Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"Tooth profile piecewise modification method for cycloid gear of RV reducer based on meshing interval optimization","authors":"Song Gao ,&nbsp;Xuan Wang ,&nbsp;Jiapeng Wang ,&nbsp;Yiwan Li","doi":"10.1016/j.precisioneng.2025.10.018","DOIUrl":"10.1016/j.precisioneng.2025.10.018","url":null,"abstract":"<div><div>Rotate vector (RV) reducer is a high-precision deceleration mechanism featuring advantages such as a large transmission ratio and load-bearing capacity. It is widely applied in fields of industrial robots. As a key component of RV reducer, the cycloid gear plays a decisive role in reducer's performance, and the cycloidal shape significantly affects the meshing performance. In this study, taking the RV-40E reducer as the object, a piecewise modification for the cycloidal gear based on meshing interval optimization was proposed. The working segment of cycloidal profile was modified by the rotated angular method, and the influence of meshing interval on transmission performance was analyzed. Then, taking the meshing-in and meshing-out phase angles as variables, the friction power loss and gluing coefficient as objectives, an optimization model for meshing interval was established. The single- and multi-objective optimizations were solved based on the genetic algorithm. The dedendum and addendum of cycloidal profiles were adopted spline curves. According to the continuity conditions at endpoints, the tooth profile equations of the non-working segments were obtained by spline interpolation method. The results demonstrated after optimization, the friction loss and gluing coefficient reduced by 6.30% and 10.50%, respectively, the reasonable radial clearances were maintained at the dedendum and addendum. Finally, the finite element simulation verification was carried out through ANSYS software. The proposed piecewise modification method not only ensures conjugate meshing in working segment, but also can flexibly control the gaps of non-working segments according to specific requirements, which provides the design ideas for gear tooth modification in engineering applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 677-689"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145362964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Vibration suppression strategy of elliptical gears based on configuration optimization design","authors":"Changbin Dong ,&nbsp;Juan Wang ,&nbsp;Wangpeng Pei ,&nbsp;Yongping Liu","doi":"10.1016/j.precisioneng.2025.10.016","DOIUrl":"10.1016/j.precisioneng.2025.10.016","url":null,"abstract":"<div><div>The dynamic imbalance problem of elliptical gears seriously affects their service performance and can significantly induce vibration. In order to overcome the above technical difficulties, this paper proposes to use topology optimization technology to achieve structural optimization design of elliptical gear spokes, aiming to suppress vibration and alleviate the dynamic imbalance problem of elliptical gears. Based on nonlinear dynamics and viscoelastic theory, a 6-degree-of-freedom bending torsional coupling dynamic model was derived considering gear eccentricity excitation, and accurately solved the time-varying meshing stiffness, comprehensive transmission error, and time-varying tooth backlash parameters of the model. The influence of lightweight design on the vibration response of the system was analyzed by combining the time-domain diagram, FFT spectrum diagram, phase diagram, and Poincaré cross-sectional diagram. The results indicate that with the optimization of the rotational inertia and centroid position of the elliptical gear transmission system through lightweight design, the vibration response of the system has been weakened, but the frequency component has not shown significant changes.Finally, vibration experiments confirmed that lightweight design has a significant inhibitory effect on the vibration characteristics of elliptical gears. ¹</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 632-649"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145362965","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A high performance hybrid-driven piezoelectric actuator based on asymmetrical structure with combined lateral and coupling motions","authors":"Qi Wang ,&nbsp;Dahoon Ahn ,&nbsp;Yang Zhang ,&nbsp;Peng Yan ,&nbsp;Ziran Wang","doi":"10.1016/j.precisioneng.2025.11.015","DOIUrl":"10.1016/j.precisioneng.2025.11.015","url":null,"abstract":"<div><div>Bionic stepping piezoelectric actuators such as stick–slip or inchworm actuators demonstrate important applications in semiconductor manufacturing and active optics, where high-speed and high-precision motion capabilities, as