Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

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An accumulative wear prediction method of planetary roller screw mechanism with multi-source errors 多源误差行星滚子丝杠机构累积磨损预测方法
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-17 DOI: 10.1016/j.precisioneng.2025.12.014
Mingcai Xing , Shuo Liu , Mingkang Wang , Yi Cui , Qiangqiang Huang , Songyu Li
{"title":"An accumulative wear prediction method of planetary roller screw mechanism with multi-source errors","authors":"Mingcai Xing ,&nbsp;Shuo Liu ,&nbsp;Mingkang Wang ,&nbsp;Yi Cui ,&nbsp;Qiangqiang Huang ,&nbsp;Songyu Li","doi":"10.1016/j.precisioneng.2025.12.014","DOIUrl":"10.1016/j.precisioneng.2025.12.014","url":null,"abstract":"<div><div>During the machining process of planetary roller screw mechanism (PRSM), the multiple geometrical errors are produced and the multiple errors play the significant roles in wear evolution of PRSM. However, the accumulative wear evolution of PRSM with multi-source errors has remained unclear. This work proposes the accumulative wear prediction model of PRSM with multi-source errors. The accumulative wear evolution of screw, rollers and nut with multi-source errors are elucidated based on the measuring roller nominal diameter error (RNDE), screw eccentric error (SEE) and nut eccentric errors (NEE). The comprehensive effects of RNDE, SEE and NEE on the accumulative wear evolution of PRSM are investigated. It is found that the multi-source errors cause the inconsistency in the accumulative wear depth among multiple rollers, and the reasonable errors matching can reduce the accumulative wear of nut.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 262-271"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145790627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Collaborative control of surface quality and stability in hemispherical resonator grinding 半球形谐振腔磨削表面质量与稳定性的协同控制
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-13 DOI: 10.1016/j.precisioneng.2025.12.013
Jiangang Sun , Henan Liu , Biao Qin , Jian Cheng , Mingjun Chen
{"title":"Collaborative control of surface quality and stability in hemispherical resonator grinding","authors":"Jiangang Sun ,&nbsp;Henan Liu ,&nbsp;Biao Qin ,&nbsp;Jian Cheng ,&nbsp;Mingjun Chen","doi":"10.1016/j.precisioneng.2025.12.013","DOIUrl":"10.1016/j.precisioneng.2025.12.013","url":null,"abstract":"<div><div>During the grinding of hemispherical resonator and other hard-brittle complex curved components, variations in geometric features lead to changes in contact conditions and force states, inducing non-uniform wheel wear and resulting in fluctuations in workpiece surface quality. Previous studies have indicated that grinding parameters are key factors influencing surface integrity and wheel wear behavior in the machining of hard-brittle materials. Building on this understanding, an optimization strategy centered on the grinding ratio is proposed herein for the first time to achieve simultaneous improvement of workpiece surface quality and wheel lifespan. Initially, a correlation model between grinding parameters and the grinding ratio was established using multiple linear regression and analysis of variance, revealing the evolution of wheel wear behavior and workpiece surface integrity under different grinding ratio conditions. Furthermore, a multi-objective optimization model tailored for hemispherical resonator was formulated, and the non-dominated sorting genetic algorithm (NSGA-II) combined with the ideal distance method was employed to determine the optimal grinding parameters. Experimental results demonstrate that, following optimization, hemispherical resonator surface roughness can be maintained within 68.90–76.94 nm, representing an improvement of 21.62 %–37.05 % compared with conventional grinding parameters, while the fluctuation range decreased by 33.14 %. Moreover, under the same material removal volume, wheel wear was reduced by 16.07 %–35.14 %. The proposed grinding ratio–centered optimization framework provides a theoretical basis for achieving high-quality and stable machining of hard-brittle complex curved components while extending wheel lifespan.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 224-235"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145790630","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thermal error modeling and multi-objective optimization design to enhance the thermal stability of interferometers 提高干涉仪热稳定性的热误差建模和多目标优化设计
