Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"Conformal polishing of NiP grating microstructures using SiO2/Al2O3 mixed abrasive slurry","authors":"Chuhong He ,&nbsp;Quanpeng He ,&nbsp;Yinhui Wang ,&nbsp;Hui Deng","doi":"10.1016/j.precisioneng.2025.06.017","DOIUrl":"10.1016/j.precisioneng.2025.06.017","url":null,"abstract":"<div><div>Nickel-phosphorus (NiP) coatings are widely used for surface modification of metal mirrors due to their excellent physical and chemical properties, such as in the collector mirrors of extreme ultraviolet (EUV) lithography machines. Grating microstructures can be fabricated on NiP coatings using Single-Point Diamond Turning (SPDT) to enhance the optical performance of mirrors. However, the SPDT process often introduces periodic marks on the surface, increasing surface roughness, causing optical flux loss, and reducing reflectance, which negatively impact the performance of mirrors. In this study, SiO₂/Al₂O₃ mixed abrasive is employed for Chemical Mechanical Polishing (CMP) to investigate conformal polishing processes for NiP grating microstructures. The mixed abrasive leverages the advantages of both abrasives: Al₂O₃ abrasive effectively removes periodic marks and reduces the spatial frequency errors in the 10¹∼10² mm⁻¹ range, while SiO₂ abrasive further smooths the surface and reduces the spatial frequency errors in the 10²∼10³ mm⁻¹ range. Through experiments, factors such as Al₂O₃ particle size, Al₂O₃ abrasive concentration, pH, and H₂O₂ concentration are comprehensively considered to precisely control the synergistic effects of the mechanical removal and chemical reactions of CMP, balancing the optimization of surface quality and conformality of microstructures. By optimizing the polishing slurry and utilizing a combination of soft and hard polishing pads, a uniform RMS roughness of 0.8 nm (scanned area: 218 × 218 μm²) was achieved across a 100 mm diameter NiP grating microstructures sample. Importantly, the grating microstructures retained their shape, with only an 84 nm reduction in the grating height and a 12.98 μm increase in the transition area width after polishing. These results highlight the excellent conformal polishing capability of the process. This study provides a promising strategy for the conformal polishing of large-area and high-precision NiP grating microstructures on EUV collector mirrors, while also offering an important reference for the industrial-scale production of other optical microstructures.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 257-276"},"PeriodicalIF":3.5,"publicationDate":"2025-06-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144331261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A high-reliability acceleration switch based on a compliant bistable mechanism","authors":"Luqing Hu,&nbsp;Hongxi Wang,&nbsp;Bohan Zhao,&nbsp;Sijiao Wang,&nbsp;Yuan Xue","doi":"10.1016/j.precisioneng.2025.06.014","DOIUrl":"10.1016/j.precisioneng.2025.06.014","url":null,"abstract":"<div><div>Acceleration switches play a crucial role as control devices in the inertial control system. Their ability to make reliable contact and close has a direct impact on the safety and stability of the entire system. This paper presents the design of a passive bistable acceleration switch. The design is based on the switching characteristics of a three-segment fully compliant bistable mechanism (TSFCBM) and the principle of frictional vibration reduction, aiming to improve system stability and reliability through friction damping. Firstly, the nonlinear stiffness of the TSFCBM and the static design relationship of the bistable acceleration switch are analyzed. Secondly, a dynamic model of the bistable acceleration switch under the coupling action of multiple forces, such as inertial force, friction damping force, and elastic force, is established. Then, dynamic characteristic simulations and experiments are conducted. The relative error between the simulation results and the experimentally measured switch closing threshold is less than 6.7 %. Moreover, once the switch is closed, it remains in the closed state even when the acceleration signal disappears, demonstrating good threshold characteristics and reliability of the bistable characteristic switch. Next, based on the above, the features of the half-sine wave acceleration signal that enable the bistable acceleration switch to close stably are further analyzed. Finally, a mathematical model between pulse width and amplitude on the closure boundary is obtained, thereby providing a theoretical basis for the threshold design of the bistable acceleration switch.