Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

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Enhancing the functionalities of three-dimensional imaging LiDAR: A review 增强三维成像激光雷达的功能:综述
IF 3.7 2区 工程技术
Xingsheng Liu , Anhu Li , Jincai Wu
{"title":"Enhancing the functionalities of three-dimensional imaging LiDAR: A review","authors":"Xingsheng Liu ,&nbsp;Anhu Li ,&nbsp;Jincai Wu","doi":"10.1016/j.precisioneng.2025.10.005","DOIUrl":"10.1016/j.precisioneng.2025.10.005","url":null,"abstract":"<div><div>Light detection and ranging (LiDAR) technology has garnered broad interest and experienced rapid growth as an essential approach to three-dimensional (3D) perception for unmanned systems, which exhibit significant potential in many flourishing fields. Motivated by the emerging need for more complex and diverse applications, LiDAR has been increasingly developed with enhanced functionalities. In this paper, we present a systematic review of the advances in 3D imaging LiDAR and its performance enhancement methods. The basic LiDAR architecture is demonstrated with fundamental principles in distance measurement and beam scanning. The research directions and progress in enhancing the 3D imaging performance of LiDAR are further discussed in terms of detection range, field of view and resolution, imaging speed, accuracy and stability, as well as information fusion. The representative 3D imaging LiDAR schemes are compared through quantitative evaluation and qualitative discussion about their strengths and limitations. Finally, we summarize the development trends of 3D imaging LiDAR towards system design integration, imaging mode expansion and multi-sensor fusion. It is intended to offer valuable insights for the exploration and application of 3D imaging LiDAR in future.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 391-407"},"PeriodicalIF":3.7,"publicationDate":"2025-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145267073","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhancing measurement precision of superluminescent diode-based chromatic confocal sensor by real-time spectral correction 利用实时光谱校正技术提高超发光二极管彩色共焦传感器的测量精度
IF 3.7 2区 工程技术
Lóránt Tibor Csőke , Szabolcs Károly Kautny , Zsolt Kollár
{"title":"Enhancing measurement precision of superluminescent diode-based chromatic confocal sensor by real-time spectral correction","authors":"Lóránt Tibor Csőke ,&nbsp;Szabolcs Károly Kautny ,&nbsp;Zsolt Kollár","doi":"10.1016/j.precisioneng.2025.09.024","DOIUrl":"10.1016/j.precisioneng.2025.09.024","url":null,"abstract":"<div><div>Chromatic confocal sensors are widely used in high-resolution, non-contact distance measurements. Despite their advantages, conventional implementations often suffer from low light utilization efficiency and instability in the illumination spectrum, both of which degrade measurement accuracy, particularly when using broadband semiconductor sources such as superluminescent diodes. In this study, we address these limitations by introducing a chromatic confocal system that incorporates a high-brightness SLD alongside a real-time spectral correction mechanism. The proposed optical setup features a dual-beam spectrometer capable of simultaneously capturing the reflected axial intensity signal and the intrinsic spectrum of the light source using a global shutter camera. This architecture enables frame-by-frame normalization of the measured signal, reducing the impact of spectral fluctuations and inherent source nonuniformities. Simulation and experimental results demonstrate that, in the previously introduced system, this method reduces the wavelength-to-distance encoding error from <span><math><mo>±</mo></math></span>0.4<!--> <!-->µm to below 0.2<!--> <!-->µm, and decreases distance uncertainty due to source instability by 20%. The system is particularly suited for applications involving low-reflectivity surfaces or requiring high-speed scanning at rates up to tens of kHz.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 408-421"},"PeriodicalIF":3.7,"publicationDate":"2025-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145267814","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tool wear suppression in diamond turning NAK80 via carbon nanofluids composite cryogenic nitrogen 碳纳米流体复合低温氮抑制金刚石车削NAK80刀具磨损
