Micromachines最新文献

{"title":"Nanomaterial-Powered Biosensors: A Cutting-Edge Review of Their Versatile Applications.","authors":"Payal Patial, Manish Deshwal, Shonak Bansal, Anjana Sharma, Kamaldeep Kaur, Krishna Prakash","doi":"10.3390/mi16091042","DOIUrl":"10.3390/mi16091042","url":null,"abstract":"<p><p>Optimal sensing devices exhibit a combination of key performance attributes, including an extensive detection limit, exceptional selectivity, high sensitivity, consistent repeatability, precise measurement, and rapid response times with efficient analyte flow. In recent years, biosensing platforms incorporating nanoscale materials have garnered considerable attention due to their diverse applications across various scientific and technological domains. The integration of nanoparticles (NPs) in biosensor design primarily bridges the dimensional gap between the signal transduction element and the biological recognition component, both of which operate at nanometer scales. The synergistic combination of NPs with electrochemical techniques has facilitated the development of biosensors characterized by enhanced sensitivity and superior analyte discrimination capabilities. This comprehensive analysis examines the evolution and recent advancements in nanomaterial (NM)-based biosensors, encompassing an extensive array of nanostructures. These consists of one-dimensional nanostructures including carbon nanotubes (CNTs), nanowires (NWs), nanorods (NRs), and quantum dots (QDs), as well as noble metal and metal and metal oxide nanoparticles (NPs). The article examines how advancements in biosensing techniques across a range of applications have been fueled by the growth of nanotechnology. Researchers have significantly improved biosensor performance parameters by utilizing the distinct physiochemical properties of these NMs. The developments have increased the potential uses of nanobiosensors in a wide range of fields, from food safety and biodefense to medical diagnostics and environmental monitoring. The continuous developments in NM-based biosensors are the result of the integration of several scientific areas, such as analytical chemistry, materials science, and biotechnology. This interdisciplinary approach continues to drive innovations in sensor design, signal amplification strategies, and data analysis techniques, ultimately leading to more sophisticated and capable biosensing platforms. As the field progresses, challenges related to the scalability, reproducibility, and long-term stability of nanobiosensors are being addressed through innovative fabrication methods and surface modification techniques. These efforts aim to translate the promising results observed in laboratory settings into practical, commercially viable biosensing devices that can address real-world analytical challenges across various sectors.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471708/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research on Cantilever Beam Roller Tension Sensor Based on Surface Acoustic Wave.","authors":"Yang Feng, Bingkun Zhang, Yang Chen, Ben Wang, Hua Xia, Haoda Yu, Xulehan Yu, Pengfei Yang","doi":"10.3390/mi16091044","DOIUrl":"10.3390/mi16091044","url":null,"abstract":"<p><p>This paper presents a design method for a continuous tension detection sensor based on a cantilever beam structure and compensates for the temperature drift of a SAW sensor based on a neural network algorithm. Firstly, a novel cantilever beam roller structure is proposed to significantly enhance the sensitivity of the transmission of silk thread tension to a SAW tension sensor. Secondly, to improve the sensitivity of the SAW tension sensor, the COMSOL finite element method (FEM) is employed for simulation to determine the optimal IDT placement. An unbalanced split IDT design is utilized to suppress potential parasitic responses. Finally, the designed sensor is tested, and a GA-PSO-BP algorithm is employed to fit the test data for temperature compensation. The experimental results demonstrate that the temperature sensitivity coefficient of the data optimized by the GA-PSO-BP algorithm is reduced by an order of magnitude compared to the raw data, with reductions of 6.0409×10-3 °C-1 and 3.0312×10-3 °C-1 compared to the BP neural network and the PSO-BP algorithm, respectively. The average output error of the optimized data is reduced by 5.748% compared to the sensor measurement data, and it is also lower than both the BP neural network and the PSO-BP algorithm. It provides new design ideas for the development of tension sensors.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12472030/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Multi-Level Scale Attention Fusion Network for Adhesive Spots Segmentation in Microlens Packaging.","authors":"Yixiong Yan, Sijia Chen, Lian Duan, Dinghui Luo, Fan Zhang, Shunshun Zhong","doi":"10.3390/mi16091043","DOIUrl":"10.3390/mi16091043","url":null,"abstract":"<p><p>The demand for high-quality beams from high-power lasers has led to the need for high-precision inspection of adhesion points for collimating lens packages. In this paper, we propose a Multi-Level Scale Attention Fusion Network (MLSAFNet) by fusing a Multi-Level Attention Module (MLAM) and a Multi-Scale Channel-Guided Module (MSCGM) to achieve highly accurate and robust adhesive spots detection. Additionally, we built a Laser Lens Adhesive Spots (LLAS) dataset using automated lens packaging equipment and performed pixel-by-pixel standardization for the first time. Extensive experimental results show that the mean intersection over union (mIoU) of MLSAFNet reaches 91.15%, and its maximum values of localization error and area measurement error are 21.83 μm and 0.003 mm², respectively, which are better than other target detection methods.