MicromachinesPub Date : 2026-09-17DOI: 10.3390/mi17091095
Mario Versaci, Francesco Carlo Morabito
{"title":"Lie Classification and Symmetry-Preserving Reduced-Order Modeling of Nonlinear Electrostatic MEMS.","authors":"Mario Versaci, Francesco Carlo Morabito","doi":"10.3390/mi17091095","DOIUrl":"10.3390/mi17091095","url":null,"abstract":"<p><p>High-fidelity continuum models of electrostatically actuated MEMS accurately capture distributed electromechanical interactions but are computationally expensive for repeated simulation, optimization, and real-time applications. This work develops a physics-informed reduced-order modeling framework based on Lie symmetry classification for a nonlinear electrostatic MEMS microplate governed by a fourth-order integro-partial differential equation. The continuum model is recast as an extended canonical system separating local differential operators from nonlocal stretching and capacitive contributions. Lie group classification of the complete boundary value problem shows that the electrostatic singularity, constitutive coefficients, fixed geometry, and clamped boundary conditions suppress nontrivial continuous spatial symmetries in the generic bounded problem, while time translation survives only in the autonomous subclass. The discrete reflection invariances of the centered rectangular device are treated separately to identify invariant functional subspaces for Galerkin projection. A symmetry-preserving reduced-order model is then constructed in the even-even subspace, retaining bending, geometric stretching, pre-stress, capacitive feedback, dielectric inhomogeneity, and fringing field effects. Numerical verification against the high-fidelity continuum model shows close agreement with the FOM for static and transient responses while preserving reflection symmetry and remaining robust under parameter variations. For the nominal configuration, the monomodal Lie-ROM predicts a pull-in voltage of 127.73V versus 128.21V for the FOM, corresponding to an absolute relative error of 0.37% and a signed error of -0.37%. The monomodal formulation substantially reduces computational cost and consistently outperforms a classical lumped-parameter approximation, providing an interpretable and efficient basis for parametric analysis, design optimization, control-oriented modeling, and future digital twin applications.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609720/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-09-17DOI: 10.3390/mi17091096
Minna Hou, Suping Jia, Lei Liu, Yuhao Li, Lin Qi, Xiaobin Tian, Sanlong Wang
{"title":"Crystallization and Interfacial Regulation of CsPbI<sub>3</sub> Perovskites by Dimethylammonium Chloride for Efficient and Stable Solar Cells.","authors":"Minna Hou, Suping Jia, Lei Liu, Yuhao Li, Lin Qi, Xiaobin Tian, Sanlong Wang","doi":"10.3390/mi17091096","DOIUrl":"10.3390/mi17091096","url":null,"abstract":"<p><p>All-inorganic CsPbI<sub>3</sub> perovskite solar cells (PSCs) are attractive for perovskite/silicon tandem solar cells because of their suitable bandgap and intrinsic thermal robustness, yet their power conversion efficiencies (PCEs) and long-term stability remain limited by defective film and interfaces. The existing additives often contain bulky organic components, which may serve as grain-boundary barriers, or even form low-dimensional phases or carrier-transport-blocking layers. Here, dimethylammonium chloride (DMACl) is employed to regulate the crystallization of CsPbI<sub>3</sub> films. DMACl treatment enlarges the average grain size and spectroscopic and electrical characterizations consistently reveal reduced defect-assisted recombination. Meanwhile, DMACl-derived species at the film surface or grain boundaries simultaneously passivate surface undercoordinated Pb<sup>2+</sup> defects and achieve favorable energy-level alignment with PC<sub>61</sub>BM, thereby establishing a low-defect interface with a low energy barrier for efficient electron extraction and transport. Consequently, the champion inverted CsPbI<sub>3</sub> PSC delivers a PCE of 20.97%, with a V<sub>OC</sub> of 1.230 V, a J<sub>SC</sub> of 20.70 mA/cm<sup>2</sup>, and an FF of 82.37%, compared with 18.99% for the control device. Importantly, DMACl treatment markedly enhances device stability under humidity, thermal, and continuous-illumination conditions. In particular, the T<sub>80</sub> lifetime under thermal aging was extended from approximately 310 h for the control device to nearly 500 h for the DMACl-treated device.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609046/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-09-17DOI: 10.3390/mi17091093
