Micromachines最新文献

RETRACTED: Yang et al. Design and Dynamic Simulation of a Novel Traveling Wave Linear Ultrasonic Motor. Micromachines 2022, 13, 557. 撤稿：Yang et al.。一种新型行波直线超声电机的设计与动态仿真。微机械，2022,13,557。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-11 DOI: 10.3390/mi16091041

Lin Yang, Kaixi Yao, Weihao Ren, Liang Chen, Mojian Yang, Rongcheng Zhao, Siyu Tang

引用次数: 0

Design and Parameter Optimization of Quasi-Zero-Stiffness Structures Based on Cosine-Curve Compliant Beams. 基于余弦曲线柔性梁的准零刚度结构设计及参数优化。

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-21 DOI: 10.3390/mi16080961

Zhuo Sun, Jinpeng Hu, Deng Li, Long Huang

引用次数: 0

Investigation into Ultrasonic Oscillation-Assisted Nickel Electroplating onto a Diamond Surface. 超声振荡辅助金刚石表面镀镍的研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-21 DOI: 10.3390/mi16080962

Qingming Fan, Bin Guo, Guokang Su, Hui Qi, Pengfan Li, Chuanyun Zhang, Kai Cheng

{"title":"Investigation into Ultrasonic Oscillation-Assisted Nickel Electroplating onto a Diamond Surface.","authors":"Qingming Fan, Bin Guo, Guokang Su, Hui Qi, Pengfan Li, Chuanyun Zhang, Kai Cheng","doi":"10.3390/mi16080962","DOIUrl":"https://doi.org/10.3390/mi16080962","url":null,"abstract":"At present, there are some challenging issues for diamond electroplating devices, such as poor particle-cathode contact uniformity, low conductivity, inefficient deposition, and complex disassembly/cleaning process of the device. To overcome these issues, an ultrasonic oscillation-assisted nickel electroplating device is innovatively designed and presented in this paper. The device features: (1) innovative architecture enabling rapid disassembly; (2) ultrasonic enhancement of diamond particle mobility (frequency × amplitude); (3) optimized electrical contact interfaces. In this paper, the effects of electroplating current, output power of ultrasonic oscillator and diamond particle size on nickel electroplating onto diamond surface are further studied particularly by ultrasonic assisted electroplating. The experimental results show that the ultrasonic oscillation assisted electroplating greatly improves the uniformity of the coating on the diamond surface and effectively prevents the adhesion between diamond particles. While the process parameters are electroplating current of 3 A, output power of ultrasonic oscillator 900 W, diamond particle size of 120/140, the weight-gain rate is 20.6%, the nickel content of the coating reaches 81.95%, and the coating is excellent uniformed without agglomeration. The research presented provides fundamental understanding for further development and application of ultrasonic oscillation-assisted electroplating technology particularly for broad precision engineering purposes.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 8","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12388650/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144960672","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Advancements and Future Prospects of Energy Harvesting Technology in Power Systems. 电力系统能量收集技术的进展与展望。

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-21 DOI: 10.3390/mi16080964

Haojie Du, Jiajing Lu, Wenye Zhang, Guang Yang, Wenzhuo Zhang, Zejun Xu, Huifeng Wang, Kejie Dai, Lingxiao Gao

{"title":"Advancements and Future Prospects of Energy Harvesting Technology in Power Systems.","authors":"Haojie Du, Jiajing Lu, Wenye Zhang, Guang Yang, Wenzhuo Zhang, Zejun Xu, Huifeng Wang, Kejie Dai, Lingxiao Gao","doi":"10.3390/mi16080964","DOIUrl":"https://doi.org/10.3390/mi16080964","url":null,"abstract":"The electric power equipment industry is rapidly advancing toward \"informationization,\" with the swift progression of intelligent sensing technology serving as a key driving force behind this transformation, thereby triggering significant changes in global electric power equipment. In this process, intelligent sensing has created an urgent demand for high-performance integrated power systems that feature compact size, lightweight design, long operational life, high reliability, high energy density, and low cost. However, the performance metrics of traditional power supplies have increasingly failed to meet the requirements of modern intelligent sensing, thereby significantly hindering the advancement of intelligent power equipment. Energy harvesting technology, characterized by its long operational lifespan, compact size, environmental sustainability, and self-sufficient operation, is capable of capturing renewable energy from ambient power sources and converting it into electrical energy to supply power to sensors. Due to these advantages, it has garnered significant attention in the field of power sensing. This paper presents a comprehensive review of the current state of development of energy harvesting technologies within the power environment. It outlines recent advancements in magnetic field energy harvesting, electric field energy harvesting, vibration energy harvesting, wind energy harvesting, and solar energy harvesting. Furthermore, it explores the integration of multiple physical mechanisms and hybrid energy sources aimed at enhancing self-powered applications in this domain. A comparative analysis of the advantages and limitations associated with each technology is also provided. Additionally, the paper discusses potential future directions for the development of energy harvesting technologies in the power environment.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 8","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12388669/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144960683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Paperclip-Type Flexible Inductive Sensor Based on Liquid Metal Coils for Simple Fabrication and Multifunctional Applications. 基于液态金属线圈的回形针式柔性电感传感器，制作简单，用途广泛。

