10.3390/mi16050518","DOIUrl":"10.3390/mi16050518","url":null,"abstract":"Terahertz metal rectangular cavity structures are widely used in terahertz devices due to their performance advantages, and various microfabrication techniques have been applied to the manufacturing of their high performance. In this paper, several typical application fields of terahertz technology and the reasons for its application in these fields are elaborated in detail. Several typical terahertz devices with terahertz metal rectangular cavity structures are introduced in detail. The research progress of various micromachining techniques for manufacturing terahertz rectangular cavity structures, such as DRIE, UV-LIGA, micro-milling, LTCC, 3D printing, and electrochemical micromachining, is discussed in detail. Finally, the advantages and disadvantages of various micromachining techniques for manufacturing terahertz micro-rectangular cavity structures are discussed, and the results show that electrochemical micromachining technology and micro-nano 3D printing technology are relatively promising methods for the manufacturing of high-frequency terahertz rectangular cavity structures.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12114094/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160097","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Temperature Effects on Wicking Dynamics: Experimental and Numerical Study on Micropillar-Structured Surfaces. 温度对排汗动力学的影响：微柱结构表面的实验和数值研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-27 DOI: 10.3390/mi16050512

Yoomyeong Lee, Hyunmuk Park, Hyeon Taek Nam, Yong-Hyeon Kim, Jae-Hwan Ahn, Donghwi Lee

{"title":"Temperature Effects on Wicking Dynamics: Experimental and Numerical Study on Micropillar-Structured Surfaces.","authors":"Yoomyeong Lee, Hyunmuk Park, Hyeon Taek Nam, Yong-Hyeon Kim, Jae-Hwan Ahn, Donghwi Lee","doi":"10.3390/mi16050512","DOIUrl":"10.3390/mi16050512","url":null,"abstract":"Boiling heat transfer, utilizing latent heat during phase change, has widely been used due to its high thermal efficiency and plays an important role in existing and next-generation cooling technologies. The most critical parameter in boiling heat transfer is critical heat flux (CHF), which represents the maximum heat flux a heated surface can sustain during boiling. CHF is primarily influenced by the wicking performance, which governs liquid supply to the surface. This study experimentally and numerically analyzed the wicking performance of micropillar structures at various temperatures (20-95 °C) using distilled water as the working fluid to provide fundamental data for CHF prediction. Infrared (IR) visualization was used to extract the wicking coefficient, and the experimental data were compared with computational fluid dynamics (CFD) simulations for validation. At room temperature (20 °C), the wicking coefficient increased with larger pillar diameters (D) and smaller gaps (G). Specifically, the highest roughness factor sample (D04G10, r = 2.51) exhibited a 117% higher wicking coefficient than the lowest roughness factor sample (D04G20, r = 1.51), attributed to enhanced capillary pressure and improved liquid supply. Additionally, for the same surface roughness factor, the wicking coefficient increased with temperature, showing a 49% rise at 95 °C compared to 20 °C due to reduced viscous resistance. CFD simulations showed strong agreement with experiments, with error within ±10%. These results confirm that the proposed numerical methodology is a reliable tool for predicting wicking performance near boiling temperatures.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12114549/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160117","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

1200V 4H-SiC MOSFET with a High-K Source Gate for Improving Third-Quadrant and High Frequency Figure of Merit Performance. 采用高k源栅极的1200V 4H-SiC MOSFET提高了第三象限和高频图形的优异性能。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-27 DOI: 10.3390/mi16050508

Mingyue Li, Zhaofeng Qiu, Tianci Li, Yi Kang, Shan Lu, Xiarong Hu

引用次数: 0

Frequency-Decoupled Dual-Stage Inverse Lithography Optimization via Hierarchical Sampling and Morphological Enhancement. 基于分层采样和形态增强的频率解耦双级反光刻优化。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-27 DOI: 10.3390/mi16050515