Lifei Qi, Tianyu Yang
{"title":"Numerical Investigation of a Skin-Interfaced Thermal Sensor for Joint Estimation of Tissue Thermal Conductivity and Blood Velocity.","authors":"Lifei Qi, Tianyu Yang","doi":"10.3390/mi17091093","DOIUrl":"10.3390/mi17091093","url":null,"abstract":"<p><p>Skin-interfaced thermal sensors offer a promising, portable, and cost-effective alternative for continuous and noninvasive measurements of skin condition and blood flow. Skin condition, especially skin hydration, is reflected by the tissue thermal conductivity. Blood flow is characterized by the average flow velocity through blood vessels in skin. However, the measurement accuracy of tissue thermal conductivity and blood velocity is hindered by the coupled heat conduction and convection in the tissue containing blood vessels. To overcome this bottleneck for precise measurements of tissue thermal conductivity and blood velocity simultaneously, we design a skin-interfaced thermal sensor consisting of a resistive heater and three thermistors. The resistive heater with a diameter of 4 mm consumes a low power of 0.05 W. The three miniature thermistors measure the steady-state temperatures on skin at the middle location of the heater center, upstream flow location, and downstream flow location. Using finite element analysis (FEA) of heat transfer in vascular skin, we optimize the three-thermistor layout, placing the upstream and downstream thermistors 6.0 mm and 2.7 mm from the heater center, respectively. FEA results reveal that the middle-thermistor temperature is predominantly sensitive to tissue thermal conductivity with relatively low flow interference, whereas the temperature difference between upstream and downstream thermistors maintains high sensitivity to blood velocity, and is less affected by tissue thermal conductivity. With the FEA results, we implement a polynomial machine learning model and a physics-informed thermal-resistance reduced-order model to analyze the thermal sensor temperature measurements and jointly predict both quantities. The relative prediction errors are typically below 4% for thermal conductivity and 10% for blood velocity using the machine learning model, and below 1% and 8% using the reduced-order model. This work provides a framework for the development of skin-interfaced thermal sensors capable of intelligent and noninvasive skin and vascular assessment.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609165/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062288","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-09-16DOI: 10.3390/mi17091085
Lu Sun, Haolin Wu, Jin Tian, Keke Bai
{"title":"Damage Mechanism of GaN HEMT and Failure Analysis of Power Amplifier Under High-Altitude Electromagnetic Pulse.","authors":"Lu Sun, Haolin Wu, Jin Tian, Keke Bai","doi":"10.3390/mi17091085","DOIUrl":"10.3390/mi17091085","url":null,"abstract":"<p><p>With the growing complexity of electromagnetic environments, electronic systems suffer from prominent strong electromagnetic interference in practical service. As a key component implementing power amplification and transmission in communication systems, interference and damage effects of a GaN HEMT power amplifier under High-altitude Electromagnetic Pulse (HEMP) directly affect the regular operation of systems. In this paper, a physical device model and an injection source model are built first; injection simulations of different HEMP pulses are adopted to analyze internal temperature and current density distributions, predicting vulnerable positions of the device under gate injection. A GaN HEMT power amplifier based on CGH40010F is then established to investigate the failure mechanism under HEMP injection and the damage effect of different pulse parameters. An injection experiment system is conducted according to HEMP pulse standard; results indicate that power amplifier failure stems from GaN HEMT device destruction. The damage evolution is tightly associated with injected energy accumulation, and the gate-source channel is the susceptible region for GaN HEMT under gate injection. These conclusions can provide important references for the protective design of GaN HEMT power amplifiers.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609541/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-09-16DOI: 10.3390/mi17091090
