Micromachines最新文献

Compact Frequency-Agile and Mode-Reconfigurable Antenna for C-Band, Sub-6-GHz-5G, and ISM Applications. 用于c波段、sub - 6ghz - 5g和ISM应用的紧凑型频率敏捷和模式可重构天线。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-19 DOI: 10.3390/mi16060724

Esraa Mousa Ali, Wahaj Abbas Awan, Anees Abbas, Syed Mujahid Abbas, Heba G Mohamed

{"title":"Compact Frequency-Agile and Mode-Reconfigurable Antenna for C-Band, Sub-6-GHz-5G, and ISM Applications.","authors":"Esraa Mousa Ali, Wahaj Abbas Awan, Anees Abbas, Syed Mujahid Abbas, Heba G Mohamed","doi":"10.3390/mi16060724","DOIUrl":"10.3390/mi16060724","url":null,"abstract":"This article presents the design and evaluation of a compact-sized antenna targeting heterogenous applications working in the C-band, 5G-sub-6GHz, and the ISM band. The antenna offers frequency reconfigurability along with multi-operational modes ranging from wideband to dual-band and tri-band. A compact-sized antenna is designed initially to cover a broad bandwidth that ranges from 4 GHz to 7 GHz. Afterwards, various multiband antennas are formed by loading various stubs. Finally, the wideband antenna along with multi-stub loaded antennas are combined to form a single antenna. Furthermore, PIN diodes are loaded between the main radiator and stubs to activate the stubs on demand, which consequently generates various operational modes. The last stage of the design is optimization, which helps in achieving the desired bandwidths. The optimized antenna works in the wideband mode covering the C-band, Wi-Fi 6E, and the ISM band. Meanwhile, the multiband modes offer the additional coverage of the LTE, LTE 4G, ISM lower band, and GSM band. The various performance parameters are studied and compared with measured results to show the performance stability of the proposed reconfigurable antenna. In addition, an in-depth literature review along with comparison with proposed antenna is performed to show its potential for targeted applications. The utilization of FR4 as a substrate of the antenna along with its compact size of 15 mm × 20 mm while having multiband and multi-mode frequency reconfigurability makes it a strong candidate for present as well as for future smart devices and electronics.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12195069/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506416","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Integrated Electrochemical and Computational Elucidation of Nitro Blue Tetrazolium Chloride as an Efficient Leveler for Copper Microvia Superfilling. 硝基蓝氯化四氮唑作为微孔补铜高效匀平剂的综合电化学和计算解析。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-19 DOI: 10.3390/mi16060721

Dong Xing, Xiangfu Wei, Jinge Ye, Mingsong Lin, Shengchang Tang, Hui You

{"title":"Integrated Electrochemical and Computational Elucidation of Nitro Blue Tetrazolium Chloride as an Efficient Leveler for Copper Microvia Superfilling.","authors":"Dong Xing, Xiangfu Wei, Jinge Ye, Mingsong Lin, Shengchang Tang, Hui You","doi":"10.3390/mi16060721","DOIUrl":"10.3390/mi16060721","url":null,"abstract":"Levelers are indispensable additives for achieving void-free, bottom-up superconformal copper filling of microvias. Establishing the molecular-level correlation between leveler structure and performance is therefore essential to the continued advancement of microelectronic copper-plating technology. Herein, nitro blue tetrazolium chloride (NBT) is identified as an efficient leveler for copper microvia superfilling. A multiscale strategy-combining electrochemical measurements, X-ray photoelectron spectroscopy (XPS), density functional theory (DFT) calculations, and molecular dynamics (MD) simulations-is employed to elucidate the action mechanism of NBT and pinpoint its electroactive sites. Electrochemical tests show that NBT markedly suppresses copper deposition and, together with polyethylene glycol (PEG), effectively resists competitive adsorption by bis-(3-sulfopropyl) disulfide (SPS), thereby enhancing the microvia superfilling performance of the PEG-SPS-NBT additive system. DFT results reveal that the nitro groups and tetrazolium rings constitute the primary adsorption centers on the copper surface; the nitro groups additionally strengthen intermolecular interactions between NBT and PEG. MD simulations further confirm that NBT anchors onto the Cu(111) surface predominantly through these NO2 groups and the tetrazolium ring, while co-adsorbed PEG enhances the overall adsorption strength of NBT. The electroplating experiment demonstrates that NBT can act as an effective leveler for microvia superfilling. Moreover, XPS analyses further confirm the synergistic co-adsorption of NBT and PEG and verify that the NO2 groups and tetrazolium rings are the dominant adsorption sites of NBT. Collectively, the electroplating, XPS, electrochemical, DFT, and MD findings clarify the structure-activity relationship of NBT and provide rational guidelines for designing next-generation copper-plating levelers.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12195018/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506476","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Experimental Study of a Broadband Vibration Energy Harvester Based on Orthogonal Magnetically Coupled Double Cantilever Beam. 基于正交磁耦合双悬臂梁的宽带振动能量采集器实验研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-19 DOI: 10.3390/mi16060722