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-11-24 DOI: 10.1016/j.precisioneng.2025.11.026
Yongjun Wang , Wan Fang , Ke Zhang , Zhengyu Wang , Chengyao Zhang , Xiaojuan Mo , Zhenying Cheng , Ruijun Li
{"title":"Thermal error modeling and multi-objective optimization design to enhance the thermal stability of interferometers","authors":"Yongjun Wang ,&nbsp;Wan Fang ,&nbsp;Ke Zhang ,&nbsp;Zhengyu Wang ,&nbsp;Chengyao Zhang ,&nbsp;Xiaojuan Mo ,&nbsp;Zhenying Cheng ,&nbsp;Ruijun Li","doi":"10.1016/j.precisioneng.2025.11.026","DOIUrl":"10.1016/j.precisioneng.2025.11.026","url":null,"abstract":"<div><div>Structural deformations caused by environmental temperature fluctuations and local heat sources are the primary factors affecting the accuracy of high-precision instruments. An optimal method based on a multi-objective genetic algorithm has been proposed and demonstrated to enhance thermal stability in interferometers. A mathematical model relating the thermal error of the interferometer to temperature fluctuations and the uniformity of the temperature field is established. Finite element analysis is conducted to evaluate the overall temperature distribution of the interferometers. The temperature field is optimized using a multi-objective genetic algorithm, and stability experiments are carried out on the interferometers both before and after optimization. As a result, the temperature fluctuation of the interferometer is reduced by 60.6 %, while temperature field uniformity and interferometer stability are improved by 55.9 % and 55.1 %, respectively. The experimental results indicate that the temperature field optimization method based on NSGA-II effectively improves the thermal stability of interferometers.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 63-74"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618674","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effects of lubrication performance on multi-roller statics characteristics of planetary roller screw mechanism with errors 润滑性能对误差行星滚子丝杠机构多滚子静力学特性的影响
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-11-21 DOI: 10.1016/j.precisioneng.2025.11.024
Mingcai Xing , Zhenwen Cheng , Shuo Liu , Meide Yang
{"title":"Effects of lubrication performance on multi-roller statics characteristics of planetary roller screw mechanism with errors","authors":"Mingcai Xing ,&nbsp;Zhenwen Cheng ,&nbsp;Shuo Liu ,&nbsp;Meide Yang","doi":"10.1016/j.precisioneng.2025.11.024","DOIUrl":"10.1016/j.precisioneng.2025.11.024","url":null,"abstract":"<div><div>In this work, the multi-roller statics model of planetary roller screw mechanism (PRSM) considering the lubrication performance is established. The effects of oil film stiffness on multi-roller statics characteristics are investigated. The thread-pair oil film stiffness on screw-roller side (SRS) and nut-roller side (NRS) are described, and the thread-pair engagement stiffness with oil film is calculated. The thread-pair load distribution (TPLD) on SRS and NRS with and without lubrication are compared for PRSM. Furthermore, the influences of lubrication performance on the multi-roller load sharing (MRLS) and TPLD with pitch error, roller nominal diameter error (RNDE), screw eccentric error (SEE) and nut eccentric error (NEE) are studied. It is found that the lubrication performance reduces the uniformity of MRLS and TPLD.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 1-12"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145584614","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Digital twin-driven spatial error distribution modeling for a four-station laser tracker system 数字双驱动四站激光跟踪系统的空间误差分布建模
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-12 DOI: 10.1016/j.precisioneng.2025.12.012
Yiliang Lin, Enchen Wu, Xiaolong Wang, Wei Wang, Ting Ding, Qiuyu Zhang, Xiaoye He
