Journal of Microelectromechanical Systems最新文献

{"title":"Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions","authors":"Zekun Wu;Guangqun Ma;Allen Wang;Guangyin Zhang;Shuda Zhong;Kehao Zhao;Qirui Wang;Yuqi Li;Kevin P. Chen","doi":"10.1109/JMEMS.2025.3580421","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3580421","url":null,"abstract":"This paper presents a rapid prototyping method for fabricating double-sided tape-based microfluidic chips that address limitations in material flexibility, fabrication complexity, and on-chip functionalities. The approach employs biocompatible, low-cost materials—including medical-grade tapes, rubber, and thermoplastics (PMMA, polycarbonate, polystyrene)—micromachined via femtosecond lasers. Solvent- and heat-free tape-based bonding enables efficient fabrication of optically transparent, UV-sterilizable layers for biomedical applications. The method supports integrated on-chip pumps and active/passive valves, achieving bidirectional and multidirectional flow control with minimal external actuation. These components operate at up to 14 psi actuation pressure and <inline-formula> <tex-math>$230~mu $ </tex-math></inline-formula>L/min flow rates, adaptable via chamber dimensions. A dual-pump configuration mimics peristaltic pumping for continuous flow, while a prototype with multidirectional pumps and reservoirs demonstrates dynamic fluid routing and on-demand distribution. The technique offers a versatile, scalable solution for microfluidic applications requiring sterility, optical clarity, and on-chip fluidic control. [2025-0059]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"594-602"},"PeriodicalIF":3.1,"publicationDate":"2025-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204560","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"On the Design of Low Voltage One-Dimensional Piezoelectric MEMS Scanning Micromirror","authors":"Yuanjie Wang;Xiaowei Zhang;Yang Tang;Honghao Wang;Fanjun Zhai;Chenxi Gao;Jianpeng Xing;Chaobo Li;Jing Xie;Dapeng Sun","doi":"10.1109/JMEMS.2025.3578961","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3578961","url":null,"abstract":"In response to the critical need for low-voltage devices in advancing miniaturization technology, this study introduces a groundbreaking piezoelectric micro-electro-mechanical-systems (MEMS) scanning micromirror architecture employing a C-beam cantilever structure. This study employs lead zirconate titanate (PZT) thin films with excellent transverse piezoelectric coefficient (d₃₁) and dielectric constant and innovatively designs and fabricates three micromirror devices (reference design, T-beam design, and C-beam design) that maintain equivalent driving areas. This study demonstrates that the C-beam structure exhibits outstanding performance in driving voltage efficiency. Compared to the T-shaped beam design, under identical scanning angle conditions (30°), the driving voltage is reduced from 70 V_pp to 6 V_pp — a 91.42% reduction. Furthermore, after implementing a pre-polarization process (−30 V, 25 min), the C-beam micromirror achieves the optical scanning angle of 87.56° at 24 V_pp driving voltage. This significant improvement highlights the critical role of structural geometry and pre-polarization treatment in MEMS actuator performance. [2025-0061]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"519-528"},"PeriodicalIF":3.1,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204543","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Spurious Mode Suppression in LiNbO3 A1 Resonators and Filters Beyond 6 GHz With Through-Holes","authors":"Shu-Mao Wu;Chen-Bei Hao;Hao Yan;Zhen-Hui Qin;Si-Yuan Yu;Yan-Feng Chen","doi":"10.1109/JMEMS.2025.3581914","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3581914","url":null,"abstract":"This paper presents the first experimental demonstration of a novel approach to suppressing spurious modes in high-frequency LiNbO3 A1 Lamb wave resonators through the integration of lithography-defined through-hole arrays. Our fabrication-friendly method effectively mitigates spurious modes without compromising resonator performance or requiring additional fabrication steps, while maintaining scalability. Fabricated on a 296-nm Z-cut LiNbO3 thin film, resonators with well-designed through-holes achieve a resonance frequency exceeding 6 GHz and an electromechanical coupling coefficient of 25%. Spurious modes are significantly suppressed, while the resonators’ total