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 246-256"},"PeriodicalIF":3.5,"publicationDate":"2025-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144331269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Feedforward-adaptive neural network control for ultra-precision positioning in magnetic levitation motion stages","authors":"Jinhe Yang ,&nbsp;Peng Jiang ,&nbsp;Tongjian Guo ,&nbsp;Yi Yu ,&nbsp;Quanliang Dong ,&nbsp;Xiaoming Wang","doi":"10.1016/j.precisioneng.2025.05.024","DOIUrl":"10.1016/j.precisioneng.2025.05.024","url":null,"abstract":"<div><div>The objective of this study is to develop a feedforward-adaptive neural network controller (F-ANNC) for precise trajectory tracking and robust disturbance rejection in magnetic levitation motion stage (MLMS) systems. Initially, the dynamic behavior of the MLMS is modeled to capture the fundamental characteristics of the system. The F-ANNC is then constructed by integrating model-based high-order trajectory feedforward control with an adaptive neural network (ANN) compensator and a linear feedback controller. The neural network component is designed using a multi-layer radial basis function neural network (ML-RBF-NN), enabling adaptive estimation and compensation for system uncertainties and external disturbances. This approach allows the neural network to dynamically adjust based on changes in system behavior without requiring precise system parameter settings. The adaptive control laws are derived from Lyapunov stability theory, ensuring both system stability and robustness. Extensive simulations and experiments validate the proposed F-ANNC, demonstrating its superior performance in managing parameter uncertainties and external disturbances, thereby confirming its effectiveness in ultra-precision MLMS applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 212-226"},"PeriodicalIF":3.5,"publicationDate":"2025-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144312493","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Zernike-guided correction of phase errors in two-photon polymerization over extended printing areas","authors":"Emilia Wdowiak ,&nbsp;Michał Józwik ,&nbsp;Martin J. Booth ,&nbsp;Piotr Zdańkowski ,&nbsp;Maciej Trusiak","doi":"10.1016/j.precisioneng.2025.06.013","DOIUrl":"10.1016/j.precisioneng.2025.06.013","url":null,"abstract":"<div><div>Two-photon polymerization (TPP) has emerged as a powerful technique, widely used across various fields for high-precision 2D and 3D microfabrication. One of its promising applications lies in the fabrication of purely phase-based transparent structures, which proved to be helpful in micro-optics, optical metrology, nanophotonics, novel microscopy techniques, and many more, via testing, calibrating, or enhancing these modern developing areas. However, achieving an accurate control over the phase properties of written structures, especially across extended printing areas still remains a challenge. In this study, we introduce a feedback-loop correction methodology that is compatible with any TPP fabrication system. Our approach relies firstly on an interferometric measurement of the phase map of printed test-component, performed in ex-situ microscopic system. Then, translating its inverse into the designed phase-influencing features of the fabricated body (refractive index and axial thickness) to further compensate the acknowledged artifacts. By using a Zernike polynomial-based analysis of the measured phase map, we unlock a precise error study and allow an accurate correction of each separated component. Such methodology reduces phase errors by up to a factor of 6, lowering the standard deviation from 5.40 rad to 0.83 rad over a 400 μm diameter area, at a wavelength of 635 nm. This marks a significant advancement in phase control over larger area. To validate the effectiveness of our correction, we fabricate a customized set of phase structures spanning the system's maximum printing area, demonstrating their potential practical applications. This work paves the way for more refined phase control in TPP, opening new possibilities for microfabrication in optics, biology, and beyond.