Journal of Microelectromechanical Systems最新文献_第2页

Elimination of Temperature Drift for MEMS Thermal Wind Sensor With On-Chip Surrounding Thermistor 基于片上热敏电阻的MEMS热风传感器温度漂移的消除

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-28 DOI: 10.1109/JMEMS.2025.3591860

Bo Qi;Wenxuan Chen;Han Xu;Zhenxiang Yi;Ming Qin;Lili Gao;Qing-An Huang

{"title":"Elimination of Temperature Drift for MEMS Thermal Wind Sensor With On-Chip Surrounding Thermistor","authors":"Bo Qi;Wenxuan Chen;Han Xu;Zhenxiang Yi;Ming Qin;Lili Gao;Qing-An Huang","doi":"10.1109/JMEMS.2025.3591860","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3591860","url":null,"abstract":"A novel micro-electro-mechanical system (MEMS) thermal wind sensor based on silicon in glass (SIG) technology is proposed to eliminate temperature shift in this work. The on-chip surrounding ambient thermistor, thermally insulated from the heater, is connected to the central thermistor in the constant temperature difference (CTD) circuit. Consequently, temperature drift caused by variations in temperature coefficient of resistance (TCR) between ambient and chip sensing elements due to power supply fluctuations is mitigated. The finite element method (FEM) was employed to optimize the chip structure, ensuring that the silicon substrate remains at ambient temperature without sensitivity deterioration. Wind tunnel experiments demonstrate that the device operates within a range of 0 to 30 m/s, with power consumption varying from 72.3 mW to 116.7 mW. Compared to the sensor with off-chip ambient thermistor, the proposed device can reduce the speed error to <inline-formula> <tex-math>$pm ~0.15$ </tex-math></inline-formula> m/s with a decrease of 62%. Furthermore, temperature chamber experiments reveal that wind speed errors are reduced from <inline-formula> <tex-math>$pm ~0.45$ </tex-math></inline-formula> m/s to <inline-formula> <tex-math>$pm ~0.15$ </tex-math></inline-formula> m/s for the ambient temperature ranging from −10° to 50°C. The proposed MEMS thermal wind sensor, characterized by high precision and low drift, can offer wide-temperature-range application in future. [2025-0084]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"672-680"},"PeriodicalIF":3.1,"publicationDate":"2025-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204571","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Frequency Split Modulation in Micro Hemispherical Resonator Based on Rim Width 基于边缘宽度的微半球谐振器分频调制

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-28 DOI: 10.1109/JMEMS.2025.3589105

Dunxiang Jian;Yan Shi;Xiang Xi;Dingbang Xiao;Xuezhong Wu

{"title":"Frequency Split Modulation in Micro Hemispherical Resonator Based on Rim Width","authors":"Dunxiang Jian;Yan Shi;Xiang Xi;Dingbang Xiao;Xuezhong Wu","doi":"10.1109/JMEMS.2025.3589105","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3589105","url":null,"abstract":"The micro hemispherical resonator is center-symmetric, and the mass and stiffness of the resonator are completely coupled. In instances where manufacturing errors are present, both mass perturbations and stiffness perturbations are introduced concurrently, leading to frequency split. Given that the formation errors of micro hemispherical resonator, specifically mass and stiffness disturbances, are predominantly concentrated in the shell, this paper proposes a micro hemispherical resonator with adjustable rim width, whose rim area is distributed circumferentially around the shell periphery. An equivalent geometric model of the resonator was established, and finite element simulation was used to study the influence of rim width on the frequency split of the resonator under different harmonic errors. It was determined that within a specified error range, adjusting the rim width results in a minimum value for the frequency split. To validate the effectiveness of the simulation results, the rim width was altered using femtosecond laser direct etching, and the resonant frequencies were measured at different rim widths. The experimental findings demonstrated that the frequency split of the resonator attained a minimum at a rim width of 0.7 mm, with a frequency split of only 1.09 Hz (86.44 ppm), which was 8.4 times lower than that at a rim width of 0 mm. Consequently, the method delineated in this paper can effectively mitigate the frequency split of resonator in circumstances where manufacturing errors are unavoidable, thereby significantly reducing the threshold for electrostatic trimming and offering the potential to achieve approximate frequency matching from a structural design perspective.[2025-0088]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"571-580"},"PeriodicalIF":3.1,"publicationDate":"2025-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Modeling and Characterization of Pulse-Width Modulation Driving of Electrostatic Actuators With Polar Dielectrics 极性电介质静电致动器脉宽调制驱动的建模与表征

