Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"High efficiency fabrication of Si microlenses by applying in-situ laser and ultrasonic vibration hybrid diamond cutting","authors":"Jianguo Zhang,&nbsp;Xinhuan Li,&nbsp;Shanyi Ma,&nbsp;Yujiang Lu,&nbsp;Haoxia Tian,&nbsp;Junfeng Xiao,&nbsp;Jianfeng Xu","doi":"10.1016/j.precisioneng.2025.01.017","DOIUrl":"10.1016/j.precisioneng.2025.01.017","url":null,"abstract":"<div><div>Microlens arrays are important component units of new optical systems with the advantageous of small unit size and high degree of integration. In this research, the efficient fabrication of microlens arrays on hard and brittle material of silicon is achieved by coupling high efficiency ultrasonic elliptical vibration trajectory with in-situ laser softening technology. Firstly, the generation mode and morphology characteristics of the microlens array are fitted by the numerical calculation. Moreover, the actual machining parameters are furtherly confirmed. Furthermore, the maximum critical depth of cut along each crystal direction of monocrystalline silicon is experimentally verified by grooving investigation for anisotropy. Finally, the high efficiency fabrication of the microlens array on silicon is carried out by applying the in-situ laser-vibration hybrid assisted diamond cutting system, where the experimental results matched well with the simulation results. This work provides a valuable method for fast fabrication of microstructure arrays on hard and brittle materials, which has broad application in precision engineering.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 324-333"},"PeriodicalIF":3.5,"publicationDate":"2025-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286923","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Optimizing processing stability with ionized polymers in magnetorheological finishing fluid","authors":"Tianyu Bai ,&nbsp;Chenglin Yan ,&nbsp;Xiaoyuan Li ,&nbsp;Lianxin Zhang ,&nbsp;Minheng Ye ,&nbsp;Chao Wang","doi":"10.1016/j.precisioneng.2025.01.018","DOIUrl":"10.1016/j.precisioneng.2025.01.018","url":null,"abstract":"<div><div>Magnetorheological finishing (MRF) is being widely utilized in Semiconductor and optical processing. The properties of the finishing fluid have a great influence on the finishing quality. This study revealed that sodium polystyrene sulfonate (PSS), when employed as a dispersant in the finishing fluid, effectively enhances the polishing performance and maintains the processing stability of the finishing fluid. In the MRF processing, the group with the addition of 0.2 % PSS achieved a reduction in the roughness (Rq) of the fused silica (FS) workpiece to 1.02 nm compared to 4.3 nm in the control group. The PSS elevated the surface potential of abrasive particles, impeding abrasive agglomeration by reinforcing electrostatic repulsion. Simultaneously, the operation life of the finishing fluid significantly extends more than 3 times. The addition of PSS resulted in a significant decrease in the oxidation of Carbonyl iron particles (CIPs). Energy spectrum analysis revealed that diamond abrasives scratched the CIPs. Scratched CIPs were prone to be oxidized to Fe³⁺, thus leading to the significant failure of the finishing fluid. PSS adsorb to particle surfaces, creating steric hindrance that reduces friction between abrasives and CIPs. The MRF fluid with PSS exhibited a notable reduction of Fe³⁺ concentration. Both mechanisms concurrently enhanced the processing stability.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 344-354"},"PeriodicalIF":3.5,"publicationDate":"2025-01-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143287270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A comprehensive evaluation of accuracy and performance metrics for a laser on-the-fly processing control system","authors":"Ping-Jian Huang,&nbsp;Chien-Fang Ding","doi":"10.1016/j.precisioneng.2025.01.014","DOIUrl":"10.1016/j.precisioneng.2025.01.014","url":null,"abstract":"<div><div>Laser On-the-Fly processing technology integrates a motion platform and a laser galvanometer scanning system to achieve high-speed and high-precision dynamic on-the-fly processing. In this study, a UV pulsed laser On-the-Fly processing system was developed, and laser processing monitoring technology was introduced to realize real-time optimization of processing parameters through a synchronous multi-axis motion control system. Experimental results demonstrate that the system maintains a circularity error within 1 μm and an average error within 0.1 μm during a 10 μm diameter circular scan. Furthermore, the system achieves scanning speeds exceeding 3000 mm/s while maintaining a pattern distortion ratio of less than 1 %. This system is suitable for both single-axis and dual-axis processing of large-area planar substrates and maintains a stable laser spot with a highly uniform distribution during scanning, thereby effectively improving processing efficiency. The results of this study can provide a potential solution for future microfabrication industries.