{"title":"Digital twin-driven spatial error distribution modeling for a four-station laser tracker system","authors":"Yiliang Lin,&nbsp;Enchen Wu,&nbsp;Xiaolong Wang,&nbsp;Wei Wang,&nbsp;Ting Ding,&nbsp;Qiuyu Zhang,&nbsp;Xiaoye He","doi":"10.1016/j.precisioneng.2025.12.012","DOIUrl":"10.1016/j.precisioneng.2025.12.012","url":null,"abstract":"<div><div>This study presents a digital-twin approach for characterizing and correcting spatial errors in a four-laser-tracker multistation measurement system (FLTMMS). A CMM-calibrated tetrahedral artifact was measured in multiple orientations; the data were used to fit a polynomial error model for systematic deviations. Uncertainty was quantified with a kernel-density-estimation Monte Carlo method that propagates measurement and model uncertainties within the digital twin. Validation experiments assessed correction performance and uncertainty prediction. After correction, the point-wise standard uncertainty decreased from 12.491 to 8.136 μm, whereas the nearly unchanged edge length uncertainty (5.358 → 5.334 μm) reflects geometry-limited propagation. Coverage-probability tests showed close agreement with theory—71 %, 96 %, and 98 % for coverage factors k<sub>p</sub> = 1, 2, and 3, versus theoretical 68.27 %, 95.45 %, and 99.73 %. Using all corrected points inside the declared working volume, all inter-point distances were formed; the empirical 95.45 % quantile (k<sub>p</sub> ≈ 2) gives a system-level distance MPE of 9.270 μm. The digital twin also reproduces the geometry-induced anisotropy of the four-tracker layout, with the largest dispersion along the axis nearly normal to the tracker plane. These results indicate that the proposed method provides traceable correction and well-calibrated uncertainty for FLTMMS, while making explicit the residual bias commonly observed in digital-twin predictions.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 248-261"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145790626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of multi-electrode synchronized electrochemical trepanning with rotational feeding system for inner twisted blisk 内扭盘片多电极同步电化学钻孔旋转送料系统设计
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-13 DOI: 10.1016/j.precisioneng.2025.12.011
Erhao Jiao, Dong Zhu, Yunmiao Wang, Ruolong Wang
{"title":"Design of multi-electrode synchronized electrochemical trepanning with rotational feeding system for inner twisted blisk","authors":"Erhao Jiao,&nbsp;Dong Zhu,&nbsp;Yunmiao Wang,&nbsp;Ruolong Wang","doi":"10.1016/j.precisioneng.2025.12.011","DOIUrl":"10.1016/j.precisioneng.2025.12.011","url":null,"abstract":"<div><div>As a core component of aero-engine compressor, inner twisted blisk features confined internal spaces, numerous blades with complex twisted surfaces, which is difficult to manufacture and improve machining efficiency. Electrochemical trepanning (ECTr) is a specialized electrochemical machining (ECM) method offering advantages such as easily controllable flow fields and high machining flexibility. However, machining efficiency is limited by the widespread adoption of the single-blade machining mode in current ECTr. Therefore, this paper proposed a multi-electrode synchronized electrochemical trepanning (MES-ECTr) with rotational feeding method, and established a MES-ECTr with rotational feeding device to realize the synchronized machining of multiple inner twisted blades in a single feed operation. The parameters such as the layout, quantity and diameter of ball bearings in the rotational feeding module were optimized through fluid-structure interaction (FSI) simulation, and the reliability of the device were improved. Furthermore, to improve machining stability for multiple blades, a multi-channel electrolyte control (MC-EC) platform was established to monitor and regulate the electrolyte flow of multiple channels in real-time, thereby enhancing flow field uniformity. Finally, the MES-ECTr with rotational feeding experiments were conducted. Stable synchronized machining of three inner twisted blades was achieved at 18 V machining voltage and 1.5 mm/min feed rate, with excellent surface consistency and accuracy consistency. Compared to conventional single-blade mode, machining efficiency improved by 226 %, demonstrating the effectiveness of the designed MES-ECTr with rotational feeding system and its promising application prospects.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 206-223"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145790631","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Comprehensive coupled wear-vibration analysis of roller linear guide considering multi-stage and multi-state actual contact variation 考虑多阶段多状态实际接触变化的滚子直线导轨磨损-振动综合耦合分析