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-24 DOI: 10.1109/JMEMS.2025.3590146

Felix Wessels;Çağlar Ataman

{"title":"Modeling and Characterization of Pulse-Width Modulation Driving of Electrostatic Actuators With Polar Dielectrics","authors":"Felix Wessels;Çağlar Ataman","doi":"10.1109/JMEMS.2025.3590146","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3590146","url":null,"abstract":"The use of electrostatic actuation is widespread across all areas of MEMS due its speed, ease-of-integration and simplicity. However, its relatively low force density typically requires high driving voltages, especially in parallel-plate configurations. This work presents a modular, high-voltage pulse-width modulation (PWM) driver that can deliver an actuation signal with analogue-like control at voltages of up to 600V and frequencies of up to 10kHz. In comparison to conventional analogue amplifier arrays, this approach can be realized with less expensive components, while enabling using polar liquid dielectrics to boost the resulting force. A detailed analysis of the potential and requirements for liquid dielectrics in combination with PWM is provided as theoretical background. We evaluate the performance of the new driver using a transmissive optofluidic wavefront modulator (Deformable Phase Plate), demonstrating actuation with both non-polar and polar liquid dielectrics. Whereas non-polar liquids lead to a linear force–duty-cycle relationship, the behavior follows a quadratic curve for polar liquids with the maximum force at 50%, with successful operation requiring a minimum frequency depending on the employed liquid. We provide design recommendations for maximizing performance regarding force generation and possible actuation range, taking advantage of the possibility to use polar liquid in electrostatic MEMS actuation. [2025-0106]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"681-690"},"PeriodicalIF":3.1,"publicationDate":"2025-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204550","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A Novel All-Fused Silica MEMS Gyroscope With an Aspect Ratio Exceeding 50:1 一种长宽比超过50:1的新型全熔硅MEMS陀螺仪

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-24 DOI: 10.1109/JMEMS.2025.3589803

Maobo Wang;Qingsong Li;Kai Wu;Xinyu Wang;Zhanqiang Hou;Yan Shi;Xuezhong Wu;Dingbang Xiao

引用次数: 0

Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes 熔融硅电感振动环陀螺仪的焦耳加热分频调谐

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-22 DOI: 10.1109/JMEMS.2025.3580725

Kai Wu;Xinyu Wang;Qingsong Li;Maobo Wang;Yuchao Yang;Xuezhong Wu;Dingbang Xiao

引用次数: 0

Calibration-Free, Split Accelerated Degradation Testing Platform Revealing the Long-Term Reliability of 2-D Micromirrors Without On-Chip Sensors 无校准，分裂加速退化测试平台揭示了无片上传感器的二维微镜的长期可靠性

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-18 DOI: 10.1109/JMEMS.2025.3587456

Ze-Yu Zhou;Kai-Ming Hu;Er-Qi Tu;Heng Zou;Hui-Yue Lin;Fan Yang;Guang Meng;Wen-Ming Zhang