Xin Fu, Hang Chen, Wanli Yang, Chao Zhan, Xiaowei Zhang, Xuan Mao, Hongping Hu
{"title":"Coupling Between Thickness-Shear and Flexural Modes in AT-Cut Quartz Mesa Resonators with Beveled Edges.","authors":"Xin Fu, Hang Chen, Wanli Yang, Chao Zhan, Xiaowei Zhang, Xuan Mao, Hongping Hu","doi":"10.3390/mi17091090","DOIUrl":"10.3390/mi17091090","url":null,"abstract":"<p><p>Beveled edges are inevitably formed in micro AT-cut quartz mesa resonators (QMRs) during the photolithography process. This local geometric variation alters the thickness distribution and edge stiffness, which in turn affects the coupling between the primary thickness-shear mode and adjacent parasitic modes. To elucidate the mechanism, we establish a vibration analysis model for the micro AT-cut QMR with beveled edge profiles based on the first-order Mindlin plate theory. The coupling between thickness-shear and flexure is the focus of the investigation. The uniform thickness regions and the beveled edge region are expressed using analytical solutions and power series expansions, respectively. The eigenfrequency equation is then derived through the interface continuity and free boundary conditions. The theoretical frequency spectra show good agreement with finite element results so that the accuracy of the proposed analytical approach is validated. A mode coupling intensity index is constructed based on the discrete Fourier spectrum of the surface displacement in the mesa region, and a modal kinetic energy ratio is introduced to characterize the modal coupling. The influence of structural parameters on the spectral characteristics and mode coupling intensity is analyzed. The results indicate that mesa parameters mainly regulate the resonance frequency and energy trapping of the primary thickness-shear mode. In contrast, due to changes in flexure stiffness of the ends and the reflection angle of elastic waves, the beveled edge parameters affect the coupling intensity between the primary thickness-shear mode and parasitic modes. The optimized parameter combinations lead to low coupling states with nearly pure thickness-shear vibration, while the mesa- and bevel-length related low coupling intervals exhibit better fabrication robustness.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13608899/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062276","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-09-16DOI: 10.3390/mi17091088
Likai Li, Desong Lv, Jingjing Lv, Dawei Li, Li Du, Yuan Du
{"title":"A 128-Channel 0.2-8.2 V Calibrated DAC IC Achieving 0.26-LSB DNL and 0.71-LSB DVO for Photonic Computing.","authors":"Likai Li, Desong Lv, Jingjing Lv, Dawei Li, Li Du, Yuan Du","doi":"10.3390/mi17091088","DOIUrl":"10.3390/mi17091088","url":null,"abstract":"<p><p>Photonic computing systems require large numbers of accurate programmable voltages for photonic weight programming and device bias control. This paper presents a 128-channel digital-to-analog converter (DAC) implemented in a 250 nm BCD high-voltage CMOS process. A code-dependent per-channel auxiliary-DAC calibration scheme is proposed to compensate main-DAC conversion errors and channel-dependent offsets. In addition, a separated low-/high-voltage-domain driver and a stepwise multichannel update scheme are adopted to reduce static power and suppress update-induced disturbances. After calibration, the measured maximum absolute differential non-linearity (DNL) and integral non-linearity (INL) are 0.26 least significant bit (LSB) and 0.39 LSB, respectively, and the maximum deviation of voltage output (DVO) across 128 channels is 0.71 LSB. The DAC achieves rising/falling slew rates of 6.1/11.7 V/μs under an 8 V output swing. Under dynamic operation with 0.2 to 8.2 V sinusoidal outputs and a 10 kΩ load per channel, the total power consumption is 0.85 W. Thermo-optic phase-shifter measurements further verify programmable photonic phase tuning, demonstrating a scalable electrical control interface for thermo-optic phase-shifter-based photonic computing hardware.