基于MEMS反射镜的光栅扫描系统的数字辅助标定与控制

IF 3.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2025-07-14 DOI:10.1109/JMEMS.2025.3584552

Paolo Frigerio;Roberto Carminati;Luca Molinari;Marco Zamprogno;Giacomo Langfelder

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引用次数: 0

摘要

这项工作公开了基于MEMS微镜的光栅扫描投影系统的实现，包括基于预测器的控制和嵌入式再校准功能。该系统的设计目标是1280 × 720像素的图像。两个独立的反射镜用于引导单个调制激光源穿过屏幕：一个在其共振频率下工作，执行正弦水平扫描，而另一个在准静态状态下工作，执行垂直扫描。当利用双向扫描时，目标分辨率的最大帧率为60 Hz。水平扫描的幅值和频率误差分别为18.5 mdeg和52 ppm，而垂直扫描的线性度为3.4 mdeg，即视场的580 ppm，平均帧间再现性为5.5 mdeg。(2025 - 0068)

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Digitally-Assisted Calibration and Control of a Raster-Scanning System Based on MEMS Mirrors

This work discloses the implementation of a raster-scanning projection system based on MEMS micromirrors, including predictor-based control and an embedded recalibration feature. The system is designed to target an image of

$1280\times 720$

pixels. Two separate mirrors are used to steer a single, modulated, laser source across the screen: one, operated at its resonance frequency, performs a sinusoidal horizontal scan, while the second, operated in the quasi-static regime, performs the vertical scan. The maximum frame rate at the target resolution is 60 Hz when bidirectional scanning is exploited. The amplitude and frequency errors of the horizontal scan are 18.5 mdeg and 52 ppm, respectively, while the linearity of the vertical scan is 3.4 mdeg, i.e., 580 ppm of the field-of-view, with a mean frame-to-frame reproducibility of 5.5 mdeg. [2025-0068]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.