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 182-191"},"PeriodicalIF":3.5,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144298289","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Analytical and experimental study on laser assisted machining of Ti6Al4V at low cutting speeds","authors":"Muruga Prabu U.,&nbsp;Pramod Kuntikana,&nbsp;Afzaal Ahmed","doi":"10.1016/j.precisioneng.2025.05.026","DOIUrl":"10.1016/j.precisioneng.2025.05.026","url":null,"abstract":"<div><div>Difficult-to-cut materials like Ti6Al4V find wide applications in the aerospace and biomedical industries because of their high strength-to-weight ratio, corrosion resistance, and biocompatibility. However, conventional machining of Ti6Al4V needs high cutting power owing to the high strength of the alloy. Laser assisted machining (LAM) is a hybrid machining process that can reduce cutting power while machining Ti6Al4V. During the process, a laser heating source constantly precedes the tool. Consequently, the material plasticity increases because the dislocations gain energy from the laser and move rapidly. The increase in plasticity is reflected in the reduced flow stress and cutting power. In this study, a non-dimensional thermal solution for the temperature rise in the shear zone because of laser tracing was first derived. Subsequently, the thermal solution was coupled with the unequal division shear zone model to determine the cutting power during LAM. However, three improvements were made to the unequal division shear model to improve the accuracy of the results. First, the constant shear zone thickness assumption was replaced with Grzesik’s expression for shear zone thickness. Secondly, constant specific heat at the shear zone was replaced by temperature-dependent specific heat of the material. Finally, instead of maximum shear stress at the shear zone, the average shear stress was utilized for cutting force calculation. Modeling was followed by validation experiments. Cutting velocities of 15, 22.5, and 30 m/min; feed of 0.1 mm/rev; width of cut of 1.5 mm; laser power of 100 and 300 W; and laser spot size of 0.5 mm were the parameters used for the experiments. A maximum of 23% reduction in cutting power was observed in LAM compared to conventional machining at a cutting velocity of 15 m/min. Moreover, tool wear studies were done using scanning electron microscopy (SEM) images. A cutting speed of 22.5 m/min was found to be optimal from a tool wear perspective.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 227-245"},"PeriodicalIF":3.5,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144331260","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Vision-based and real-time calibration of industrial robot by using deep learning and dimension-reduced models","authors":"Zhouxiang Jiang ,&nbsp;Ruoheng Ding ,&nbsp;Yuxuan Liu ,&nbsp;Zhongjie Long ,&nbsp;Bao Song","doi":"10.1016/j.precisioneng.2025.06.011","DOIUrl":"10.1016/j.precisioneng.2025.06.011","url":null,"abstract":"<div><div>A real-time calibration method for six-DoF industrial robot is presented. It aims to address the issue that calibration always suspends the work of robot and is quite costly due to repeated utilization of expensive measurement instrument. For this, a pose measurement strategy with cost-effective cameras is proposed where the work trajectory of robot is considered as a strict constraint on configurations to meet the requirement of real time. However, such efficiency improvement is accompanied by the accuracy decrease because the camera brings large measurement error and the trajectory constraint results in the reduced parameter identifiability. Firstly, to pull up the camera performance to the same level of precise instrument like the laser tracker, a set of neural networks are designed to map the inaccurately measured poses by camera to the accurate poses of concerned joints. Secondly, a dimension-reducing method is proposed to truncate the constrained kinematic-error model into two, which commonly achieve high parameter identifiability. Simulation shows that the prediction accuracy of joint pose with the well-trained networks is much higher than the measurement accuracy of laser tracker. Besides, the calibration accuracy with the dimension-reduced models is validated to be higher than that with the single high-dimension model of typical calibration. Finally, a generation strategy of training data with deeper regularity is proposed to meet the accuracy requirement in real scene, and the comparative results in the experiment validate a good potential of the real-time calibration method in manufacturing that requires high accuracy of robot and no suspension of work.