Micromachines最新文献

Interposer-Based ESD Protection: A Potential Solution for μ-Packaging Reliability of 3D Chips. 基于中间层的ESD保护：三维芯片封装可靠性的潜在解决方案。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-21 DOI: 10.3390/mi16040488

Xunyu Li, Zijin Pan, Weiquan Hao, Runyu Miao, Zijian Yue, Albert Wang

引用次数: 0

Design and Driving Characteristics of a Bidirectional Micro-Device Based on Multi-Electrothermal Co-Actuation. 基于多电热协同驱动的双向微器件设计与驱动特性研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-21 DOI: 10.3390/mi16040487

Yujuan Tang, Zihao Guo, Yujiao Ding, Xinjie Wang

{"title":"Design and Driving Characteristics of a Bidirectional Micro-Device Based on Multi-Electrothermal Co-Actuation.","authors":"Yujuan Tang, Zihao Guo, Yujiao Ding, Xinjie Wang","doi":"10.3390/mi16040487","DOIUrl":"https://doi.org/10.3390/mi16040487","url":null,"abstract":"In this paper, a bidirectional micro-device based on multi-electrothermal co-actuation is proposed for a fuze safety system, combining the advantages of the simple structure, small size, low input voltage, large output, and absence of electromagnetic interference in electrothermal actuators. Based on the working principle of the multi-electrothermal co-actuation device and the mathematical model of the single V-shaped electrothermal actuator established in this paper, the temperature distribution of the V-shaped electrothermal actuator is simulated. In addition, the dynamic response and the effect of geometric factors on the output performance of the multi-electrothermal co-actuation device are analyzed in detail. Furthermore, driving characteristics tests of the electrothermal micro-device are carried out. The experimental findings indicate that a displacement of approximately 258.95 μm with a response time of about 156.51 ms can be achieved by the V-shaped electrothermal actuator when the applied voltage is 1.2 V. In a single cycle, a total displacement of 340 μm is obtained by the co-actuation device in around 1.28 s.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12029375/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144032291","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Single-Field Finite Difference Time-Domain Method Verified Using a Novel Antenna Design with an Artificial Magnetic Conductor Enhanced Structure. 一种新型人工磁导体增强天线设计验证了单场时域有限差分方法。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-21 DOI: 10.3390/mi16040489

Yongjun Qi, Weibo Liang, Yilan Hu, Liang Zhang, Cheng You, Yuxiang Zhang, Tianrun Yan, Hongxing Zheng

{"title":"A Single-Field Finite Difference Time-Domain Method Verified Using a Novel Antenna Design with an Artificial Magnetic Conductor Enhanced Structure.","authors":"Yongjun Qi, Weibo Liang, Yilan Hu, Liang Zhang, Cheng You, Yuxiang Zhang, Tianrun Yan, Hongxing Zheng","doi":"10.3390/mi16040489","DOIUrl":"https://doi.org/10.3390/mi16040489","url":null,"abstract":"The Finite Difference Time-Domain (FDTD) method is a powerful tool for electromagnetic field analysis. In this work, we develop a variation of the algorithm to accurately calculate antenna, microwave circuit, and target scattering problems. To improve efficiency, a single-field (SF) FDTD method is proposed as a numerical solution to the time-domain Helmholtz equations. New formulas incorporating resistors and voltage sources are derived for the SF-FDTD algorithm, including hybrid implicit-explicit and weakly conditionally stable SF-FDTD methods. The correctness of these formulas is verified through numerical simulations of a newly designed dual-band wearable antenna with an artificial magnetic conductor (AMC) structure. A novel antenna fed by a coplanar waveguide with a compact size of 15.6 × 20 mm2 has been obtained after being optimized through an artificial intelligent method. A double-layer, dual-frequency AMC structure is designed to improve the isolation between the antenna and the human body. The simulation and experiment results with different bending degrees show that the antenna with the AMC structure can cover two frequency bands, 2.4 GHz-2.48 GHz and 5.725 GHz-5.875 GHz. The gain at 2.45 GHz and 5.8 GHz reaches 5.3 dBi and 8.9 dBi, respectively. The specific absorption rate has been reduced to the international standard range. In particular, this proposed SF-FDTD method can be extended to analyze other electromagnetic problems with fine details in one or two directions.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12029290/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144027861","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A 3D DC Electric Field Meter Based on Sensor Chips Packaged Using a Highly Sensitive Scheme. 一种基于高灵敏封装传感器芯片的三维直流电场计。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-20 DOI: 10.3390/mi16040484

