Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

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Fabrication of hierarchical micro/nano structure using UV laser for application in PANI electrodes of supercapacitors 用紫外激光制备分层微纳结构在超级电容器聚苯胺电极中的应用
IF 3.7 2区 工程技术
Yeeu-Chang Lee , Kuo-Tung Tseng , Wei-Fu Ji , Jui-Ming Yeh
{"title":"Fabrication of hierarchical micro/nano structure using UV laser for application in PANI electrodes of supercapacitors","authors":"Yeeu-Chang Lee ,&nbsp;Kuo-Tung Tseng ,&nbsp;Wei-Fu Ji ,&nbsp;Jui-Ming Yeh","doi":"10.1016/j.precisioneng.2025.08.012","DOIUrl":"10.1016/j.precisioneng.2025.08.012","url":null,"abstract":"<div><div>This study employed an ultraviolet (UV) laser to create structures with micro- and nanoscale features. Initially, microstructures were fabricated by combining UV laser irradiation with 3D μ-printing technology utilizing monomer polymerization and crosslinking chemical reactions. Subsequently, UV laser interference lithography is applied to expose a positive photoresist on top of the microstructures, inducing a photochemical reaction that, after development, forms nanopatterns. These micro/nano hierarchical structures can then be replicated using PDMS (polydimethylsiloxane) molding to produce inverse molds for the structures. Finally, a solution of chemically oxidative polymerized polyaniline (PANI) is coated onto the PDMS mold. After baking and demolding, a PANI film with micro/nano hierarchical structures was obtained and used as the working electrode in supercapacitors. Compared to planar-coated PANI films, hierarchical structures increase the electrode surface area, contributing to an enhanced specific capacitance. To understand its electrochemical properties, cyclic voltammetry (CV) and galvanostatic charge–discharge measurements were performed. Compared to the non-structured PANI, the specific capacitance of the microstructured PANI and the micro/nano hierarchical structured PANI increased by approximately 30 % and 60 %, respectively.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 1017-1024"},"PeriodicalIF":3.7,"publicationDate":"2025-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144921755","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A review of tube inner surface polishing technologies and development 管材内表面抛光技术及发展综述
IF 3.7 2区 工程技术
Youliang Wang , Hua Liu , Zhou Jia , Xincheng Yin , Xiujuan Chen
{"title":"A review of tube inner surface polishing technologies and development","authors":"Youliang Wang ,&nbsp;Hua Liu ,&nbsp;Zhou Jia ,&nbsp;Xincheng Yin ,&nbsp;Xiujuan Chen","doi":"10.1016/j.precisioneng.2025.08.013","DOIUrl":"10.1016/j.precisioneng.2025.08.013","url":null,"abstract":"<div><div>Tube is a common structure in daily life and industrial production, and its quality directly affects the performance and life of the piping system. Polishing of inner surfaces to obtain high-precision surfaces plays a crucial role in aerospace, petrochemical and medical fields. In order to improve the adaptability of tubes and polishing methods, this paper takes a unique approach and classifies existing polishing methods from five aspects: mechanical field, magnetic field, electric field, chemical field, and ultrasonic field, so as to help optimize and upgrade the polishing technology of tube inner surface. On the basis of domestic and foreign literature, the paper summarizes the processing principles of different methods in single-field polishing and multi-field coupling polishing, as well as the factors affecting the processing efficiency, and analyzes the surface quality of workpieces with different materials and sizes after polishing. Finally, the development status of inner surface processing technology is summarized, and the future inner surface polishing will develop towards non-damage, environmental protection, high efficiency, and automation.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 963-983"},"PeriodicalIF":3.7,"publicationDate":"2025-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144904137","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development and performance evaluation of a multi-mode piezoelectric motion platform for high-precision optical measurements 高精度光学测量多模压电运动平台的研制与性能评价
IF 3.7 2区 工程技术
Fan Fang , Lusheng Yuan , Liang Wang , Xuyang Si , Rui Wang , Biao Liu , Yuan Wan