{"title":"Calibration-Free, Split Accelerated Degradation Testing Platform Revealing the Long-Term Reliability of 2-D Micromirrors Without On-Chip Sensors","authors":"Ze-Yu Zhou;Kai-Ming Hu;Er-Qi Tu;Heng Zou;Hui-Yue Lin;Fan Yang;Guang Meng;Wen-Ming Zhang","doi":"10.1109/JMEMS.2025.3587456","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3587456","url":null,"abstract":"Complicated multi-failure mechanisms triggered by distinctive stresses in different harsh environments have become essential yet challenging in reliability research of microelectromechanical systems (MEMS). For this issue, accelerated degradation testing (ADT) is widely used as an efficient strategy to obtain the long-term reliability of MEMS devices in a short amount of time. Therefore, precise and robust monitoring of performance degradation in harsh environments is the foundation of ADTs. However, current electro-mechanical-coupling methods, especially on-chip piezoresistive sensors, exhibit sensitivity shifts and must be calibrated manually at different temperatures, making them costly and restricting the accuracy. Here, we propose a calibration-free, temperature-robust split accelerated degradation testing platform (S-ADTP), which can accurately evaluate the long-term reliability of 2D MEMS micromirrors without any thermal-induced sensitivity shifts. S-ADTP eliminates the error of the FOV detection caused by sensitivity shifts, contributing to higher and more temperature-robust accuracy than electro-mechanical-coupling methods. ADTs with single and multiple stresses are subsequently conducted. Experimental results reveal the distinct failure mechanisms associated with varying environmental conditions, indicating that the crack propagation is the primary failure mode in high-temperature environments, while the demagnetization of permanent magnets becomes dominant in temperature-humidity coupling environments. The work can provide a calibration-free and temperature-robust method without any thermal-induced sensitivity shifts in ADTs for 2D micromirrors, and distinguish the complicated multi-failure mechanisms triggered by distinctive environmental stresses.[2025-0062]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"622-630"},"PeriodicalIF":3.1,"publicationDate":"2025-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204535","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

51.3 GHz Overmoded Bulk Acoustic Resonator Using 35% Scandium Doped Aluminum Nitride 基于35%钪掺杂氮化铝的51.3 GHz超模体声谐振器

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-17 DOI: 10.1109/JMEMS.2025.3587525

Juhun Baek;Stephan Barth;Tom Schreiber;Hagen Bartzsch;John Duncan;Gianluca Piazza

{"title":"51.3 GHz Overmoded Bulk Acoustic Resonator Using 35% Scandium Doped Aluminum Nitride","authors":"Juhun Baek;Stephan Barth;Tom Schreiber;Hagen Bartzsch;John Duncan;Gianluca Piazza","doi":"10.1109/JMEMS.2025.3587525","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3587525","url":null,"abstract":"This work demonstrates an Overmoded Bulk Acoustic Resonator (OBAR) design that incorporates 35% Scandium doped Aluminum Nitride (Sc<sub>0.35</sub>Al<sub>0.65</sub>N) as the piezoelectric layer. The ScAlN OBAR presented here is a Bulk Acoustic Wave (BAW) resonator that excites a second overtone within a stack formed by a ScAlN layer and a set of alternating metallic layers. The metal electrodes act simultaneously as the acoustic cavity and as acoustic Bragg mirrors. Individual resonators are connected to each other by thick floating electrodes and top interconnects to form the devices demonstrated herein. The fabricated ScAlN OBAR with best performance exhibits a series resonant frequency of 51.3 GHz, electromechanical coupling (<inline-formula> <tex-math>$k_{t}^{2}$ </tex-math></inline-formula>) of 6.1% and a Quality factor (Q) at series resonance of 108. The measurements of various ScAlN OBAR devices with different geometries show that Q is increasing as the perimeter and area of the individual resonator increases and <inline-formula> <tex-math>$k_{t}^{2}$ </tex-math></inline-formula> is increasing as the number of resonators in series increases. Material losses and surface roughness with associated acoustic energy leakage are discussed as possible sources of damping in these mmWave resonators. The investigations trace a path for further technological improvement and show that the ScAlN OBAR is a promising device for mmWave acoustics and filtering applications. [2025-0071]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"538-547"},"PeriodicalIF":3.1,"publicationDate":"2025-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Digitally-Assisted Calibration and Control of a Raster-Scanning System Based on MEMS Mirrors 基于MEMS反射镜的光栅扫描系统的数字辅助标定与控制

