Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"Preparation of high-quality polarized grating arrays based on glass surfaces by vibration-assisted nanoimprinting","authors":"Yan Gu ,&nbsp;Hongwei Yao ,&nbsp;Jieqiong Lin ,&nbsp;Yingao Xue ,&nbsp;Silin Liu ,&nbsp;Yuan Xi ,&nbsp;Tianyu Gao ,&nbsp;Xinyang Liu","doi":"10.1016/j.precisioneng.2025.03.003","DOIUrl":"10.1016/j.precisioneng.2025.03.003","url":null,"abstract":"<div><div>The present study proposes a method of fabricating polarized gratings using piezoelectric-driven vibration-assisted nanoimprinting, aiming to address the challenges associated with high production costs and lengthy fabrication periods in the optical field. The influence of grating surface material and period on polarized efficiency is analyzed through FDTD. Additionally, the impact of vibration frequency and amplitude on the filling rate is examined. The incorporation of one-dimensional transverse vibration characterized by high frequency and low amplitude during the nanoimprinting process can effectively mitigate resistance encountered in the filling stage, enhance the surface quality of polarized gratings, and optimize photoresist infiltration within the template. The vibration parameters suitable for the vibration-assisted nanoimprint method are determined experimentally and under these parameters, the grating's filling rate is enhanced by 11 %. Finally, it is verified by scanning electron microscopy that the polarized gratings prepared through the vibration-assisted nanoimprinting method have good surface morphology, clear diffracted spots under light source irradiation, and good polarization performance. This study demonstrates that vibration-assisted nanoimprinting has unique cost-effectiveness, and the surface properties of the prepared polarized gratings are great, which provides a new method for the preparation of polarized gratings.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 159-174"},"PeriodicalIF":3.5,"publicationDate":"2025-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143551101","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Automatic precision matching method of optical measurement data for blade profile quality detection","authors":"Maoyue Li,&nbsp;Baiying Sha,&nbsp;Zelong Liu,&nbsp;Hongyu Lv,&nbsp;Yuanqiang Su","doi":"10.1016/j.precisioneng.2025.03.004","DOIUrl":"10.1016/j.precisioneng.2025.03.004","url":null,"abstract":"<div><div>Blades are key components in aviation engines, determining energy conversion efficiency, operational safety, and lifespan. During the precision machining, assembly, and maintenance stages of damaged blades, three-dimensional measurements are necessary to accurately guide related process flows. To precisely measure various surface quality errors on blades, a measurement reference standard is usually introduced when aligning measurement data with CAD models. However, the complexity of thin-walled blades and significant noise interference makes it challenging to accurately locate optical measurement data. This paper proposes an automatic method for matching blade optical measurement data with CAD models, allowing for precise alignment of actual blade measurement data with their theoretical CAD models. To achieve this, the method prioritizes matching the tenon surface data based on structural features in the point cloud data. Firstly, a point feature descriptor is developed for the quick and automatic retrieval of tenon points from the blade point cloud. Secondly, a new sample consensus pose estimation technique is introduced. This method imposes constraints on the maximum distance from the normal vectors during the compatibility sorting process, facilitating the generation of more reasonable hypotheses. Through rigorous hypothesis verification, the optimal rotation and translation matrices are determined. Finally, experimental results on actual measurement data and simulated datasets demonstrate that the proposed matching method achieves high accuracy and efficiency.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 204-217"},"PeriodicalIF":3.5,"publicationDate":"2025-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143562395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Prediction of surface roughness in single-point diamond turning by combining machine tool internal signals and deep learning method","authors":"Genshen Liu ,&nbsp;Kaiyang Xia ,&nbsp;Zhongwei Li ,&nbsp;Yuan-Liu Chen","doi":"10.1016/j.precisioneng.2025.02.026","DOIUrl":"10.1016/j.precisioneng.2025.02.026","url":null,"abstract":"<div><div>This paper presents a novel surface roughness prediction model for the single-point diamond turning (SPDT) process which takes into account the relative vibration between the cutting tool and workpiece as well as the material swelling effect. In previous prediction models, the relative vibration between the cutting tool and the workpiece (or the relative tool-work vibration) was commonly measured prior to the machining operation and simplified into a superposition of multiple steady simple harmonic motions, neglecting its variations throughout the machining process and resulting in the loss of significant details. Moreover, few models have simultaneously considered the impact of the relative