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-21 DOI: 10.3390/mi16080965

Xun Sun, Kaixin Li, Zifeng Zhang, Linling Xiang, Yihao Zhou, Bin Sheng

{"title":"Paperclip-Type Flexible Inductive Sensor Based on Liquid Metal Coils for Simple Fabrication and Multifunctional Applications.","authors":"Xun Sun, Kaixin Li, Zifeng Zhang, Linling Xiang, Yihao Zhou, Bin Sheng","doi":"10.3390/mi16080965","DOIUrl":"https://doi.org/10.3390/mi16080965","url":null,"abstract":"At present, high-resolution and reliable inductive sensors have increasingly emerged as a pivotal component in the advancement of flexible electronic devices. The integration of liquid metal with flexible substrates presents a promising approach for the fabrication of inductive sensors. This paper introduces a novel paperclip-type helical coil inductive sensor, characterized by advancements in both structural design and a simplified manufacturing process. The sensor comprises a fine silicone tube filled with liquid metal, encapsulated within polydimethylsiloxane (PDMS) glue. A significant innovation of this design is its complete elimination of the need for high-precision sacrificial metal molds. This approach bypasses complex processes such as precision mold machining, demolding, and post-mold residue cleaning, thereby significantly streamlining the production work-flow. We optimized the parameters of the paperclip-type helical coil, the aspect ratio, and the number of turns, achieving the maximum sensitivity under limited conditions. Experimental results demonstrate that this sensor is capable of tensile, pressure, and non-contact distance sensing. The linearity of the tensile sensing is exceptional (R2=0.999), with consistent performance observed after 800 tensile cycles. The pressure sensing range extends from 0 to 230 kPa, and the non-contact distance sensing is effective within a range of 10 mm. Furthermore, the sensor exhibits strong performance in monitoring human physiological activities and metal distance detection, demonstrating significant application potential in flexible electronics and wearable devices.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 8","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12388588/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144960739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Suppression Method for Random Errors of IFOG Based on the Decoupling of Colored Noise-Spectrum Information. 基于彩色噪声-频谱信息解耦的IFOG随机误差抑制方法。

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-21 DOI: 10.3390/mi16080963

Zhe Liang, Zhili Zhang, Zhaofa Zhou, Hongcai Li, Junyang Zhao, Longjie Tian, Hui Duan

{"title":"A Suppression Method for Random Errors of IFOG Based on the Decoupling of Colored Noise-Spectrum Information.","authors":"Zhe Liang, Zhili Zhang, Zhaofa Zhou, Hongcai Li, Junyang Zhao, Longjie Tian, Hui Duan","doi":"10.3390/mi16080963","DOIUrl":"https://doi.org/10.3390/mi16080963","url":null,"abstract":"In high-precision inertial navigation systems, suppressing the random errors of a fiber-optic gyroscope is of great importance. However, the traditional rule-based autoregressive moving average modeling method, when applied in Kalman filtering considering colored noise, presents inherent disadvantages in principle, including inaccurate state equations and difficulties in state dimension expansion. To this end, the noise characteristics in the fiber-optic gyroscope signal are first deeply analyzed, a random error model form is clarified, and a new model-order determination criterion is proposed to achieve the high-precision modeling of random errors. Then, based on the effective suppression of the angle random walk error of the fiber-optic gyroscope, and combined with the linear system equation of its colored noise, an adaptive Kalman filter based on noise-spectrum information decoupling is designed. This breaks through the principled limitations of traditional methods in suppressing colored noise and provides a scheme for modeling and suppressing fiber-optic gyroscope random errors under static conditions. Experimental results show that, compared with existing methods, the initial alignment accuracy of the proposed method based on 5 min data of fiber-strapdown inertial navigation is improved by an average of 48%.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 8","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12388321/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144960686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Holmium Metal Nanoparticle PbO₂ Anode Formed by Electrodeposition for Efficient Removal of Insecticide Acetamiprid and Improved Oxygen Evolution Reaction. 电沉积制备金属钬纳米粒子PbO2阳极高效除虫脒及改进析氧反应。