well as load performance, often involve a trade-off arising from distinct actuation mechanisms. This study proposes a compact piezoelectric actuator based on biomimetic driving principles combining the advantages of stick–slip and inchworm actuations by employing only two piezoelectric stack units. The design comprises a multifunctional driving foot based on a flexible triangular mechanism and a clamping foot based on a spring hinge. The asymmetrical structure features displacement amplification and enables combined lateral and coupling motions, supporting a hybrid driving principle to achieve both stick–slip and inchworm motions from a performance perspective. A prototype of the designed piezoelectric actuator was fabricated to verify its feasibility and performance. The experimental results show that the actuator achieves a maximum speed of 52.89 mm/s and a maximum output force of 24.52 N, with a motion resolution of 23 nm, which significantly outperform existing results in the literature.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1049-1059"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578682","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Hard-turning-induced surface integrity and fatigue performance of 18CrNiMo7-6 steel for V-notched specimens","authors":"Yinxia Zhang ,&nbsp;Man Liu ,&nbsp;Jinyong Han ,&nbsp;Siyu Zhai ,&nbsp;Xiuwu Liu ,&nbsp;Xiaodong Yan ,&nbsp;Fuquan Nie ,&nbsp;Zhenlong Peng","doi":"10.1016/j.precisioneng.2025.09.016","DOIUrl":"10.1016/j.precisioneng.2025.09.016","url":null,"abstract":"<div><div>In conventional grinding processes for hardened steel, excessive residual tensile stress can negatively affect part performance. Additionally, using cutting fluids during grinding often causes environmental pollution. To address these issues, this study adopted dry hard turning (DHT) instead of grinding processing for fatigue specimens. This study focused on the DHT of 18CrNiMo7-6 hardened steel and examined how the DHT processing parameters affect the surface roughness, surface residual stress, and 3D surface morphology of 18CrNiMo7-6 hardened steel V-notch specimens. Additionally, fatigue tests and fracture analyses were performed to compare the fatigue performance of the specimens machined via DHT and grinding processing with the preferred parameters. The experimental results show that as the rotational speed (<em>n</em>) increases, the surface roughness (<em>Ra</em>) first decreases and then increases, whereas the residual compressive stress of the V-notch fatigue specimens first increases and then decreases. As the feed velocity (<em>v</em>_<em>f</em>) increases, <em>Ra</em> increases, and the residual compressive stress decreases. Under specific conditions, when <em>n =</em> 1200 rpm and <em>v</em>_<em>f</em> = 5 mm/min, <em>Ra</em> reaches a minimum of 0.259 μm, the axial residual stress reaches a maximum of −580.0 MPa and the tangential residual stress reaches a maximum of −420.6 MPa. Additionally, the surface integrity of the specimens machined via DHT is significantly superior to that of the specimens processed via conventional grinding, and the fatigue resistance of the DHT-machined specimens is superior to that of the specimens processed via grinding. The fatigue resistance of the DHT specimens is better than that of the ground specimens, which can realize “Turning instead of Grinding.”</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 268-278"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Deep learning-driven virtual phase shifting for enhanced interferometric surface profiling","authors":"Jurim Jeon ,&nbsp;Yangjin Kim ,&nbsp;Naohiko Sugita","doi":"10.1016/j.precisioneng.2025.10.021","DOIUrl":"10.1016/j.precisioneng.2025.10.021","url":null,"abstract":"<div><div>Accurate surface measurement of silicon wafers is essential for various high-precision applications, where even sub-nanometer deviations can lead to critical performance degradation. Phase-shifting interferometry (PSI) is widely used for this task owing to its high accuracy. Among PSI methods, the classical 4-step phase-shifting algorithm (PSA) with π/2 shifts offers an optimal balance between accuracy and simplicity, effectively compensating for second harmonic distortion. However, in real-world experiments, ideal phase shifts are difficult to realize because of environmental disturbances, which result in phase-shift errors and coupling effects with harmonic distortions. To address this limitation, we propose a deep learning-based virtual phase shifter (DLVPS) that generates three additional interferograms with accurate phase shifts, which accounts for second harmonic components, from a single experimental interferogram. The original input interferogram