MicromachinesPub Date : 2026-04-14DOI: 10.3390/mi17040473
Tao Zhang, Shichang Yan, Gaoe Qin
{"title":"Lightweight Semantic-Guided FCOS for In-Line Micro-Defect Inspection in Semiconductor Manufacturing.","authors":"Tao Zhang, Shichang Yan, Gaoe Qin","doi":"10.3390/mi17040473","DOIUrl":"10.3390/mi17040473","url":null,"abstract":"<p><p>The relentless miniaturization of semiconductor components and Printed Circuit Boards (PCBs) has rendered Automated Optical Inspection (AOI) of micro-defects a critical bottleneck in modern manufacturing and metrology. While in-line inspection systems offer economically viable and scalable quality control solutions, they impose stringent constraints on both inference latency and detection robustness-particularly for diminutive, sparsely distributed defects (e.g., mouse bites, pinholes) amidst complex, repetitive circuit topologies. To bridge this gap, we present a semantic-enhanced FCOS framework specifically engineered for micro-defect inspection. Our approach introduces two synergistic innovations: (1) a Semantic-Guided Upsampling Unit (SGU) that adaptively reweights channel-spatial features to reconcile the semantic disparity between shallow textural details and deep contextual representations; and (2) a Sparse Center-ness Calibration (SCC) module that enforces high-confidence, spatially sparse supervision to sharpen localization precision and suppress false positives. The SGU is integrated within a Progressive Semantic-Enhanced Feature Pyramid Network (PSE-FPN) that extends multi-scale representations to stride-4 (P2) resolution, while the SCC module is embedded directly into the detection head. Comprehensive evaluations on MS COCO and the real-world DeepPCB dataset validate the efficacy of our design. On COCO, our model achieves 41.8% AP with real-time throughput of 28 FPS on a single NVIDIA 1080Ti GPU. A lightweight variant further attains 41.6% AP at 42 FPS, accommodating high-throughput production environments. For PCB defect detection, the framework delivers 98.7% mAP@0.5, substantially outperforming contemporary detectors. These results demonstrate that semantics-aware, lightweight architectures enable scalable, real-time quality assurance in semiconductor manufacturing.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118466/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-04-14DOI: 10.3390/mi17040470
Oscar Perez-Landeros, Alan Garcia-Gallegos, David Mateos-Anzaldo, Roumen Nedev, Judith Paz-Delgadillo, Mariela Dominguez-Osuna, Evelyn Magaña-Leyva, Ricardo Salinas-Martinez, Mario Curiel-Alvarez
{"title":"Study of the Relation Between the Reynolds Number and the Formation of Au and Ag Nanostructures by Flow-Driven Surface Modification in Microfluidic Reactors.","authors":"Oscar Perez-Landeros, Alan Garcia-Gallegos, David Mateos-Anzaldo, Roumen Nedev, Judith Paz-Delgadillo, Mariela Dominguez-Osuna, Evelyn Magaña-Leyva, Ricardo Salinas-Martinez, Mario Curiel-Alvarez","doi":"10.3390/mi17040470","DOIUrl":"10.3390/mi17040470","url":null,"abstract":"<p><p>Microfluidics enables spatially controlled nanostructure synthesis by coupling confined flows with surface reactions. In this work, we study how geometry-induced laminar microenvironments govern the in situ formation of Au and Ag nanostructures inside 3D-printed microfluidic reactors. Proof-of-concept fish-scale valves were fabricated by masked stereolithography in three architectures designed to define three recurring zones in the microreactor, inside the fish-scales (zone 1), between the fish-scales (zone 2), and along the rows of fish-scales (zone 3). A Cu thin film was deposited on the inner walls of the channel to serve as the sacrificial surface for galvanic replacement using AgNO<sub>3</sub> or HAuCl<sub>4</sub>. Distinct 0D, 1D, and 2D nanostructures were simultaneously obtained in a zone-dependent manner across the valves, including nanoparticle and nanopore-rich regions, nanowires, nanoflakes and clustered 2D features. COMSOL simulations were used to solve the Navier-Stokes equation and extract specific-zone flow descriptors, including Reynolds number, velocity, and wall shear stress, and relate them to the nanostructure morphologies observed by SEM. The flow throughout the devices is strongly laminar, with local Reynolds numbers up to 0.04, exhibiting systematic spatial gradients imposed by the valve geometry. These results provide a design-guided route to tune nanostructure morphology through microchannel architecture under constant global operating conditions.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118167/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147816628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-04-14DOI: 10.3390/mi17040471
Ahmad M Alshorman, Bashar Sh Al-Zu'bi, Omar A Ababneh, Abdel Rahman Al Manasra, Khaled Alshurman, Tarik Alhmoud
