{"title":"Advances in hot embossing technology for optical glass micro-nanostructures: A review","authors":"Tao Zhu , Kangsen Li , Feng Gong","doi":"10.1016/j.precisioneng.2024.11.016","DOIUrl":"10.1016/j.precisioneng.2024.11.016","url":null,"abstract":"<div><div>Hot embossing forming technology is a key technology for fabricating micro-nanostructures on optical glass, providing a process for efficient, large-scale, and economical production of optical glass components with excellent optical performance. The process uses coated mold with micro-nanostructures to hot emboss optical glass at high temperatures. However, the intricate and unpredictable flow and deformation behavior of viscoelastic glass in the thermodynamic field presents challenges to researchers. Therefore, this paper begins with an evaluative review of the adhesion and friction effects of glass on different mold and coating materials. Based on this foundation, the paper comprehensively summarizes both theoretical and applied advanced studies on the filling and flow deformation mechanisms of viscoelastic glass during molding and the quality of the final molded product. Then, the development of high-precision prediction models and molding parameter control systems is proposed for the future establishment of an integrated study framework that can predict glass flow deformation and to facilitate the efficient filling and accurate replication of micro-nanostructures. Finally, after summarizing the current research of the hot-rolled embossing for optical polymer, this paper pioneeringly proposes the unresolved critical challenges and related solutions of hot-rolled embossing for optical glass, setting the course for future research efforts in the emerging field of advanced hot-rolled embossing technologies.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"92 ","pages":"Pages 141-166"},"PeriodicalIF":3.5,"publicationDate":"2024-11-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143176765","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Dual-mode on-machine metrology for SPDT tool alignment","authors":"Wenjun Kang, Yihan Wang, Hongzhang Ma, Daodang Wang, Rongguang Liang","doi":"10.1016/j.precisioneng.2024.11.015","DOIUrl":"10.1016/j.precisioneng.2024.11.015","url":null,"abstract":"<div><div>To address the critical demand for on-machine metrology (OMM) in precision optics fabrication, a unique dual-mode OMM system has been developed. By integrating polarization-based snapshot motionless phase shifting, this OMM system enables the measurement of both surface form and roughness under laser interferometry mode and LED interference microscopy mode. Its compact and dual-mode design makes it ideal for on-machine tool alignment within single-point diamond turning (SPDT) machines, without the need to remove parts. To enhance its OMM capabilities, a defocus-model-based least square (L2) regression fitting algorithm and a convex-hull-based L2 regression are proposed to achieve precise retrieval of deviations in X and Y axes with robustness. Additionally, a high-precision calibration method for testing system misalignment, based on the Zernike high-order approximation model, is applied to relax the OMM system alignment requirements. As a result, rapid tool alignment is achieved without stringent alignment needs. The proposed OMM eliminates the necessity for offline metrology feedback during the tool alignment process and increases process efficiency by at least 50 %. Furthermore, it eliminates errors caused by removing, repositioning, and rebalancing the part, offering a novel alternative solution to address the critical demand for SPDT tool alignment and surface characterization.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"92 ","pages":"Pages 101-110"},"PeriodicalIF":3.5,"publicationDate":"2024-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143176763","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Phase-shifting profilometry for 3D shape measurement of moving objects on production lines","authors":"Qing He, Jiaxing Ning, Xu Liu, Qingying Li","doi":"10.1016/j.precisioneng.2024.11.010","DOIUrl":"10.1016/j.precisioneng.2024.11.010","url":null,"abstract":"<div><div>It is challenging for phase-shifting profilometry to measure objects in motion on production lines due to two main issues. Firstly, the movement of the object causes a mismatch in its position across different fringe patterns. Additionally, there is a violation of the ideal phase shift between these fringe patterns. To address these problems, we propose a method that takes advantage of the known moving direction of objects on production lines. By aligning the isophase direction of fringe patterns with the known direction of the moving objects, our method essentially solves the well-known phase error problem caused by object motion. Furthermore, we have developed a projection and imaging technique to track the measured object that is covered with different fringe patterns. Both of the previously listed issues have been resolved in this manner. The proposed method is validated by comparisons with state-of-the-art methods, proving its simplicity, broader applicability, and improved measurement accuracy.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"92 ","pages":"Pages 30-38"},"PeriodicalIF":3.5,"publicationDate":"2024-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142759581","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jianzhou Chen , Zhifeng Liu , Chuanhai Chen , Baobao Qi , Jingjing Xu , Long Tao , Qiaobin Yan
