Micromachines最新文献

Non-Invasive Three-Dimensional Cell Manipulation Technology Based on Acoustic Microfluidic Chips. 基于声学微流控芯片的无创三维细胞操作技术。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-22 DOI: 10.3390/mi16091068

Lin Lin, Yiming Zhen, Wang Li, Guoqiang Dong, Rongxing Zhu, Minhui Liang

{"title":"Non-Invasive Three-Dimensional Cell Manipulation Technology Based on Acoustic Microfluidic Chips.","authors":"Lin Lin, Yiming Zhen, Wang Li, Guoqiang Dong, Rongxing Zhu, Minhui Liang","doi":"10.3390/mi16091068","DOIUrl":"10.3390/mi16091068","url":null,"abstract":"This study presents a non-invasive three-dimensional cell manipulation technique based on acoustic microfluidic chips, which generates acoustic flow fields through the vibration of micropillars induced by bulk acoustic waves to achieve precise multi-dimensional rotational manipulation of cells. Moreover, the characteristics of the acoustic flow field under linear, quasi-circular, elliptical, and higher-order vibration modes were intensively studied, and the rotational manipulation performance of polystyrene microbeads and cancer cells was optimized by adjusting the frequency and voltage. The results showed that the rotational speed and direction of the particles varied significantly in different vibration modes, with the particles and cells achieving the highest rotational speed in the elliptical vibration mode (frequency: 44.9 kHz, and voltage: 60 Vpp). In addition, the technique successfully achieved in-plane and out-of-plane rotation of cancer cells, and cell viability tests showed that 94% of the cells remained active after manipulation, demonstrating the low damage and biocompatibility of the method. This study provides a new, efficient, precise and gentle approach to three-dimensional manipulation of cells, which holds significant potential in biomedical research and clinical applications.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471655/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and Research of Superimposed Force Sensor. 叠加式力传感器的设计与研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-22 DOI: 10.3390/mi16091069

Genshang Wu, Jinggan Shao, Yicun Xu, Zhanshu He, Shifei Liu

{"title":"Design and Research of Superimposed Force Sensor.","authors":"Genshang Wu, Jinggan Shao, Yicun Xu, Zhanshu He, Shifei Liu","doi":"10.3390/mi16091069","DOIUrl":"10.3390/mi16091069","url":null,"abstract":"The measurement accuracy and equipment stability of superposition-type force sensors are primarily influenced by the layout and number of individual force sensors. Analyzing this impact effect through experimental testing for each configuration would consume significant manpower, material resources, and financial costs. To efficiently analyze the influence of the number of paralleled individual sensors and their layout within a superposition-type force measurement instrument on overall device stability and force measurement accuracy, this paper employs SolidWorks to establish models of force instruments based on common superposition schemes. Subsequently, ANSYS is utilized to perform finite element analysis on models of different schemes, obtaining corresponding data on total deformation, stress, and simulated force values. The analysis results indicate that a relatively sparse sensor layout with symmetric arrangement around the center point of the base plate enhances overall stability, and the force measurement error can be controlled within several ten-thousandths. Furthermore, the more stable and higher-accuracy schemes identified through simulation analysis were compared with practical experimental results to analyze theoretical versus actual errors. The test results showed that when the three single force sensors are placed in a \"Pin font\" shape, the sum of the forces measured by each individual sensor differs from the sum of the forces measured by the superimposed sensors by only a few ten-thousandths, which is within the acceptable range.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471882/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Safety Monitoring Method for Pipeline Crossing the Mining Area Based on Vibration-Strain Fusion Analysis. 基于振动-应变融合分析的跨矿区管道安全监测方法。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-22 DOI: 10.3390/mi16091074

Jianping He, Tongchun Qin, Zhe Zhang, Ronggui Liu, Yuping Bao

{"title":"Safety Monitoring Method for Pipeline Crossing the Mining Area Based on Vibration-Strain Fusion Analysis.","authors":"Jianping He, Tongchun Qin, Zhe Zhang, Ronggui Liu, Yuping Bao","doi":"10.3390/mi16091074","DOIUrl":"10.3390/mi16091074","url":null,"abstract":"The overlying rock layers in a mining area may collapse or settle, subjecting pipelines to uneven forces that can lead to deformation or even fracture. This paper proposes a pipeline safety monitoring method that combines fiberoptic vibration and strain sensing to detect vibrations and deformations caused by rock layer collapse in mining zones. First, pipeline deformation monitoring under unknown force directions was investigated using fiber Bragg grating (FBG) sensing technology. Second, we constructed a mining area pipeline model and conducted vibration/deformation monitoring tests employing FBG sensors, distributed Brillouin strain sensing, and distributed fiberoptic vibration sensing technologies. The experimental results demonstrate that FBG sensor arrays deployed at 90-degree intervals can effectively identify the pipeline's primary force direction and maximum strain, with direction angle errors of less than 5.2%. The integrated analysis of vibration and strain data enables accurate identification and measurement of extended vibration responses and pipeline deformations in open-air zones. This study establishes a comprehensive monitoring framework for ensuring pipeline safety in mining areas.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472133/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression. 用于串扰抑制的压电快轴和电磁慢轴混合驱动MEMS微镜。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-22 DOI: 10.3390/mi16091072