and the three generated interferograms comprise a synthetic interferogram sequence that enables accurate phase retrieval. Experimental validation on silicon wafer profiling confirmed that the DLVPS can produce more accurate phase shifts than the classical experimental method, demonstrating its robustness against environmental disturbances. The evaluation of the retrieved phase exhibited phase error of 0.0725 and standard deviation of 0.0368 rad, indicating that the proposed method achieved both high phase retrieval accuracy and robust repeatability. Our approach utilizes deep learning to reduce reliance on complex hardware-based phase shifting, achieving stable and precise phase retrieval in the presence of environmental disturbances. Furthermore, by combining this with analytic phase retrieval, the proposed method overcomes the practical limitations of PSI while preserving the strengths of the established 4-step PSA.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 757-766"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145416751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Algebraic kinematic modeling and trajectory analysis for double-sided planetary grinding of silicon wafers in semiconductor manufacturing","authors":"Chung-Yu Tsai ,&nbsp;Chih-Chun Cheng ,&nbsp;Wei-Jie Luo","doi":"10.1016/j.precisioneng.2025.10.013","DOIUrl":"10.1016/j.precisioneng.2025.10.013","url":null,"abstract":"<div><div>Double-sided planetary grinding (DSPG) of semiconductor materials faces several critical challenges, including the lack of a unified quantitative kinematic framework, systematic methods for determining optimal grinding cycles, and sufficient understanding of the trajectory overlap mechanisms that affect surface uniformity. Furthermore, current approaches cannot quantify the directional randomness in the grinding paths, leading to inefficient empirical parameter selection. To address these limitations, this study develops a comprehensive algebraic kinematic modeling framework. Precise mathematical models are derived to describe the planetary gear motion relationships, and an optimal cycle determination methodology is introduced. A novel trajectory overlap analysis method is proposed for examining the abrasive grain behavior, and a Shannon entropy method is employed to quantify the grinding path directional randomness and support data-driven optimization. Case studies show that the relative rotational speed ratios significantly influence the surface uniformity, with moderate grinding cycles achieving nearly uniform directional distributions. Moreover, the framework accurately predicts trajectory repetition cycles and explains the variations in the surface quality. Overall, it provides semiconductor engineers with systematic process control tools, overcoming the limitations of empirical approaches and enabling consistent, high-quality wafer processing for hard materials such as silicon carbide (SiC) and gallium nitride (GaN).</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 660-676"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145362967","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Isotropic point synthesis of flexures and of compliant mechanisms","authors":"O. Sorgonà ,&nbsp;L. Bruzzone ,&nbsp;O. Giannini ,&nbsp;M. Verotti","doi":"10.1016/j.precisioneng.2025.09.027","DOIUrl":"10.1016/j.precisioneng.2025.09.027","url":null,"abstract":"<div><div>In this paper, the <em>point compliance synthesis</em> method is applied at the output port of a compliant mechanism to determine the points that satisfy the isotropy property. The kinetostatics of the compliant system is described using the ellipse of elasticity theory. According to the proposed modeling approach, based on projective geometry, the position of the isotropic points depends solely on the conic eccentricity, and their coordinates can be obtained through a simple arithmetic expression. Since any compliant system can be modeled by an ellipse of elasticity, the results obtained are of general validity. The synthesis procedure is applied to three case studies: two uniform flexures having axes with constant and variable curvature, and a closed-chain compliant mechanism. Numerical simulations and experimental testing are carried out to validate the procedure and to confirm the isotropy property.