tool-work vibration and material properties, both of which substantially influence surface roughness. In this study, a signal acquisition system is developed to collect the machine tool internal signals that can accurately reflect the varying vibration states during the cutting process. A dynamic volumetric topography simulation model is established to realize in-process surface generation simulation using the collected internal signals. To consider the influence of material properties, a deep Long Short-Term Memory (LSTM) network is built to estimate the changes in surface topography caused by the material swelling effect. Experiments are conducted to validate the proposed surface roughness prediction model, and the results demonstrate that it can stably and accurately predict surface roughness with relative prediction errors lower than 10 % for all test experiments. Moreover, the dynamic characteristic of the model also provides the capability for conducting online quality and anomaly monitoring tasks.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 113-129"},"PeriodicalIF":3.5,"publicationDate":"2025-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143529287","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Research on thermal error compensation modeling for the machine tool integrated drive system based on energy consumption big data and an optimized bidirectional network","authors":"Guo-hua Chen ,&nbsp;Bo Zhou ,&nbsp;Tao Li ,&nbsp;Jie Mao ,&nbsp;Bo Li ,&nbsp;Zhen-xin Fu","doi":"10.1016/j.precisioneng.2025.02.024","DOIUrl":"10.1016/j.precisioneng.2025.02.024","url":null,"abstract":"<div><div>In the era of burgeoning intelligent manufacturing, the thermal errors of the integrated drive system in CNC machine tools manifest intricate dynamic traits, including non-linearity, time-variance, and strong coupling. These thermal errors are intricately associated with multiple factors, such as heat source distribution and energy consumption. Traditional thermal error compensation modeling techniques often fail to account for the influence of multiple thermal factors, primarily relying on temperature data obtained from a limited number of thermally sensitive points. To address this gap, the present research introduces a novel bidirectional spatiotemporal network model (IKSM). This model integrates the Improved Complete Ensemble Empirical Mode Decomposition with Adaptive Noise (ICEEMDAN), Kernel Principal Component Analysis (KPCA), and Strengthened Scalable Crested Porcupine Optimization (SSCPO). At the onset of the research, experiments were carried out using the S5H Intelligent Precision Machining Center provided by Jiangxi Jiashite Company. Temperature, current, power, and thermal error data of the motorized spindle and the linear motor for driving feed under various working conditions were collected. The ICEEMDAN-KPCA approach was subsequently utilized to reduce data dimensionality, thereby facilitating the efficient extraction of essential features. Similarly, the SSCPO algorithm was applied to optimize the parameters of the network model. Through a series of ablation experiments and comparative analyses, the IKSM demonstrated exceptional performance across varying rotational speeds and feed rates. For instance, at a motorized spindle speed of 10,000 rpm, the Root Mean Square Error (RMSE) decreased by 62.05 % relative to the basic BIGRU model, while the coefficient of determination (R²) increased by 40.23 %. Furthermore, the SHAP method was employed to conduct a comprehensive analysis of the key influencing factors, yielding effective strategies and innovative approaches for enhancing the accuracy of CNC machine tools.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 91-112"},"PeriodicalIF":3.5,"publicationDate":"2025-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143529285","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A review of recent studies on piezoelectric stick-slip actuators","authors":"BoWen Zhong,&nbsp;Zhan Liao,&nbsp;HongZeng Hu,&nbsp;ShiLin Liu,&nbsp;CuiGang He,&nbsp;LiNing Sun","doi":"10.1016/j.precisioneng.2025.02.018","DOIUrl":"10.1016/j.precisioneng.2025.02.018","url":null,"abstract":"<div><div>Piezoelectric stick-slip actuator is a kind of cross-scale precision positioning platform with millimeter-level motion stroke and nano-level positioning accuracy. It has been successfully applied in many fields such as biology, optics, precision positioning and robotics. However, there are still few comprehensive and systematic reviews of stick-slip actuators. Therefore, this paper gives a comprehensive review of recent research on stick-slip actuators. In this paper, the driving method, structure design, modeling and control, practical application of stick-slip actuator are reviewed. Finally, a summary is concluded and the future development perspectives of stick-slip actuators are discussed. This review contributes to giving a comprehensive understanding of the stick-slip actuators. It also provides guidance on designing new stick-slip actuators for improving their mechanical output performances.