IF 3.7 2区 工程技术
Guoqing Zhang , Zejiang Xu , Zexuan Huo , Jiabao Zhang
{"title":"Tool wear suppression in diamond turning NAK80 via carbon nanofluids composite cryogenic nitrogen","authors":"Guoqing Zhang ,&nbsp;Zejiang Xu ,&nbsp;Zexuan Huo ,&nbsp;Jiabao Zhang","doi":"10.1016/j.precisioneng.2025.10.001","DOIUrl":"10.1016/j.precisioneng.2025.10.001","url":null,"abstract":"<div><div>Diamond turning is an essential machining method for precision molds and dies. However, iron-carbon chemical affinity leads to severe graphitization of diamond tools when machining iron-based materials. Therefore, it is important to develop new techniques to suppress diamond graphitization. In the present study, an assisted machining method based on carbon nanofluid composite cryogenic nitrogen (CNFCCN) is proposed. Firstly, the influence of different concentrations of carbon nanofluid (CNF) and temperatures of cryogenic nitrogen (CN) on the machining performance was investigated. Secondly, by analyzing the negative effects of CNF-assisted machining at different concentrations and CN-assisted machining at different temperatures on the machined surface quality, CNFCCN-assisted machining at the appropriate concentrations and temperatures were selected, and the effects of CNFCCN-assisted machining on the machined surface quality were investigated. Thirdly, the suppression of graphitization wear of diamond tools by different assisted machining was evaluated by comparing the changes in tool material composition. Finally, the suppression effect of different assisted machining on diamond tool wear was assessed by analyzing the wear width of the flank face. The results show that the machined surface quality is improved by 25.7 % and a 50.9 % tool wear suppression effect is achieved under the machining of 0.25 % CNF composite −20 °C CN. This study provides valuable theoretical and experimental guidance for ultra-precision turning of iron-based materials.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 367-379"},"PeriodicalIF":3.7,"publicationDate":"2025-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Suppression of high-order detent force harmonics in motor structures using a double-sided asymmetric primary design 利用双面非对称设计抑制电机结构中高阶减振力谐波
IF 3.7 2区 工程技术
Peng Guo , Yongjian Li , Peng Su , Zilong Li
{"title":"Suppression of high-order detent force harmonics in motor structures using a double-sided asymmetric primary design","authors":"Peng Guo ,&nbsp;Yongjian Li ,&nbsp;Peng Su ,&nbsp;Zilong Li","doi":"10.1016/j.precisioneng.2025.09.026","DOIUrl":"10.1016/j.precisioneng.2025.09.026","url":null,"abstract":"<div><div>In high-slot-count linear motors, mismatched end force and cogging force harmonics make high-order detent forces hard to suppress, leading to large thrust ripples. To address this, a double-sided, asymmetric primary structure is proposed that suppresses high-order detent force harmonics, reduces overall detent force, and enhances thrust performance. The motor's geometry and operating principles are first described, followed by derivation of a detent force model and detailed analysis of the harmonic suppression mechanism. Quantitative suppression criteria are then established, and a multi-objective optimization framework is developed to identify an optimal motor configuration for detent force minimization. Comparative analysis with a conventional symmetric primary confirms the proposed structure's effectiveness and robustness. A prototype motor is manufactured and tested, demonstrating a thrust ripple reduction to just 2.89 %. These results validate the design's efficacy and provide novel methodologies and insights for linear-motor structure design and detent-force suppression.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 380-390"},"PeriodicalIF":3.7,"publicationDate":"2025-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220264","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A novel bio-inspired compound restrictor for high-precision aerostatic bearings: design and evaluation 一种用于高精度空气静压轴承的新型仿生复合节流器:设计与评价