Yanhao Feng, Jianhua Wang, Xiangye Chen, Peng Liu

{"title":"Experimental Study of a Broadband Vibration Energy Harvester Based on Orthogonal Magnetically Coupled Double Cantilever Beam.","authors":"Yanhao Feng, Jianhua Wang, Xiangye Chen, Peng Liu","doi":"10.3390/mi16060722","DOIUrl":"10.3390/mi16060722","url":null,"abstract":"Purpose: The aim of this study is to achieve automated energy capture and charging for the ADXL355 accelerometer, enhance the vibration energy collection efficiency, and widen the energy trapping frequency band of a system in a working environment for bridge health state detection. Methods: A vibration energy harvester based on a magnetic coupling cantilever beam in an orthogonal direction was proposed. The harvester works by adjusting the angle and magnetic spacing between the two cantilever-beam piezoelectric oscillators, enabling the oscillators to produce large-scale and stable vibrations when excited by an external broadband vibration source. Results: Sinusoidal frequency sweep experiments showed that, under an excitation amplitude of 0.2 g, the proposed broadband vibration energy harvester based on orthogonal magnetic coupling double cantilever beams achieved the best energy harvesting performance when the magnetic angle of the double cantilever beam system was 130°, and the radius was 16 mm. In the frequency range of 5-20 Hz, the system can effectively capture higher effective voltages across all frequency bands, with a total captured voltage value of approximately 15.3 V. Compared with the control group, the system's energy harvesting capacity under this working condition increases by 770%. Additionally, the effective frequency band of the system was broadened by 3.7 Hz. Conclusions: Unlike previous studies, which often limited the angles of the magnetic fields generated by the magnets at the ends of piezoelectric beams to specific values, this study explores the influence of rotating these magnetic fields to general angles on the working frequency band of the structure. The findings provide a new perspective and theoretical basis for the optimal design of broadband vibration energy harvesters.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12194980/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506454","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Influence of Nonlinear Effects Induced by Mode Coupling on Vibration Trajectories of MEMS Micromirrors. 模耦合非线性效应对MEMS微镜振动轨迹的影响。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-19 DOI: 10.3390/mi16060723

Zhen Chen, Dayong Qiao, Anjie Peng

引用次数: 0

A X-Band Integrated Passive Device Structure Based on TMV-Embedded FOWLP. 基于tmv嵌入式FOWLP的x波段集成无源器件结构。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-17 DOI: 10.3390/mi16060719

