Journal of Microelectromechanical Systems最新文献

{"title":"Acoustic Radiation Actuator by Amplitude-Modulated PMUT for Microspeaker Demonstration","authors":"Juan Pablo Romero-Campos;Andrea Vergara;Shuji Tanaka","doi":"10.1109/JMEMS.2026.3713307","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3713307","url":null,"abstract":"We demonstrate an acoustic radiation force (ARF)–driven microspeaker in which a polyimide (Kapton) membrane is actuated by amplitude-modulated ARF generated by a piezoelectric micromachined ultrasonic transducer (pMUT) array to produce audible sound. The ARF mechanism is first validated through two preliminary experiments: 1) quantification of the force generated by a single pMUT using a lightweight cantilever; and 2) excitation of a Kapton membrane at its natural frequency, confirming ARF-to-mechanical motion transduction via ear-simulator measurements. Building on these results, a 14-element pMUT array achieves peak membrane velocities up to 1.1 cm/s at 8 V and produces sound-pressure levels over the 20 Hz–20 kHz range, including 105 dB at 10 kHz and <inline-formula> <tex-math>$ge 60$ </tex-math></inline-formula> dB at 400 Hz (18 V). The measured velocity exhibits a sub-quadratic dependence on drive voltage (V<inline-formula> <tex-math>${}^{1}cdot ^{28}$ </tex-math></inline-formula>, R<inline-formula> <tex-math>${}^{2} =99.4$ </tex-math></inline-formula>%), indicating an amplitude-dependent reduction in efficiency during array operation. These results establish ARF-based actuation as a viable approach for MEMS microspeakers, while suggesting that higher carrier frequencies and optimized membrane designs may further improve low-frequency performance. [2026-0016]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"814-821"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11618691","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149096996","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Comprehensive Study on MEMS Resonators Subject to Blue Sideband Excitation","authors":"Fangzhou Chen;Yueyang Li;Yancheng Lian;Zhuoyue Zheng;Fengzhe Xu;Junchen Liu;Jinuo Zhou;Jinbo Yang;Chun Zhao;Zheng Wang;Kunfeng Wang;Xudong Zou;Rui P. Martins;Pui-In Mak;Yuan Wang","doi":"10.1109/JMEMS.2026.3703774","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3703774","url":null,"abstract":"This work conducts a comprehensive investigation of the recently emerging blue-sideband excitation (BSE) technique on micro-resonators, exploring the manifold distinctive features that this subject presents, and highlighting its promising potential for practical applications. Commencing with the fundamental mechanisms, this study reveals the excited mode nonlinearity with respect to BSE, which has been unresolved in previous literature. Followed by a corroboration of universality, this study demonstrates consistent BSE characteristics across diverse resonator architectures and validates a single-source driving strategy capable of simultaneously exciting multiple resonant modes. More importantly, we identify a previously unreported inverse-sensitivity phenomenon under BSE. Two distinct synchronous multi-mode operation regimes are observed: in one regime, each mode retains the sensitivity characteristics of conventional single-mode operation; in the other, the sensitivities of the modes are modified but exhibit opposite trends. This intriguing behavior is further investigated, with particular focus on electrostatic perturbation sensitivity and noise floor performance. Furthermore, noise and stability analyses provide comprehensive insights into resonator performance under various excitation conditions. Overall, this work highlights the unique characteristics of BSE-driven MEMS resonators and provides practical guidance for leveraging BSE to enhance device performance, paving the way for next-generation high-precision MEMS resonators.[2026-0004]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"792-805"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097044","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Suspended Lithium Niobate Single-Crystal Thin Film Arrays for High-Speed Infrared Pyroelectric Sensing","authors":"Yuqing Hu;Jiayi Liu;Qing Wan;Xianhao Le","doi":"10.1109/JMEMS.2026.3717270","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3717270","url":null,"abstract":"Conventional infrared detectors, hindered by millisecond-level response speeds, fail to meet the demands of ultrafast dynamic sensing in security, medical care, and other fields. While pyroelectric detectors offer cooling-free, room-temperature operation, traditional materials suffer from slow thermal relaxation, severely limiting high-speed performance. To