{"title":"A Compliant SMA-Actuated Capsule Robot with Integrated Locomotion and Steering for Wireless Capsule Endoscopy.","authors":"Ahmad M Alshorman, Bashar Sh Al-Zu'bi, Omar A Ababneh, Abdel Rahman Al Manasra, Khaled Alshurman, Tarik Alhmoud","doi":"10.3390/mi17040471","DOIUrl":"10.3390/mi17040471","url":null,"abstract":"<p><p>Wireless Capsule Endoscopy (WCE) is a minimally invasive technology for imaging the gastrointestinal (GI) tract, particularly the small intestine, where conventional endoscopy faces accessibility limitations. Traditional capsule endoscopes rely on passive motion driven by natural peristalsis, which limits controllability and may increase the risk of capsule retention. To address these challenges, this study presents the design and experimental validation of a compliant active capsule endoscope actuated by four Shape Memory Alloy (SMA) spring actuators. A key feature of the proposed system is a steering mechanism that reuses the same SMA actuators responsible for locomotion, enabling control of the camera orientation without increasing system complexity, size, or weight. The capsule architecture consists of rigid polylactic acid (PLA) links connected through thermoplastic polyurethane (TPU) flexure hinges, fabricated using dual-material 3D printing. Nonlinear finite element analysis (FEA) was employed to optimize the flexure hinge geometry for maximum displacement while maintaining safe stress levels. To validate the concept, a 3.5× scaled prototype was fabricated and integrated with SMA actuators and an Arduino-based control system. The experimental results demonstrate effective locomotion and steering capabilities, achieving a maximum stroke of approximately 5.4 mm and a steering angle of 24° for the 3.5× scaled prototype, corresponding to an estimated stroke of approximately 1.98 mm (Based on the FEA) at the intended clinical scale. Thermal characterization of the SMA actuators was also conducted to identify suitable operating current ranges for future biomedical deployment. The results demonstrate the feasibility of integrating locomotion and steering within a compact compliant capsule architecture, representing a step toward next-generation capsule endoscopy systems with improved navigation and diagnostic capability.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118210/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Automated Label-Free Classification of Circulating Tumor Cells and White Blood Cells Using Hyperspectral Imaging and Deep Learning on Microfluidic SACA Chip System.","authors":"Shun-Chi Wu, Jon-Nan Chiu, Yi-Wen Chen, Chen-Hsi Hung, Mang Ou-Yang, Fan-Gang Tseng","doi":"10.3390/mi17040472","DOIUrl":"10.3390/mi17040472","url":null,"abstract":"<p><p>Circulating tumor cells (CTCs) are essential biomarkers for cancer prognosis, yet their extreme rarity and biological heterogeneity pose significant challenges for label-free detection. This study presents an automated, non-invasive classification framework integrating a self-assembly cell array (SACA) microfluidic chip with hyperspectral imaging (HSI) and deep learning. By utilizing the SACA chip's 5 µm gap design, patient-derived blood samples were organized into a flattened monolayer, ensuring high-purity spectral acquisition by minimizing cell overlapping. We implemented two deep-learning pipelines: an Attention-Based Adaptive Spectral-Spatial Kernel ResNet (A<sup>2</sup>S<sup>2</sup>K-ResNet) for pixel-level feature extraction and a modified ResNet50 for structural image analysis. While spectral classification achieved ~80% accuracy for cultured cell lines, its performance on patient-derived CTCs was hindered by subtle spectral overlap with white blood cells (WBCs). To overcome this, a multi-band ensemble strategy using majority voting across seven optimized spectral bands (470-900 nm) was developed. This hybrid approach significantly enhanced detection robustness, achieving an overall accuracy of >93.5% and precision exceeding 92%. These results demonstrate that combining microfluidic spatial control with multi-band deep learning offers a reliable, label-free pipeline for clinical liquid biopsy and real-time cancer monitoring.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118043/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-04-13DOI: 10.3390/mi17040469
Renxuan Zhang, Ting Liu, Jianlong Zhao, Gaozhe Cai
{"title":"A Cascaded Dual Spiral Microfluidic Chip for Continuous Separation of Multicomponent Microparticles.","authors":"Renxuan Zhang, Ting Liu, Jianlong Zhao, Gaozhe Cai","doi":"10.3390/mi17040469","DOIUrl":"10.3390/mi17040469","url":null,"abstract":"<p><p>Inertial microfluidics is promising for the high throughput, label-free continuous separation of multicomponent microparticles. However, conventional single spiral microchannels struggle to separate three or more particle types, while traditional cascaded systems relying on sheath fluids or multiple pumps suffer from increased operational complexity. To address this, we propose a cascaded dual spiral microfluidic chip based on passive flow resistance matching. Driven by a single syringe pump without sheath flow, it achieves continuous sorting of three particle types. An adaptive flow resistance network is incorporated: the first stage channel maintains high velocity to preferentially extract large particles via strong inertial lift forces. The fluid then enters the second stage through a predetermined geometric resistance for automatic deceleration. Experiments demonstrate that at 1.6 mL/min, the system achieves continuous separation of a 1:10:10 mixture of 15, 10, and 5 µm microparticles. The 15 µm target recovery rate reaches 92%, while the collection purities for 10 µm and 5 µm particles exceed 98% and 99%, respectively. This purely passive fluidic architecture simplifies cascaded sorting, providing a robust engineering solution for complex multicomponent sample preprocessing.