Haoxiang Li, Jiapeng Hou, Zheng Gong, Huijun Yu, Yue Liu, Wenjiang Shen

{"title":"Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression.","authors":"Haoxiang Li, Jiapeng Hou, Zheng Gong, Huijun Yu, Yue Liu, Wenjiang Shen","doi":"10.3390/mi16091072","DOIUrl":"10.3390/mi16091072","url":null,"abstract":"Electromagnetic micro-electro-mechanical system (MEMS) micromirrors are widely used in optical scanning systems but often encounter mechanical crosstalk due to the use of shared drive coils. This phenomenon leads to parasitic motion along the slow axis during fast-axis operation, resulting in undesirable elliptical scanning patterns that degrade image quality. To tackle this issue, a hybrid actuation scheme is proposed in which a piezoelectric actuator drives the fast axis through an S-shaped spring structure, achieving a resonance frequency of 792 Hz, while the slow axis is independently driven by an electromagnetic actuator operating in quasi-static mode. Finite element simulations and experimental measurements validate that the proposed decoupled design significantly suppresses mechanical crosstalk. When the fast axis is driven to a 40° optical scan angle, the hybrid system reduces the parasitic slow-axis deflection (typically around 1.43°) to a negligible level, thereby producing a clean single-line scan. The piezoelectric fast axis exhibits a quality factor of Q = 110, while the electromagnetic slow axis achieves a linear 20° deflection at 20 Hz. This hybrid design facilitates a distortion-free field of view measuring 40° × 20° with uniform line spacing, presenting a straightforward and effective solution for high-precision scanning applications such as LiDAR (Light Detection and Ranging) and structured light projection.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471941/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176435","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces. 混合电感耦合等离子体和计算机控制光学表面抛光快速制造无损伤超光滑表面。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-22 DOI: 10.3390/mi16091073

Wei Li, Peiqi Jiao, Dawei Luo, Qiang Xin, Bin Fan, Xiang Wu, Bo Gao, Qiang Chen

{"title":"Hybrid Inductively Coupled Plasma and Computer-Controlled Optical Surfacing Polishing for Rapid Fabrication of Damage-Free Ultra-Smooth Surfaces.","authors":"Wei Li, Peiqi Jiao, Dawei Luo, Qiang Xin, Bin Fan, Xiang Wu, Bo Gao, Qiang Chen","doi":"10.3390/mi16091073","DOIUrl":"10.3390/mi16091073","url":null,"abstract":"The polymer deposition layer (PDL) formed during inductively coupled plasma (ICP) processing significantly limits the figuring accuracy and surface quality of fused silica optics. This study investigates the formation mechanism, composition, and evolution of the PDL under varying dwell times and proposes an innovative dwell time gradient strategy to suppress roughness deterioration. A significant disparity in hardness and elastic modulus between the deposition layer and the substrate is revealed, explaining its preferential removal and protective buffering effect in computer-controlled optical surfacing (CCOS). A hybrid ICP-CCOS polishing process was developed for processing a ϕ100 mm fused silica mirror. The results show that within 33 min, the surface graphic error RMS was significantly reduced from 58.006 nm to 12.111 nm, and within 90 min, the surface roughness was ultra-precisely reduced from Ra 1.719 nm to Ra 0.151 nm. The average processing efficiency was approximately 0.63 cm2/min. Critically, a damage-free, ultra-smooth surface without subsurface damage (SSD) was successfully achieved. This hybrid process enables the simultaneous optimization of figure accuracy and roughness, eliminating the need for iterative figuring cycles. It provides a novel theoretical framework for high-precision figuring and post-ICP polymer removal, advancing the efficient fabrication of high-performance optics.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471840/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176450","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Investigation of Scribing Parameters' Influence on the Tomography and Crack Initiation of OLED Display Panels for Circular Structures. 刻划参数对圆形结构OLED显示板层析成像和裂纹萌生影响的研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-22 DOI: 10.3390/mi16091071

