Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"Surface oxidation properties of GaN wafers in chemical magnetorheological polishing process by ultrasonic action","authors":"Huazhuo Liang ,&nbsp;Wenjie Chen ,&nbsp;Youzhi Fu ,&nbsp;Yue Jian ,&nbsp;Wenjie Zhou ,&nbsp;Dawei Liu ,&nbsp;Junfeng He","doi":"10.1016/j.precisioneng.2025.03.019","DOIUrl":"10.1016/j.precisioneng.2025.03.019","url":null,"abstract":"<div><div>To overcome the difficulty of ultraprecision processing of GaN wafers, an ultrasonic chemical magnetorheological composite polishing method using the ultrasonic Fenton method is proposed. The effects of the catalyst type, catalyst concentration and oxidant concentration on the generation of the hydroxyl radical ·OH by ultrasonic Fenton were examined, and the reaction principle of ultrasonic Fenton was determined by using the ·OH and Fe²⁺ content as the main evaluation indices. Compared with those of the ultrasonic Fenton/Fenton reaction under the same conditions, the oxidation‒reduction potential, temperature, ·OH content and Fe²⁺ content all continuously increased within 60 min; thus, ultrasonication promoted the Fenton reaction. A higher catalyst concentration correlated to a higher ionised Fe²⁺ content. A high ·OH content was rapidly generated at the beginning of the reaction, and the ·OH content subsequently decreased after the rapid consumption of the oxidant as the reaction proceeded. The amount of O on the GaN surface increased after oxidation, and the main product of the oxide layer on the GaN surface was Ga₂O₃. Comparative polishing tests have shown that the combination of ultrasound and Fenton action results in higher polishing efficiency and quality.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 412-421"},"PeriodicalIF":3.5,"publicationDate":"2025-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel 3D dimension estimation approach in additive manufacturing based on virtual-real hybrid point cloud data and semantic segmentations","authors":"Shuo Shan,&nbsp;Hans Nørgaard Hansen,&nbsp;Yang Zhang,&nbsp;Matteo Calaon","doi":"10.1016/j.precisioneng.2025.03.016","DOIUrl":"10.1016/j.precisioneng.2025.03.016","url":null,"abstract":"<div><div>The advancements in additive manufacturing (AM) technology, while empowering the manufacturing of complex structures, have also increased the demand for corresponding measurement techniques. While 3D scanning and reconstruction have been employed for quality inspection in AM, there remains a gap between scan results and specific dimensions, hindering the progress of AM processes toward greater precision and speed. Aiming to bridge the gap between AM components and dimensional features, this paper introduces a novel method to estimate pre-defined dimensions from point cloud of AM objects. Building upon the foundation of semantic segmentation and post-processing calculations, hybrid data and down sampling are applied and evaluated. Comparisons with Coordinate Measuring Machine (CMM) measurements confirm that the proposed method in this paper significantly reduces measurement time and simplifies the measurement process, cutting the computation time down to 12 % of the original while maintaining high accuracy. The segmentation accuracy can reach 89 % when using a hybrid dataset with virtual data. The measurement uncertainty of the proposed method is quantified, confirming that the dominant contributor to the measurement uncertainty comes from the scanning instrument, validating the reliability of the proposed method.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 388-399"},"PeriodicalIF":3.5,"publicationDate":"2025-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683578","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Hybrid physics and data-driven modeling for edge control and form correction in the surface adaptive polishing of the optical surface","authors":"Cao Zhong-Chen ,&nbsp;Zhao Chenyao ,&nbsp;Wu Dongxu ,&nbsp;Liu Haitao","doi":"10.1016/j.precisioneng.2025.03.017","DOIUrl":"10.1016/j.precisioneng.2025.03.017","url":null,"abstract":"<div><div>The novel surface adaptive polishing (SAP) process is a promising approach for ultra-precision polishing of optical free-form surfaces. However, further investigation into the damage control mechanism and form control theory of this approach is required. A series of experimental studies has been conducted to determine the influencing mechanisms of the polishing parameters on the surface and subsurface states. The surface quality can be significantly improved, and the surface and subsurface damage is effectively mitigated