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-20 DOI: 10.3390/mi16080960

Milica Kaludjerović, Sladjana Savić, Danica Bajuk-Bogdanović, Aleksandar Jovanović, Lazar Rakočević, Goran Roglić, Jadranka Milikić, Dalibor Stanković

{"title":"Holmium Metal Nanoparticle PbO2 Anode Formed by Electrodeposition for Efficient Removal of Insecticide Acetamiprid and Improved Oxygen Evolution Reaction.","authors":"Milica Kaludjerović, Sladjana Savić, Danica Bajuk-Bogdanović, Aleksandar Jovanović, Lazar Rakočević, Goran Roglić, Jadranka Milikić, Dalibor Stanković","doi":"10.3390/mi16080960","DOIUrl":"https://doi.org/10.3390/mi16080960","url":null,"abstract":"This work examines the possibility of using a PbO2-based electrode doped with the rare-earth metal holmium in the field of oxygen evolution and the development of an efficient method for the degradation of acetamiprid. Acetamiprid is a widely used insecticide and, as such, it very often reaches waterways, where it can cause many problems for wildlife and the environment. X-ray powder diffraction analysis, Raman spectroscopy, and energy-dispersive X-ray spectroscopy results confirmed the structure of Ti/SnO2-Sb2O3/Ho-PbO2, while the morphology of its surface was investigated by scanning electron microscopy with energy-dispersive X-ray spectroscopy. Ti/SnO2-Sb2O3/Ho-PbO2 showed good OER activity in alkaline media with a Tafel slope of 138 mV dec-1. The Ti/SnO2-Sb2O3/Ho-PbO2 electrode shows very good efficiency in removing acetamiprid. By optimizing the degradation procedure, the following operating conditions were obtained: a current density of 20 mA cm-2, a pH value of the supporting electrolyte (sodium sulfate) of 2, and a concentration of the supporting electrolyte of 0.035 M. After optimization, the maximum efficiency of removing acetamiprid (10 mg L-1, 4.5 × 10-5 mol) from water was achieved, 96.8%, after only 90 min of treatment, which represents an efficiency of 1.125 mol cm-2 of the electrode. Additionally, it was shown that the degradation efficiency is strictly related to the concentration of the treated substance.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 8","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12388753/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144960804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Sensitivity and Contrast Characterization of PMMA 950K Resist Under 30 keV Focused Ga⁺ Ion Beam Exposure. 在30 keV聚焦Ga+离子束照射下PMMA 950K电阻的灵敏度和对比特性

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-20 DOI: 10.3390/mi16080958

Mukhit Muratov, Yana Shabelnikova, Sergey Zaitsev, Renata Nemkayeva, Nazim Guseinov

{"title":"Sensitivity and Contrast Characterization of PMMA 950K Resist Under 30 keV Focused Ga+ Ion Beam Exposure.","authors":"Mukhit Muratov, Yana Shabelnikova, Sergey Zaitsev, Renata Nemkayeva, Nazim Guseinov","doi":"10.3390/mi16080958","DOIUrl":"https://doi.org/10.3390/mi16080958","url":null,"abstract":"In this study, the key lithographic performance of PMMA 950K resist was evaluated by exposure to a 30 keV focused gallium (Ga+) ion beam. The sensitivity and contrast of PMMA 950K were directly compared with those of electron exposure under identical development conditions. It was found that the sensitivity of PMMA 950K to Ga+ ions for 50 nm films reaches a value of about 0.4 μC/cm2, which is more than 250 times higher than its sensitivity to electron exposure. A method for evaluating the resist contrast during ion exposure is proposed in this work, taking into account the highly non-uniform dose distribution across the resist depth; it yielded a contrast value of γ = 2.6, which is consistent with the result obtained with electron exposure (γ = 2.8). In addition, a pronounced dependence of the resist sensitivity on the resist thickness was found: with an increase in thickness from 10 nm to 60 nm the sensitivity decreases by an order of magnitude. The obtained results form a reliable methodological basis for characterizing the behavior of polymer resists under ion irradiation and provide valuable recommendations for optimizing lithography with a focused beam of Ga+ ions when creating nanostructures for microelectronics, photonics, and quantum technologies.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 8","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12388081/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144960726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Pulsed CO₂ Laser-Fabricated Cascades of Double Resonance Long Period Gratings for Sensing Applications. 用于传感应用的脉冲CO2激光制造双共振长周期光栅级联。