Huaye Kong, Xijing Zhu, Guohong Li, Yao Liu

{"title":"Investigation of Scribing Parameters' Influence on the Tomography and Crack Initiation of OLED Display Panels for Circular Structures.","authors":"Huaye Kong, Xijing Zhu, Guohong Li, Yao Liu","doi":"10.3390/mi16091071","DOIUrl":"10.3390/mi16091071","url":null,"abstract":"This paper focuses on the scoring-wheel cutting process for circular structures of OLED display panels, conducting in-depth research through an experiment-analysis-optimization system. Based on the Taguchi experimental design, a three-factor, five-level experiment is conducted, with the blade wheel angle (A), cutting speed (B), and pressure (C) set as influencing factors, and the scratch depth (h), width (w), median crack depth (l), and transverse crack width (d) set as evaluation indicators. The experiments are carried out using a self-developed dicing-wheel cutting device, and the morphology, roughness, and hardness of the cutting surface and cross-section are characterized by means of ultra-depth-of-field microscopy, laser confocal microscopy, microhardness tester, and other equipment. The research shows that the order of factors affecting the cutting quality is as follows: A > C > B. Through the analysis of morphology and crack characteristics, it is determined that the optimal parameter combination is a dicing wheel angle of 130°, a cutting speed of 20 mm/s, and a pressure of 11 N. The verification results indicate that this combination can reduce surface roughness, stabilize hardness, and realize efficient and precise processing of special-shaped structures in OLED display panels, providing strong theoretical and technical support for industrial process optimization.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471608/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High Power Density X-Band GaN-on-Si HEMTs with 10.2 W/mm Used by Low Parasitic Gold-Free Ohmic Contact. 用于低寄生无金欧姆接触的10.2 W/mm高功率密度x波段GaN-on-Si hemt。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-22 DOI: 10.3390/mi16091067

Jiale Du, Hao Lu, Bin Hou, Ling Yang, Meng Zhang, Mei Wu, Kaiwen Chen, Tianqi Pan, Yifan Chen, Hailin Liu, Qingyuan Chang, Xiaohua Ma, Yue Hao

{"title":"High Power Density X-Band GaN-on-Si HEMTs with 10.2 W/mm Used by Low Parasitic Gold-Free Ohmic Contact.","authors":"Jiale Du, Hao Lu, Bin Hou, Ling Yang, Meng Zhang, Mei Wu, Kaiwen Chen, Tianqi Pan, Yifan Chen, Hailin Liu, Qingyuan Chang, Xiaohua Ma, Yue Hao","doi":"10.3390/mi16091067","DOIUrl":"10.3390/mi16091067","url":null,"abstract":"To enhance the RF power properties of CMOS-compatible gold-free GaN devices, this work introduces a kind of GaN-on-Si HEMT with a low parasitic regrown ohmic contact technology. Attributed to the highly doped n+ InGaN regrown layer and smooth morphology of gold-free ohmic stacks, the lowest ohmic contact resistance (Rc) was presented as 0.072 Ω·mm. More importantly, low RF loss and low total dislocation density (TDD) of the Si-based GaN epitaxy were achieved by a designed two-step-graded (TSG) transition structure for the use of scaling-down devices in high-frequency applications. Finally, the fabricated GaN HEMTs on the Si substrate presented a maximum drain current (Idrain) of 1206 mA/mm, a peak transconductance (Gm) of 391 mS/mm, and a breakdown voltage (VBR) of 169 V. The outstanding material and DC performances strongly encourage a maximum output power density (Pout) of 10.2 W/mm at 8 GHz and drain voltage (Vdrain) of 50 V in active pulse mode, which, to our best knowledge, updates the highest power level for gold-free GaN devices on Si substrates. The power results reflect the reliable potential of low parasitic regrown ohmic contact technology for future large-scale CMOS-integrated circuits in RF applications.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471317/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176439","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Study on the Transient Process of Contact-Mode Triboelectric Nanogenerators. 接触型摩擦纳米发电机瞬态过程研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-22 DOI: 10.3390/mi16091070

Shengyao Zhang, Hongchun Luo, Ru Zhang, Shun Ye, Haoyu Wei, Zhiqiang Zeng, Futi Liu, Guiyu Zhou

{"title":"A Study on the Transient Process of Contact-Mode Triboelectric Nanogenerators.","authors":"Shengyao Zhang, Hongchun Luo, Ru Zhang, Shun Ye, Haoyu Wei, Zhiqiang Zeng, Futi Liu, Guiyu Zhou","doi":"10.3390/mi16091070","DOIUrl":"10.3390/mi16091070","url":null,"abstract":"In the research of triboelectric nanogenerators (TENGs), most attention has been paid to material modification, structural design, and power management. Little study has been performed on the transient process of TENGs, although the capacitance characteristics of TENGs are well known. In this work, the transient process of contact-mode TENGs was studied by the infinite-plate model and verified by experimental tests. The results showed that TENGs exhibited a much higher output in the transient process than that in the steady state. Within the transient process, the transfer charge gradually grew to a maximum value, while the output current and power decreased. A formula to calculate the duration of the transient process was derived by Fourier expansion. This work also demonstrated an interesting transformation process of the Q-V curve in the transient process. Furthermore, the transient phenomenon was verified clearly in a contact-mode TENG sample fabricated by copper and polytetrafluoroethylene (PTFE) films through experimental tests. These results are useful for performance optimization of TENGs in applications.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472149/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145175848","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