{"title":"Robot stiffness modeling based on the rigid flexible coupling simulation and its application to trajectory planning","authors":"Jianzhou Chen , Zhifeng Liu , Chuanhai Chen , Baobao Qi , Jingjing Xu , Long Tao , Qiaobin Yan","doi":"10.1016/j.precisioneng.2024.11.011","DOIUrl":"10.1016/j.precisioneng.2024.11.011","url":null,"abstract":"<div><div>The flexibility of joints has the major influence on the robot stiffness, which makes it limited in the field of precision and ultra-precision machining. How to ensure the end-effector stiffness of the robot has been one significant problem for the above application. To address this challenge, in this work, a rigid-flexible coupling simulation method is proposed for the robot, then based on the simulation, the robotic end-effector stiffness prediction model is established, which can be applied to the robotic trajectory planning to control its end-effector stiffness. In the simulation method, the rigid-flexible simulation model of the robot is established based on the torsional stiffness estimation of each joint and its global decomposition in multiple directions of robotic base coordinate system. During the stiffness modeling, the neural network theory is used to establish a mapping model between robotic pose and end-effector stiffness based on the sample data accumulated by simulations under different poses. In order to show the significance of this work, an application case to the trajectory planning problem is performed. The results analysis, indicates that the proposed algorithm can control the end-effector stiffness not less than the required value during the whole robotic operation.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"92 ","pages":"Pages 77-89"},"PeriodicalIF":3.5,"publicationDate":"2024-11-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143176195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Lei Yuan , Mingxiang Ling , Jianhao Lai , Tingjun Zeng , Hao Xu , Xianmin Zhang
{"title":"Optimal design of a novel three-stage displacement amplifying mechanism with curved-axis flexure hinges","authors":"Lei Yuan , Mingxiang Ling , Jianhao Lai , Tingjun Zeng , Hao Xu , Xianmin Zhang","doi":"10.1016/j.precisioneng.2024.11.003","DOIUrl":"10.1016/j.precisioneng.2024.11.003","url":null,"abstract":"<div><div>A novel three-stage displacement amplifying mechanism is proposed by integrating the lever-type, Scott-Russell and double-arm elliptical mechanisms with red blood cell inspired flexure hinges that well balances the displacement amplification ratio and main resonance frequency. Flexure hinges are loaded in tension and bending instead of compression and bending, which can be free from potential buckling problems due to the stress stiffening effects. The combination of the dynamic stiffness matrix method and the discrete-beam transfer matrix method is utilized to rapidly forecast the kinetostatic and dynamic performances of the proposed compliant amplifier, including the curved-axis flexure hinges with complex contour profiles. Then, the Pareto multi-objective optimization strategy, taking those key geometric parameters obtained by the sensitivity analysis into account, is represented based on NSGA-II and a linear frequency solution strategy to accelerate the calculation efficiency and parameter optimization iteration. Based on the application requirement, a point on the Pareto curve is chosen as the optimal configuration for operating conditions. At last, experiments of the piezoelectric compliant amplifier under two types of external mass loads are exhibited. A displacement amplification ratio of 12.2 and main resonance frequency of 1380.5 Hz are achieved for the piezoelectric compliant amplifier under no external mass load.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"92 ","pages":"Pages 39-62"},"PeriodicalIF":3.5,"publicationDate":"2024-11-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143176753","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Meng Xu , Yiling Yang , Yang Lv , Gaohua Wu , Yuguo Cui