suspension area is reduced by over 50%, enhancing both mechanical and thermal stability. When extended to a <inline-formula> <tex-math>$pi $ </tex-math></inline-formula>-type filter with a center frequency of approximately 7.0 GHz and a fractional bandwidth of ~14%, the filter with through-holes demonstrates cleaner passband and improved band edge characteristics. The through-hole design functions as both acoustic scatterers and release channels, offering a unified solution for performance optimization, stability, design flexibility, and manufacturability, thereby establishing Lamb wave resonators with through-holes as a scalable solution for next-generation, multiscale RF systems. [2025-0060]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"529-537"},"PeriodicalIF":3.1,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Monolithic-Wafer-Based Cascade-Actuation XYZ-Microstage With Large Displacement and Low Crosstalk by Integrating an In-Plane Comb-Drive XY-Microstage With Out-of-Plane Al/SiO2 Bimorph Actuators","authors":"Huanyu Dai;Penghong Shi;Zengyi Wang;Junyang Ding;Bing Li;Gaopeng Xue","doi":"10.1109/JMEMS.2025.3581231","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3581231","url":null,"abstract":"This study innovatively proposes and demonstrates a monolithic-wafer-based cascade-actuation XYZ-microstage featuring large displacement strokes and low-crosstalk movements, achieved by integrating an in-plane comb-drive XY-microstage with out-of-plane Al/SiO₂ bimorph thermoelectric actuators for the first time. A three-level serial kinematic scheme within a monolithic wafer, i.e., a three-level frame-in-frame structural configuration, is employed to mitigate motion crosstalk across the X-, Y-, and Z-axes. In the in-plane comb-drive XY-microstage, which comprises four actuation units, both decoupling-motion structural design and capacitance-coupling crosstalk constraints are implemented to ensure low-crosstalk movements along the ±X- and ±Y-axes. Four sets of out-of-plane Al/SiO₂ bimorph actuators independently actuate the comb-drive XY-microstage along the Z-axis. Additionally, mechanical Si-springs are introduced to facilitate electrical interconnections between the XY-microstage and external pads. This design also overcomes the limitation of out-of-plane stroke space in a monolithic wafer, thereby maximizing the actuation potential to achieve significant out-of-plane displacement. A critical step in the microfabrication process involves the successful creation of high-aspect-ratio silicon combs and Al/SiO₂ bimorphs by engineering “step” structures in the handle layer of an SOI wafer, enabling subsequent structure release. Finally, the fabricated monolithic-wafer-based XYZ-microstage can provide large displacements of <inline-formula> <tex-math>$92.3~mu $ </tex-math></inline-formula>m, <inline-formula> <tex-math>$78.3~mu $ </tex-math></inline-formula>m, and <inline-formula> <tex-math>$2.0~mu $ </tex-math></inline-formula>m in the X-, Y-, and Z-directions, respectively. Furthermore, the three-dimensional cascade-actuation configuration within a monolithic wafer is adaptable to various actuation-mode combinations, facilitating multi-degree-of-freedom actuations.[2025-0021]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"581-593"},"PeriodicalIF":3.1,"publicationDate":"2025-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication, Electrochemical Characterization, and In Vivo Validation of a Flexible Neural Probe","authors":"João R. Freitas;José A. Rodrigues;João L. Machado;Leandro A. A. Aguiar;Ana J. Rodrigues;João F. Oliveira;José H. Correia;Sara Pimenta","doi":"10.1109/JMEMS.2025.3579544","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3579544","url":null,"abstract":"The use of flexible neural probes for brain recordings presents several advantages compared to rigid neural probes. The main advantage is related to the reduction of damage to the neural tissue when using a flexible invasive neural probe. This work presents the fabrication, characterization, and <italic>in vivo</i> validation of a flexible neural probe fabricated with photosensitive and low-temperature cured polyimide. The neural probe was fabricated with standard microfabrication technologies, and its dimensions are approximately <inline-formula> <tex-math>$130~mu $ </tex-math></inline-formula>m in width, <inline-formula> <tex-math>$9~mu $ </tex-math></inline-formula>m in thickness, and 6 mm in shaft length. The device has 11 