Yeeu-Chang Lee , Kuo-Tung Tseng , Wei-Fu Ji , Jui-Ming Yeh
{"title":"用紫外激光制备分层微纳结构在超级电容器聚苯胺电极中的应用","authors":"Yeeu-Chang Lee , Kuo-Tung Tseng , Wei-Fu Ji , Jui-Ming Yeh","doi":"10.1016/j.precisioneng.2025.08.012","DOIUrl":null,"url":null,"abstract":"<div><div>This study employed an ultraviolet (UV) laser to create structures with micro- and nanoscale features. Initially, microstructures were fabricated by combining UV laser irradiation with 3D μ-printing technology utilizing monomer polymerization and crosslinking chemical reactions. Subsequently, UV laser interference lithography is applied to expose a positive photoresist on top of the microstructures, inducing a photochemical reaction that, after development, forms nanopatterns. These micro/nano hierarchical structures can then be replicated using PDMS (polydimethylsiloxane) molding to produce inverse molds for the structures. Finally, a solution of chemically oxidative polymerized polyaniline (PANI) is coated onto the PDMS mold. After baking and demolding, a PANI film with micro/nano hierarchical structures was obtained and used as the working electrode in supercapacitors. Compared to planar-coated PANI films, hierarchical structures increase the electrode surface area, contributing to an enhanced specific capacitance. To understand its electrochemical properties, cyclic voltammetry (CV) and galvanostatic charge–discharge measurements were performed. Compared to the non-structured PANI, the specific capacitance of the microstructured PANI and the micro/nano hierarchical structured PANI increased by approximately 30 % and 60 %, respectively.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 1017-1024"},"PeriodicalIF":3.7000,"publicationDate":"2025-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of hierarchical micro/nano structure using UV laser for application in PANI electrodes of supercapacitors\",\"authors\":\"Yeeu-Chang Lee , Kuo-Tung Tseng , Wei-Fu Ji , Jui-Ming Yeh\",\"doi\":\"10.1016/j.precisioneng.2025.08.012\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This study employed an ultraviolet (UV) laser to create structures with micro- and nanoscale features. Initially, microstructures were fabricated by combining UV laser irradiation with 3D μ-printing technology utilizing monomer polymerization and crosslinking chemical reactions. Subsequently, UV laser interference lithography is applied to expose a positive photoresist on top of the microstructures, inducing a photochemical reaction that, after development, forms nanopatterns. These micro/nano hierarchical structures can then be replicated using PDMS (polydimethylsiloxane) molding to produce inverse molds for the structures. Finally, a solution of chemically oxidative polymerized polyaniline (PANI) is coated onto the PDMS mold. After baking and demolding, a PANI film with micro/nano hierarchical structures was obtained and used as the working electrode in supercapacitors. Compared to planar-coated PANI films, hierarchical structures increase the electrode surface area, contributing to an enhanced specific capacitance. To understand its electrochemical properties, cyclic voltammetry (CV) and galvanostatic charge–discharge measurements were performed. Compared to the non-structured PANI, the specific capacitance of the microstructured PANI and the micro/nano hierarchical structured PANI increased by approximately 30 % and 60 %, respectively.</div></div>\",\"PeriodicalId\":54589,\"journal\":{\"name\":\"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology\",\"volume\":\"96 \",\"pages\":\"Pages 1017-1024\"},\"PeriodicalIF\":3.7000,\"publicationDate\":\"2025-08-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S014163592500251X\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, MANUFACTURING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S014163592500251X","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
Fabrication of hierarchical micro/nano structure using UV laser for application in PANI electrodes of supercapacitors
This study employed an ultraviolet (UV) laser to create structures with micro- and nanoscale features. Initially, microstructures were fabricated by combining UV laser irradiation with 3D μ-printing technology utilizing monomer polymerization and crosslinking chemical reactions. Subsequently, UV laser interference lithography is applied to expose a positive photoresist on top of the microstructures, inducing a photochemical reaction that, after development, forms nanopatterns. These micro/nano hierarchical structures can then be replicated using PDMS (polydimethylsiloxane) molding to produce inverse molds for the structures. Finally, a solution of chemically oxidative polymerized polyaniline (PANI) is coated onto the PDMS mold. After baking and demolding, a PANI film with micro/nano hierarchical structures was obtained and used as the working electrode in supercapacitors. Compared to planar-coated PANI films, hierarchical structures increase the electrode surface area, contributing to an enhanced specific capacitance. To understand its electrochemical properties, cyclic voltammetry (CV) and galvanostatic charge–discharge measurements were performed. Compared to the non-structured PANI, the specific capacitance of the microstructured PANI and the micro/nano hierarchical structured PANI increased by approximately 30 % and 60 %, respectively.
期刊介绍:
Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.