{"title":"A novel bionic parallel XY piezoelectric stick-slip positioning stage","authors":"Meng Xu , Yiling Yang , Yang Lv , Gaohua Wu , Yuguo Cui","doi":"10.1016/j.precisioneng.2024.11.009","DOIUrl":"10.1016/j.precisioneng.2024.11.009","url":null,"abstract":"<div><div>This paper reports a novel parallel XY piezoelectric stick-slip positioning stage with bionic actuation mechanisms and driving strategies by mimicking fleas in nature. In particular, it exhibits low stress, macro-stroke decoupling, easy regulation, and smooth transition. Double-circular arc bionic flexible hinges are devised to reduce stress. Meanwhile, piezoelectric stick-slip driving is combined with orthogonal guiding mechanisms to realize high resolution, large stroke, and parallel decoupling. Also, a bionic driving strategy with improved Hopf oscillators is proposed to regulate stick-slip motion and decrease system disturbances. Statics and dynamics models are derived, and stress, frequency, and single-step displacement are simulated. Finally, a prototype is manufactured, and its performance is tested. The maximum velocity is 9.03 mm/s, <em>x</em>- and <em>y</em>-direction displacement coupling rates are 0.89 % and 0.92 %, resolutions are 5 nm and 5.5 nm, and maximum horizontal and vertical loads are 1.4 N and 40 N, respectively. Meanwhile, the positioning stage can quickly converge to its steady state even under a 30 V interference and suppress the micro/nano vibration using the proposed driving strategy. Experiments verify the effectiveness of the structural design and bionic driving strategy.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"92 ","pages":"Pages 1-20"},"PeriodicalIF":3.5,"publicationDate":"2024-11-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142720443","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers","authors":"Mona Yadi , Tsutomu Uenohara , Yasuhiro Mizutani , Yoshiharu Morimoto , Yasuhiro Takaya","doi":"10.1016/j.precisioneng.2024.11.004","DOIUrl":"10.1016/j.precisioneng.2024.11.004","url":null,"abstract":"<div><div>Precise analysis of the full-field in-plane vibration of microelectromechanical system (MEMS) transducers is crucial for assessing their device functionality and performance. As an example, in the context of frequency/amplitude modulation of Quartz Tuning Fork (QTF)-based atomic force microscopy (AFM) systems, understanding QTF’s in-plane vibration can significantly enhance accurate evaluation of tip-sample forces. Current methods, such as analytical and numerical approaches, have limitations when it comes to providing accurate measurements. To address these limitations, we proposed an experimental approach that combines stroboscopic and sampling moiré (SM) techniques. This method focuses on investigating the in-plane vibration of a QTF and utilizes the obtained results to measure the sensor’s dynamic properties such as vibration mode shape, resonance frequency (<span><math><msub><mrow><mi>f</mi></mrow><mrow><mn>0</mn></mrow></msub></math></span>), and quality factor (<span><math><mi>Q</mi></math></span>). Nanometer-scale light pulses, generated using a custom-designed stroboscope, are synchronized with the QTF’s excitation voltage to freeze the vibration effectively, enabling imaging using a standard CCD camera. Subsequently, SM analysis is employed to extract the surface vibration profile, facilitating the measurement of vibration mode shape, <span><math><msub><mrow><mi>f</mi></mrow><mrow><mn>0</mn></mrow></msub></math></span>, and <span><math><mi>Q</mi></math></span>. This technique shows promise for analyzing the dynamic behavior of various micro-devices compatible with the sample preparation process.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"92 ","pages":"Pages 21-29"},"PeriodicalIF":3.5,"publicationDate":"2024-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142757347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yumei Bai , Rongxing Liu , Jiulin Wu , Jixing Che , Mingkai Wu , Rui Zhou , Xuedong Chen , Lizhan Zeng , Wei Jiang
{"title":"Stiffness model for pneumatic spring with air-diaphragm coupling effect","authors":"Yumei Bai , Rongxing Liu , Jiulin Wu , Jixing Che , Mingkai Wu , Rui Zhou , Xuedong Chen , Lizhan Zeng , Wei Jiang","doi":"10.1016/j.precisioneng.2024.11.008","DOIUrl":"10.1016/j.precisioneng.2024.11.008","url":null,"abstract":"<div><div>An accurate pneumatic spring stiffness model is essential for achieving subhertz, quasi-zero stiffness vibration isolation in optical experiments, precision measurements, and semiconductor manufacturing involving heavy equipment. Conventional stiffness models for pneumatic springs with diaphragms often neglect the effect of the elastic diaphragm, making it difficult to accurately characterise pneumatic spring stiffness. This paper presents an innovative pneumatic spring stiffness model that incorporates the air-diaphragm coupling effect—a phenomenon in which the air and diaphragm interact synergistically to affect stiffness. The inclusion of this coupling effect alters the effective area and volume of the pneumatic spring, two critical parameters influencing stiffness. Detailed mechanical and geometrical derivations are provided to establish an accurate stiffness model. A modification coefficient is introduced to quantify the air-diaphragm coupling effect on stiffness, and various factors influencing this coefficient, as