熔融硅电感振动环陀螺仪的焦耳加热分频调谐

IF 3.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2025-07-22 DOI:10.1109/JMEMS.2025.3580725

Kai Wu;Xinyu Wang;Qingsong Li;Maobo Wang;Yuchao Yang;Xuezhong Wu;Dingbang Xiao

{"title":"熔融硅电感振动环陀螺仪的焦耳加热分频调谐","authors":"Kai Wu;Xinyu Wang;Qingsong Li;Maobo Wang;Yuchao Yang;Xuezhong Wu;Dingbang Xiao","doi":"10.1109/JMEMS.2025.3580725","DOIUrl":null,"url":null,"abstract":"Frequency splitting occurs between the degenerate modes of MEMS ring gyroscopes due to manufacturing errors, which severely restricts their performance. This letter presents a frequency split tuning method based on Joule heating in a fused silica inductive vibrating ring gyroscope. A specially designed wire layout generates a temperature gradient on the resonant structure when current flows through, causing different frequency shifts in the two degenerate modes, thus achieving frequency split tuning. This method successfully enabled mode matching for a gyroscope with an initial frequency split of 1.47 Hz, demonstrating a frequency split tuning capability of 58 Hz/W.[2025-0075]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"513-515"},"PeriodicalIF":3.1000,"publicationDate":"2025-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes\",\"authors\":\"Kai Wu;Xinyu Wang;Qingsong Li;Maobo Wang;Yuchao Yang;Xuezhong Wu;Dingbang Xiao\",\"doi\":\"10.1109/JMEMS.2025.3580725\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Frequency splitting occurs between the degenerate modes of MEMS ring gyroscopes due to manufacturing errors, which severely restricts their performance. This letter presents a frequency split tuning method based on Joule heating in a fused silica inductive vibrating ring gyroscope. A specially designed wire layout generates a temperature gradient on the resonant structure when current flows through, causing different frequency shifts in the two degenerate modes, thus achieving frequency split tuning. This method successfully enabled mode matching for a gyroscope with an initial frequency split of 1.47 Hz, demonstrating a frequency split tuning capability of 58 Hz/W.[2025-0075]\",\"PeriodicalId\":16621,\"journal\":{\"name\":\"Journal of Microelectromechanical Systems\",\"volume\":\"34 5\",\"pages\":\"513-515\"},\"PeriodicalIF\":3.1000,\"publicationDate\":\"2025-07-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Microelectromechanical Systems\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11089503/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Microelectromechanical Systems","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11089503/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

摘要

由于制造误差，MEMS环形陀螺仪的简并模之间会产生频裂，严重制约了其性能。本文介绍了一种基于焦耳加热的熔融硅电感振动环陀螺仪的分频调谐方法。特殊设计的导线布局在电流流过时在谐振结构上产生温度梯度，使两种简并模式发生不同的频移，从而实现分频调谐。该方法成功地实现了初始分频为1.47 Hz的陀螺仪的模式匹配，证明了分频调谐能力为58 Hz/ w。[2025-0075]

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes

Frequency splitting occurs between the degenerate modes of MEMS ring gyroscopes due to manufacturing errors, which severely restricts their performance. This letter presents a frequency split tuning method based on Joule heating in a fused silica inductive vibrating ring gyroscope. A specially designed wire layout generates a temperature gradient on the resonant structure when current flows through, causing different frequency shifts in the two degenerate modes, thus achieving frequency split tuning. This method successfully enabled mode matching for a gyroscope with an initial frequency split of 1.47 Hz, demonstrating a frequency split tuning capability of 58 Hz/W.[2025-0075]

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.