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 310-323"},"PeriodicalIF":3.5,"publicationDate":"2025-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143369642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fast and affordable printing of polymeric nanostructures via superluminescent light projection","authors":"Jungho Choi,&nbsp;Sourabh K. Saha","doi":"10.1016/j.precisioneng.2025.01.016","DOIUrl":"10.1016/j.precisioneng.2025.01.016","url":null,"abstract":"<div><div>The ability to additively manufacture polymeric nanostructures is highly desirable, but existing light-based techniques are challenging to scale up due to the need to engineer optical nonlinearity into the process. This nonlinearity enables overcoming the optical diffraction limit so that nanoscale features that are smaller than the focused light spot can be printed. However, achieving optical nonlinearity requires either expensive high-intensity femtosecond lasers to activate multi-photon absorption or novel custom-designed photoresists to activate multi-step absorption. Here, we present the superluminescent light projection (SLP) technique as an alternative approach that does not require one to engineer optical nonlinearity into the process, yet it is still capable of sub-diffraction printing. We achieved this by digitally patterning a low-intensity light beam generated from a low-cost superluminescent diode and projecting the patterned beam into a UV-curable photoresist. SLP can print features as small as 325 nm with 405 nm light and at an intensity of 36 W/cm², which is more than 25 billion times lower than that required for multi-photon 3D printing. Furthermore, it enables rapid printing of 3D structures through its layer-by-layer writing mechanism at a voxel generation rate of up to 2.3 × 10⁵ voxels/s using a system which is 35 times less expensive than multi-photon printers. Thus, SLP can significantly advance the affordability of rapid nanoscale 3D printing for a variety of applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 302-309"},"PeriodicalIF":3.5,"publicationDate":"2025-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143369641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation into high-shear and low-pressure grinding heat using liquid-body-armor-like wheel: Theory and modeling","authors":"Yebing Tian ,&nbsp;Shuang Liu ,&nbsp;Bing Liu ,&nbsp;Pengzhan Wang","doi":"10.1016/j.precisioneng.2025.01.005","DOIUrl":"10.1016/j.precisioneng.2025.01.005","url":null,"abstract":"<div><div>High-shear and low-pressure grinding with the liquid-body-armor-like wheel has significant advantages, such as good machining quality, high adaptability, and low cost. It has a considerable potential for application in the field of precision machining. A theoretical analytical model was proposed to understand the heat dissipation mechanism and the distribution of the heat source in the high-shear and low-pressure grinding with liquid-body-armor-like wheel. Firstly, the convective heat transfer coefficient of the cutting film at the interface of the workpiece surface and wheel was solved through combining the fluid dynamic and the heat transfer. Then, a heat source model for the high-shear and low-pressure grinding was established. The temperature field under three different shapes (i.e. rectangular, triangular, and trapezoidal) of the heat source distribution were solved. Additionally, the effects of grinding velocity, workpiece feed rate, and normal grinding force on the shape of the heat source distribution were analyzed. Finally, the grinding temperature during the grinding process was measured using the thermocouple on the experimental platform to verify the model. The findings show the trapezoidal distribution of heat sources has the minimum error as compared with the rectangular and triangular heat source distribution. The theoretical analytical results and finite element simulation results agreed well with the measured temperature values. The average error of the analytical results was 5.5 %. The theoretical temperature increased with the grinding velocity and the normal grinding force. It decreased with the increase in the workpiece feed rate. The highest measured temperature was only 91.68 °C at the grinding velocity of 14 m/s in this work. The temperature was significantly lower than that of the conventional grinding. This study provides theoretical guidance for the thermal behaviors and heat generation mechanisms in high-shear and low-pressure grinding processes.