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 624-631"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145362968","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research progress on grinding contact theory of axisymmetric aspheric optical elements","authors":"Wenzhang Yang ,&nbsp;Bing Chen ,&nbsp;Bing Guo ,&nbsp;Qingliang Zhao ,&nbsp;Juchuan Dai ,&nbsp;Guangye Qing","doi":"10.1016/j.precisioneng.2025.08.015","DOIUrl":"10.1016/j.precisioneng.2025.08.015","url":null,"abstract":"<div><div>Aspherical optical components are critical in precision optical systems (e.g., aerospace, medical, astronomy) for superior aberration correction and imaging performance. Fabricated from hard, brittle materials like ceramics and silicon, these components offer exceptional hardness, thermal stability, and wear resistance. Current machining methods—molding, diamond turning, grinding-polishing, and ultra-precision grinding—face challenges due to material brittleness and hardness. Ultra-precision grinding emerges as an effective approach for shaping aspherical optics, necessitating fundamental insights into grinding contact theory to optimize material removal and precision. This paper systematically reviews aspherical grinding techniques and their characteristics, followed by an in-depth analysis of contact theory advancements, including contact arc length, maximum undeformed chip thickness, and residual height in hard-brittle material grinding. Finally, it summarizes current research limitations and proposes future directions for advancing precision grinding theory, aiming to enhance the fabrication of high-performance aspherical optical components.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 24-51"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145005320","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Applicability of projection lithography using a gradient-index lens array to patterning of 50–150 micron thick resist","authors":"Toshiyuki Horiuchi,&nbsp;Naoyuki Otsuka,&nbsp;Takeharu Fukuhara,&nbsp;Hiroshi Kobayashi","doi":"10.1016/j.precisioneng.2025.09.023","DOIUrl":"10.1016/j.precisioneng.2025.09.023","url":null,"abstract":"<div><div>Scan projection lithography using a gradient index lens array as a projection lens is advantageous for printing rough patterns more than 15 μm in large areas at a stretch. In addition to this wonderful performance, it was demonstrated in this paper that patterning in very thick resist films with thicknesses of 50–150 μm was practicable. Since imaging light rays came to a wafer with the maximum inclination angle <em>θ</em> of 12° depending on the property of selected lens array, pattern images formed in the thick resist film with a thickness of <em>t</em> had blurs of <em>b</em> = 2<em>t</em> tan12° = 0.435<em>t</em> at the resist surface. For this reason, the <em>b</em> value became the resolution limit of 1:1 lines-and-spaces patterns printed using a resist with the thickness of <em>t</em>. It was actually demonstrated that the resolution limits for 50- and 100-μm thick resist SU-8 almost corresponded to <em>b</em>. Aspect ratios were also coincided with the estimated value of <em>t/b</em> = 2.35. If the aspect ratios were tolerated to be smaller, patterns with thicknesses of more than 150 μm were printable. In addition, means for improving the patterning performances were discussed. Utilization of a lens array with a smaller inclination angle of imaging light rays, optimization of the exposure-light wavelength, and intentional defocusing of the wafer may be effective.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 326-333"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Compact hybrid reluctance based tip/tilt actuator for large range fast steering mirrors","authors":"Alexander Pechhacker ,&nbsp;Tobias Schopf ,&nbsp;Ernst Csencsics ,&nbsp;Georg Schitter","doi":"10.1016/j.precisioneng.2025.09.021","DOIUrl":"10.1016/j.precisioneng.2025.09.021","url":null,"abstract":"<div><div>This work presents a compact tip/tilt fast steering mirror (FSM) based on a linearized hybrid reluctance actuation topology. The actuation principle is analyzed using a magnetic equivalent circuit model and finite-element method simulations. The proposed design achieves a large range of <span><math><mrow><mo>±</mo><mn>5</mn><mo>/</mo><mn>10</mn></mrow></math></span> deg (mechanical/optical) with an optical aperture of 1 × 1.5 inch, delivering higher torque and linearity compared to the state of the art. To maintain compactness, the system uses magnetically coupled axes while achieving a decoupling of over 30<!--> <!-->dB. Independent control loops for each yield position bandwidths of 1.06<!--> <!-->kHz and 1.13<!--> <!-->kHz, enabling a precision below 1.2 mdeg, and Lissajous scanning up to 110<!--> <!-->Hz with 4 deg. Overall, the compact FSM demonstrates the highest range-bandwidth product (+22%) with the largest range of hybrid reluctance actuated systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 317-325"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220267","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}