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118683/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817242","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-04-12DOI: 10.3390/mi17040467
Mariya Aleksandrova, Georgi Nikolov, Valentin Mateev, Rade Tomov, Ivo Iliev
{"title":"Method for Patterning of Conductive Polymers on Flexible Substrates with Possible Applications for Wearable Sensing.","authors":"Mariya Aleksandrova, Georgi Nikolov, Valentin Mateev, Rade Tomov, Ivo Iliev","doi":"10.3390/mi17040467","DOIUrl":"10.3390/mi17040467","url":null,"abstract":"<p><p>This study presents a novel fabrication approach for the precise patterning of conductive polymer coatings (graphene/PEDOT:PSS) on flexible substrates. Traditional lithographic methods often result in chemical or thermal degradation of polymer chains, compromising electrical conductivity. The proposed method utilizes an inversely structured gold nanocoating (400-450 nm) as a sacrificial template. By employing a selective lift-off process in a potassium iodide solution, high-resolution polymer topologies are achieved without damaging the active material. The resulting structures exhibit a sheet resistance of 90-100 Ω/sq and maintain linear sensitivity to temperature and humidity, making them suitable for next-generation wearable medical diagnostics.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118768/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-04-12DOI: 10.3390/mi17040468
Xiao Chen, Ying Zhang
{"title":"Underwater Acoustic Target Detection Using a Miniaturized MEMS Hydrophone Array.","authors":"Xiao Chen, Ying Zhang","doi":"10.3390/mi17040468","DOIUrl":"10.3390/mi17040468","url":null,"abstract":"<p><p>Sonar is a fundamental tool for underwater target detection. However, conventional detection systems often suffer from poor sensor consistency and high fabrication costs. More critically, for low-frequency operation, the required array aperture becomes prohibitively large, limiting their deployment on small, mobile underwater platforms. To address the demand for compact, high-performance sensing solutions, this paper presents a miniaturized Micro-electromechanical Systems (MEMS) hydrophone array designed for underwater target detection. The array consists of six elements with a spacing of 0.25 m. Each element is approximately 22 mm in diameter and encapsulated in polyurethane via a casting and curing process. The core sensing element, a MEMS acoustic pressure hydrophone, exhibits a sensitivity of -177.2 ± 1.5 dB (re: 1 V/µPa) across the 20 Hz to 4 kHz frequency range and a noise resolution of approximately 59.5 dB (re: 1 µPa/√Hz) at 1 kHz. A key challenge in array-based detection is the phase mismatch among acquisition channels, which degrades algorithm performance. To mitigate this, we propose a phase self-correction method based on interleaved ADC acquisition control, enabling synchronous multi-channel sampling and effectively eliminating system-level phase errors. Furthermore, to overcome the inherent aperture limitations of conventional beamforming (CBF) applied to a miniaturized array, a differential beamforming (DBF) algorithm is adopted. This approach is less frequency-dependent and can approximate a frequency-invariant beam pattern, making it well-suited for miniaturized arrays. Simulation results confirm the theoretical validity of the DBF algorithm for the proposed MEMS hydrophone array. Sea trial data further demonstrate that this method achieves higher target detection accuracy compared to CBF techniques.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118243/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
MicromachinesPub Date : 2026-04-12DOI: 10.3390/mi17040466
Ke Wang, Xinghua Chen, Boju Hou, Peng Xu, Yufei Li, Xutong Liu, Huirong Shi, Ming Zhang, Hongding Wang