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 192-211"},"PeriodicalIF":3.5,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144312567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Influence of tool posture variations and SIM method application on surface topography in 5-axis ball-end milling","authors":"Zhao Zhao,&nbsp;Wenming Wei,&nbsp;Wanhua Zhao","doi":"10.1016/j.precisioneng.2025.06.003","DOIUrl":"10.1016/j.precisioneng.2025.06.003","url":null,"abstract":"<div><div>Surface topography serves as a critical determinant of fatigue strength and tribological performance in five-axis ball-end milling of complex curved workpieces, where residual height and texture geometry are significantly influenced by variations in tool posture. To investigate the evolution of surface topography with kinematic parameters in five-axis ball-end milling, this study proposed an innovative Sweep-Inerpolate-Map (SIM) model for the prediction of three-dimensional surface topography. The experimental measurements and simulated predictions of surface topography demonstrated strong consistency through multivariate cutting experiments conducted under three critical parameters: feedrate ranging 0.2–0.5 mm/rev, B-axis angle (<span><math><mrow><msub><mi>θ</mi><mi>b</mi></msub></mrow></math></span>) ranging <span><math><mrow><mrow><mn>0</mn><mo>°</mo></mrow><mo>∼</mo><mrow><mn>10</mn><mo>°</mo></mrow></mrow></math></span>, and C-axis angle (<span><math><mrow><msub><mi>θ</mi><mi>c</mi></msub></mrow></math></span>) ranging <span><math><mrow><mrow><mn>0</mn><mo>°</mo></mrow><mo>∼</mo><mrow><mn>360</mn><mo>°</mo></mrow></mrow></math></span>. Detailed analysis revealed two key mechanisms: (1) The Texture Unit Inclination Angle (TUIA) exhibits sinusoidal periodicity with respect to <span><math><mrow><msub><mi>θ</mi><mi>b</mi></msub></mrow></math></span> and <span><math><mrow><msub><mi>θ</mi><mi>c</mi></msub></mrow></math></span>, TUIA reaches extremum values in clockwise/counterclockwise directions when <span><math><mrow><msub><mi>θ</mi><mi>b</mi></msub><mo>&gt;</mo><mrow><mn>0</mn><mo>°</mo></mrow></mrow></math></span> with <span><math><mrow><msub><mi>θ</mi><mi>c</mi></msub></mrow></math></span> at <span><math><mrow><mrow><mn>90</mn><mo>°</mo></mrow></mrow></math></span> or <span><math><mrow><mrow><mn>270</mn><mo>°</mo></mrow></mrow></math></span>, respectively; (2) The Peak Line Residual Height (PLRH) is primarily governed by <span><math><mrow><msub><mi>θ</mi><mi>b</mi></msub></mrow></math></span>, showing significant positive correlation between its amplitude/fluctuation range and <span><math><mrow><msub><mi>θ</mi><mi>b</mi></msub></mrow></math></span>. PLRH demonstrates minimal sensitivity to rotational angles and feed directions with <span><math><mrow><msub><mi>θ</mi><mi>b</mi></msub></mrow></math></span> ranging <span><math><mrow><mrow><mn>0</mn><mo>°</mo></mrow><mo>∼</mo><mrow><mn>20</mn><mo>°</mo></mrow></mrow></math></span>. Through systematic simulations and experimental validation, this study constructed a rigorous quantitative mapping framework between kinematic parameters and surface texture characteristics in ball-end milling, thereby providing a solid theoretical foundation for optimizing cutting parameters and achieving active control over texture shape.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 346-367"},"PeriodicalIF":3.5,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144523091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Direct phase aberration compensation through gradient fitting for wafer surface 3D measurement using digital holography","authors":"Qing He,&nbsp;Qingying Li,&nbsp;Defeng Zhang,&nbsp;Zhuanfang Zheng","doi":"10.1016/j.precisioneng.2025.06.005","DOIUrl":"10.1016/j.precisioneng.2025.06.005","url":null,"abstract":"<div><div>Digital holography is a widely used method for quantitative phase imaging. However, the object wave contains phase aberrations introduced by the imaging lenses. A multitude of techniques have been proposed to compensate for the phase aberrations, and most of them require a phase unwrapping procedure before compensation, which can be easily affected by any unwrapping error caused by discontinuity boundaries. To address this problem, we propose a direct phase aberration compensation method based on phase gradient fitting without phase unwrapping. We use a bivariate polynomial model to describe the distribution of the phase aberrations. The fitting procedure is based on comparisons between the phase gradients described by the model and those calculated from the actual wrapped phase distribution. Simulations and experimental results for 3D measurement of the wafer surface demonstrate that our method outperforms state-of-the-art approaches, proving its effectiveness in compensating the phase aberrations.