IF 3.7 2区 工程技术
Xiuyuan Chen , Xichun Luo , Yazhou Sun , Wenbin Zhong , Charles Walker , Yankang Tian , Zhengjian Wang , Wenlong Chang , Frank Wardle
{"title":"A novel bio-inspired compound restrictor for high-precision aerostatic bearings: design and evaluation","authors":"Xiuyuan Chen ,&nbsp;Xichun Luo ,&nbsp;Yazhou Sun ,&nbsp;Wenbin Zhong ,&nbsp;Charles Walker ,&nbsp;Yankang Tian ,&nbsp;Zhengjian Wang ,&nbsp;Wenlong Chang ,&nbsp;Frank Wardle","doi":"10.1016/j.precisioneng.2025.09.025","DOIUrl":"10.1016/j.precisioneng.2025.09.025","url":null,"abstract":"<div><div>Compound restrictors are widely adopted in aerostatic bearings due to their good static performance and ease of fabrication. However, further enhancement of their performance using surfaces with groove structures designed is still rarely researched. Inspired by the unique fluid controllability of the biomimetic hexagonal micro-pattern, this paper proposes a novel bio-inspired aerostatic bearing design to realize high stability without compromising load capacity and static stiffness. Air mass flow rate, another key factor affecting its static performance, is also considered. Computational fluid dynamics (CFD) simulation study reveals that setting suitable divergence angle enables better pressurized airflow controllability. The key structural parameters were calculated using the resistance network method (RNM). The results were further verified through experimental measurements. Performance tests of the prototyped aerostatic linear motion stage verified the theoretical modelling accuracy. A positioning accuracy (perpendicular to the stage feed direction) of less than 15 nm/10 mm was achieved, which was almost half of that of the conventional linear bearing stage under the same conditions (8 μm bearing clearance, 0.2 MPa supply pressure).</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 348-366"},"PeriodicalIF":3.7,"publicationDate":"2025-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220263","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impact of resin reuse on form accuracy in 3D printed microchannels and effects on hydrodynamic flow stability 树脂再利用对3D打印微通道形状精度的影响及对流体动力流动稳定性的影响
IF 3.7 2区 工程技术
Emanuela Cutuli , Lorena Saitta , Giovanni Celano , Claudio Tosto , Gianluca Cicala , Maide Bucolo
{"title":"Impact of resin reuse on form accuracy in 3D printed microchannels and effects on hydrodynamic flow stability","authors":"Emanuela Cutuli ,&nbsp;Lorena Saitta ,&nbsp;Giovanni Celano ,&nbsp;Claudio Tosto ,&nbsp;Gianluca Cicala ,&nbsp;Maide Bucolo","doi":"10.1016/j.precisioneng.2025.09.022","DOIUrl":"10.1016/j.precisioneng.2025.09.022","url":null,"abstract":"<div><div>This work investigates the impact of resin reuse on the form accuracy and hydrodynamic stability of microfluidic channels fabricated via Projection Micro-Stereolithography (P<span><math><mi>μ</mi></math></span>SL). Three micro-optofluidic (MoF) devices were manufactured using fresh, once and twice reused photocurable resin batches. Resin reuse offers a sustainable approach that addresses recycling challenges associated with cured acrylate and methacrylate resins, making it an increasingly effective option for eco-friendly manufacturing. The devices were tested through an air–water bi-phase flow to assess hydrodynamic stability. A Phase I distribution-free quality control approach employing recursive sequential and permutation (RS/P) methods was conducted to evaluate channels’ width stability, while Fourier Transform Infrared Spectroscopy (FT-IR) was exploited to track chemical changes in reused resin batches. A Design of Experiment (DoE) study allowed hydrodynamic performance to be analyzed for the devices, revealing that increasing the flow rate to 0.3 <span><math><mi>mL/min</mi></math></span> enhanced stability across all devices, overcoming flow constriction effects caused by the photocurable resin reuse.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 334-347"},"PeriodicalIF":3.7,"publicationDate":"2025-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Compact hybrid reluctance based tip/tilt actuator for large range fast steering mirrors 用于大范围快速转向镜的紧凑混合磁阻式尖端/倾斜驱动器