well as their impact on stiffness, are examined. An experiment was conducted to validate the proposed model, showing a relative error of less than 1.65 % between the experimental and theoretical results. Considering the air-diaphragm coupling effect, the absolute error approximation was reduced by an order of magnitude, and the relative stiffness decreased by 11.05 % and 8.26 % in Experiments 1 and 2, respectively. Owing to its high precision, the proposed model provides theoretical guidance for the engineering design of pneumatic springs and facilitates the accurate matching of quasi-zero stiffness vibration isolation systems for heavy equipment in ultra-precision applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"91 ","pages":"Pages 728-738"},"PeriodicalIF":3.5,"publicationDate":"2024-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142697352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Shijie Li , Jiani Liu , Bingcai Liu , Ailing Tian , Sibo Niu , Lumin Zhao , Haitao Liu , Chunyan Shi , Jin Zhang , Haifeng Liang , Changlong Cai
{"title":"Distance deviation sensitivity on null test of convex hyperboloid mirrors with large relative aperture","authors":"Shijie Li , Jiani Liu , Bingcai Liu , Ailing Tian , Sibo Niu , Lumin Zhao , Haitao Liu , Chunyan Shi , Jin Zhang , Haifeng Liang , Changlong Cai","doi":"10.1016/j.precisioneng.2024.11.006","DOIUrl":"10.1016/j.precisioneng.2024.11.006","url":null,"abstract":"<div><div>In the shape measurement of convex hyperboloid mirrors with large relative apertures, alignment deviations can significantly affect the accuracy of null test results owing to their sensitivity, resulting in inaccurate results. This paper introduces autocollimation and compensation methods. Subsequently, a shape detection experiment of a large relative aperture convex hyperboloid mirror with a diameter of 15 mm was conducted using the aforementioned methods. Further, a detailed simulation analysis was performed to address the inconsistencies between the two test results. The results suggested that the Hindle sphere method was highly sensitive to distance deviation. Furthermore, the distances in the optical path exerted a complementary effect, which easily obscured the true surface shape of the measured part. The computer-generated hologram (CGH) method could accurately determine the true surface shape deviation based on the alignment judgment provided by the aligned CGH part. These studies provide scientific guidance for more accurately obtaining the true surface shape error of the hyperboloid mirror under test, and have significant engineering application value.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"91 ","pages":"Pages 707-715"},"PeriodicalIF":3.5,"publicationDate":"2024-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142697350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Caitao Liu, YuGuo Cui, Dan Liang, Li Liu, JunQiang Lou
{"title":"Rapid non-contact measurement of distance between two pins of flexspline in harmonic reducers based on standard/actual parts comparison","authors":"Caitao Liu, YuGuo Cui, Dan Liang, Li Liu, JunQiang Lou","doi":"10.1016/j.precisioneng.2024.11.007","DOIUrl":"10.1016/j.precisioneng.2024.11.007","url":null,"abstract":"<div><div>In order to achieve rapid and precise measurement of distance between two pins of flexspline in harmonic reducers, an rapid non-contact measurement strategy based on standard/actual parts comparison is proposed. Firstly, to eliminate the installation eccentricity error of flexspline fixture, a sine-quadrant eccentricity error elimination method is designed. The sinusoidal curve and quadrant of the measured fixture eccentricity error with respect to the fixture rotation angle is used to calculate the eccentric error components along <em>x</em> and <em>y</em> axes, which has the advantages of simplicity and rapidity. Secondly, a Gaussian-Harmonic Wavelet Filtering (GHWF) algorithm is proposed to filter out the noise in the measurement process, which can effectively suppress the Gibbs phenomenon in harmonic wavelet transformation and improve the signal-to-noise ratio. Finally, an experimental platform including baseplate, turntable, flexspline, moving platform and laser sensor is constructed, in order to verify the performances of error elimination, noise filtering and distance measuring. Experimental results show that the measurement error of the proposed strategy is less than 7 μm, which is consistent with the accuracy obtained by the commercial high-precision gear measuring instrument. The average measurement time is about 29.6 s, much less than the 5 min of the commercial instrument, showing great application potential for the efficient distance measurement of gears and flexsplines.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"91 ","pages":"Pages 716-727"},"PeriodicalIF":3.5,"publicationDate":"2024-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142697351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}