when using the SAP tool for polishing, whether applied internally or at the edge of the workpiece. Moreover, theoretical modeling of form correction will be undertaken, focusing on developing a multi-scale physics and data-driven material removal model. The maximum removal depth at the edge exponentially varies with the overhang ratio. Accordingly, a correction coefficient is established to characterize the spatial distribution of the tool in the material removal function. Experimental and simulation results demonstrate high consistency in the validation experiments. The findings of this study are not only significant for ultra-precision polishing of the SAP tool but also provide a comprehensive approach for future research on edge control and form correction.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 400-411"},"PeriodicalIF":3.5,"publicationDate":"2025-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Design and analysis of Leaf-spring flexure hinge with adjustable fillet shapes","authors":"Junwei Lin ,&nbsp;Hasiaoqier Han ,&nbsp;Peiyi Li ,&nbsp;Jiaxin Li ,&nbsp;Qingwen Wu ,&nbsp;Zhenbang Xu","doi":"10.1016/j.precisioneng.2025.03.010","DOIUrl":"10.1016/j.precisioneng.2025.03.010","url":null,"abstract":"<div><div>Leaf-spring flexure hinge is a fundamentally compliant element that can be combined to create various hinge configurations. The shapes of the hinge’s fillets directly affect its performance. This study systematically investigates leaf-spring flexure hinges with adjustable fillet shapes and proposes a parametric design method. Based on Non-Uniform Rational B-Splines (NURBS) curves, this method allows the design of adjustable fillet shapes such as circular, elliptical, parabolic and hyperbolic forms. Then, the performance of the leaf-spring flexure hinges is investigated by means of a parameter study with a focus on the effects of fillet shapes. Finally, multi-objective optimization was conducted, and a test system is built to verify the analysis model. In summary, the proposed parametric design method for leaf-spring flexure hinges effectively predicts and optimizes hinge performance and provides new ideas for the design of spatial compliant mechanisms.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 330-343"},"PeriodicalIF":3.5,"publicationDate":"2025-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143642210","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Pilot capability evaluation of a modular laser diode-based prototype for beam focusing detection and calibration in laser processing","authors":"Zhou Su ,&nbsp;Mubasher Ali ,&nbsp;Feng Lin ,&nbsp;Yuanfu Tan ,&nbsp;Wei-Hsin Liao ,&nbsp;Hay Wong","doi":"10.1016/j.precisioneng.2025.03.013","DOIUrl":"10.1016/j.precisioneng.2025.03.013","url":null,"abstract":"<div><div>Current methods for focus detection and calibration in laser processing face challenges such as limited accuracy, lack of automated self-calibration, compatibility issues with commercial machines, and high costs. This paper introduces a novel method and prototype based on laser diode technology, designed to efficiently detect and self-calibrate the focus state of processing lasers. The prototype utilizes a universal laser diode package as a detector, with the emitted light beam effectively locating the detection area. An integrated photodiode generates digital signal when identifying the beam characteristics of the detected processing laser, facilitating the development of an efficient closed-loop feedback control system. Experimental results demonstrate that when the detected laser beam spot size varies between 231 μm (minimum adjustable size) and 251 μm, the prototype accurately responds to these changes in real time, exhibiting a reliable linear correlation (R² &gt; 0.999). Analysis of two types of detectors revealed similar high detection accuracy, with error rates of 0.023 % and 0.022 %, respectively. Furthermore, the prototype maintained a detection error rate ranging from 0.022 % to 0.049 % across detection distances of 100–250 mm, confirming consistent high accuracy under various conditions. The system also showcased self-calibration capabilities, adjusting the optical path to calibrate its focus state with an error rate of only 0.050 %. This cost-effective prototype, designed for high compatibility with existing processing machines, is expected to provide valuable insights into the field of laser processing.