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609330/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Experimental Investigation of Laser-Assisted Ultrasonic Vibration Milling of CF/PEEK-Based CFRTP Unidirectional Laminates.","authors":"Zhengqiang Li, Kang Xiao, Minghai Wang, Qijia Wang, Xuezhi Wang, Xianjun Kong, Siyu Zhou","doi":"10.3390/mi17091087","DOIUrl":"10.3390/mi17091087","url":null,"abstract":"<p><p>Carbon fiber-reinforced polyetheretherketone is widely used in aerospace, transportation, and medical devices because of its high interlaminar and intralaminar fracture toughness, excellent mechanical properties, and long-term stability at elevated temperatures. However, its two-phase structure, consisting of brittle fibers embedded in a tough matrix, presents significant machining challenges. In this study, a two-stage laser-ultrasonic vibration-assisted milling process was investigated by combining laser-induced matrix thermal softening and decomposition with high-frequency, intermittent tool-workpiece contact. Unidirectional laminates with 0° and 90° fiber orientations were machined to systematically evaluate the effects of processing parameters on cutting force, measured surface temperature, surface roughness, and machining defects. The proposed process reduced the cutting force by 7.4-26.1%, improved surface roughness, and reduced observable machined surface defects. Appropriate laser and ultrasonic parameters were associated with lower measured surface temperatures and fewer observable fiber fracture and fiber-matrix separation features, thereby improving machined surface quality. These findings clarify the synergistic effects of laser and ultrasonic parameters and provide a basis for process optimization and high-quality machining of carbon fiber-reinforced polyetheretherketone composites.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609122/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-09-16DOI: 10.3390/mi17091089
Benchao Lv, Jun Zhao, Hongsheng Sun, Xucong Bao, Tong Zhao, Xiaolin Wang, Zhiyuan Yao, Xinjian Li, Xiaoniu Li
{"title":"A Large-Aperture Variable Iris Directly Driven by a V-Shaped Mode-Coupled Ultrasonic Motor: Design, Optimization, and Experimental Validation.","authors":"Benchao Lv, Jun Zhao, Hongsheng Sun, Xucong Bao, Tong Zhao, Xiaolin Wang, Zhiyuan Yao, Xinjian Li, Xiaoniu Li","doi":"10.3390/mi17091089","DOIUrl":"10.3390/mi17091089","url":null,"abstract":"<p><p>Large-aperture variable irises must provide continuous aperture regulation within a restricted axial space. This study presents a laboratory prototype of a 20-blade iris directly driven by a V-shaped mode-coupled ultrasonic motor. The iris was geometrically designed for a 5.5 mm-98 mm clear-aperture range. A wave-spring-bearing compliant preload mechanism was designed to maintain blade compression while permitting low-resistance actuating-ring rotation. Under a 3 N axial load, finite-element analysis showed that a representative three-blade overlap unit was approximately 7.6 times stiffer axially than the preload mechanism, so deformation occurred mainly in the latter. Taguchi design and multi-objective optimization produced a flexibly clamped stator with simulated working modes at 121.93 kHz and 122.10 kHz, separated by 170 Hz; the measured frequencies were 120.7 kHz and 121.5 kHz. At 121.8 kHz and 300 Vpp, the 5.74 g stator generated bidirectional maximum thrusts of 3.91 N and 4.11 N, corresponding to a maximum thrust-to-mass ratio of 716 N/kg. A separate short-cycle test yielded a minimum observed stable tangential displacement of 3.23 μm. Quantitative opening and closing tests over a local 10 mm-20 mm interval yielded mean absolute actuating-ring angle errors of 0.087° and 0.13°, respectively. Model-extrapolation tests from a 20 mm reference yielded an aperture MAE of 0.183 mm over 10 mm-80 mm, while errors of 1.7 mm and -1.2 mm were measured at the 5.5 mm and 98 mm targets. These results support the functional feasibility of the proposed direct-drive architecture and identify an increased prediction error near the travel limits.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609041/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062527","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-09-16DOI: 10.3390/mi17091086