overcome this bottleneck, this work implements a material-structure synergistic optimization strategy. We developed a high-speed pyroelectric device integrating a specific Y-41-cut LiNbO₃ single-crystal thin film with a planar array structure. In addition, the device incorporates an SiO₂ infrared absorption layer to enhance photothermal conversion efficiency. The fabricated device achieves a remarkable response time of <inline-formula> <tex-math>$31~mu $ </tex-math></inline-formula>s and maintains stable voltage output under 60 kHz laser excitation. This synergistic approach successfully breaks through traditional speed limitations, providing a significant technical advancement for high-performance infrared pyroelectric detection systems. [2026-0037]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"765-767"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097174","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Closed-Form Model for Laterally Driven Electrostatic Combs With or Without Overlap","authors":"Alejandro Godinez Perez Medina;Alexis Brenes;Jérôme Juillard","doi":"10.1109/JMEMS.2026.3706108","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3706108","url":null,"abstract":"This letter presents a closed-form model for laterally-driven electrostatic combs with zero or negative overlap (disengaged combs). In this case, capacitance is determined by the fringing fields between the tips of the fingers, resulting in a complex dependence on position and on the ratio of finger width to gap. We propose a single analytical formula which accurately captures these effects for a wide range of geometries and is valid in the better-known large overlap case. Our model relies on conformal mapping techniques. We first derive an analytical formula in the case of comb fingers with infinitesimal width compared to the gap. This formula is then adjusted to account for finite finger width by fitting with numerical simulations. The resulting model is validated through a comparison to experimental measurements taken from literature. [2026-0045]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"756-758"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097765","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Thickness-Field Excited Bimorph Lithium Niobate Piezoelectric Transducer","authors":"Vakhtang Chulukhadze;Zihuan Liu;Lezli Matto;Ziqian Yao;Michael Liao;Tzu-Hsuan Hsu;Mark S. Goorsky;Neal Hall;Ruochen Lu","doi":"10.1109/JMEMS.2026.3708315","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3708315","url":null,"abstract":"This work presents the first demonstration of a thickness-field-excited (TFE) lithium niobate (LN) flexural mode piezoelectric transducer. A <inline-formula> <tex-math>$mathrm {300~mu text {m} }$ </tex-math></inline-formula>-thick periodically poled piezoelectric (P3F) 36Y LN bimorph is used to prototype. The transducer features a robust mechanical structure and optimized design, achieving a high electromechanical coupling coefficient (<inline-formula> <tex-math>$k^{2}$ </tex-math></inline-formula>) of 5% with a flexural-mode resonance of 115 kHz. Laser Doppler vibrometer (LDV) measurements indicate a good mode shape, whereas impedance measurements indicate excellent dielectric loss. The resulting TFE transducer exhibits high performance, linearity, and integrability, indicating promise as a low-loss, robust piezoelectric transducer platform. These results motivate a closer examination of the TFE LN piezoelectric micromachined ultrasonic transducer (PMUT) with a high capacitance density.[2026-0063]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"762-764"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097930","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An Integrated Microelectromechanical Conductivity--Temperature--Depth Sensor With Small Size, High Resolution, and High Accuracy","authors":"Neng Wan;Liying Wang;Youxuan Fan;Peng Chen;Zong Tan;Hang Ye;Yuxiang Cui;Xiaofei Shi;Jianqiu Huang;Xiaobing Zhang","doi":"10.1109/JMEMS.2026.3713839","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3713839","url":null,"abstract":"Salinity, temperature and depth (CTD) are fundamental environmental parameters in oceanography, which play a critical role in marine scientific research, ecological conservation, and resource exploration. CTD sensors fabricated using micro-electro-mechanical system (MEMS) technology offer significant advantages, including small size, low power consumption, cost-effectiveness, and high performance, making them a prominent research focus over the past decade. In this study, we developed a miniaturized integrated CTD MEMS sensor chip by combining three sensing elements: a