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 376-387"},"PeriodicalIF":3.5,"publicationDate":"2025-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research on force-position decoupling control technology of bonnet polishing of robotic arm","authors":"Shujing Sha ,&nbsp;Ning Wang ,&nbsp;Shaohang Ma ,&nbsp;Baojun Yu ,&nbsp;Chao Li ,&nbsp;Lulu Jiang ,&nbsp;Guanting Liu ,&nbsp;Zhuang Qin ,&nbsp;Runchuan Zhao","doi":"10.1016/j.precisioneng.2025.03.012","DOIUrl":"10.1016/j.precisioneng.2025.03.012","url":null,"abstract":"<div><div>Among complex curved surface polishing technologies, bonnet polishing has developed rapidly due to its superior polishing performance, but the force-position coupling problem is still a major problem in the polishing process. This study proposes a bonnet polishing system based on a torque servo. First, the force-position coupling problem was theoretically analyzed, and a dual-disc torque servo based on magnetorheological fluid was designed. On this basis, the output-damping torque model was established. Based on the Preston equation, the complex surface grinding and polishing removal function was modeled, and a force-position decoupling model based on the torque servo was further established. Then relevant performance simulation and performance testing were performed on the torque servo to verify the feasibility of its structural design. Finally, a robotic arm bonnet polishing system based on a torque servo was built, and a series of polishing experiments were conducted on complex curved surface workpieces. The results show that the surface quality Sa and Sz values of the workpiece before and after polishing dropped from 902.75 nm to 10.74<em>λ</em> to 32.75 nm and 0.96<em>λ</em> respectively, which significantly improved the surface quality of the processed parts. In order to improve the processing accuracy of complex curved surface workpieces, a reliable polishing solution is provided.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 315-329"},"PeriodicalIF":3.5,"publicationDate":"2025-03-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143628531","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Evaluation of the stiffness isotropy for spatially isotropic Stewart platforms","authors":"Xinbing Ding","doi":"10.1016/j.precisioneng.2025.03.005","DOIUrl":"10.1016/j.precisioneng.2025.03.005","url":null,"abstract":"<div><div>It is known that a six-degree-of-freedom (DOF) Stewart platform that has been designed to be spatially isotropic in the central configuration cannot be spatially isotropic in any other configuration. Hence, in order to evaluate the practical usefulness of the mechanism, it is necessary to evaluate the stiffness isotropy around the spatially isotropic configuration in the workspace. One of the most popular methods for assessing the stiffness isotropy is based on the condition number, because parallel robots are spatially isotropic when the condition number of the Cartesian stiffness matrix of the robot is equal to one. However, the methods based on the condition number have several drawbacks, such as the fact that the effect of the middle eigenvalues or middle singular values is not considered. This paper first introduces the calculation steps of the Cartesian stiffness matrix for each configuration of the workspace. Thereafter, three novel methods for evaluating the stiffness isotropy of the Cartesian stiffness matrix in non-spatially isotropic configurations are introduced. Finally, two spatially isotropic variants are selected to verify these three methods.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 303-314"},"PeriodicalIF":3.5,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143621021","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Micro shaft turning by electrochemical discharge machining using a sandwich cathode","authors":"Chenxue Wang ,&nbsp;Tomohiro Sasaki ,&nbsp;Atsutoshi Hirao","doi":"10.1016/j.precisioneng.2025.03.011","DOIUrl":"10.1016/j.precisioneng.2025.03.011","url":null,"abstract":"<div><div>Traditional micro shaft turning faces challenges such as short tool life, mechanical stress, deformation, and difficulty in machining complex shapes. This study presents electrochemical discharge turning (ECDT) of the micro copper rod with the diameter of 3 mm. A sandwich laminated electrode is used as the cathode. The high-speed rotating copper rod, mounted on a CNC platform, enables scanning motion. We investigated the effects of electrical parameters and spindle speed on machining performance. Experimental and simulation results show that the sandwich electrode improves shaft shoulder machining precision. Machining speed and surface quality depend on the relative durations of anode electrochemical dissolution (AED) and anode electro-discharge erosion (AEE) phases.