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-22 DOI: 10.1016/j.precisioneng.2025.12.017
Tian-Wen Qi , Sheng-Hao Xu , De-Jun Cheng , Xue Zuo
{"title":"Comprehensive coupled wear-vibration analysis of roller linear guide considering multi-stage and multi-state actual contact variation","authors":"Tian-Wen Qi ,&nbsp;Sheng-Hao Xu ,&nbsp;De-Jun Cheng ,&nbsp;Xue Zuo","doi":"10.1016/j.precisioneng.2025.12.017","DOIUrl":"10.1016/j.precisioneng.2025.12.017","url":null,"abstract":"<div><div>Wear-induced stiffness variation in roller linear guides (RLGs) decreases their dynamic load-bearing stability and leads to significant positioning errors. However, most existing models assume uniform wear at the roller-raceway interfaces within idealized contact zones, which greatly limits dynamic performance analysis accuracy. This paper investigates the relationships among contact load, impact angle, and elastic deformation during a multi-stage contact-variation process associated with uneven wear evolution. Based on this analysis, it proposes a novel physics-based predictive wear model to determine the actual uneven wear-depth distribution and the corresponding contact zones between the carriage and rail raceways. Subsequently, a comprehensive wear-vibration coupling model is developed to analyze the wear-induced five-degree-of-freedom (5-DOF) dynamic behavior under multidirectional loading conditions, based on a mechanic model that accurately describes preload degradation in multi-state contact interfaces. Furthermore, numerical simulations are conducted to evaluate the uneven wear-depth distribution, preload degradation, and nonlinear dynamic characteristics. Moreover, the proposed method is compared with existing models. The findings demonstrate the superior performance of the proposed approach and show that it can accurately predict the actual wear-depth distribution and vibration behavior of RLG systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 272-291"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145840365","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mechanism-based prediction of helical gear grinding Surface roughness: Integrated modeling of spatial kinematics and abrasive trajectory effects 基于机理的斜齿轮磨削表面粗糙度预测:空间运动学和磨料轨迹影响的综合建模
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-11-22 DOI: 10.1016/j.precisioneng.2025.11.023
Shuying Yang , Lei Zheng , Jiju Guan , Weifang Chen , Rupeng Zhu
{"title":"Mechanism-based prediction of helical gear grinding Surface roughness: Integrated modeling of spatial kinematics and abrasive trajectory effects","authors":"Shuying Yang ,&nbsp;Lei Zheng ,&nbsp;Jiju Guan ,&nbsp;Weifang Chen ,&nbsp;Rupeng Zhu","doi":"10.1016/j.precisioneng.2025.11.023","DOIUrl":"10.1016/j.precisioneng.2025.11.023","url":null,"abstract":"<div><div>As critical transmission components in aero-engines, hard-tooth-surface involute helical cylindrical gears require precise control of surface morphology to ensure high-quality manufacturing with minimized subsurface damage. The complexity of form grinding processes arises from intricate wheel-workpiece spatial kinematics and heterogeneous local contact geometries, which challenge the prediction of chip formation mechanisms and resultant surface topography. This study presents a numerical calculation model to characterize surface morphology in helical gear form grinding. By analyzing localized contact conditions and geometric mapping relationships, the abrasive grain trajectories were mathematically formulated through a spatial helical motion model. The helical tooth surface was discretized to calculate undeformed chip thickness along the normal direction, enabling the reconstruction of three-dimensional surface morphology. Experimental validation using manufactured specimens confirmed the accuracy of the model, with further investigation revealing non-uniform surface distribution characteristics. Key findings demonstrate that surface roughness along the involute profile increases with rolling angle, exhibiting negative correlation with wheel speed, while positively correlating with feed rate and grinding depth. The proposed model provides a theoretical foundation for optimizing helical gear grinding parameters and enhancing in-service performance through surface integrity control.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 49-62"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Achieving sub-μm accuracy on a pagoda-type micro-CMM via dynamic volumetric error compensation 通过动态体积误差补偿,在宝塔式微型三坐标测量机上实现亚μm精度
