Micromachines最新文献_第4页

An Efficient Gradient-Free Topology Optimization Method Based on Superellipse Curves and a Multilayer Perceptron Surrogate. 基于超椭圆曲线和多层感知器代理的高效无梯度拓扑优化方法。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-10 DOI: 10.3390/mi17091074

Fengyi Jin, Yanli Liu

{"title":"An Efficient Gradient-Free Topology Optimization Method Based on Superellipse Curves and a Multilayer Perceptron Surrogate.","authors":"Fengyi Jin, Yanli Liu","doi":"10.3390/mi17091074","DOIUrl":"10.3390/mi17091074","url":null,"abstract":"Topology optimization is an effective method for obtaining high-performance material distributions with novel configurations. However, its application to complex electromagnetic devices remains challenging because of the difficulty of deriving sensitivities and the low computational efficiency associated with repeated finite element method (FEM) evaluations for nonlinear materials. This paper proposes an efficient gradient-free topology optimization method that integrates superellipse curves with a multilayer perceptron (MLP) surrogate model while accounting for nonlinearity. First, based on the general superellipse curve, an improved expression is introduced, in which the size, shape, and position can be flexibly controlled by only seven parameters. Then, a parameterized superellipse-curve-based gradient-free topology optimization framework is established, which can be applied to complex electromagnetic devices with nonlinear materials and complex objective functions. Moreover, a lightweight MLP-based surrogate model is constructed using limited training samples generated by Latin hypercube sampling and FEM, and it can replace FEM for evaluating nonlinear material behavior with negligible computational cost. Finally, the proposed topology optimization framework is applied to the design of a magnetic actuator, both with and without considering nonlinear B-H characteristics, demonstrating its effectiveness.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609890/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of Microfluidic Culture System for Spatially Regulated Differentiation of Mesenchymal Stem Cells Toward Osteochondral Interface Regeneration. 间充质干细胞向骨软骨界面再生空间调控分化的微流体培养系统的建立。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-10 DOI: 10.3390/mi17091073

Toshifumi Ohi, Shogo Miyata

{"title":"Development of Microfluidic Culture System for Spatially Regulated Differentiation of Mesenchymal Stem Cells Toward Osteochondral Interface Regeneration.","authors":"Toshifumi Ohi, Shogo Miyata","doi":"10.3390/mi17091073","DOIUrl":"10.3390/mi17091073","url":null,"abstract":"Regeneration of the osteochondral interface is essential for effective articular cartilage repair and the prevention of graft delamination. In this study, we developed a microfluidic culture device for the spatial regulation of mesenchymal stem cell (MSC) differentiation within a single-phase hydrogel by controlling concentration gradients of differentiation-inducing factors. The system comprised a PDMS culture chamber with dual-flow of culture media to generate concentration gradients of chondrogenic and osteogenic inductive factors. Numerical simulations were performed to characterize the flow velocity and distribution of factors aligned with the dual-flow direction in the hydrogel. The numerical results confirmed that the dual-flow successfully induced concentration differences between the opposite sides of the hydrogel. Bovine bone marrow-derived MSCs encapsulated in 3% agarose gel were cultured for 20 days under continuous dual-flow containing chondrogenic and osteogenic differentiation media. Histological analysis showed that the localized calcium deposition was aligned with the flow direction on the osteogenic differentiation side. In contrast, sulfated glycosaminoglycan (sGAG) synthesis was observed on the chondrogenic differentiation side. These results demonstrate that the developed culture system can successfully reconstruct an osteochondral-like interface from MSCs within a single-phase hydrogel.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609876/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062452","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Nanomaterial-Based SPR Sensing Chip for Detection of Metal Ion Mixtures in Aquatic Environment. 基于纳米材料的SPR传感芯片用于水环境中金属离子混合物的检测。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-09 DOI: 10.3390/mi17091067