Pengfei Yang, Xiaolong Wen, Xiaonan Li, Zhaozhi Chu, Chunrong Peng, Shuang Wu

{"title":"A 3D DC Electric Field Meter Based on Sensor Chips Packaged Using a Highly Sensitive Scheme.","authors":"Pengfei Yang, Xiaolong Wen, Xiaonan Li, Zhaozhi Chu, Chunrong Peng, Shuang Wu","doi":"10.3390/mi16040484","DOIUrl":"https://doi.org/10.3390/mi16040484","url":null,"abstract":"This study presents a 3D DC electric field meter (EFM) that uses three identical 1D MEMS chips. The shielding electrodes and sensing electrodes of the MEMS chips employ a combination of rigid frames and short strip-type beams to improve vibrational stability. To enhance sensitivity, our MEMS chips feature inner convex packaging covers. Moreover, the integrated design and wireless transmission efficiently eradicate the impact of ground potential on detection results. Detailed simulations have been conducted to analyze the electric field distribution within the chip package and the electric field distribution on the EFM's surface. A prototype was then developed, calibrated, and validated. The test results indicate that the sensitivity of our proposed 3D EFM is at least 4.64 times higher than the highest sensitivity observed in previously reported MEMS 3D EFMs. The maximum relative deviation is a mere 2.2% for any rotation attitude. Remarkably, even in high humidity conditions, the EFM's linearity remains within 1%. Additionally, the resolution of any single axis is less than 10 V/m.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12029672/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144017670","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Mechano-Filtering Encapsulation: A Stitching-Based Packaging Strategy Implementing Active Noise Suppression in Piezoresistive Pressure Sensors. 机械滤波封装：一种在压阻式压力传感器中实现主动噪声抑制的基于缝合的封装策略。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-20 DOI: 10.3390/mi16040486

Yi Yu, Yingying Zhao, Tao Xue, Xinyi Wang, Qiang Zou

{"title":"Mechano-Filtering Encapsulation: A Stitching-Based Packaging Strategy Implementing Active Noise Suppression in Piezoresistive Pressure Sensors.","authors":"Yi Yu, Yingying Zhao, Tao Xue, Xinyi Wang, Qiang Zou","doi":"10.3390/mi16040486","DOIUrl":"https://doi.org/10.3390/mi16040486","url":null,"abstract":"Flexible pressure sensors face the dual challenges of weak signal extraction and environmental noise suppression in wearable electronics and human-machine interfaces. This research proposes an intelligent pressure sensor utilizing chitosan/carbon nanotube/melamine sponge (CS/CNT/MS) composites, achieving high-performance sensing through a dual-stage noise reduction architecture that combines mechanical pre-filtration and electrical synergistic regulation. An innovative compressed-stitching encapsulation technique creates pressure sensors with equivalent mechanical low-pass filtering characteristics, actively eliminating interference signals below 3 kPa while maintaining linear response within the 3-20 kPa effective loading range (sensitivity: 0.053 kPa-1). The synergistic effects of CS molecular cross-linking and CNTs' three-dimensional conductive network endow the device with a 72 ms response time, 24 ms recovery speed, and over 3500-cycle compression stability. Successful applications in smart sport monitoring and tactile interactive interfaces demonstrate a material-structure-circuit co-design paradigm for mechanical perception in complex environments.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12029852/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144018514","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Posture Detection of Dual-Hemisphere Capsule Robot Based on Magnetic Tracking Effects and ORB-AEKF Algorithm. 基于磁跟踪效应和ORB-AEKF算法的双半球胶囊机器人姿态检测。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-20 DOI: 10.3390/mi16040485

Xu Liu, Yongshun Zhang, Qiancheng Wang

引用次数: 0

A Slanted-Finger Interdigitated Transducer Microfluidic Device for Particles Sorting. 一种用于颗粒分选的斜指交叉换能器微流控装置。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-20 DOI: 10.3390/mi16040483

Baoguo Liu, Xiang Ren, Tao Xue, Qiang Zou

{"title":"A Slanted-Finger Interdigitated Transducer Microfluidic Device for Particles Sorting.","authors":"Baoguo Liu, Xiang Ren, Tao Xue, Qiang Zou","doi":"10.3390/mi16040483","DOIUrl":"https://doi.org/10.3390/mi16040483","url":null,"abstract":"Sorting particles or cells of specific sizes in complex systems has long been a focus of many researchers. Acoustic surface waves, which generate acoustic radiation forces on particles or cells and, thus, influence their motion, are commonly used for the non-destructive separation of particles or cells of specific sizes. In previous studies, the frequency of acoustic surface wave generation has been limited by the interdigitated transducer (IDT). To extend the effective operating frequency range of the IDT, a slanted-finger interdigitated transducer (SFIT) with a wide acoustic path and multiple operating frequencies was designed. Compared with traditional acoustic sorting devices, which suffer from a limited frequency range and narrow acoustic paths, this new design greatly expands both the operating frequency range and acoustic path width, and enables adjustable operating frequencies, providing a solution for sorting particles or cells with uneven sizes in complex environments. The optimal resonance frequency is distributed within the 32-42 MHz range, and the operating frequencies within this range can generate a standing wave acoustic path of approximately 200 μm, thus enhancing the effectiveness of the operating frequencies. The microfluidic sorting device based on SFIT can efficiently and accurately sort polystyrene (PS) with particle sizes of 20 μm, 30 μm, and 50 μm from mixed PS microspheres (5, 10, 20 μm), (5, 10, 30 μm), and (5, 10, 50 μm), with a sorting efficiency and purity exceeding 96%. Additionally, the device is capable of sorting other types of mixed microspheres (5, 10, 20, 30, 50 μm). This new wide-acoustic-path, multi-frequency sorting device demonstrates the ability to sort particlesin a high-purity, label-free manner, offering a more alternative to traditional sorting methods.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12029442/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144004988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