platinum microelectrodes, deposited by direct current sputtering. Electrochemical characterization of the microelectrodes was performed immediately after fabrication and again after six months, showing a final mean impedance in the range of 200-400 k<inline-formula> <tex-math>$Omega $ </tex-math></inline-formula> at 1 kHz, demonstrating their suitability for neural signal detection. Then, insertion tests were performed using an agar phantom and a mouse brain, considering two approaches for implantation. After choosing the best approach, acute <italic>in vivo</i> electrophysiological recordings were performed in an anesthetized mouse, successfully recording spikes and local field potential neural activity from the hippocampus.[2025-0034]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 4","pages":"482-487"},"PeriodicalIF":3.1,"publicationDate":"2025-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144756774","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Toward Memristor-Like Resonant Sensors: Observation of Pinched Hysteresis Within MEMS Resonators","authors":"Erion Uka;Chun Zhao","doi":"10.1109/JMEMS.2025.3581048","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3581048","url":null,"abstract":"Memristors, uniquely characterized by their pinched hysteresis loop fingerprints, have attracted significant research interest over the past decade, due to their enormous potential for novel computation and artificial intelligence applications. Memristors are widely regarded as the fourth fundamental electrical component, with voltage and current being their input and output signals. In broader terms, similar pinched hysteresis behavior should also exist in other physical systems across domains (e.g., physical input and electrical output), hence linking the real physical world with the digital domain (e.g., in the form of a physical sensor). In this work, we report the first observation of pinched hysteresis behavior in a micro-electro-mechanical systems (MEMS) resonator device, showing that it is viable to create resonant MEMS sensors incorporating memristor-like properties, i.e., <italic>MemReSensor</i>. We envisage that this will lay the foundations for a new way of fusing MEMS with artificial intelligence (AI), such as creating in-physical-sensor computing, as well as in-sensor AI, e.g., multi-mode in-sensor matrix multiplication across domains. [2025-0029]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 4","pages":"503-512"},"PeriodicalIF":3.1,"publicationDate":"2025-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144758391","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Piezoresistive Angle Feedback Sensors With Various Schemes in MEMS Micromirrors","authors":"Er-Qi Tu;Xiao-Yong Fang;Fei Zhao;Jia-Hao Wu;Wen-Ming Zhang","doi":"10.1109/JMEMS.2025.3575334","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3575334","url":null,"abstract":"In recent years, the rapid development of Micro-Electro-Mechanical System (MEMS) technology has facilitated the widespread application of MEMS micromirrors in various precision instruments owing to their exceptional optical control capabilities. Meanwhile, the demand for increased accuracy in micromirror control has also grown steadily. This paper evaluates three distinct piezoresistive schemes for angle feedback in MEMS micromirrors, aiming to elucidate their key advantages and limitations while providing guidance for high-accuracy scheme selection. The comparison is based on the piezoresistive behavior of single-crystal silicon under identical n-type doping conditions. The angle feedback sensor is integrated into a custom-designed 1D MEMS electromagnetic micromirror, which features a multi-layer stacked assembly and a moving-magnet driving scheme. The peak-to-peak voltage (Vpp) in the feedback signal is comprehensively analyzed, and the rarely explored DC offset drift is also explicitly discussed. Experimental results reveal that the Wheatstone scheme provides the highest angle feedback sensitivity, measured at 6.96 mV/(V<inline-formula> <tex-math>$cdot $ </tex-math></inline-formula>deg), while the four-terminal scheme exhibits the most stable DC offset drift, with a maximum of only 0.137 mV over the entire test period. [2024-0211]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 4","pages":"472-481"},"PeriodicalIF":3.1,"publicationDate":"2025-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144758438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Near-Spurious-Free 