Alireza Mohammad Karim
{"title":"Engineering Nanotherapeutics Through Interfacial Mechanics: Mechanobiology and Precision Drug Delivery.","authors":"Alireza Mohammad Karim","doi":"10.3390/mi17091086","DOIUrl":"10.3390/mi17091086","url":null,"abstract":"<p><p>The biological microenvironment is inherently mechanical, with cells continuously sensing and responding to fluid shear stress, matrix stiffness, tensile strain, hydrostatic pressure, and other physical cues through highly conserved mechanotransduction pathways. These mechanical interactions arise across biological interfaces and are increasingly investigated using microfluidic and nanofluidic technologies that enable precise control of physiologically relevant mechanical environments. While nanomedicine has traditionally focused on biochemical targeting and molecular recognition, growing evidence demonstrates that interfacial mechanical forces critically regulate nanoparticle transport, vascular adhesion, cellular uptake, biodistribution, therapeutic activation, and treatment efficacy. Simultaneously, pathological alterations in tissue mechanics have emerged as hallmarks of numerous diseases, including cancer, cardiovascular disease, fibrosis, pulmonary hypertension, neurodegeneration, and metabolic disorders, creating new opportunities for mechanics-guided therapeutic design. This Perspective develops an integrative framework in which interfacial mechanics is treated as an actionable engineering variable across the nanotherapeutic delivery pathway. The framework distinguishes three mechanistic roles of mechanics: as a determinant of therapeutic transport, as an activation signal for mechanically responsive materials, and as a biological target through mechanotransduction pathways. Particular attention is given to fluid shear stress, extracellular-matrix mechanics, strain, pressure, nano-cell interfacial interactions, and the use of microfluidic and nanofluidic systems to reproduce physiologically relevant mechanical environments. Experimentally demonstrated mechanically responsive systems are distinguished from prospective concepts, and the translational implications of mechanical heterogeneity, activation thresholds, off-target triggering, and combined mechanical-biochemical gating are examined. The Perspective further identifies quantitative and experimental requirements needed to advance mechanics-guided nanotherapeutics from conceptual designs toward predictive and clinically translatable systems. Collectively, this framework positions interfacial mechanics as a complementary design dimension to molecular targeting in precision drug delivery.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609238/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-09-16DOI: 10.3390/mi17091091
Yanbin Ma, Fangjie Shu, Meng Wang, Di Yu, Yuhang Wang, Zongren Yue, Chunzhi Sun
{"title":"Custom-Built Vision-Assisted Arc Discharge System for Fabricating High-Q In-Line Microbubble Resonator Arrays.","authors":"Yanbin Ma, Fangjie Shu, Meng Wang, Di Yu, Yuhang Wang, Zongren Yue, Chunzhi Sun","doi":"10.3390/mi17091091","DOIUrl":"10.3390/mi17091091","url":null,"abstract":"<p><p>Whispering gallery mode microbubble resonators (MBRs) are prominent optofluidic platforms, yet fabricating highly symmetric in-line arrays remains a technical challenge. Here, we demonstrate a custom-built, vision-assisted arc discharge apparatus for the deterministic fabrication of high-Q MBRs. Using finite-element simulations and microscopic observations, we reveal that asymmetric expansion is primarily driven by transverse misalignment within the plasma arc and intrinsic thermal anisotropy caused by the current crowding effect. Guided by these physical insights, we utilize real-time three-axis spatial compensation to successfully fabricate highly symmetric, cascaded in-line MBR arrays on a single continuous capillary. Optical characterization of a 16-cavity array demonstrates excellent performance reproducibility, with 12 individual microbubbles achieving ultra-high Q-factors exceeding 10<sup>7</sup>. This highly controllable approach provides a robust platform for distributed microfluidic sensing and integrated lab-on-a-chip applications.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609745/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}