MEMS Varifocal Optical Elements for Focus Control. 用于聚焦控制的MEMS变焦光学元件。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-19 DOI: 10.3390/mi16040482

Chen Liu, Tong Wang, Xin Wang, Manpeng Chang, Yu Jian, Weimin Wang

引用次数: 0

Influence of Oil Viscosity on Hysteresis Effect in Electrowetting Displays Based on Simulation. 基于仿真的油粘度对电润湿显示器滞回效应的影响。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-18 DOI: 10.3390/mi16040479

Wei Li, Linwei Liu, Taiyuan Zhang, Lixia Tian, Li Wang, Cheng Xu, Jianwen Lu, Zichuan Yi, Guofu Zhou

{"title":"Influence of Oil Viscosity on Hysteresis Effect in Electrowetting Displays Based on Simulation.","authors":"Wei Li, Linwei Liu, Taiyuan Zhang, Lixia Tian, Li Wang, Cheng Xu, Jianwen Lu, Zichuan Yi, Guofu Zhou","doi":"10.3390/mi16040479","DOIUrl":"https://doi.org/10.3390/mi16040479","url":null,"abstract":"As the most promising new reflective display technology, electrowetting displays (EWDs) have the advantages of a simple structure, fast response, high contrast, and rich colors. However, due to the hysteresis effect, the grayscales of EWDs cannot be accurately controlled, which seriously restricts the industrialization process of this technology. In this paper, the oil movement process in an EWD pixel cell was simulated, and the influence of oil viscosity on the hysteresis effect was studied based on the proposed simulation model. Firstly, the cause of the hysteresis effect was analyzed through the hysteresis curve of an EWD. Then, based on the COMSOL Multiphysics simulation environment, the oil movement process in an EWD pixel cell was simulated by coupling the phase field of laminar two-phase flow and electrostatic field. Finally, based on the simulation model, the influence of oil viscosity on the hysteresis effect in an EWD pixel cell was studied. We observed that the maximum hysteresis difference in the hysteresis effect increased with the increase in oil viscosity and decreased with the decrease in oil viscosity. The oil viscosity had little effect on the maximum aperture ratio of EWD. The pixel-on response time and pixel-off response time increased with the increase in oil viscosity.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12029425/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144002294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Kinetostatic Modeling and Workspace Analysis of Redundant Actuated n-4R Compliant Parallel Pointing Mechanism. 冗余驱动n-4R柔性并联指向机构的运动学建模与工作空间分析。

IF 3 3区工程技术

Micromachines Pub Date : 2025-04-18 DOI: 10.3390/mi16040478

Jun Ren, Yikang Shu, Youwei Lin

{"title":"Kinetostatic Modeling and Workspace Analysis of Redundant Actuated n-4R Compliant Parallel Pointing Mechanism.","authors":"Jun Ren, Yikang Shu, Youwei Lin","doi":"10.3390/mi16040478","DOIUrl":"https://doi.org/10.3390/mi16040478","url":null,"abstract":"The workspace of the compliant parallel mechanism (CPM) is generally limited due to the small deformation range of flexible hinges, which are usually at the micro/nano scale. This paper takes the 2-DOFs n-4R compliant parallel pointing mechanism (n-4R CPPM) as the object and optimizes the workspace performance of the mechanism through redundant actuation, aiming to maximize the workspace. First, the kinetostatic model and the flexible hinge displacement model of the redundant actuated n-4R CPPM are established, successively. The former model reveals the relationships between the output displacements and the input forces/displacements, while the latter relates the flexible hinge deformation and the input forces/displacements. Second, a space pointing trajectory is chosen to validate the accuracy of the kinetostatic model of the redundant actuated 3-4R CPPM through finite element (FE) simulation. The results show that the relative error between the analytical and the FE results does not exceed 2.1%, and the high consistency indicates the accuracy of the kinetostatic model. Finally, the workspace performance of the 3-4R and 4-4R CPPMs is successively optimized through redundant actuation. The results indicate that, compared with the non-redundant actuation case, the workspace can be effectively enlarged and become more symmetric by means of the redundant actuation. The maximum achievable pitch angle ψa and the y-direction motion range of the mobile platform both increase by 100%. Moreover, it is shown that the workspace in the non-redundant actuated case is a subset of the workspace in the redundant actuated case, and the position-workspace shape changes from planar to 3-D.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-04-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12029636/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144018510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0