6.5 GHz XBARs With Dimension-Matched and Response-Averaged Electrodes","authors":"Zihao Xie;Xianhao Le;Tengbo Cao;Feng Gao;Qing Wan;Jin Xie","doi":"10.1109/JMEMS.2025.3577619","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3577619","url":null,"abstract":"Lithium niobate (LiNbO₃) laterally excited bulk acoustic wave resonators (XBARs) show great potential for high-frequency, wide-bandwidth radio frequency (RF) filters. However, suppressing spurious mode responses remains a critical challenge. In this study, we demonstrate near-spurious-free 6.5 GHz Z-Y LiNbO₃ XBARs using dimension-matched and response-averaged electrodes. Dispersion analysis of traditional interdigitated transducer (IDT) electrode dimensions reveals that spurious mode response levels are minimized when the electrode width corresponds to half the wavelength of the second-order quasi-antisymmetric (QA2) Lamb mode in the electrode/LiNbO₃ plate. This result holds across a range of electrode thicknesses and exhibits weak dependence on pitch. Based on these matched IDT dimensions, we propose three novel IDT topologies that employ response-averaging strategies to further reduce spurious mode responses without compromising the first-order antisymmetric (A1) Lamb mode. The fabricated devices show good agreement with simulation results, achieving a low-spurious response and moderate performance. This work provides a systematic design framework for low-spurious-response XBARs, offering a path to more reliable and efficient next-generation wireless front-end filters. [2025-0070]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 4","pages":"496-502"},"PeriodicalIF":3.1,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144758389","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nonlinearity Reduction in Three-End Serpentine Torsion Bar of MEMS Mirror","authors":"Xudong Song;Dayong Qiao;Xiumin Song","doi":"10.1109/JMEMS.2025.3576255","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3576255","url":null,"abstract":"Serpentine springs are widely employed in microelectromechanical systems (MEMS) accelerometers, resonators, and mirrors due to their unique advantages, including a wide adjustable stiffness range and minimal area occupation. Despite these advantages, the inherent nonlinearity of the serpentine torsion bars, whose origin remains unclear, imposes limitations on the performance of MEMS mirrors. This study investigates the nonlinearity of the three-end serpentine torsion bars, which consist of middle and side beams. Through the derivation of spring constants for both the middle and side beams and the definition of a nonlinear factor for the serpentine torsion bars, it was established that the nonlinearity is predominantly influenced by the center offset of the side beam. A specific three-end serpentine torsion bar was utilized to examine the effects of the center offset of the side beam. The variation in the cubic spring constant of the serpentine torsion bars (<inline-formula> <tex-math>${k} _{mathbf {3}}$ </tex-math></inline-formula>) was found to closely resemble that of the side beams (<inline-formula> <tex-math>${k} _{mathbf {s3}}$ </tex-math></inline-formula>) during the center offset adjustment, with weak nonlinearity emerging at a small center offset. To validate the effectiveness of the nonlinearity reduction, an electromagnetic MEMS mirror incorporating three-end serpentine torsion bars with weak nonlinearity was designed. Experimental results demonstrated that the MEMS mirror can operate linearly at a frequency of 3002.36 Hz and achieve an optical angle of 95°. This advancement is expected to enhance the performance and expand the application scope of MEMS mirrors.[2025-0073]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 4","pages":"488-495"},"PeriodicalIF":3.1,"publicationDate":"2025-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144756772","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Journal of Microelectromechanical Systems Publication Information","authors":"","doi":"10.1109/JMEMS.2025.3566294","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3566294","url":null,"abstract":"","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 3","pages":"C2-C2"},"PeriodicalIF":2.5,"publicationDate":"2025-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11022992","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144206205","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}