IF 3.7 2区 工程技术
Alexander Pechhacker , Tobias Schopf , Ernst Csencsics , Georg Schitter
{"title":"Compact hybrid reluctance based tip/tilt actuator for large range fast steering mirrors","authors":"Alexander Pechhacker ,&nbsp;Tobias Schopf ,&nbsp;Ernst Csencsics ,&nbsp;Georg Schitter","doi":"10.1016/j.precisioneng.2025.09.021","DOIUrl":"10.1016/j.precisioneng.2025.09.021","url":null,"abstract":"<div><div>This work presents a compact tip/tilt fast steering mirror (FSM) based on a linearized hybrid reluctance actuation topology. The actuation principle is analyzed using a magnetic equivalent circuit model and finite-element method simulations. The proposed design achieves a large range of <span><math><mrow><mo>±</mo><mn>5</mn><mo>/</mo><mn>10</mn></mrow></math></span> deg (mechanical/optical) with an optical aperture of 1 × 1.5 inch, delivering higher torque and linearity compared to the state of the art. To maintain compactness, the system uses magnetically coupled axes while achieving a decoupling of over 30<!--> <!-->dB. Independent control loops for each yield position bandwidths of 1.06<!--> <!-->kHz and 1.13<!--> <!-->kHz, enabling a precision below 1.2 mdeg, and Lissajous scanning up to 110<!--> <!-->Hz with 4 deg. Overall, the compact FSM demonstrates the highest range-bandwidth product (+22%) with the largest range of hybrid reluctance actuated systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 317-325"},"PeriodicalIF":3.7,"publicationDate":"2025-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Applicability of projection lithography using a gradient-index lens array to patterning of 50–150 micron thick resist 梯度折射率透镜阵列投影光刻在50-150微米厚抗蚀剂上的适用性
IF 3.7 2区 工程技术
Toshiyuki Horiuchi, Naoyuki Otsuka, Takeharu Fukuhara, Hiroshi Kobayashi
{"title":"Applicability of projection lithography using a gradient-index lens array to patterning of 50–150 micron thick resist","authors":"Toshiyuki Horiuchi,&nbsp;Naoyuki Otsuka,&nbsp;Takeharu Fukuhara,&nbsp;Hiroshi Kobayashi","doi":"10.1016/j.precisioneng.2025.09.023","DOIUrl":"10.1016/j.precisioneng.2025.09.023","url":null,"abstract":"<div><div>Scan projection lithography using a gradient index lens array as a projection lens is advantageous for printing rough patterns more than 15 μm in large areas at a stretch. In addition to this wonderful performance, it was demonstrated in this paper that patterning in very thick resist films with thicknesses of 50–150 μm was practicable. Since imaging light rays came to a wafer with the maximum inclination angle <em>θ</em> of 12° depending on the property of selected lens array, pattern images formed in the thick resist film with a thickness of <em>t</em> had blurs of <em>b</em> = 2<em>t</em> tan12° = 0.435<em>t</em> at the resist surface. For this reason, the <em>b</em> value became the resolution limit of 1:1 lines-and-spaces patterns printed using a resist with the thickness of <em>t</em>. It was actually demonstrated that the resolution limits for 50- and 100-μm thick resist SU-8 almost corresponded to <em>b</em>. Aspect ratios were also coincided with the estimated value of <em>t/b</em> = 2.35. If the aspect ratios were tolerated to be smaller, patterns with thicknesses of more than 150 μm were printable. In addition, means for improving the patterning performances were discussed. Utilization of a lens array with a smaller inclination angle of imaging light rays, optimization of the exposure-light wavelength, and intentional defocusing of the wafer may be effective.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 326-333"},"PeriodicalIF":3.7,"publicationDate":"2025-09-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Research on surface magnetorheological polishing technology for optical grade components 光学级元件表面磁流变抛光技术研究
IF 3.7 2区 工程技术