{"title":"Development and performance evaluation of a multi-mode piezoelectric motion platform for high-precision optical measurements","authors":"Fan Fang ,&nbsp;Lusheng Yuan ,&nbsp;Liang Wang ,&nbsp;Xuyang Si ,&nbsp;Rui Wang ,&nbsp;Biao Liu ,&nbsp;Yuan Wan","doi":"10.1016/j.precisioneng.2025.08.011","DOIUrl":"10.1016/j.precisioneng.2025.08.011","url":null,"abstract":"<div><div>This study presents a novel multi-mode XY piezoelectric motion platform designed to resolve the inherent metrological conflict between travel range and positioning accuracy in existing optical measurement systems during multi-scale measurement operations. The platform employs a V-shaped piezoelectric stator and applies specific electrical signals to achieve three modes: the elliptical drive mode (EDM), the stick-slip drive mode (SDM), and the inertial drive mode (IDM). Dynamic modeling was first used to analyze the step characteristics of the platform, followed by fabrication and testing of a prototype to validate the output performance. Experimental results show that the prototype successfully achieves high precision motion in all three modes: SDM, EDM, and IDM, with maximum speeds of 21.61 mm/s, 39.71 mm/s, and 52.2 mm/s, and maximum loads of 7 N, 6 N, and 9 N, respectively. The IDM mode exhibits millimeter speed, while the SDM mode provides nanometer precision. In addition, the prototype was successfully applied to semiconductor component defect inspection and microelectronics component manipulation, using the IDM for fast motion and the SDM for precise micro-adjustment. This study provides valuable insights into the control of non-resonant piezoelectric systems and expands their potential applications in optical measurements.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 984-997"},"PeriodicalIF":3.7,"publicationDate":"2025-08-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144908461","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A novel 3-DOF planar parallel stick-slip platform using macro fiber composite 基于宏纤维复合材料的新型三自由度平面平行粘滑平台
IF 3.7 2区 工程技术
Ling-wei Meng , Yi-ling Yang , Yang Lv , Gao-hua Wu , Yu-guo Cui
{"title":"A novel 3-DOF planar parallel stick-slip platform using macro fiber composite","authors":"Ling-wei Meng ,&nbsp;Yi-ling Yang ,&nbsp;Yang Lv ,&nbsp;Gao-hua Wu ,&nbsp;Yu-guo Cui","doi":"10.1016/j.precisioneng.2025.08.010","DOIUrl":"10.1016/j.precisioneng.2025.08.010","url":null,"abstract":"<div><div>This paper proposes a three-degree-of-freedom (3-DOF) high-precision stick-slip platform with planar parallel decoupling and backward inhibition. An arch driving unit using macro fiber composite (MFC) is proposed to realize large single-step output and actuation-structure integration, and pillar support is devised to improve load capacity. A cooperative driving method is designed to suppress backward movement. Then, a system dynamics model with electromechanical, friction, and the 3-DOF connection is established. Finally, a prototype is manufactured, and various experiments are conducted. The proposed stick-slip platform exhibits large single-step displacements of 301.6 μm, 292.9 μm, and 9.947 mrad for the <em>X</em>-axis, <em>Y</em>-axis, and rotation around the <em>Z</em>-axis motion, respectively. The maximum vertical load is 110 N. Also, the backward rate is reduced from 62.9 % to 0.56 % for translational movement in the <em>X</em> and <em>Y</em> axes and from 46.8 % to 2.79 % for the <em>Z</em>-axis rotation. Thus, experiments verify the proposed stick-slip platform with macro fiber composite.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 998-1016"},"PeriodicalIF":3.7,"publicationDate":"2025-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144908462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Femtosecond laser helical drilling on nickel-based single crystal superalloy: Parameter influence laws, surface integrity and formation mechanisms 飞秒激光螺旋钻削镍基单晶高温合金:参数影响规律、表面完整性及形成机理
IF 3.7 2区 工程技术
Yuxing Liu, Zhixun Wen, Meng Li, Cheng Wang, Ming Li, Zhenwei Li, Zhufeng Yue
{"title":"Femtosecond laser helical drilling on nickel-based single crystal superalloy: Parameter influence laws, surface integrity and formation mechanisms","authors":"Yuxing Liu,&nbsp;Zhixun Wen,&nbsp;Meng Li,&nbsp;Cheng Wang,&nbsp;Ming Li,&nbsp;Zhenwei Li,&nbsp;Zhufeng Yue","doi":"10.1016/j.precisioneng.2025.08.008","DOIUrl":"10.1016/j.precisioneng.2025.08.008","url":null,"abstract":"<div><div>Aiming at the problem of poor quality in the current femtosecond laser drilling process, this paper analyzed and compared the influence of different femtosecond laser drilling process parameters on the surface quality of film cooling hole (FCH) wall from the perspectives of geometric characteristics, processing efficiency and FCH wall ablation. The single factor test and orthogonal test were used to reveal the influence mechanism of process parameters from the aspects of removal