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 175-190"},"PeriodicalIF":3.5,"publicationDate":"2025-02-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143551102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation on dual-purpose electrolyte of electrolytic machining of M50 aviation bearing raceway and electrolytic in-process dressing of grinding wheel","authors":"Jianxing Wu ,&nbsp;Huaichao Wu ,&nbsp;Xu Huang ,&nbsp;Lv Yang ,&nbsp;Fang Lu","doi":"10.1016/j.precisioneng.2025.02.021","DOIUrl":"10.1016/j.precisioneng.2025.02.021","url":null,"abstract":"<div><div>In order to realize the integration of M50 bearing raceway electrochemical machining and electrolytic in-process dressing (ELID) grinding, it is necessary to explore a dual-purpose electrolyte suitable for M50 electrochemical machining and electrolytic dressing of grinding wheel. Therefore, the paper searched for the electrolyte compositions suitable for M50 electrochemical machining and electrolytic dressing of grinding wheel were determined via electrochemical basic experiments. Then, the uniform design method was used for relevant electrolytic experiments. According to the experimental results, the optimal ratio of electrolyte composition was determined to be 17.935 % NaNO₃+12.528 % NaClO₃ by using multi-objective optimization theory. Through XPS test, it was found that the electrolysis products of M50 under the action of the above electrolyte were mainly metal (Fe, Cr, Mo) oxides and hydroxyl compounds. Meanwhile, the electrolytic products would form a passivation film on the surface of M50. Through the nanoindentation test, it was found that the hardness of the passivation film was 95.150 HV and the elastic modulus was 75.650 GPa, which were 11.487 % and 36.524 % of the M50 matrix, respectively, which effectively reduces the processing difficulty of M50. Finally, the M50 bearing raceway was compositely processed by electrochemical machining and ELID grinding, it was found that the processing efficiency and surface roughness were significantly improved compared with ordinary grinding.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 130-148"},"PeriodicalIF":3.5,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143551103","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Hybrid dual-stage fast tool servo for integrated machining and measurement of optical microstructures","authors":"Yixuan Meng ,&nbsp;Lingwen Tan ,&nbsp;Hao Wu ,&nbsp;Xiangyuan Wang ,&nbsp;ZhiWei Zhu ,&nbsp;XinQuan Zhang ,&nbsp;MingJun Ren ,&nbsp;Benny C.F. Cheung ,&nbsp;LiMin Zhu","doi":"10.1016/j.precisioneng.2025.02.023","DOIUrl":"10.1016/j.precisioneng.2025.02.023","url":null,"abstract":"<div><div>This study presents the development of a dual-stage force sensor integrated fast tool servo (FS-FTS) for the integrated machining and measurement of optical microstructures. The modeling, design and control of the dual-stage FS-FTS are described in detail. Specifically, the normal-stressed electromagnetic actuator (NSEA) drives the primary stage, which provides a large stroke. The piezoelectric actuator (PEA) drives the secondary stage, which achieves a high bandwidth. The mechanical-electromagnetic model and mechanical-piezoelectric model of the two stages are established, based on which a simultaneous electro-mechanical parameter optimization method is proposed for the parameter design of the FS-FTS. Then, the closed-loop position controller and force controller are both carefully designed for the ultra-precision machining and in-process inspection of optical microstructures. Finally, a process that integrates the machining and measurement is developed and a 2-dimensional (2-D) water drop surface serving as the target surface is fabricated to demonstrate the performance of the developed system. The experimental result suggests that the stroke of the primary stage achieves 288 μm and the first-order resonant frequency of the secondary stage achieves 8520 Hz. The root-mean-square (RMS) tracking error is decreased from 1.0009 μm to 0.1521 μm by using the proposed primary-secondary coordinated position controller when tracking the toolpath of the 2-D water drop surface. Furthermore, the RMS error of the fabricated surface is only 125.7 nm when the spindle speed is 1600 r/min and that of the in-process inspection process is only 55.7 nm. These results demonstrate the superiority of the developed system in terms of integrated machining and measurement.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 264-277"},"PeriodicalIF":3.5,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143578832","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel minimum zone method for cylindricity error evaluation based on rotation projection method and adaptive particle swarm optimisation","authors":"Rongjun Cheng ,&nbsp;Hebang Jian ,&nbsp;Yu Li ,&nbsp;Qiangxian Huang ,&nbsp;Liansheng Zhang ,&nbsp;Hongli Li","doi":"10.1016/j.precisioneng.2025.02.025","DOIUrl":"10.1016/j.precisioneng.2025.02.025","url":null,"abstract":"<div><div>To realize an accurate and rapid evaluation of cylindricity error, a novel minimum zone algorithm based on rotation projection method and adaptive particle swarm optimisation (RPM–APSO) is proposed. The principle of this method is to firstly transform the three-dimensional cylindrical coordinates into two-dimensional circular coordinates via rotation and projection, and then calculate the minimum