Jie Li, Xiaomeng Zhang, Chong Yue, Wenbin Yin

{"title":"Nanomaterial-Based SPR Sensing Chip for Detection of Metal Ion Mixtures in Aquatic Environment.","authors":"Jie Li, Xiaomeng Zhang, Chong Yue, Wenbin Yin","doi":"10.3390/mi17091067","DOIUrl":"10.3390/mi17091067","url":null,"abstract":"Aquatic heavy metal pollution poses substantial risks to ecological systems and human health, attributable to the toxic properties and bioaccumulative behaviors of metallic ions, including Hg[II], Zn[II], and ion mixtures. A novel SPR sensing chip based on a Ag-BiFeO3-MoS2-graphene hybrid structure is proposed and analyzed for detection of metal ion mixtures. Systematic tuning is implemented for Ag and BiFeO3 film thicknesses to boost the overall sensing capability, aiming to acquire minimized reflectance together with favorable detection sensitivity. Following this step, we investigate how different quantities of MoS2 and graphene layers affect the sensing properties of the SPR biosensor. Analytical outcomes demonstrate that configurations adopting monolayer MoS2 and graphene achieve the maximum phase sensitivity. Moreover, the optimized SPR chip architecture achieves sensing sensitivity two orders of magnitude greater than conventional sensor setups. Numerical investigations are further carried out to evaluate the sensor's response toward various heavy metal ion species. The maximal sensitivity of 1.599 × 106 deg/RIU is realized when detecting Zn[II]. Under this optimal structural setup, the spatial electric field distributions responding to variations in the refractive index of the sensing medium are also characterized. The remarkable sensitivity of the presented sensor configuration makes it a more competitive choice for deployment in further biological detection scenarios.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609112/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062278","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Toward a 10 GHz High-Order Surface Acoustic Wave Resonator: A Finite-Element Study on LiNbO₃/SiC Heterostructure Incorporating Embedded Electrodes. 迈向10ghz高阶表面声波谐振器：嵌入电极的LiNbO3/SiC异质结构的有限元研究。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-09 DOI: 10.3390/mi17091072

Yixuan Wang, Hao Li, Qiong Wu, Tianxiang Wu, Qiaozhen Zhang

{"title":"Toward a 10 GHz High-Order Surface Acoustic Wave Resonator: A Finite-Element Study on LiNbO3/SiC Heterostructure Incorporating Embedded Electrodes.","authors":"Yixuan Wang, Hao Li, Qiong Wu, Tianxiang Wu, Qiaozhen Zhang","doi":"10.3390/mi17091072","DOIUrl":"10.3390/mi17091072","url":null,"abstract":"The escalating demand for high-frequency acoustic devices in 5G/6G communications imposes stringent requirements on surface acoustic wave (SAW) resonators, including high operating frequency, large electromechanical coupling coefficient K2, and high quality factor Q. However, conventional SAW devices suffer from severe trade-offs among these metrics. This work proposes and theoretically analyzes an embedded-electrode LiNbO3/SiC heterostructure SAW resonator tailored for high-order modes, with its frequency response evaluated via finite-element modeling. A quasi-three-dimensional periodic model consisting of LiNbO3/IDT/SiC structure is established, and the effects of LiNbO3 crystallographic orientation, normalized LiNbO3 thickness, and embedded-Al-electrode thickness on the resonator performance are then systematically investigated. For the selected design with Euler angle β = 30°, the optimal normalized LiNbO3 thickness is found to be hLN/λ=0.2. Under this crystal orientation, the optimized normalized embedded-electrode thickness is hIDT/λ = 0.06. The optimized resonator achieves a resonant frequency of fr = 12.792 GHz, a phase velocity of V = 12,792 m/s, a K2 of 9.16%, and a Q of 1004.4. These investigation results validate the proposed LiNbO3/IDT/SiC heterostructure as a viable platform for pushing SAW technology into the 10 GHz regime, thereby bridging the gap between acoustic-wave devices and millimeter-wave RF systems for next-generation communications.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609484/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Collective Motion and Programmable Self-Organization of Rotating Active Particles Manipulated by Magnetic Fields. 磁场操纵下旋转主动粒子的集体运动和可编程自组织。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-09 DOI: 10.3390/mi17091068

Kailai Wang, Jiawei Li, Leilei Wang, Shishuang Zhang, Xu Zheng, Qilong Zheng, Haihang Cui

{"title":"Collective Motion and Programmable Self-Organization of Rotating Active Particles Manipulated by Magnetic Fields.","authors":"Kailai Wang, Jiawei Li, Leilei Wang, Shishuang Zhang, Xu Zheng, Qilong Zheng, Haihang Cui","doi":"10.3390/mi17091068","DOIUrl":"10.3390/mi17091068","url":null,"abstract":"Rotating magnetic microparticles are classic active matter systems dominated by competing magnetic dipolar attraction and spin-induced hydrodynamic repulsion, whose collective behaviors under programmable magnetic field remain insufficiently characterized. This work builds a two-dimensional orthogonal Helmholtz coil experimental setup to investigate the collective motion and self-organization of magnetic microparticles. For single-component assemblies, the hexatic order parameter varies non-monotonically with driving frequency and particle area fraction; an intermediate frequency range (60-80 Hz) yields optimal hexagonally ordered structures, and a full phase diagram covering clustered, ordered and disordered states is established. Binary mixtures of 200 μm and 300 μm particles display hydrodynamic driven size segregation, with the segregation parameter peaking uniformly at 60 Hz. By applying programmable Lissajous-type magnetic fields with mismatched orthogonal frequencies, we achieve tunable elliptical particle trajectories and controlled splitting of particle clusters. This study reveals the coupling mechanism between magnetic and finite Reynolds number hydrodynamic interactions and proposes a programmable method to dynamically reconfigure active microparticle swarms.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13608911/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062326","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Uncertainty-Aware Machine Learning for Compact-Model-Based Design and Identifiability Analysis of WSe₂p-Channel Transistors. 基于紧凑模型的wse2p通道晶体管设计与可识别性分析的不确定性感知机器学习。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-09 DOI: 10.3390/mi17091070