{"title":"Two-Step Polishing Technique for Flat and Smooth Copper Substrates by Electrochemical and Chemical Etching.","authors":"Ke Wang, Xinghua Chen, Boju Hou, Peng Xu, Yufei Li, Xutong Liu, Huirong Shi, Ming Zhang, Hongding Wang","doi":"10.3390/mi17040466","DOIUrl":"10.3390/mi17040466","url":null,"abstract":"<p><p>Methods of single-point diamond turning and chemical mechanical polishing can achieve an ultra-flat substrate. However, these methods which rely on mechanical interactions to achieve material removal can easily lead to defects such as abrasive embedding and scratches on the surface. In addition, for low-rigidity and thin-plate workpieces, clamping deformation and force deformation are critical factors affecting the machining accuracy. This paper proposes a two-step polishing chain that uses controllable electrochemical and chemical etching to correct the shape error of the workpiece. With the optimized parameters, the jet electrochemical machining (Jet-ECM), which uses the electrochemical etching mechanism, is applied to the computer-controlled optical surfacing (CCOS) to achieve the rapid convergence of the shape accuracy. In addition, electrogenerated chemical polishing (EGCP) is implemented as a follow-up process which uses the mechanism of diffusion-controlled chemical etching to reduce the mid-spatial-frequency (MSF) error caused by the computer-controlled optical surfacing. Based on this two-step polishing chain and the self-developed devices, the peak-to-valley (PV) value of the <i>φ</i> 50 mm workpiece (valid dimensions = 90% of the central region) is reduced from 2.678 μm to 0.384 μm. This study has great implications for further understanding the mechanism of Jet-ECM and EGCP, which expands the applications of stress-free polishing to solve the processing problems of the low-rigidity workpiece.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118300/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Patterned Metal Flexible Films as a Strain Sensor with Good Durability and Anti-Corrosion Property.","authors":"Xu Zheng, Qing Wang, Wenming Cao, Wenchao Li, Rui Zhang, Ping Xiang, Yijia Liu","doi":"10.3390/mi17040464","DOIUrl":"10.3390/mi17040464","url":null,"abstract":"<p><p>To prevent corrosion in humid environments and electrical failure under loads, we developed a highly durable corrosion-resistant flexible strain sensor with a patterned sandwich structure. The effects of film dimensions and ambient temperature on the sensor's electrical conductivity were investigated separately. The patterned flexible strain sensor demonstrated exceptional durability, maintaining stability after multiple tensile cycles and large deformations. The PDMS coating effectively protected the conductive layer from external environmental factors. Experimental results revealed that the sensor could efficiently block the corrosive effects of humid environments. Furthermore, when applied to real-time micro-strain detection in steel plate tensile tests, the relationship between Δ<i>R/R</i><sub>0</sub> and strain exhibited high linearity and sensitivity. The conductive film shows excellent durability and corrosion resistance, demonstrating significant application potential as a flexible strain sensor in humid conditions.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118555/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817244","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Mechanism of Tungsten Film Adhesion Enhancement on Alumina Ceramics via Microgroove Spacing During Multi-Abrasive Scratching.","authors":"Xue Yang, Jiayi Wu, Wenlong Liu, Wenhao Ma, Chen Jiang","doi":"10.3390/mi17040465","DOIUrl":"10.3390/mi17040465","url":null,"abstract":"<p><p>During the high-temperature deposition of tungsten thin films on alumina ceramic substrates, the inherent mismatch in thermal expansion coefficients frequently triggers interfacial delamination, where uncontrollable factors in stochastic surface topographies can exacerbate localized stress concentrations. To resolve these interfacial failures, the enhancement of interfacial adhesion through a deterministic surface microgroove design is identified as the general objective of the present research. Within this framework, the establishment of a robust quantitative mapping between the transverse scratching offset distances and the resultant periodic microgeometry is first pursued as a specific experimental objective. This methodological approach effectively transforms the stochastic nature of the substrate into deterministic geometric configurations. Second, a specific numerical objective is fulfilled by evaluating the interfacial stress redistribution and damage evolution utilizing refined thermomechanical coupled simulations based on the cohesive zone model. The integrated findings demonstrate that optimizing the microgroove spacing effectively governs the morphological transition and broadens stress diffusion pathways to mitigate thermal mismatch effects. Specifically, the structural optimization at a spacing of 28.8 µm facilitates an approximately 31.8% reduction in the maximum interfacial stress and a 10% decrease in the average film stress compared to the 13.6 µm spacing. Finally, this research clarifies the underlying mechanisms of stress buffering and provides a rigorous engineering methodology for the structural design of reliable high-performance ceramic-metal interfaces in extreme environments.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"17 4","pages":""},"PeriodicalIF":3.0,"publicationDate":"2026-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC13118814/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147817297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}