Micromachines最新文献

Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields. 侧向电场激励下PMN-PT正交晶片体声波共振特性

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-21 DOI: 10.3390/mi16050600

Boyue Su, Yujie Zhang, Feng Yu, Pengfei Kang, Tingfeng Ma, Peng Li, Zhenghua Qian, Iren Kuznetsova, Vladimir Kolesov

{"title":"Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields.","authors":"Boyue Su, Yujie Zhang, Feng Yu, Pengfei Kang, Tingfeng Ma, Peng Li, Zhenghua Qian, Iren Kuznetsova, Vladimir Kolesov","doi":"10.3390/mi16050600","DOIUrl":"https://doi.org/10.3390/mi16050600","url":null,"abstract":"For relaxor ferroelectric single crystal (1 - x)Pb(Mg1/3Nb2/3)O3 - xPbTiO3 (PMN-PT), through reasonable component regulation and electric field polarization, an orthogonal mm2 point group structure can be obtained, which has high piezoelectric constants and is, therefore, a desired substrate material for lateral-field-excited (LFE) bulk acoustic wave (BAW) devices. In this work, acoustic wave resonance characteristics of (zxt) 45° PMN-PT BAW devices with LFE are investigated. Firstly, Mindlin first-order plate theory is used to obtain vibration governing equations of orthorhombic crystals excited by a lateral electric field. By analyzing the electrically forced vibrations of the finite plate, the basic vibration characteristics, such as motional capacitance, resonant frequency, and mode shape are obtained, and influences of different electrode parameters on resonance characteristics of the device are investigated. In addition, the effects of the structure parameters on the mass sensitivity of the devices are analyzed and further verified by FEM simulations. The model presented in this study can be conveniently used to optimize the structural parameters of LFE bulk acoustic wave devices based on orthorhombic crystals, which is crucial to obtain good resonance characteristics. The results provide an important basis for the design of LFE bulk acoustic wave resonators and sensors by using PMN-PT orthorhombic crystals.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144159457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

RETRACTED: Shi et al. Surface Hydrophilic Modification for Chip of Centrifugal Microfluidic Immunoassay System. Micromachines 2022, 13, 831. 撤稿：Shi et al.。离心式微流控免疫分析系统芯片表面亲水改性研究。微机械，2022,13,831。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-21 DOI: 10.3390/mi16050599

Yuxing Shi, Peng Ye, Chuang Wang, Kuojun Yang, Jinhong Guo

引用次数: 0

Advances in Electrode Design and Physiological Considerations for Retinal Implants. 视网膜植入物电极设计与生理学研究进展。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-21 DOI: 10.3390/mi16050598

Cihun-Siyong Gong

引用次数: 0

Influence of Lithography Process Parameters on Continuous Surface Diffractive Optical Elements for Laser Beam Shaping. 光刻工艺参数对激光光束整形用连续面衍射光学元件的影响。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-21 DOI: 10.3390/mi16050601

Wenjing Liu, Axiu Cao, Junbo Liu, Hui Pang, Qiling Deng, Jian Wang, Song Hu

引用次数: 0

Insight into Various Casting Material Selections in Rapid Investment Casting for Making EDM Electrodes. 电火花加工电极快速熔模铸造中各种铸造材料的选择。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-20 DOI: 10.3390/mi16050595

Thanh Tan Nguyen, Van-Thuc Nguyen, Van Tron Tran, Anh Thi Le, Thanh Duy Nguyen, Quoc Dung Huynh, Minh Tri Ho, Minh Phung Dang, Hieu Giang Le, Van Thanh Tien Nguyen

{"title":"Insight into Various Casting Material Selections in Rapid Investment Casting for Making EDM Electrodes.","authors":"Thanh Tan Nguyen, Van-Thuc Nguyen, Van Tron Tran, Anh Thi Le, Thanh Duy Nguyen, Quoc Dung Huynh, Minh Tri Ho, Minh Phung Dang, Hieu Giang Le, Van Thanh Tien Nguyen","doi":"10.3390/mi16050595","DOIUrl":"https://doi.org/10.3390/mi16050595","url":null,"abstract":"Investment casting is a precision casting technology that can produce complex shapes from various materials, particularly difficult-to-cast and difficult-to-machine metallic alloys. Meanwhile, electrical discharge machining (EDM) is a well-known technique for producing ultra-precise mechanical parts, and electrode quality is crucial. Few studies have explored how rapid prototyping (RP) pattern generation and investment casting influence the final product's shape, dimensions, and surface roughness. This study investigates EDM electrode fabrication using investment casting and RP-generated epoxy resin patterns. We examine the effects of electrode materials (CuZn5, CuZn30, and FeCr24) on surface roughness, alongside the impact of ceramic shell thickness and RP pattern shrinkage on electrode quality. The EDM electrodes have a shrinkage of 0.8-1.9% and a surface roughness of 3.20-6.35 μm, depending on the material selections. Additionally, the probability of shell cracking decreases with increasing shell thickness, achieving stability at 16.00 mm. This research also applies investment casting electrodes to process DC53 steel. The results indicate that the surface roughness of the workpiece after EDM machining with different electrode materials is in the range of 4.71 µm to 9.88 µm. The result expands the use of investment casting in electrode fabrication, enabling the production of high-precision electrodes with complex profiles and challenging materials, potentially reducing both time and cost.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The Dielectrophoretic Interactions of Curved Particles in a DC Electric Field. 直流电场中弯曲粒子的介电相互作用。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-20 DOI: 10.3390/mi16050596