zone roundness error that is equivalent to the minimum zone cylindricity error. APSO algorithm is adopted twice to determine the optimal rotation angles and accurate roundness error of the projected coordinates respectively. Owing to the dimensionality reduction, the calculation difficulty is reduced and the computational efficiency is substantially improved. The effectiveness and accuracy of the proposed algorithm are verified by constructing two groups of cylindrical simulation datasets. Compared with other five intelligent optimisation algorithms and the results of the published literature, the RPM–APSO algorithm is proved to be superior in terms of computational accuracy and convergence speed, which can provide an accurate, efficient and reliable method for the cylindricity error evaluation of micro-nano coordinate measuring machine.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 149-158"},"PeriodicalIF":3.5,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143551104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effect of disk-shaped tools on ECDM performance in micro-hole drilling","authors":"Akhilesh Kumar Tiwari,&nbsp;Sudhansu Sekhar Panda","doi":"10.1016/j.precisioneng.2025.02.022","DOIUrl":"10.1016/j.precisioneng.2025.02.022","url":null,"abstract":"<div><div>Electrochemical discharge machining (ECDM) is a non-conventional machining process popular for creating microfeatures such as micro holes and microchannels in non-conductive materials like glass and alumina samples. However, the quality of the drilled holes through ECDM severely decreases as the machining depth increases due to the scarcity of electrolytes and the challenges of debris removal from the machining zone. The present study aims to enhance the machining efficiency and improve the quality of blind holes at higher depths. The disk-shaped tools are fabricated to improve electrolyte supply at higher depths, ensuring effective gas film formation and providing better electrolyte circulation for debris removal. The effect of disk-shaped tools is compared with cylindrical tools using material removal rate (MRR), hole entrance overcut, and aspect ratio as response parameters. The input variables are the applied pulse voltage, pulse frequency, and machining depth. The ANSYS Fluent computational fluid dynamics (CFD) software is used for numerical simulation of the crater profile and mushy zone in single-discharge machining. The mushy zone properties are modeled in between the solidus (&lt;893 K) and liquidus (&gt;1093 K) temperatures of the workpiece. The temperature-dependent physical properties of the borosilicate glass, including thermal conductivity, viscosity, and specific heat, are considered in the range of 500 °C–1500 °C. Results showed that disk tools improved the MRR by 34.5 % and aspect ratio by 26 %, compared to the cylindrical tools. The experimental and simulation results are consistent, with an average deviation of 10 %.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 218-235"},"PeriodicalIF":3.5,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143562396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Detection model of electroplated diamond wire surface abrasive distribution characteristics based on YOLO-EDW","authors":"Wenbin Huang ,&nbsp;Yufei Gao ,&nbsp;Guanzheng Li ,&nbsp;Zhenyu Shi","doi":"10.1016/j.precisioneng.2025.02.020","DOIUrl":"10.1016/j.precisioneng.2025.02.020","url":null,"abstract":"<div><div>Electroplated diamond wire (EDW), a primary cutting tool for hard and brittle materials such as monocrystalline silicon, polycrystalline silicon, and sapphire, demonstrates processing efficiency and quality that are directly influenced by its surface abrasive distribution density. While computer vision-based methods have been proposed for efficient abrasive detection, current approaches exhibit limited accuracy in handling complex scenarios involving small abrasive sizes, dense distributions, and occlusions. This study introduces YOLO-EDW, an enhanced YOLOv8-based object detection model that utilizes EDW scanning electron microscope (SEM) images. The proposed model significantly enhances detection accuracy for small, densely distributed, and occluded abrasives through the integration of four key components: the Separation Enhanced Attention Module (SEAM), Spatial Depth Convolution Module (SPD-Conv), Optimized Object Detection Layer, and Wise-IoU Loss Function. Experimental results on the EDW-SEM dataset demonstrate that YOLO-EDW achieves improvements of 6.61 % and 7.16 % in mAP50 and mAP50:95 metrics, respectively, compared to the original YOLOv8. Compared with eight mainstream models such as FCOS-nas, YOLOF, and Faster-RCNN, YOLO-EDW shows excellent performance in dealing with abrasive densities and occlusions. This study achieves precise identification of abrasive distribution features, enabling efficient quantification of effective abrasives along the EDW's semicircular circumference and establishing a robust foundation for accurate abrasive density calculations.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 67-79"},"PeriodicalIF":3.5,"publicationDate":"2025-02-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143510994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}