Jiajie Yang, Lixin Xu, Xiangyu Yin, Ke Yang

{"title":"A X-Band Integrated Passive Device Structure Based on TMV-Embedded FOWLP.","authors":"Jiajie Yang, Lixin Xu, Xiangyu Yin, Ke Yang","doi":"10.3390/mi16060719","DOIUrl":"10.3390/mi16060719","url":null,"abstract":"In this paper, the fabrication and testing of an integrated passive device (IPD) structure for X-band FMCW radar based on the fan-out wafer-level packaging (FOWLP) process are discussed. First, a transition line structure is added to the IPD structure to increase the upper impedance limit of the substrate, so as to reduce the process implementation difficulty and development cost. Second, the vertical soldered SubMiniature Push-On Micro (SMPM) interfaces testing method is proposed, reducing the testing difficulty of the dual-port structure with the antenna. Finally, the process fabrication as well as testing of the IPD structure are completed. The dimensions of the fabricated structure are 16.983 × 24.099 × 0.56 mm3. Test results show that, with a center frequency of 8.5 GHz, the actual operational bandwidth of the structure reaches 7.66% (8.095-8.74 GHz), with a maximum isolation of 33.9 dB. The bandwidth with isolation greater than 20 dB is 1.76% (8.455-8.605 GHz). The maximum gain at the center frequency is 2.02 dBi. Additionally, experimental uncertainty analysis is performed on different IPD structures, and the measurement results are basically consistent. These results validate the feasibility of the FOWLP process in the miniaturization of X-band FMCW radar antenna and other passive devices.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12194809/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Designed Omnidirectional Antenna of Quarter-Mode Substrate-Integrated Waveguide Element with Characteristic Mode Analysis. 基于特征模分析的四分之一模基板集成波导元件全向天线设计。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-17 DOI: 10.3390/mi16060717

Wei Hu, Liangfu Peng, Tao Tang, Maged A Aldhaeebi, Thamer S Almoneef, Jaouhar Mouine

引用次数: 0

Radomizing an Antenna for a SAR-Based ETA Radar System While Ensuring Imaging Accuracy: A Focus on Phase Shifts. 基于sar的ETA雷达系统在保证成像精度的同时对天线进行雷达化：对相移的关注。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-17 DOI: 10.3390/mi16060720

María Elena de Cos Gómez, Alicia Flórez Berdasco, Jaime Laviada Martínez, Fernando Las-Heras Andrés

引用次数: 0

Impact of Reset Pulse Width on Gradual Conductance Programming in Al₂O₃/TiO_x-Based RRAM. 重置脉冲宽度对Al2O3/ tiox基RRAM电导渐变编程的影响

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-17 DOI: 10.3390/mi16060718

Hyeonseong Lim, Wonbo Shim, Tae-Hyeon Kim

{"title":"Impact of Reset Pulse Width on Gradual Conductance Programming in Al2O3/TiOx-Based RRAM.","authors":"Hyeonseong Lim, Wonbo Shim, Tae-Hyeon Kim","doi":"10.3390/mi16060718","DOIUrl":"10.3390/mi16060718","url":null,"abstract":"This work investigates the impact of reset pulse width on multilevel conductance programming in Al2O3/TiOx-based resistive random access memory. A 32 × 32 cross-point array of Ti (12 nm)/Pt (62 nm)/Al2O3 (3 nm)/TiOx (32 nm)/Ti (14 nm)/Pt (60 nm) devices (2.5 µm × 2.5 µm active area) was fabricated via e-beam evaporation, atomic layer deposition, and reactive sputtering. Following an initial forming step and a stabilization phase of five DC reset-set cycles, devices were programmed using an incremental step pulse programming (ISPP) scheme. Reset pulses of fixed amplitude were applied with widths of 100 µs, 10 µs, 1 µs, and 100 ns, and the programming sequence was terminated when the read current at 0.2 V exceeded a 45 µA target. At a 100 µs reset pulse width, most cycles exhibited abrupt current jumps that exceeded the target current, whereas at a 100 ns width, the programmed current increased gradually in all cycles, enabling precise conductance tuning. Cycle-to-cycle variation decreased by more than 50% as the reset pulse width was reduced, indicating more uniform filament disruption and regrowth. These findings demonstrate that controlling reset pulse width offers a straightforward route to reliable, linear multilevel operation in Al2O3/TiOx-based RRAM.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12195168/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Miniaturized Dual and Quad Port MIMO Antenna Variants Featuring Elevated Diversity Performance for UWB and 5G-Midband Applications. 小型化的双端口和四端口MIMO天线变体，具有提高UWB和5g中频应用的分集性能。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-17 DOI: 10.3390/mi16060716