Jie Zhou, Qingyan Zhang, Haifeng Sun, Chuan Jin, Ji Zhou, Junbo Liu

{"title":"Frequency-Decoupled Dual-Stage Inverse Lithography Optimization via Hierarchical Sampling and Morphological Enhancement.","authors":"Jie Zhou, Qingyan Zhang, Haifeng Sun, Chuan Jin, Ji Zhou, Junbo Liu","doi":"10.3390/mi16050515","DOIUrl":"10.3390/mi16050515","url":null,"abstract":"Inverse lithography technology (ILT) plays a pivotal role in advanced semiconductor manufacturing because it enables pixel-level mask modifications, significantly enhances pattern fidelity, and expands process windows. However, traditional gradient-based ILT methods often struggle with the trade-off between imaging fidelity and mask manufacturability due to coupled optimization objectives. We propose a frequency-separated dual-stage optimization framework (FD-ILT) that strategically decouples these conflicting objectives by exploiting the inherent low-pass characteristics of lithographic systems. The first stage optimizes low-frequency (LF) components using hierarchical downsampling to generate a high-fidelity continuous transmission mask. This approach reduces computational complexity while refining resolution progressively. The second stage enforces manufacturability by exclusively adjusting high-frequency (HF) features through morphological regularization and progressive binarization penalties while maintaining the mask LF to preserve imaging accuracy. Our method achieves simultaneous control of both aspects by eliminating gradient conflicts between fidelity and manufacturing constraints. The simulation results demonstrate that FD-ILT achieves superior imaging quality and manufacturability compared to conventional gradient-based ILT methods, offering a scalable solution for advanced semiconductor nodes.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12113725/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160105","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

MXene-Enhanced Laser-Induced Graphene Flexible Sensor with Rapid Response for Monitoring Pilots' Body Motion. 用于飞行员身体运动监测的mxene增强激光诱导石墨烯柔性传感器。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-27 DOI: 10.3390/mi16050513

Xia Lei, Hongyun Fan, Yilin Zhao, Mian Zhong, Zhanghui Wu, Lin Li, Shouqing Li, Xiaoqing Xing, Jianhua Liu, Yibo Sun, Yong Jiang, Guogang Ren

{"title":"MXene-Enhanced Laser-Induced Graphene Flexible Sensor with Rapid Response for Monitoring Pilots' Body Motion.","authors":"Xia Lei, Hongyun Fan, Yilin Zhao, Mian Zhong, Zhanghui Wu, Lin Li, Shouqing Li, Xiaoqing Xing, Jianhua Liu, Yibo Sun, Yong Jiang, Guogang Ren","doi":"10.3390/mi16050513","DOIUrl":"10.3390/mi16050513","url":null,"abstract":"Flexible wearable strain sensors demonstrate promising application prospects in health monitoring, human-machine interaction, motion tracking, and the detection of human physiological signals. Although laser-induced graphene (LIG) materials have been extensively utilized in these scenarios, traditional types of LIG sensors are constrained by intrinsic limitations, including discontinuous conductive networks and electromechanical responsive hysteresis. These limitations hinder their applications in micro-strain detection scenarios. Consequently, enhancing the performance of LIG-based sensors has become a crucial priority. To address this challenge, we developed a novel MXene/LIG composite featuring optimized conductive networks and interfacial coupling effects through the systematic enhancement of LIG. The flexible strain sensor fabricated using this composite exhibits exceptional performance, including an ultra-low sheet resistance of 14.1 Ω, a high sensitivity of 20.7, a micro-strain detection limit of 0.05%, and a rapid response time of approximately 65 ms. These improvements significantly enhance electromechanical responsiveness and strain detection sensitivity. Furthermore, the sensor exhibits remarkable stability under varying tensile strains, particularly showing outstanding repeatability across 2500 cyclic tests. Notably, when applied to the pilot health monitoring scenarios, the MXene/LIG-based sensor demonstrates robust capability in detecting body movement signals such as micro-expressions and joint movements. This establishes a novel and highly effective technological solution for the real-time monitoring of pilots' motion states during operational scenarios.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12114579/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160241","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0