Zhuangzhuang Cheng , Cong Sun , Mengjiao Duan , Zhenbiao Zhang , Kun Liang , Wenxin Wang , Xueliang Zhang
{"title":"Research on surface magnetorheological polishing technology for optical grade components","authors":"Zhuangzhuang Cheng ,&nbsp;Cong Sun ,&nbsp;Mengjiao Duan ,&nbsp;Zhenbiao Zhang ,&nbsp;Kun Liang ,&nbsp;Wenxin Wang ,&nbsp;Xueliang Zhang","doi":"10.1016/j.precisioneng.2025.09.018","DOIUrl":"10.1016/j.precisioneng.2025.09.018","url":null,"abstract":"<div><div>Optical grade components face significant challenges in manufacturing due to hard and brittle material properties and stringent requirements for damage-free surfaces. Most existing manufacturing methods have limitations in manufacturing cost and efficiency. Therefore, a multi-parameter synergistic control of the magnetorheological polishing (MRP) method is proposed, to optimize the excitation performance of the excitation device through magnetic field simulation, to regulate the anti-settling characteristics of the MRP fluid by combining with additive ratios, and to systematically investigate the influence of multi-dimensional parameters such as kinematic parameters of the polishing device, process parameters and so on, on the polishing effect. The regulation mechanism of magnetic flux density and particle size on the structure of magnetic chains is revealed by Monte Carlo simulation. The further established mesh density model of abrasive particle motion trajectory provides the theoretical basis for the synergistic optimization of the multi-parameters. This study provides a systematic experimental and theoretical method for the ultra-precision machining of optical components. It provides new ideas for the application of MRP technology in the machining of other hard and brittle materials.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 249-267"},"PeriodicalIF":3.7,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Smooth motion in piezoelectric stick-slip actuators at low driving voltage enabled by an orthogonally coupled symmetric mechanism 采用正交耦合对称机构实现压电贴滑执行器在低驱动电压下的平滑运动
IF 3.7 2区 工程技术
Fujun Wang , Jianhua Dai , Beichao Shi , Cunman Liang , Yanling Tian
{"title":"Smooth motion in piezoelectric stick-slip actuators at low driving voltage enabled by an orthogonally coupled symmetric mechanism","authors":"Fujun Wang ,&nbsp;Jianhua Dai ,&nbsp;Beichao Shi ,&nbsp;Cunman Liang ,&nbsp;Yanling Tian","doi":"10.1016/j.precisioneng.2025.09.019","DOIUrl":"10.1016/j.precisioneng.2025.09.019","url":null,"abstract":"<div><div>To achieve smooth motion over a wide velocity range in micro-nano manufacturing, this paper presents a novel piezoelectric stick-slip actuator (PSSA) actuated by an orthogonally coupled symmetric mechanism (OCSM). The OCSM comprises two vertically symmetric branches, each branch containing a vertically series-connected III-shaped guiding and i-shaped passive flexible mechanism, enabling efficient transmission of the piezoelectric actuator (PZT) displacement to the driving foot while enhancing end stiffness and first-order natural frequency. The impact of the stiffness of each flexible mechanism on motion smoothness is investigated through theoretical analysis. Key parameters are determined, and finite element analysis is conducted for verification. A prototype of the PSSA has been manufactured, and experimental tests are conducted. The results indicate that the developed PSSA exhibits a compact structure, smooth motion under low driving voltage, high stepping mode resolution (38.5 nm), and rapid velocity (6.21 mm/s). The influence of driving voltage, driving frequency, and the number of pulse cycles per step on motion smoothness is analyzed. A macro-micro switching positioning experiment is conducted. And the scanning mode resolution is 20 nm. Tip-based nanofabrication (TBN) experiments are conducted to create micro-nano structures on silicon wafer surfaces.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 290-302"},"PeriodicalIF":3.7,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158624","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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