efficiency, pulse overlap rate and plasma absorption. The results show that with the increase of laser output power (<em>P</em>), the material removal efficiency increases, and the FCH wall ablation increases. The amount of focus drop per scan layer (<em>H</em>) and single-layer scan dwell time (<em>T</em>) jointly determine the feed rate during helical drilling, which affects the quality of the FCH wall. The number of helical scanning path cycle (<em>R</em>) has the greatest influence on the surface ablation of the FCH wall. When the <em>R</em> is small, the scanning of the outermost circle of the helical drilling processing path increases, the material is removed more fully, and the quality of the FCH wall is improved. The change of pulse overlap rate caused by rotation speed of helical scan module (<em>V</em>) has no significant effect on the quality of FCH wall. Based on the influence of parameters, a better combination of process parameters has obtained. Under this parameter combination, the processing time is 25 s, the taper reaches 0.027°, the hole wall exhibits a nano stripe structure with no ablation, and the roughness Ra is only 0.405 μm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 944-962"},"PeriodicalIF":3.7,"publicationDate":"2025-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144892901","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-precision alignment system for DMD-based maskless lithography in multilayer exposure applications 多层曝光中基于dmd的无掩模光刻高精度对准系统
IF 3.7 2区 工程技术
Ting Hsuan Miau , Chun Ying Wu , Yung Chun Lee
{"title":"High-precision alignment system for DMD-based maskless lithography in multilayer exposure applications","authors":"Ting Hsuan Miau ,&nbsp;Chun Ying Wu ,&nbsp;Yung Chun Lee","doi":"10.1016/j.precisioneng.2025.07.026","DOIUrl":"10.1016/j.precisioneng.2025.07.026","url":null,"abstract":"<div><div>Maskless lithography based on Digital Micromirror Devices (DMDs) has advanced rapidly in recent decades and offers a flexible and efficient alternative to conventional lithography methods that require physical photomasks. In many applications, multilayer exposure and patterning of photoresist (PR) layers are common, essential, and required for most lithography systems. Consequently, effective methods are needed to ensure accurate layer-by-layer alignment of the successive exposure patterns. However, despite the importance of alignment, current DMD-based maskless lithography systems lack methods to achieve high-precision alignment across multiple layers. Accordingly, this study proposes a simple yet effective alignment system for DMD-based maskless lithography incorporating a downward image sensor and an upward image sensor. The downward image sensor captures the alignment targets on the substrate or previous layer, and the coordinates of these targets are determined using digital image analysis techniques. The upward-facing sensor simultaneously measures the offset distance between the optical engine and the downward-facing sensor. Given the information acquired from the two sensors, the current posture of the substrate relative to the DMD can be accurately determined and the planned exposure coordinates for the subsequent layer corrected as needed. The experimental results show that the proposed method achieves an average alignment accuracy of <span><math><mrow><mn>1</mn><mo>.</mo><mn>76</mn><mspace></mspace><mi>μ</mi><mi>m</mi></mrow></math></span> in the <span><math><mi>x</mi></math></span>-direction and <span><math><mrow><mn>0</mn><mo>.</mo><mn>63</mn><mspace></mspace><mi>μ</mi><mi>m</mi></mrow></math></span> in the <span><math><mi>y</mi></math></span>-direction, with a maximum error of <span><math><mrow><mn>3</mn><mspace></mspace><mi>μ</mi><mi>m</mi></mrow></math></span>. This level of precision meets the alignment requirements for circuit board exposure. Alignment exposure tests conducted on commercial substrates confirm the applicability of the proposed alignment system for real-world lithography.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 937-943"},"PeriodicalIF":3.7,"publicationDate":"2025-08-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144892014","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A novel straightness error prediction method incorporating machining errors of linear guideways 一种考虑直线导轨加工误差的直线度误差预测方法
IF 3.7 2区 工程技术
Tianxiang Wang , Peng Guo , Hongyu Liu , Xiuzhen Meng , Xishuo Chen , Song Zhang