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 259-271"},"PeriodicalIF":3.5,"publicationDate":"2025-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143369640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Dynamic modeling and damping-induced suppression of cross-coupling in an XY flexure-based stage","authors":"Siyue Li ,&nbsp;Zhong Chen ,&nbsp;Xineng Zhong ,&nbsp;Xianmin Zhang","doi":"10.1016/j.precisioneng.2025.01.012","DOIUrl":"10.1016/j.precisioneng.2025.01.012","url":null,"abstract":"<div><div>Compliant mechanisms are widely utilized in micro-nano motion applications. Cross-coupling in multi-axis motion is a significant source of errors in precision motion systems. Although the static and dynamic properties of flexure-based nanopositioning stages have been extensively studied, their unified parametric expressions for motion cross-coupling are still lacking, and the impact of damping on cross-coupling has not been thoroughly analyzed. In this paper, we further model the force–displacement relationship of compliant mechanisms and present an analytical framework for the dynamic cross-coupling of a precision motion stage based on the Beam Constraint Model (BCM). We predict the cross-coupling effect and analytically quantify cross-coupling errors in geometry. As a case study, this model is applied to the static and dynamic cross-coupling analysis of a flexure-based nanopositioning stage, examining the effective of damping on cross-coupling reduction. Experimental results show that the dynamic cross-coupling ratio decreased by 6.52% at low frequencies and 10.37% at the resonant frequency when the stage was equipped with passive damping. The nonlinear dynamic cross-coupling model effectively predicts cross-coupling behavior and the impact of damping, offering a simpler and clearer approach for forecasting the damping characteristics of cross-coupling. This model can be integrated into control systems for error compensation and the rejection of damping-induced cross-coupling, providing new insights into damping control in compliant mechanisms.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 272-284"},"PeriodicalIF":3.5,"publicationDate":"2025-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286930","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Development of a customized novel additively manufactured honing tool: Surface integrity and Abbott-Firestone assessment of the honed part","authors":"Mohsen Barmouz ,&nbsp;Bahman Azarhoushang","doi":"10.1016/j.precisioneng.2025.01.013","DOIUrl":"10.1016/j.precisioneng.2025.01.013","url":null,"abstract":"<div><div>The honing process is widely used for finishing cylindrical internal surfaces to achieve superior surface integrity. Traditional flexible honing tools, though affordable and easy to use, have limitations in processing multi-diameter holes, curved surfaces, and varying diameters. This research introduces a novel customized honing tool designed and fabricated using additive manufacturing, enabling rapid and efficient design adjustments for diverse applications. Experimental evaluations revealed its high performance, achieving surface roughness values of R_a ≈ 0.5 μm and S_a ≈ 0.3 μm. Abbott-Firestone curves showed reduced running-in periods (up to 30-fold), minimized wear, and extended component lifespan. Moreover, optimizing rotational speed and reciprocating cycles significantly improved surface quality, showcasing the tool's adaptability and potential as a superior finishing solution.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 253-258"},"PeriodicalIF":3.5,"publicationDate":"2025-01-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286924","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"High dynamic wavefront stability control for high-uniformity periodic microstructure fabrication","authors":"Zijian Zhong ,&nbsp;Jingwen Li ,&nbsp;Tianshi Lu ,&nbsp;Xinghui Li","doi":"10.1016/j.precisioneng.2025.01.006","DOIUrl":"10.1016/j.precisioneng.2025.01.006","url":null,"abstract":"<div><div>Periodic microstructures are widely used in optical communication, sensing, and imaging systems for their superior performance in optical modulation. Among their fabrication methods, interference lithography stands out for its high precision and uniformity, making it applicable for the fabrication of large-area periodic