Zhiwei Huang, Tong Zhang, Jing Feng, Yage Wang

{"title":"The Dielectrophoretic Interactions of Curved Particles in a DC Electric Field.","authors":"Zhiwei Huang, Tong Zhang, Jing Feng, Yage Wang","doi":"10.3390/mi16050596","DOIUrl":"https://doi.org/10.3390/mi16050596","url":null,"abstract":"In practical dielectrophoretic cell interaction experiments, cells do not always exhibit circular or rod-like shapes, making the study of dielectrophoretic interactions among irregularly shaped particles of significant importance. We established a mathematical model for curved particles to analyze their mutual dielectrophoretic interactions, incorporating particle deformability by varying their shear modulus, and employed the arbitrary Lagrangian-Eulerian method to describe particle motion and deformation. The results demonstrate that under the influence of a direct current electric field, curved particles undergo rotation, deformation, and mutual attraction due to dielectrophoresis, eventually forming a stable alignment parallel to the applied electric field. Adjusting the electric field strength effectively modulates the interaction intensity and movement velocity between particles. This study elucidates the fundamental principles governing dielectrophoretic interactions among deformable curved particles in DC electric fields, providing theoretical guidance for dielectrophoretic manipulation experiments involving biological cells, metallic particles, and other entities under DC electric fields.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Tuning Transmission Properties of Two-Dimensional Photonic Crystal Waveguides Using Functional Dielectric Cavities. 利用功能介质腔调谐二维光子晶体波导的传输特性。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-20 DOI: 10.3390/mi16050597

Siqi Zhang, Feng Yang, Wenying Zhang, Wei Zhao, Luhe Yang, Hong Li

{"title":"Tuning Transmission Properties of Two-Dimensional Photonic Crystal Waveguides Using Functional Dielectric Cavities.","authors":"Siqi Zhang, Feng Yang, Wenying Zhang, Wei Zhao, Luhe Yang, Hong Li","doi":"10.3390/mi16050597","DOIUrl":"https://doi.org/10.3390/mi16050597","url":null,"abstract":"In this study, the photonic band structure, transmissivity, and electric field distribution of a two-dimensional photonic crystal coupled waveguide structure are calculated using the supercell technique and finite element method. The waveguide consists of circular KNbO3 and functional dielectric cylinders embedded in air. The dielectric constant of a functional medium cylinder is spatially dependent, which is realized through the electro-optic and Kerr effects. The dielectric constant function is defined as εc(r)=k·r+b (0⩽r⩽rc), where the coefficient k and parameter b can be adjusted by an external electric field. By tuning k and b, the transmission characteristics of the waveguide, including the propagation direction and light field distribution, exhibit significant adjustability. Specifically, parameter b enhances or suppresses the transmissivity at output ports 1 and 2. By utilizing the regulatory capability of functional media on waveguide transmission characteristics, optical filters with specific filtering functions can be designed. These findings provide novel design strategies for advanced optical devices.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effects of Gas-Surface Interaction Conditions on the Performance of Knudsen Force-Based, Low-Pressure Micro Hydrogen Sensors. 气-表面相互作用条件对基于Knudsen力的低压微型氢传感器性能的影响