{"title":"A novel straightness error prediction method incorporating machining errors of linear guideways","authors":"Tianxiang Wang ,&nbsp;Peng Guo ,&nbsp;Hongyu Liu ,&nbsp;Xiuzhen Meng ,&nbsp;Xishuo Chen ,&nbsp;Song Zhang","doi":"10.1016/j.precisioneng.2025.08.009","DOIUrl":"10.1016/j.precisioneng.2025.08.009","url":null,"abstract":"<div><div>In the assembly process of a linear guideway, straightness error is primarily influenced by machining errors and the sequence of bolt residual preload. Accurate prediction of straightness error is a necessary prerequisite for improving linear accuracy. The primary objective of this research is to propose a novel method for the accurate prediction of straightness errors in linear guideways under different bolt tightening sequences. First, based on the analysis of the linear guideway load state, a prediction method for straightness error incorporating the machining errors of the guideway and the bed mounting surface is proposed. Secondly, by comparing the experimental results of the guideways assembled under three different initial tightening sequences, the prediction accuracy of straightness errors reaches over 88 %, validating the accuracy and repeatability of the prediction method. Meanwhile, the impact of the tightening sequence on the straightness error is discussed. Finally, based on the straightness error prediction, the tightening strategy is optimized to improve the accuracy and assembly efficiency of the guideway, demonstrating the practicality of this prediction method. The findings of this research enable accurate prediction of straightness errors in linear guideways under different tightening strategies, providing manufacturers with references and guidance during the assembly process.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 905-919"},"PeriodicalIF":3.7,"publicationDate":"2025-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144865347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spherical tulip electrical contacts for quasi kinematic coupling of rapid swap batteries 快速交换电池准运动学耦合用球形郁金香电触点
IF 3.7 2区 工程技术
Abigail Wucherer, David Edington, Aditya Mehrotra, Alexander Slocum
{"title":"Spherical tulip electrical contacts for quasi kinematic coupling of rapid swap batteries","authors":"Abigail Wucherer,&nbsp;David Edington,&nbsp;Aditya Mehrotra,&nbsp;Alexander Slocum","doi":"10.1016/j.precisioneng.2025.08.007","DOIUrl":"10.1016/j.precisioneng.2025.08.007","url":null,"abstract":"<div><div>Rapid swap battery packs provide a potential means to improve electric vehicle adoption in high utilization industrial vehicles where lengthy charge times are a barrier to electrification. High voltage, high current battery connectors are critical components for coupling the pack to the electric vehicle, yet state-of-the-art connections require precision alignment of contact surfaces and active retention mechanisms that may become stuck or fail to engage properly if the vehicle undergoes deformation, such as that experienced in rugged environments.</div><div>Here, we investigate the integration of electrical connectors with the battery mount’s structural loop to create a design space where preload, geometry, and contact resistance may be optimized. This co-design approach enables mechanical and electrical functional requirements to be considered in conjunction to ensure reliable fulfillment in both areas while reducing the time for battery pack swaps.</div><div>The result is a quasi-kinematic coupling-based connector with integrated electrical contacts, allowing for repeatable and accurate positioning of the battery pack to the vehicle. A slotted ball and socket design approach is presented to accommodate angular misalignment and establish high contact area through elastic averaging. Contact resistance, a primary metric for evaluating the functionality of an electrical contact, is explored as a function of scrub, contact area, and compliance within the connector. Initial characterization of wear is also evaluated to identify failure mechanisms and to validate the design strategy of encouraging relative sliding motion at the contact interface to break through the continuously re-formed oxide layers on each mating cycle for improved conductivity.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 920-936"},"PeriodicalIF":3.7,"publicationDate":"2025-08-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144885850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhancing hard parting off performance on AISI 304: A comparative study of conventional flood cooling and eco-friendly vegetable oil-based sustainable MQL 提高AISI 304的硬分离性能:传统的洪水冷却与环保植物油基可持续MQL的比较研究
IF 3.7 2区 工程技术
Ayşegül Çakır Şencan