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-14 DOI: 10.1109/JMEMS.2025.3584552

Paolo Frigerio;Roberto Carminati;Luca Molinari;Marco Zamprogno;Giacomo Langfelder

引用次数: 0

Programmable Acoustofluidic-Powered Miniaturized Robot for Two-Dimensional Swimming 用于二维游泳的可编程声流体动力微型机器人

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-10 DOI: 10.1109/JMEMS.2025.3583342

Yue Feng;Hao Zhang;Shiyu Li;Weiwei Cui

{"title":"Programmable Acoustofluidic-Powered Miniaturized Robot for Two-Dimensional Swimming","authors":"Yue Feng;Hao Zhang;Shiyu Li;Weiwei Cui","doi":"10.1109/JMEMS.2025.3583342","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3583342","url":null,"abstract":"Miniaturized swimming robots have been widely explored for navigation and precise manipulation in low Reynolds number fluids, showing great potential in biomedical applications. In this work, we propose an asymmetric-pattern Lamb wave resonator (LWR) at an operating frequency of 148 MHz and demonstrate it as a wireless driver for two-dimensional swimming robotics. Experimental results show that the resonator immersed in water could generate strong acoustic streaming with highly directional drag forces even under applied powers of ~100 mW. The LWRs are fabricated with standard semiconductor process, leading to convenient design of the operating frequency and device layout. Both the linear motion with a speed of several mm/s and rotation with a speed of more than <inline-formula> <tex-math>$100~^{circ }$ </tex-math></inline-formula>/s have been realized using a four parallelly connected LWR array as the driver. Therefore, by precisely controlling the movement direction and speed of the robot, flexible two-dimensional swimming has been achieved. This work presents a strategy of microscale acoustofluidic principle for the development of miniaturized two-dimensional swimming robots, inspiring the exploration of tiny robots in minimally invasive surgery and drug delivery domains.[2024-0183]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"631-635"},"PeriodicalIF":3.1,"publicationDate":"2025-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing 光热转换薄膜覆盖的三维打印微尺度悬臂梁的原位可逆重复驱动作为4D打印的新途径

IF 3.1 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2025-07-04 DOI: 10.1109/JMEMS.2025.3583086

Tymon Janisz;Karolina Laszczyk;Rafał Walczak

{"title":"In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing","authors":"Tymon Janisz;Karolina Laszczyk;Rafał Walczak","doi":"10.1109/JMEMS.2025.3583086","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3583086","url":null,"abstract":"We present a new approach for in situ actuating of a microscale 3D-printed polymer cantilever utilizing a laser beam. To enable the polymer cantilever deflection, a light-heat converting film consisted of carbon nanotubes (CNT) or nitrocellulose lacquer was applied to the surface of the cantilever. This film causes IR absorption and its efficient conversion into heat that induces local change in the phase of the structural material and, therefore, the cantilever deflection and hence actuation. To our knowledge, this solution has not been previously presented in the literature. The research was conducted on the cantilevers printed using the inkjet technique. The results demonstrated a direct correlation between the laser power supply current and the deflection of the cantilevers tip; with adjusting the current, the beam tip achieved a significant deflection ranging from tens to hundreds of micrometers. Additionally, for 100 cycles, where in one cycle the laser beam was ON-OFF, the cantilever retained its mechanical properties; meanwhile, the film endured. These findings open new possibilities for the practical application of this remote actuation method across various fields of engineering, in micro- and microscale, and beyond, such as 4D printing structuring components and further for advanced actuators and sensors. [2025-0010]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"603-610"},"PeriodicalIF":3.1,"publicationDate":"2025-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11071684","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0