Zhengran He, Kyeiwaa Asare-Yeboah, Meng Su, Jie Zhao

{"title":"Uncertainty-Aware Machine Learning for Compact-Model-Based Design and Identifiability Analysis of WSe2p-Channel Transistors.","authors":"Zhengran He, Kyeiwaa Asare-Yeboah, Meng Su, Jie Zhao","doi":"10.3390/mi17091070","DOIUrl":"10.3390/mi17091070","url":null,"abstract":"Machine-learning surrogates can accelerate transistor design, but optimized predictions require physical consistency and explicit treatment of surrogate uncertainty. Here, we develop an uncertainty-aware machine-learning framework for compact-model-based design of WSe2p-channel field-effect transistors using an experimentally calibrated S2DS model. A 5000-device dataset spanning channel length, equivalent oxide thickness, hole mobility, contact resistance, impurity density, trap density, and gate-voltage offset was used to train a censor-aware neural-network surrogate for full p-branch transfer-curve prediction at two drain biases. On an independent 750-device test set, the surrogate achieved a mean pointwise R2 of 0.9891 and an exact-coordinate RMSE of 0.0799 decade. The framework further combined inverse-identifiability analysis, Sobol sensitivity analysis, and multiobjective optimization of saturation on-state current, saturation-bias maximum transconductance, normalized drain-bias threshold shift, and threshold-voltage placement. Screening of 262,144 candidate designs yielded 48 Pareto-optimal solutions, of which nine satisfied the uncertainty-screening criteria and six retained all four performance claims after direct S2DS reevaluation. These results demonstrate a physically grounded and uncertainty-aware approach for efficient WSe2 transistor design within an experimentally calibrated compact-model domain.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609425/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Significantly Improving the Power Capability of Water-Jet Guided Laser: An Optical Breakdown Suppression Strategy via Axial Multi-Focal Beam Shaping. 显著提高水射流制导激光器功率性能：一种轴向多焦点光束整形抑制光击穿的策略。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-09 DOI: 10.3390/mi17091071

Dandan Zhao, Yugang Zhao

{"title":"Significantly Improving the Power Capability of Water-Jet Guided Laser: An Optical Breakdown Suppression Strategy via Axial Multi-Focal Beam Shaping.","authors":"Dandan Zhao, Yugang Zhao","doi":"10.3390/mi17091071","DOIUrl":"10.3390/mi17091071","url":null,"abstract":"Water-jet guided laser (WJGL) technology has gained significant attention in precision manufacturing due to its extremely small heat-affected zone. However, laser-induced water breakdown severely constrains the achievable laser power and processing efficiency. This paper presents and validates an optical solution employing a custom-designed rotationally symmetric aspheric lens. The lens is designed to generate a sequence of discrete focal points distributed along the optical axis. This configuration maintains a high average laser power while suppressing the peak power density at each individual focus below the water breakdown threshold. Theoretical modeling and ray tracing simulations confirm the superior performance of the lens in creating a controllable multi-focal beam. Experimental results demonstrate that a WJGL system incorporating the six-focus aspheric lens operates stably at 350 W. This represents a 300 W increase compared to the conventional spherical lens, which had a stable operating power limit of approximately 50 W within this experimental system. In microgroove machining experiments on NiTi alloy, the new system achieved an approximately 3.5-fold increase in groove depth and a 2.7-fold reduction in taper angle. This study provides a practical and effective beam shaping strategy to overcome the fundamental power limitation in WJGL technology.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609405/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062360","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Active Droplet Formation in a Microfluidic Cross-Junction Using Stacked Piezoelectric Actuators. 利用堆叠压电致动器在微流控交叉结中形成主动液滴。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-09 DOI: 10.3390/mi17091069