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-23 DOI: 10.1016/j.precisioneng.2025.12.016
Ya-Xiong He , Yefeng Chen , Zai Luo , Dian Bian , Yinbao Cheng , Wensong Jiang , Yaru Li , Rui-Jun Li
{"title":"Achieving sub-μm accuracy on a pagoda-type micro-CMM via dynamic volumetric error compensation","authors":"Ya-Xiong He ,&nbsp;Yefeng Chen ,&nbsp;Zai Luo ,&nbsp;Dian Bian ,&nbsp;Yinbao Cheng ,&nbsp;Wensong Jiang ,&nbsp;Yaru Li ,&nbsp;Rui-Jun Li","doi":"10.1016/j.precisioneng.2025.12.016","DOIUrl":"10.1016/j.precisioneng.2025.12.016","url":null,"abstract":"<div><div>The increasing demand for inspecting complex micro-structures challenges conventional metrology, driving the need for 3D coordinate measuring systems with micro- and nano-scale accuracy. This paper presents a volumetric error compensation approach to achieve sub-micrometer accuracy metrology by developing a global and dynamic error compensation model on the basis of Abbe principle and Bryan principle. A comprehensive volumetric error model for general CMMs incorporating all 21 geometric errors was derived from the fundamental Abbe and Bryan principles using kinematics of rigid bodies. The general model was then applied and simplified for a self-developed Pagoda-type micro-CMM equipped with integrated multi-degree-of-freedom sensors for instantaneous geometric error measurement. The efficacy of the volumetric error compensation was validated through single-axis positioning tests, gauge block measurements, and the inspection of complex micro-structures, including a bearing raceway and a high-aspect-ratio micro-hole. After dynamic volumetric error compensation, the positioning errors in three directions were reduced from a maximum of 130 nm to below 10 nm. Volumetric accuracy tests on gauge blocks showed a reduction in the standard deviation of length measurements by 73 % (X-axis), 55 % (Y-axis), and 75 % (Z-axis). The compensated system successfully measured a bearing's inner raceway with a radius standard deviation of 161 nm and a high-aspect-ratio (5:1) micro-hole with a maximum diameter standard deviation of 48 nm, achieving an expanded measurement uncertainty of 155 nm (k = 2).</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 292-303"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145840364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Prediction of subsurface damage in precision grinding of hemispherical resonators 半球形谐振器精密磨削亚表面损伤预测
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-07 DOI: 10.1016/j.precisioneng.2025.12.006
Chuang Zhao , Hao Yi , Jiale Guo , Limin Zhu , Lingxi Guo , Jie Lan , Yuli Sun , Dunwen Zuo
{"title":"Prediction of subsurface damage in precision grinding of hemispherical resonators","authors":"Chuang Zhao ,&nbsp;Hao Yi ,&nbsp;Jiale Guo ,&nbsp;Limin Zhu ,&nbsp;Lingxi Guo ,&nbsp;Jie Lan ,&nbsp;Yuli Sun ,&nbsp;Dunwen Zuo","doi":"10.1016/j.precisioneng.2025.12.006","DOIUrl":"10.1016/j.precisioneng.2025.12.006","url":null,"abstract":"<div><div>Cracks are a common form of subsurface damage (SSD) in optical glass grinding, directly affecting the positioning accuracy and lifespan of hemispherical resonator gyroscopes (HRGs). This study presents a predictive model for SSD in hemispherical resonator grinding, based on indentation fracture theory. The SSD and surface roughness average (Ra) data, obtained from grinding experiments under various conditions, were used to optimize the model's accuracy. Material scratching tests under different loads revealed that only surface plastic deformation occurred, with no observable SSD at 120 mN. The characteristics of surface damage (SD) transitioned from plastic deformation to brittle fracture between 120 mN and 300 mN, with subsurface cracks propagating in the direction of maximum stress. The model's practical applicability was further verified through precision grinding trials conducted on hemispherical resonators. A minimum error of 1.41 % and a mean error of 14.94 % demonstrate the model's predictive capability within a specific range.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 120-130"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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