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471493/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176483","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"RETRACTED: Yang et al. Design and Dynamic Simulation of a Novel Traveling Wave Linear Ultrasonic Motor. <i>Micromachines</i> 2022, <i>13</i>, 557.","authors":"Lin Yang, Kaixi Yao, Weihao Ren, Liang Chen, Mojian Yang, Rongcheng Zhao, Siyu Tang","doi":"10.3390/mi16091041","DOIUrl":"10.3390/mi16091041","url":null,"abstract":"<p><p>The journal retracts the article \"Design and Dynamic Simulation of a Novel Traveling Wave Linear Ultrasonic Motor\" [...].</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12425131/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145033633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research on GNSS/MEMS IMU Array Fusion Localization Method Based on Improved Grey Prediction Model.","authors":"Yihao Chen, Jieyu Liu, Weiwei Qin, Can Li","doi":"10.3390/mi16091040","DOIUrl":"10.3390/mi16091040","url":null,"abstract":"<p><p>To address the issue of decreased positioning accuracy caused by interference or blockage of GNSS signals in vehicle navigation systems, this paper proposes a GNSS/MEMS IMU array fusion localization method based on an improved grey prediction model. First, a multi-feature fusion GNSS confidence evaluation algorithm is designed to assess the reliability of GNSS data in real time using indicators such as signal strength, satellite visibility, and solution consistency; second, to overcome the limitations of traditional grey prediction models in processing vehicle complex motion data, two key improvements are proposed: (1) a dynamic background value optimization method based on vehicle motion characteristics, which dynamically adjusts the weight coefficients in the background value construction according to vehicle speed, acceleration, and road curvature, enhancing the model's sensitivity to changes in vehicle motion state; (2) a residual sequence compensation mechanism, which analyzes the variation patterns of historical residual sequences to accurately correct the prediction results, significantly improving the model's prediction accuracy in nonlinear motion scenarios; finally, an adaptive fusion framework under normal and denied GNSS conditions is constructed, which directly fuses data when GNSS is reliable, and uses the improved grey model prediction results as virtual measurements for fusion during signal denial. Simulation and vehicle experiments verify that: compared to the traditional GM(1,1) model, the proposed method improves prediction accuracy by 31%, 52%, and 45% in straight, turning, and acceleration scenarios, respectively; in a 30-s GNSS denial scenario, the accuracy is improved by over 79% compared to pure INS methods.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471993/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Optimized Design of Sparse Antenna Array for 2D Subarrays Based on GA-PSO Algorithm and Ambiguity Function.","authors":"Jian Yang, Jian Lu, Tong Zhu, Chuanxiang Li, Yinghui Quan","doi":"10.3390/mi16091038","DOIUrl":"10.3390/mi16091038","url":null,"abstract":"<p><p>A sparse antenna array of subarrays can effectively reduce the digital channels of array antennas, system complexities, and hardware cost while simultaneously increasing the antenna aperture. In this study, a new optimal design is proposed for a sparse antenna array of subarrays in the full-phased multiple input multiple output (FPMIMO) operation mode based on genetic algorithm-particle swarm optimization (GA-PSO) and ambiguity functions. The proposed algorithm can adaptively adjust the number of optimization iterations for yielding the optimization results of the PSO algorithm and GA to ensure the global optimization performance of algorithms and combine ambiguity functions to determine the final optimized sparse antenna array of subarrays. The effectiveness of the proposed algorithm is verified via simulation tests.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471872/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145175991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Novel Motion Platform Based on Dual Driving Feet Linear Ultrasonic Motor.","authors":"Yue Jian, Zhen Liu, Ping Yao, Wenjie Zhou, Junfeng He, Huazhuo Liang","doi":"10.3390/mi16091039","DOIUrl":"10.3390/mi16091039","url":null,"abstract":"<p><p>This paper presents a novel motion platform based on a π-shaped linear ultrasonic motor. Initially, a new preload device was designed in accordance with established criteria for high-power linear ultrasonic motors. Mounted on the base structure, this mechanism neither interferes with the stator's high-frequency vibrations nor couples with the mover's motion. Structural parameters were determined through theoretical modeling, while experimental validation confirmed the mechanism's capability to deliver stable and appropriate preload throughout the motor's complete operating cycle, thereby enhancing the platform's operational stability and positioning accuracy. Subsequently, a novel mover was developed by replacing linear guides with a ceramic-ceramic mechanism. This mover features a compact structure and flexible design, facilitating both miniaturization and effective stroke amplification. The resulting platform achieves a 40% reduction in volume compared to conventional designs while extending the stroke to 150% of the original capacity. Finally, a prototype was fabricated and experimentally evaluated. Test results demonstrate output velocities exceeding 200 mm/s in both directions, with positioning accuracy reaching 1.1 μm.