End Surface Grinding Machinability of Zirconia Ceramics via Longitudinal-Torsional Coupled Vibration Rotary Ultrasonic Machining. 纵向-扭转耦合振动旋转超声氧化锆陶瓷端面磨削加工性研究。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-21 DOI: 10.3390/mi16091065

Fan Chen, Wenbo Bie, Kuohu Li, Xiaosan Ma

{"title":"End Surface Grinding Machinability of Zirconia Ceramics via Longitudinal-Torsional Coupled Vibration Rotary Ultrasonic Machining.","authors":"Fan Chen, Wenbo Bie, Kuohu Li, Xiaosan Ma","doi":"10.3390/mi16091065","DOIUrl":"10.3390/mi16091065","url":null,"abstract":"Zirconia (ZrO2) ceramics are advanced structural materials that exhibit exceptional performance in aerospace and other heavy-duty applications. Since conventional machining of ZrO2 ceramics presents significant challenges, this study employs the longitudinal-torsional coupled rotary ultrasonic machining (LTC-RUM) method for end surface grinding of ZrO2 ceramics. To elucidate the material removal mechanism of LTC-RUM, an analysis was conducted from the perspective of individual abrasive grains. Subsequently, LTC-RUM experiments were carried out on ZrO2 ceramic samples to investigate the effects of processing parameters on cutting force, surface roughness, and surface morphology. The results show that cutting force decreases with lower spindle speed and ultrasonic power, but increases with higher feed rate and cutting depth. The surface roughness decreases with increasing spindle speed, yet increases with feed rate. Moreover, the surface roughness initially decreases and then increases with increasing ultrasonic power and cutting depth. Compared to conventional machining methods, LTC-RUM significantly reduces cutting force and surface roughness, thereby improving workpiece surface quality. This study provides valuable insights into the application of LTC-RUM for machining ZrO2 ceramics and other hard and brittle materials.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471684/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176279","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effect of Hafnium-Based Thin Film Thickness on Microstructure and Electrical of Yttrium-Doped Hafnium Oxide Ferroelectric Devices Prepared by Magnetron Sputtering. 铪基薄膜厚度对磁控溅射制备掺钇氧化铪铁电器件的微观结构和电性能的影响。

IF 3 3区工程技术

Micromachines Pub Date : 2025-09-21 DOI: 10.3390/mi16091066

Bei Ma, Ke Ma, Xinhui Qin, Yingxue Xi, Jin Zhang, Xinyu Yang, Pengfei Yang, Weiguo Liu

{"title":"Effect of Hafnium-Based Thin Film Thickness on Microstructure and Electrical of Yttrium-Doped Hafnium Oxide Ferroelectric Devices Prepared by Magnetron Sputtering.","authors":"Bei Ma, Ke Ma, Xinhui Qin, Yingxue Xi, Jin Zhang, Xinyu Yang, Pengfei Yang, Weiguo Liu","doi":"10.3390/mi16091066","DOIUrl":"10.3390/mi16091066","url":null,"abstract":"This study employs reactive magnetron sputtering technology to fabricate TiN/Y-HfO2/TiN multilayer thin film devices using titanium targets and yttrium-doped high-purity hafnium targets. A systematic investigation was conducted to explore the influence of hafnium-based thin film thickness on the structural and electrical properties of TiN/Y-HfO2/TiN thin film devices. Radio frequency magnetron sputtering was utilized to deposit Y-HfO2 films of varying thicknesses on TiN electrodes by controlling deposition time, with a yttrium doping concentration of 8.24 mol.%. The surface morphology and crystal structure of the thin films were characterized using atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction (XRD). Results indicate that as film thickness increases, surface roughness and Raman peak intensity increase correspondingly, with the tetragonal phase (t) characteristic peak being most prominent at 65 nm. DC magnetron sputtering was employed to deposit TiN top electrodes, resulting in TiN/Y-HfO2/TiN thin film devices. Following rapid thermal annealing at 700 °C, electrical properties were evaluated using a ferroelectric tester. Leakage current density exhibited a decreasing trend with increasing film thickness, while the maximum polarization intensity gradually increased, reaching a maximum of 11.5 μC/cm2 at 120 nm.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471966/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176316","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0