He Yang, Baokai Huang, Wen Wang, Zhanfeng Chen, Keqing Lu

{"title":"Active Droplet Formation in a Microfluidic Cross-Junction Using Stacked Piezoelectric Actuators.","authors":"He Yang, Baokai Huang, Wen Wang, Zhanfeng Chen, Keqing Lu","doi":"10.3390/mi17091069","DOIUrl":"10.3390/mi17091069","url":null,"abstract":"On-demand droplet formation is of crucial importance to the engineering applications of droplet microfluidics. This work presents an experimental investigation on active control of droplet formation using stacked piezoelectric actuators. Two stacked piezoelectric actuators are placed adjacent to the continuous phase channel, producing periodic excitations on the continuous phase flow. It is found that droplet formation greatly depends on the excitation frequency and voltage. Droplet formation synchronizes piezoelectric excitation at a small excitation frequency, i.e., droplet formation frequency equals excitation frequency and its subharmonics. Beyond a critical value of the excitation frequency, a neglected effect of excitation frequency on droplet generation is observed. The droplet generation frequency could be increased up to ~2.6 times that without excitation. The droplet generation frequency exhibits a stepwise increase with rising excitation voltage. When the droplet formation frequency equals the excitation frequency, droplet formation undergoes filling, necking, and pinching-off. When the droplet formation frequency is half of the excitation frequency, additional refilling and re-necking stages are observed. The regime diagram of the droplet formation frequency in the synchronization mode is presented. The scaling of the generated droplet length is deduced. Since periodic excitations are employed on the continuous phase flow, the proposed active control method could minimize the detrimental impact on biochemical reagents within droplets.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609031/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062517","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Reusable and Soft Self-Adhesive Epidermal Electrodes for Human Skin Enabled by Functional Additives. 可重复使用的柔软自粘人体皮肤表皮电极的功能添加剂。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-08 DOI: 10.3390/mi17091066

Sungmin Bae, Dong-Jin Lee, Chuljin Hwang, Dae Yu Kim

{"title":"Reusable and Soft Self-Adhesive Epidermal Electrodes for Human Skin Enabled by Functional Additives.","authors":"Sungmin Bae, Dong-Jin Lee, Chuljin Hwang, Dae Yu Kim","doi":"10.3390/mi17091066","DOIUrl":"10.3390/mi17091066","url":null,"abstract":"Wearable electronics, particularly dry epidermal electrodes, provide human-connected interfaces for recording biopotential signals. However, their practical utility is often hindered by their limited operational longevity and the resulting environmental burden of electronic waste, as most conventional electrodes are discarded after a single use because of performance degradation. Herein, a reusable, soft, and conductive epidermal electrode is reported, fabricated through the precise incorporation of functional additives. By intentionally modulating the polymer chain architecture, a homogeneous composite is developed that exhibits exceptional flexibility, high conductivity (~100 S/cm), softness (~649 kPa), and stretchability (~234%). This molecular-level design promotes strong intermolecular interactions at the skin-electrode interface, facilitating persistent adhesion and conformability to challenging surfaces, including wet, wrinkled, and stretched skin. These properties enable reliable electrocardiography acquisition through 50 repeated attachment and detachment cycles, over which a commercial Ag/AgCl gel electrode became unmeasurable after 20. The applicability of the electrode to human-machine interfaces is further demonstrated by capturing clear electromyography signals of muscle activity during a rock-paper-scissors game. This low-modulus electrode platform offers a route towards repeated-use wearable healthcare systems and soft-robotics applications, with the potential to reduce the waste associated with single-use electrodes.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609114/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062289","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure. 窄跨梁膜-短梁结构的高灵敏度MEMS压力传感器。

IF 3.5 3区工程技术

Micromachines Pub Date : 2026-09-08 DOI: 10.3390/mi17091062

Tao Wang, Zibang Xiao, Peicang Chen, Meng Nie, Zhen Yan, Shijie Deng, Jing Chen, Xiaolin Wang, Jingquan Liu

{"title":"A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure.","authors":"Tao Wang, Zibang Xiao, Peicang Chen, Meng Nie, Zhen Yan, Shijie Deng, Jing Chen, Xiaolin Wang, Jingquan Liu","doi":"10.3390/mi17091062","DOIUrl":"10.3390/mi17091062","url":null,"abstract":"To address the difficulty of balancing sensitivity and nonlinearity in MEMS piezoresistive pressure sensors, this study proposes an MEMS piezoresistive pressure sensor with a narrow cross-beam membrane-short beam structure. The structure introduces a tapered design at the ends of a conventional cross beam and incorporates short beams to enhance stress concentration in the sensitive regions, thereby improving output sensitivity while maintaining low nonlinearity. Finite-element analysis was performed to evaluate the stress distribution and deflection characteristics and to compare the proposed structure with conventional cross-beam and other diaphragm structures. Under identical overall dimensions, the proposed structure improves sensitivity by 61% relative to the conventional cross beam. Based on the finite-element results, multivariate fitting models for surface stress and deflection were established, and nonlinear optimization was used to determine the constrained optimal geometrical parameters within the validated design domain. Simulation results indicate that, over a pressure range of 0-1 kPa, the proposed sensor achieves a sensitivity of 12.23 mV/V/kPa and a maximum nonlinearity of 0.196% FSS, demonstrating favorable performance for micropressure detection.","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 9","pages":""},"PeriodicalIF":3.5,"publicationDate":"2026-09-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13609132/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149062542","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0