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-20 DOI: 10.3390/mi16080959

Tinko Eftimov, Sanaz Shoar Ghaffari, Georgi Dyankov, Veselin Vladev, Alla Arapova

{"title":"Pulsed CO2 Laser-Fabricated Cascades of Double Resonance Long Period Gratings for Sensing Applications.","authors":"Tinko Eftimov, Sanaz Shoar Ghaffari, Georgi Dyankov, Veselin Vladev, Alla Arapova","doi":"10.3390/mi16080959","DOIUrl":"https://doi.org/10.3390/mi16080959","url":null,"abstract":"We present a detailed theoretical and experimental study of cascaded double resonance long period gratings (C DR LPGs) for fabricated sensing applications. The matrix description of cascaded LPGs is presented, and several important particular cases are considered related to the regular and turn around point (TAP) gratings. A pulsed CO2 laser was used to fabricate ordinary and cascaded DR LPGs in a photosensitive optical fiber. The responses of the fabricated C DR LPGs to surrounding refractive index (SRI) temperature as well to longitudinal strain have been studied. A statistical comparison of the SRI sensitivities of ordinary and cascaded DR LPGs is presented to outline the capabilities and advantages of cascaded DR gratings. It was experimentally established that the temperature dependence of the wavelength split at the TAP follows a logarithmic dependence and the sensitivity to temperature is inversely proportional to the temperature itself. We evaluate the temperature stability needed for SRI-based sensing application and the importance of fine-tuning to the operational point slightly after the TAP to ensure maximum sensitivity of the sensor.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 8","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12388610/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144960790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Structural and Electrically Conductive Properties of Plasma-Enhanced Chemical-Vapor-Deposited High-Resistivity Zn-Doped β-Ga₂O₃ Thin Films. 等离子体增强化学气相沉积高电阻率掺锌β-Ga2O3薄膜的结构和导电性能

IF 3 3区工程技术

Micromachines Pub Date : 2025-08-19 DOI: 10.3390/mi16080954

Leonid A Mochalov, Sergey V Telegin, Aleksei V Almaev, Ekaterina A Slapovskaya, Pavel A Yunin

{"title":"Structural and Electrically Conductive Properties of Plasma-Enhanced Chemical-Vapor-Deposited High-Resistivity Zn-Doped β-Ga2O3 Thin Films.","authors":"Leonid A Mochalov, Sergey V Telegin, Aleksei V Almaev, Ekaterina A Slapovskaya, Pavel A Yunin","doi":"10.3390/mi16080954","DOIUrl":"https://doi.org/10.3390/mi16080954","url":null,"abstract":"A method was developed for plasma-enhanced chemical vapor deposition of β-Ga2O3:Zn thin films with the possibility of pre-purifying precursors. The structural and electrically conductive properties of β-Ga2O3:Zn thin films were studied. Increasing the temperature of the Zn source (TZn) to 220 °C led to the formation of Ga2O3 films with a Zn concentration of 4 at.%, at TZn = 230 °C [Zn] = 6 at.% and at 235 °C. [Zn] = 8 at.% At TZn = 23 °C, the films corresponded to the β-Ga2O3 phase and were single-crystalline with a surface orientation of (-201). As TZn increased, the polycrystalline structure of β-Ga2O3 films with a predominant orientation of (111) was formed. The introduction of Zn led to the formation of a more developed microrelief of the surface. Raman spectroscopy showed that a small concentration of impurity atoms tended to replace gallium atoms in the oxide lattice, which was also confirmed by the Hall measurements. The concentration of charge carriers upon the introduction of Zn, which is a deep acceptor, decreased by 2-3 orders of magnitude, which mainly determined the decrease in the films' resistivity. The resulting thin films were promising for the development of high-resistivity areas of β-Ga2O3-based devices.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 8","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-08-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12388335/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144960711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0