Karthikeyan Ramanathan, Srivatsun Gopalakrishnan, Thrisha Chandrakanthan

{"title":"Miniaturized Dual and Quad Port MIMO Antenna Variants Featuring Elevated Diversity Performance for UWB and 5G-Midband Applications.","authors":"Karthikeyan Ramanathan, Srivatsun Gopalakrishnan, Thrisha Chandrakanthan","doi":"10.3390/mi16060716","DOIUrl":"10.3390/mi16060716","url":null,"abstract":"The growing demand for high-speed and high-capacity wireless communication has intensified the need for compact, wideband, and efficient MIMO antenna systems, particularly for 5G mid-band and UWB applications. This article presents a miniaturized dual and quad port MIMO antenna design optimized for 5G mid-band (n77/n78/n79/n96/n102) and Ultra-Wideband (UWB) applications without employing any decoupling structures between the radiating elements. The 2-port configuration features two closely spaced symmetric monopole elements (spacing < λmax/2), promoting efficient use of space without degrading performance. An FR4 substrate (εr = 4.4) is used for fabrication with a compact size of 30 × 41 × 1.6 mm3. This layout is extended orthogonally and symmetrically to form a compact quad-port variant with dimensions of 60 × 41 × 1.6 mm3. Both designs offer a broad operational bandwidth from 2.6 GHz to 10.8 GHz (8.2 GHz), retaining return loss (SXX) below -10 dB and strong isolation (SXY < -20 dB at high frequencies, <-15 dB at low frequencies). The proposed MIMO antennas demonstrate strong performance and excellent diversity characteristics. The two-port antenna achieves an average envelope correlation coefficient (ECC) of 0.00204, diversity gain (DG) of 9.98 dB, and a mean effective gain difference (MEGij) of 0.3 dB, with a total active reflection coefficient (TARC) below -10 dB and signal delay variation under 0.25 ns, ensuring minimal pulse distortion. Similarly, the four-port design reports an average ECC of 0.01432, DG of 9.65 dB, MEGij difference below 0.3 dB, and TARC below -10 dB, confirming robust diversity and MIMO performance across both configurations.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12194843/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Optical Film with Microstructures to Regulate Viewing Angle of HUDs. 调节hud视角的微结构光学薄膜。

IF 3 3区工程技术

Micromachines Pub Date : 2025-06-16 DOI: 10.3390/mi16060714

Qibin Feng, Xiangjun Li, Chunhui Chen, Guoqiang Lv, Zi Wang

{"title":"Optical Film with Microstructures to Regulate Viewing Angle of HUDs.","authors":"Qibin Feng, Xiangjun Li, Chunhui Chen, Guoqiang Lv, Zi Wang","doi":"10.3390/mi16060714","DOIUrl":"10.3390/mi16060714","url":null,"abstract":"Head-up displays (HUDs) can effectively enhance driving safety by projecting information-such as speed and maps-onto the windshield, thereby reducing blind spots caused by drivers looking down. As drivers need to observe road conditions within a wider horizontal viewing field, and considering that the observed angle in a vertical direction is relatively small, it becomes reasonable for an HUD to present a larger horizontal viewing angle than vertical viewing angle. This paper proposes a method to independently regulate the horizontal and vertical viewing angles. The original microstructure morphology is modeled as an ellipsoid, and the curvatures of the ellipsoid's major and minor axes are calculated according to the required viewing angles. The simulation results show that the horizontal viewing angle corresponding to 85% of the maximum luminance increases from 2° without the film to 20° with the film, while the vertical viewing angle increases from 2° to 8°. The optical film with the designed microstructures is prepared and measured. The practical measurement results indicate that the tested horizontal and vertical viewing angles exhibit significant differentiation. At 85% of the maximum luminance, the horizontal viewing angle increases from 2° without the film to 23° with the film, while the vertical viewing angle increases from 2° to 10°. These results meet the requirements for independently regulating horizontal and vertical viewing angles and widening the horizontal viewing angle.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 6","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12195440/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144506495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0