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 170-181"},"PeriodicalIF":3.5,"publicationDate":"2025-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144291308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Intelligent monitoring and control system for molten metal drop-on-demand jetting by water-hammer effect","authors":"Boce Xue ,&nbsp;Yanzhen Zhang ,&nbsp;Yuyao Wu ,&nbsp;Guofang Hu ,&nbsp;Zihao Li ,&nbsp;Weiwei He ,&nbsp;Mingyu Yan ,&nbsp;Runsheng Li ,&nbsp;Xiao-Yu Tang","doi":"10.1016/j.precisioneng.2025.06.010","DOIUrl":"10.1016/j.precisioneng.2025.06.010","url":null,"abstract":"<div><div>The molten metal drop-on-demand (DoD) jetting technology holds great potential for applications in fields such as electronics manufacturing and metal additive manufacturing. To ensure the stability and reliability of droplet quality, monitoring the jetting system state and controlling the jetting process are essential. However, existing studies primarily focus on conventional ink rather than molten metal, while monitoring the jetting system state and controlling the jetting process remain unintegrated. This study develops an integrated intelligent monitoring and control system for a self-developed water-hammer-based molten metal DoD jetting system. Firstly, the geometric features of droplets are collected and analyzed under varying liquid level heights and different driving waveform parameters. Subsequently, a jetting simulation model is established, and then it is used for sampling to train a prediction model for droplet volume reachable range, which can be used to monitor the state of the jetting system. Next, a multi-objective molten droplet control system is designed based on deep reinforcement learning, enabling the control system to simultaneously regulate the droplet volume and shape. Finally, simulations and experiments are conducted on the developed monitoring and control system. The results demonstrate that the monitoring system can accurately determine the current state of the liquid level. Furthermore, under normal liquid level height, the control system can achieve precise and rapid control over both the droplet volume and shape. This study contributes to improving the production quality of molten metal DoD jetting systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 134-146"},"PeriodicalIF":3.5,"publicationDate":"2025-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144270029","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Deep learning-based restoration method for missing fringe information in the high reflectivity regions","authors":"Longxiang Zhang,&nbsp;Yixin Ji,&nbsp;Wei Wu,&nbsp;Jianhua Wang","doi":"10.1016/j.precisioneng.2025.06.006","DOIUrl":"10.1016/j.precisioneng.2025.06.006","url":null,"abstract":"<div><div>Conventional fringe projection profilometry (FPP) based on a single-exposure is limited in achieving high-precision 3D measurements when processing fringe images that contain saturated regions, as distortion in these areas significantly reduces the measurement accuracy. Although high dynamic range (HDR) methods can mitigate this issue, they require additional conditions, which increase both measurement costs and complexity. To address the limitations of traditional HDR methods, a method based on deep learning is proposed for restoring missing fringe information. The proposed method employs a simple U-Net architecture to efficiently restore saturated fringe images by leveraging high-dimensional feature representations and skip connections within the network. In addition, combining the restored fringe information provided by the method presented enables 3D measurement of the object under different measurement systems. The results of the experiments confirm that the method accurately restores the fringe information in saturated images, making the restored images suitable for high-precision 3D reconstruction. Furthermore, by integrating the restored fringe information, the proposed method enables 3D reconstruction using saturated fringe images captured under different measurement systems, which include those with varying saturation levels and those captured from different angles. This demonstrates that the proposed method restores missing fringe information in saturated images and exhibits strong generalization capabilities.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 80-93"},"PeriodicalIF":3.5,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144261420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}