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 344-357"},"PeriodicalIF":3.5,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Prediction model for pre-travel error in on-machine measurement of spherical surfaces in joint bearings using a lever gauge","authors":"Songhua Li ,&nbsp;Chuang Zuo ,&nbsp;Zichen Zhao ,&nbsp;Chi Jin","doi":"10.1016/j.precisioneng.2025.03.009","DOIUrl":"10.1016/j.precisioneng.2025.03.009","url":null,"abstract":"<div><div>On-machine measurement is a critical technology that enhances manufacturing precision and efficiency in the production of spherical surfaces for joint bearings. However, the accuracy of fitting reference ball center coordinates for short arc measurements utilizing a lever gauge remains low. The simple calculation of the distance between reference ball center and the calibration points does not suffice for precise identification of pre-travel error. This limitation significantly compromises the measurement accuracy of spherical surfaces. Therefore, this paper proposes a novel method for establishing and identifying a pre-travel error prediction model specifically for on-machine measurements conducted with a lever gauge. Initially, the mechanical structure of the lever gauge and the principles governing on-machine measurement of spherical surface was analyzed. This analysis focused on mechanism of pre-travel error, considering factors such as motion, contact force, and probe pose. Subsequently, a strategy for selecting calibration points was developed, tailored to the measurement requirements spherical surfaces in joint bearings. The parameters of the pre-travel error prediction model were determined using measurement data from reference ball calibration points, which were collected by the lever gauge at various pre-travel distances. The efficacy of the pre-travel error compensation method was ultimately verified through on-machine measurements of spherical surfaces on reference balls and plain bearings. The results indicate that, pre-travel error compensation significantly reduces the measurement error for spherical surfaces on reference balls to less than 0.7 μm, thereby improving the measurement accuracy by 57.1 %. For spherical surfaces in joint bearings, the measurement error after compensation is decreased to less than 1.4 μm, resulting in an improvement in measurement accuracy of 53.3 %. The compensation results show that the proposed prediction model for pre-travel error can improve the on-machine measurement accuracy considerably.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 278-289"},"PeriodicalIF":3.5,"publicationDate":"2025-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143593331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation on plastic and brittle characteristic of magnesium aluminum spinel in ultra-precision grinding","authors":"Peng Gu ,&nbsp;Yunxiang Zhou ,&nbsp;Chenchen Sun ,&nbsp;Zhongjin Luo ,&nbsp;Zhenhua Jiang ,&nbsp;Zhuoqi Shi","doi":"10.1016/j.precisioneng.2025.03.001","DOIUrl":"10.1016/j.precisioneng.2025.03.001","url":null,"abstract":"<div><div>Magnesium aluminate spinel is utilized in aerospace, optics, and electronics due to its optical properties, strength, thermal stability, and corrosion resistance. Ultra-precision grinding delivers superior surface finishing, optimal for hard and brittle substances. Surface quality after ultra-precision grinding affects optical performance significantly. In this paper, the material removal mechanism of magnesium aluminate spinel is investigated. A comprehensive method for evaluating the three-dimensional surface after ultra-precision grinding is proposed, which clearly describes the distribution of surface states. Surface error indicators are suggested for the plasticity and brittleness domain of ground surfaces. Additionally, three-dimensional surface analysis of magnesium aluminate spinel after ultra-precision grinding is performed utilizing Fourier transform. The optimized ultra-precision grinding process parameters by the firefly algorithm are obtained as <em>n</em>_<em>s</em> = 20200 r·min⁻¹, <em>v</em>_<em>w</em> = 1.2 mm min⁻¹, <em>a</em>_<em>p</em> = 1.5 μm. The mid-frequency surface roughness is 0.015 μm, and the profile height is 0.23 μm. This research achieves an optimal balance between grinding efficiency and surface quality, offering guidelines for the grinding processes for other brittle and hard materials.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 358-375"},"PeriodicalIF":3.5,"publicationDate":"2025-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}