piezoresistive pressure sensor, a four-electrode conductivity sensor, and a platinum resistance temperature sensor, utilizing a standardized MEMS fabrication process. The chip has a size of <inline-formula> <tex-math>$2times 2times 0.9$ </tex-math></inline-formula> mm³. Our best chip shows conductivity (for salinity) resolution of <inline-formula> <tex-math>$sim ~0.0005$ </tex-math></inline-formula> mS/cm, temperature resolution of <inline-formula> <tex-math>$sim ~0.0027~^{circ }$ </tex-math></inline-formula>C and pressure resolution (for depth) of <inline-formula> <tex-math>$sim $ </tex-math></inline-formula>0.67 kPa (6.7 cm water depth). An AI (artificial intelligent) algorithm is also employed to enhance the performance of the CTD sensor. After optimization, the accuracies of the sensors decreased from 0.02°C to 0.004°C (temperature sensor), from 0.02 MPa to 0.002 MPa (pressure sensor), from 0.08 mS/cm to 0.02 mS/cm (conductivity sensor), respectively. Chips with moderate or lower performance (due to the natural distribution induced by process deviation) thus got enhance with comparable performance with the best chips. The current report indicates that the MEMS CTD sensor, embedded with the AI algorithm, might be a viable route towards future marine applications.[2026-0026]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"882-890"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Compact Broadband Multi-Frequency PMUT Arrays for Photoacoustic Vascular Sensing","authors":"Yexing Fang;Mengyue Zhang;Aocheng Bao;Chong Yang;Bowen Sheng;Changhui Li;Yipeng Lu","doi":"10.1109/JMEMS.2026.3713345","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3713345","url":null,"abstract":"Continuous cuffless blood-pressure (BP) monitoring requires compact sensors capable of tracking arterial diameter with high repeatability. Time-resolved photoacoustic (PA) sensing is attractive because vessel diameter is directly encoded in the temporal separation between the anterior- and posterior-wall arrivals in the PA A-line signal, eliminating the need for beamforming and image reconstruction. Here, we present a compact (2.5 mm <inline-formula> <tex-math>$times,, 5$ </tex-math></inline-formula> mm) multi-frequency piezoelectric micromachined ultrasonic transducer (PMUT) receiver fabricated by a cavity silicon-on-insulator (CSOI) process. The high-fill-factor design provides three receive bands centered at approximately 3.5, 5.5, and 11 MHz, with PA −6 dB fractional bandwidths of 126%, 103%, and 110%, respectively. Owing to the large effective acoustic aperture and low-noise front-end readout, the low-frequency array achieves a noise-equivalent pressure (NEP) of <inline-formula> <tex-math>$2.9~boldsymbol {mPa}/sqrt { boldsymbol {Hz}}$ </tex-math></inline-formula> at 3.5 MHz. Using a compact 532 nm pulsed laser delivering <inline-formula> <tex-math>$sim 5~mu $ </tex-math></inline-formula>J/pulse, the system resolved vessel phantoms with inner diameters down to 1.0 mm at a depth of 5 mm in an optically clear medium, detected PA signals up to 40 mm in clear media, and maintained vessel detection up to 6 mm in a scattering tissue-mimicking medium. These results demonstrate that complementary low-, mid-, and high-frequency PMUT arrays can jointly provide penetration depth and diameter resolution within a compact footprint, supporting the development of wearable PA sensors for cuffless vascular monitoring. [2026-0042]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"822-830"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097065","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fabrication and Characterization of High Magnetostrictive FeCoCr Thin Film and MEMS Magnetic Micro-Cantilevers","authors":"Khushbu Khandal;Vinita;J. Arout Chelvane;Prashant Sharma;Jitendra Singh","doi":"10.1109/JMEMS.2026.3707335","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3707335","url":null,"abstract":"This study presents the design, fabrication, and comprehensive characterization of as-deposited magnetostrictive FeCo and FeCoCr thin films based micro-cantilevers. Chromium (Cr) was systematically doped into the FeCo thin films to investigate its effect on their magnetostrictive properties. The magnetostriction coefficient was precisely evaluated using a non-contact stroboscopic Laser Doppler Vibrometer (LDV) setup, where a Si/SiO₂/FeCoCr microcantilever served as the mechanical transducer, converting magnetic energy into mechanical energy. The microcantilever was subjected to an in-plane external DC magnetic field, oriented either parallel or perpendicular to its length. Results revealed that increasing Cr content significantly enhanced the magnetostrictive response, achieving a peak value of magnetostriction approximately 151 ppm. Additionally, Cr incorporation improved the films mechanical, electrical, and structural properties, yielding a saturation magnetization of about 1172 emu/cm³, a residual tensile stress of + 85.53 MPa, a resistivity of around <inline-formula> <tex-math>$85.54~mu Omega $ </tex-math></inline-formula>-cm, and an average grain size of ~35 nm. These properties establish that FeCoCr thin films are promising material for micro-magnetic sensors and as efficient alternatives for electrode materials for the MEMS applications.