{"title":"Enhancing hard parting off performance on AISI 304: A comparative study of conventional flood cooling and eco-friendly vegetable oil-based sustainable MQL","authors":"Ayşegül Çakır Şencan","doi":"10.1016/j.precisioneng.2025.08.005","DOIUrl":"10.1016/j.precisioneng.2025.08.005","url":null,"abstract":"<div><div>Machining operations are essential for producing precision components in aerospace, biomedical, and other advanced industries. This study addresses the notable research gap by focusing on the parting off operation of AISI 304 stainless steel, a process that has been largely overlooked compared to the widely studied turning operation. The machinability of this difficult-to-cut material was evaluated under dry cutting, conventional (mineral oil), and minimum quantity lubrication (MQL, vegetable oil-based) conditions. The dynamic viscosity and thermal conductivity of the cutting fluids were thoroughly analyzed both at room temperature and elevated temperatures simulating actual machining conditions, providing a comprehensive thermo-rheological characterization. Experiments were conducted at various feed rates (0.01–0.03 mm/rev) and cutting speeds (20 and 30 m/min). MQL and conventional cooling significantly improved performance metrics compared to dry cutting: surface roughness decreased by 64 % and 88 %, reaching 0.829 μm and 0.279 μm, respectively; cutting temperatures were reduced by 54 % and 62 %; and flank wear diminished by 71 % and 74 % under MQL and conventional methods, respectively. Real-time temperature monitoring and graphical recording demonstrated the effectiveness of the environmentally friendly and economical MQL system even in the challenging geometry of the parting off operation. The optimal results were obtained at a feed rate of 0.01 mm/rev and cutting speed of 30 m/min using MQL, where the cutting zone temperature and tool wear were significantly reduced, and the surface quality of the machined part was markedly improved, leading to a sustainable manufacturing process. This clearly establishes that vegetable oil-based MQL is a superior, eco-friendly, and cost-effective alternative to conventional cooling methods, even under demanding geometric conditions.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 884-904"},"PeriodicalIF":3.7,"publicationDate":"2025-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144865348","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Validation of pitch deviation measurement of a diffraction scale grating using robust and highly-sensitive optical angle sensors 用鲁棒高灵敏度光学角度传感器测量衍射尺度光栅节距偏差的验证
IF 3.7 2区 工程技术
Tomoki Kitazume, Naoya Tashiro, Yuya Yamazaki, Yuki Shimizu
{"title":"Validation of pitch deviation measurement of a diffraction scale grating using robust and highly-sensitive optical angle sensors","authors":"Tomoki Kitazume,&nbsp;Naoya Tashiro,&nbsp;Yuya Yamazaki,&nbsp;Yuki Shimizu","doi":"10.1016/j.precisioneng.2025.08.003","DOIUrl":"10.1016/j.precisioneng.2025.08.003","url":null,"abstract":"<div><div>A method for evaluating the pitch deviation of a diffraction scale grating based on the changes in the angles of diffraction of diffracted beams is a promising one for measurement of the pitch deviation over the entire length of the scale. In this method, differential operations with the readouts from two laser autocollimation (LA) units are performed so that the influences of the angular error motion of the scale scanning and the scale local slope can be reduced. Meanwhile, the sensitivity of each LA unit should be accurately calibrated, since the influence of the sensitivity fluctuation will become apparent, especially under the condition where the nominal grating pitch is much larger with respect to the light wavelength of the laser beam for measurement. Also, the verification of the pitch deviation obtained by the proposed method remains an issue to be addressed. In this paper, at first, the allowable sensitivity fluctuation of the LA unit is estimated based on numerical calculations. After that, by using the prototype optical system, the sensitivity fluctuations of LA units are evaluated in experiments. Furthermore, the pitch deviation of a diffraction scale grating with a nominal pitch of 4 μm is evaluated by the proposed method, and the accumulated pitch deviation is compared with the calibration curve provided by a scale manufacturer, as well as the calibration result obtained by a home-made calibration system with a laser interferometer.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 874-883"},"PeriodicalIF":3.7,"publicationDate":"2025-08-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144865346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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