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-19 DOI: 10.3390/mi16050593

Yanli Wang, Xiaowei Wang, Chunlin Du, Zhijun Zhang

{"title":"Effects of Gas-Surface Interaction Conditions on the Performance of Knudsen Force-Based, Low-Pressure Micro Hydrogen Sensors.","authors":"Yanli Wang, Xiaowei Wang, Chunlin Du, Zhijun Zhang","doi":"10.3390/mi16050593","DOIUrl":"https://doi.org/10.3390/mi16050593","url":null,"abstract":"Knudsen force phenomenon caused by non-uniform temperature fields in rarefied gas has been a topic of interest among researchers of gas sensing and structure actuating for micro-electromechanical systems (MEMS). The effects of gas-surface interaction conditions (accommodation coefficients, temperature differences, and carrier gases) on gas flows and hydrogen detection performance (Knudsen force) in MEMS gas sensors, consisting of a series of triangular cold beams and rectangular hot beams, are studied by using direct simulation Monte Carlo (DSMC) method combined with the Cercignani-Lampis-Lord (CLL) model in this work. The research results reveal that Knudsen force strongly depends on accommodation coefficients, temperature difference, and carrier gases. Specifically, the dependence of Knudsen force on accommodation coefficients is stronger at high pressure than at low pressure. In particular, Knudsen force increases slightly as accommodation coefficients are reduced from 1 to 0.1 but dramatically rises when accommodation coefficients verge on 0. In addition, Knudsen force is almost a linear function of temperature difference. The peak value of Knudsen force can be increased by roughly 28 times when the temperature difference rises from 10 K to 300 K. Last but not least, the linear correlation of hydrogen concentration in binary gas mixtures with Knudsen force is proposed for gas concentration detection in practice.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144160051","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

DBSCAN-PCA-INFORMER-Based Droplet Motion Time Prediction Model for Digital Microfluidic Systems. 基于dbscan - pca - informer的数字微流体系统液滴运动时间预测模型。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-19 DOI: 10.3390/mi16050594

Zhijie Luo, Bin Zhao, Wenjin Liu, Jianhua Zheng, Wenwen Chen

{"title":"DBSCAN-PCA-INFORMER-Based Droplet Motion Time Prediction Model for Digital Microfluidic Systems.","authors":"Zhijie Luo, Bin Zhao, Wenjin Liu, Jianhua Zheng, Wenwen Chen","doi":"10.3390/mi16050594","DOIUrl":"https://doi.org/10.3390/mi16050594","url":null,"abstract":"In recent years, emerging digital microfluidic technology has shown great application potential in fields such as biology and medicine due to its simple structure, sample-saving properties, ease of integration, and wide range of manipulation. Currently, due to potential faults in chips during production and usage, as well as high safety requirements in their application domains, thorough testing of chips is essential. This study records data using a machine vision-based digital microfluidic driving control system. As chip usage frequency rises, device degradation introduces seasonal and trend patterns in droplet motion time data, complicating predictive modeling. This paper first employs the density-based spatial clustering of applications with noise (DBSCAN) clustering algorithm to analyze the droplet motion time data in digital microfluidic systems. Subsequently, principal component analysis (PCA) is applied for dimensionality reduction on the clustered data. Using the INFORMER model, we predict changes in droplet motion time and conduct correlation analysis, comparing results with traditional long short-term memory (LSTM), frequency-enhanced decomposed transformer (FEDformer), inverted transformer (iTransformer), INFORMER, and DBSCAN-INFORMER prediction models. Experimental results show that the DBSCAN-PCA-INFORMER model substantially outperforms LSTM and other benchmark models in prediction accuracy. It achieves an R2 of 0.9864, an MSE of 3.1925, and an MAE of 1.3661, indicating an excellent fit between predicted and observed values.The results demonstrate that the DBSCAN-PCA-INFORMER model achieves higher prediction accuracy than traditional LSTM and other approaches, effectively identifying the health status of experimental devices and accurately predicting failure times, underscoring its efficacy and superiority.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144159867","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and Analysis of a Passive Micromixer Based on Multiple Passages. 基于多通道的无源微混频器的设计与分析。

IF 3 3区工程技术

Micromachines Pub Date : 2025-05-19 DOI: 10.3390/mi16050592

Makhsuda Juraeva, Dong-Jin Kang

{"title":"Design and Analysis of a Passive Micromixer Based on Multiple Passages.","authors":"Makhsuda Juraeva, Dong-Jin Kang","doi":"10.3390/mi16050592","DOIUrl":"https://doi.org/10.3390/mi16050592","url":null,"abstract":"We propose a novel passive micromixer based on multiple passages and analyze its mixing performance comprehensively. The multiple passages are constructed with straight channels, making them easier to manufacture, compared to conventional SAR micromixers and other micromixers based on curved channels. Its mixing performance has been demonstrated to be superior to that of the previous micromixers across a broad range of Reynolds numbers. Five distinct designs incorporating converging passages were explored to study the significance of the number of passages on the mixing performance. Across a broad range of Reynolds number ranges (0.1 to 80), the two-passage design significantly improved mixing performance, with a degree of mixing (DOM) consistently exceeding 0.84. Particularly, the mixing enhancement is prominent within the low and intermediate range of Reynolds numbers (Re≤20). This enhancement in the regime of molecular diffusion dominance stems from the elongated interface between the two fluids. The mixing enhancement in the transition regime is due to a secondary flow being generated on the cross-section normal to the main stream direction. The intensity of this secondary flow is significantly influenced by the number of multiple passages. The optimal number for the present micromixer design is two. The DOM remains almost constant for the submergence of multiple passages in the range of 40 to 70 (μm).","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 5","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144159872","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0