[2026-0033]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"891-899"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Experimental Characterization and Optimization of Palladium-Coated Laterally Vibrating Resonators for High-Sensitivity Hydrogen Sensing","authors":"Gaia Giubilei;Farah Ben Ayed;Pietro Simeoni;Zhenyun Qian;Matteo Rinaldi","doi":"10.1109/JMEMS.2026.3721013","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3721013","url":null,"abstract":"This paper presents the experimental characterization and optimization of palladium (Pd)-coated aluminum nitride (AlN) laterally vibrating resonators (LVRs) for high-sensitivity hydrogen (H₂) detection. The sensing mechanism relies on hydrogen-induced biaxial compressive stress in the Pd film, which shifts the resonant frequency through stress-frequency transduction, enabling compact, selective, and high-resolution H₂ monitoring for leak-detection applications. Pd-coated LVRs operating from 123 to 396 MHz were fabricated on a single 4-inch wafer, enabling a controlled study of the combined effects of operating frequency, Pd thickness, and residual stress on electromechanical performance and sensing response. Quality factors reaching <inline-formula> <tex-math>$Q = 1625$ </tex-math></inline-formula> and electromechanical coupling coefficients reaching <inline-formula> <tex-math>$k_{t}^{2} = 1.94%$ </tex-math></inline-formula> were achieved, representing a <inline-formula> <tex-math>$2.7times $ </tex-math></inline-formula> improvement in Q over prior ScAlN-based implementations. Sensitivity increases monotonically with frequency (15 to 54 Hz/ppm at 123–396 MHz for 100 nm Pd) and with Pd thickness (<inline-formula> <tex-math>$8.5times $ </tex-math></inline-formula> from 100 to 200 nm). Residual stress is identified as a previously underreported optimization lever, producing a <inline-formula> <tex-math>$2.6times $ </tex-math></inline-formula> sensitivity enhancement for the same Pd thickness. The 317 MHz device with 150 nm Pd is identified as the optimal design point (<inline-formula> <tex-math>$Q = 1411$ </tex-math></inline-formula>, <inline-formula> <tex-math>$k_{t}^{2} = 0.92%$ </tex-math></inline-formula>), achieving a peak sensitivity of 772 Hz/ppm in the low-concentration regime with <inline-formula> <tex-math>$t_{90} approx 10$ </tex-math></inline-formula> min, establishing Pd-coated AlN LVRs among the most sensitive resonant H₂ sensors reported to date.[ 2026-0081]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"923-937"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097382","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Low-Voltage-Driven Dual-Band Tunable Fabry--Pérot Filter","authors":"Beichen Zhou;Chuheng Fu;Ningkang Dai;Yupeng Yan;Ying Jin;Gaopeng Xue;Min Wang","doi":"10.1109/JMEMS.2026.3720621","DOIUrl":"https://doi.org/10.1109/JMEMS.2026.3720621","url":null,"abstract":"Dual-band tunable filters are crucial for compact infrared detection, spectroscopy, and multi-band information acquisition, especially in short-wave infrared (SWIR) and mid-wave infrared (MWIR) systems. However, existing schemes rely on complex structures, leading to high complexity, poor integrability, and difficulty in stable low-voltage dual-band tuning. To solve these issues, we propose a low-voltage dual-band tunable MEMS Fabry–Pérot (F-P) filter for SWIR and MWIR, which is composed of an electrostatically actuated tunable air cavity sandwiched by a Dual-Band Mirror (DBM). The fabricated device achieves continuous dual-band spectral tuning under a driving voltage less than 15 V. The tuning ranges of 226 nm (2169-2394 nm) in SWIR and 440 nm (3816-4255 nm) in the MWIR are realized respectively, with an average transmittance above 60%. These results demonstrate the feasibility of the DBM design for low-voltage-driven and high-efficiency dual-band tuning applications. [2026-0067]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"35 5","pages":"967-973"},"PeriodicalIF":3.5,"publicationDate":"2026-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"149097245","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}