microstructures. However, the exposure wavefront is subject to the environmental perturbations, and the resulted drifts compromise the quality of produced photoresist mask. To address this problem, a method for exposure wavefront control aimed at high-uniformity periodic microstructures fabricating is proposed. Embedded in a dual-beam interference lithography system, the method monitors the drifts based on high-speed CCD image acquisition of the Moiré pattern generated by a reference grating, computes the magnitude of drifts based on a line-sampling cross-correlation algorithm and compensates for the drifts based on mirrors driven by piezoelectric actuators. The proposed method achieves simultaneous monitoring and controlling of phase and period drifts at a bandwidth of over 250 Hz. Experiments demonstrate that this system can effectively suppress low-frequency disturbances-induced drifts and reduce the root mean square (RMS) value of phase drifts to <span><math><mrow><mn>9</mn><mo>×</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>3</mn></mrow></msup></mrow></math></span> grating periods and period drifts to <span><math><mrow><mn>2</mn><mo>.</mo><mn>27</mn><mo>×</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>5</mn></mrow></msup></mrow></math></span> grating periods during exposure, providing a solid foundation for fabricating high-uniformity periodic microstructures.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 216-223"},"PeriodicalIF":3.5,"publicationDate":"2025-01-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"TSP-based depth-first search algorithms for enhanced path planning in laser-based directed energy","authors":"Bingjie Xiao ,&nbsp;Zhihui Zhang ,&nbsp;Qi Wang ,&nbsp;Baoyu Zhang ,&nbsp;Shaopeng Zheng","doi":"10.1016/j.precisioneng.2025.01.009","DOIUrl":"10.1016/j.precisioneng.2025.01.009","url":null,"abstract":"<div><div>In the field of laser-directed energy deposition, it is crucial to optimize the path planning to improve the mechanical properties and ensemble fidelity of the precision printed samples. The traditional path planning methods typically require layer-by-layer calculation of the intersections between the scan lines and the contour loops, which leads to substantial redundant computations and low forming precision. In order to solve these problems, this paper transforms the path optimization into the Travelling Salesman Problem (TSP), followed by realizing the strategy of continuous inter-layer scanning through depth-first search. This method can generate efficient, non-intersecting connection paths in a short time, effectively reducing the total length of the connection path and processing time. Experimental results show that compared with the conventional zig-zag strategy, the path planning method based on TSP performs well in terms of near-net shape, compactness, and hardness of the molding samples. By shifting the intersection areas of the path to the outer contour and interacting the long and short sides, the method can realize the high precision joint part without gap forming and reduce the internal defects of the component.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 224-236"},"PeriodicalIF":3.5,"publicationDate":"2025-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286928","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The innovation in planar optics: Technological breakthroughs and application prospects of metalens","authors":"Dong Li ,&nbsp;Manna Gu ,&nbsp;Chenxia Li ,&nbsp;Ying Tian ,&nbsp;Bo Fang ,&nbsp;Jingxiang Wang ,&nbsp;Zhi Hong ,&nbsp;Xufeng Jing","doi":"10.1016/j.precisioneng.2025.01.011","DOIUrl":"10.1016/j.precisioneng.2025.01.011","url":null,"abstract":"<div><div>As a branch of metasurfaces, metalens have demonstrated unparalleled potential in optical manipulation and imaging shaping. By altering the structure of meta-atoms, metalens can achieve various functions, such as diffraction-limited focusing and aberration correction. This paper introduces the principles and modulation methods of metalens, categorizing them into plasmonic and dielectric types based on the materials used. It also covers tunable metalens and achromatic metalens, highlighting some of the latest advancements in the field. The aim of this paper is to provide readers with a comprehensive understanding of metalens and offer new ideas and methods for designing high-performance optical systems in the future.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 237-252"},"PeriodicalIF":3.5,"publicationDate":"2025-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143287290","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}