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471605/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Mg-Doped P-Type AlN Thin Film Prepared by Magnetron Sputtering Using Mg-Al Alloy Targets.","authors":"Yulin Ma, Xu Wang, Kui Ma","doi":"10.3390/mi16091035","DOIUrl":"10.3390/mi16091035","url":null,"abstract":"<p><p>Aluminum nitride (AlN), a III-V wide-bandgap semiconductor, has attracted significant attention for high-temperature and high-power applications. However, achieving p-type doping in AlN remains challenging. In this study, p-type AlN thin films were fabricated via magnetron sputtering using Mg-Al alloy targets with varying Mg concentrations (0.01 at.%, 0.02 at.%, and 0.5 at.%), followed by ex situ high-temperature annealing to facilitate Mg diffusion and electrical activation. The structural, morphological, and electrical properties of the films were systematically characterized using X-ray diffraction (XRD), white light interferometry (WLI), scanning electron microscopy (SEM), energy-dispersive X-ray spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS), and Hall effect measurements. The results demonstrate that at a Mg doping concentration of 0.02 at.%, the films exhibit optimal crystallinity, uniform Mg distribution, and a favorable balance between carrier concentration and mobility, resulting in effective p-type conductivity. Increasing Mg doping leads to higher surface roughness and the formation of columnar and conical grain structures. While high Mg doping (0.5 at.%) significantly increases carrier concentration and decreases resistivity, it also reduces mobility due to enhanced impurity and carrier-carrier scattering, negatively impacting hole transport. XPS and EDS analyses confirm Mg incorporation and the formation of Mg-N and Al-Mg bonds. Overall, this study indicates that controlled Mg doping combined with high-temperature annealing can achieve p-type AlN films to a certain extent, though mobility and carrier activation remain limited, providing guidance for the development of high-performance AlN-based bipolar devices.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471319/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The Effect of Dual-Layer Carbon/Iron-Doped Buffers in an AlGaN/GaN High-Electron-Mobility Transistor.","authors":"Po-Hsuan Chang, Chong-Rong Huang, Chia-Hao Liu, Kuan-Wei Lee, Hsien-Chin Chiu","doi":"10.3390/mi16091034","DOIUrl":"10.3390/mi16091034","url":null,"abstract":"<p><p>This study compared the effectiveness of gallium nitride (GaN) with a single carbon-doped (C-doped) buffer layer and a composite carbon/iron-doped (C/Fe-doped) buffer layer within an AlGaN/GaN high-electron-mobility transistor (HEMT). In traditional power devices, Fe-doping has a large memory effect, causing Fe ions to diffuse outwards, which is undesirable in high-power-device applications. In the present study, a C-doped GaN layer was added above the Fe-doped GaN layer to form a composite buffer against Fe ion diffusion. Direct current (DC) characteristics, pulse measurement, low-frequency noise, and variable temperature analysis were performed on both devices. The single C-doped buffer layer in the AlGaN/GaN HEMT had fewer defects in capturing and releasing carriers, and better dynamic characteristics, whereas the composite C/Fe-doped buffers, by suppressing Fe migration toward the channel, showed higher vertical breakdown voltage and lower sheet resistance, and still demonstrated potential for further performance tuning to achieve enhanced semi-insulating behavior. With optimized doping concentrations and layer thicknesses, the dual-layer configuration offers a promising path toward improved trade-offs between leakage suppression, trap control, and dynamic performance for next-generation GaN-based power devices.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471957/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Heterogeneous Integration Technology Drives the Evolution of Co-Packaged Optics.","authors":"Han Gao, Wanyi Yan, Dan Zhang, Daquan Yu","doi":"10.3390/mi16091037","DOIUrl":"10.3390/mi16091037","url":null,"abstract":"<p><p>The rapid growth of artificial intelligence (AI), data centers, and high-performance computing (HPC) has increased the demand for large bandwidth, high energy efficiency, and high-density optical interconnects. Co-packaged optics (CPO) technology offers a promising solution by integrating photonic integrated circuits (PICs) directly within or close to electronic integrated circuit (EIC) packages. This paper explores the evolution of CPO performance from various perspectives, including fan-out wafer level packaging (FOWLP), through-silicon via (TSV)-based packaging, through-glass via (TGV)-based packaging, femtosecond laser direct writing waveguides, ion-exchange glass waveguides, and optical coupling. Micro ring resonators (MRRs) are a high-density integration solution due to their compact size, excellent energy efficiency, and compatibility with CMOS processes. However, traditional thermal tuning methods face limitations such as high static power consumption and severe thermal crosstalk. To address these issues, non-volatile neuromorphic photonics has made breakthroughs using phase-change materials (PCMs). By combining the integrated storage and computing capabilities of photonic memory with the efficient optoelectronic interconnects of CPO, this deep integration is expected to work synergistically to overcome material, integration, and architectural challenges, driving the development of a new generation of computing hardware with high energy efficiency, low latency, and large bandwidth.</p>","PeriodicalId":18508,"journal":{"name":"Micromachines","volume":"16 9","pages":""},"PeriodicalIF":3.0,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC12471338/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145176425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}