Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"Dynamic Behavior of diamond wire saw: Correlation with surface integrity in monocrystalline silicon wafer processing","authors":"Miao Zhang ,&nbsp;Lin Wang ,&nbsp;Shujuan Li ,&nbsp;Aofei Tang ,&nbsp;Tuo Kang ,&nbsp;Wang Qin ,&nbsp;Weipei Zhang","doi":"10.1016/j.precisioneng.2025.10.009","DOIUrl":"10.1016/j.precisioneng.2025.10.009","url":null,"abstract":"<div><div>Wire saw cutting is the main method for processing monocrystalline silicon wafers, in which the dynamic stability of the moving wire saw critically influences wafer surface quality. Existing research has primarily focused on optimizing processing parameters and analyzing localized cutting forces, yet the mechanism by which wire vibrations induce surface damage remains underexplored. In this study, a multi-parameter dynamic model incorporating wire speed, tension, and feed rate was developed based on axial motion string transverse vibration theory. The free vibration response was solved using modal analysis, with detailed characterization of the first four vibrational modes and critical damping evolution. In the forced vibration analysis, state equations were formulated for both concentrated and distributed forces, and numerical simulations revealed distinct wire saw vibration patterns under these conditions. Key findings include resonance thresholds and the dependence of vibration amplitude on excitation frequency and position. Orthogonal experiments quantified parameter effects on surface roughness (<span><math><mrow><mi>S</mi><mi>a</mi></mrow></math></span>), with polarity analysis identifying feed rate as the dominant factor (polar <span><math><mrow><mi>R</mi><mo>=</mo><mn>3.23</mn></mrow></math></span>). Optimal parameters (wire speed <span><math><mrow><msub><mi>v</mi><mi>s</mi></msub><mo>=</mo><mn>2.5</mn><mi>m</mi><mo>/</mo><mi>s</mi></mrow></math></span>, feed rate <span><math><mrow><msub><mi>v</mi><mi>f</mi></msub><mo>=</mo><mn>0.5</mn><mi>m</mi><mi>m</mi><mo>/</mo><mi>min</mi></mrow></math></span>, tension <span><math><mrow><mi>P</mi><mo>=</mo><mn>15</mn><mi>N</mi></mrow></math></span>) achieved a surface roughness reduction to <span><math><mrow><mn>1.9345</mn><mi>μ</mi><mi>m</mi></mrow></math></span>. Combined confocal microscopy and cutting force spectral analysis confirmed a linear positive correlation between wire vibration amplitude/cutting force fluctuations and surface damage features (scratches, pits, cracks). This work establishes a theoretical framework for optimizing wire saw cutting processes in industrial applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 422-436"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145320347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel low-friction pneumatic actuator optimization design method for high-precision position servo control in grinding processes","authors":"Yan Shi ,&nbsp;Zhanxin Li ,&nbsp;Yulong Nie ,&nbsp;Zhibo Sun ,&nbsp;Yanxia Niu ,&nbsp;Jiange Kou ,&nbsp;Zhiguo Yang ,&nbsp;Yixuan Wang","doi":"10.1016/j.precisioneng.2025.09.015","DOIUrl":"10.1016/j.precisioneng.2025.09.015","url":null,"abstract":"<div><div>Friction in traditional pneumatic actuator (TPA) limits high-precision positioning and force control in grinding. This study developed an aerostatically suspended low-friction pneumatic actuator (LFPA). An internal air film flow model was developed to relate radial load capacity to air consumption. A hybrid multi-objective optimization algorithm (NGC-HMWOA) was then used to optimize the piston geometry to improve load capacity and reduce air consumption. A prototype was built and tested, and friction benchmarking confirmed the stability of the hydrostatic gas film formation and demonstrated an approximately 99.7 % reduction in static friction compared to the TPA. In servo positioning experiments under constant, sinusoidal, and random references, the LFPA achieved approximately 55 % faster settling time and approximately 21.7 % lower root mean square error, consistently delivering faster transient response and higher accuracy. These results demonstrate the superior performance of a low-friction pneumatic actuator suitable for high-precision grinding and highlight its potential in high-precision grinding and polishing applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 213-225"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145121218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Deformation mechanism and accurate prediction method of aspheric glass molding process","authors":"Lele Yan ,&nbsp;Jiaqing Xie ,&nbsp;Ruqian Sun ,&nbsp;Haiyan Fan ,&nbsp;Wenchao Wei ,&nbsp;Benshuai Ruan ,&nbsp;Fang Gu ,&nbsp;Mingqiang Zhu ,&nbsp;Tianfeng Zhou","doi":"10.1016/j.precisioneng.2025.09.005","DOIUrl":"10.1016/j.precisioneng.2025.09.005","url":null,"abstract":"<div><div>With the accelerating iteration speed of smartphones and the continuous development of emerging AR/VR wearable device technologies, the market demand for high-precision aspheric glass lens has surged. Glass molding is considered as the most efficient method for preparing aspheric glass lens, but the deformation mechanism of glass at high temperatures is extremely complex and difficult to accurately predict. If the molding process parameters are set unreasonably, it will cause internal stress fluctuation, lead to form error and fragmentation, reduce the yield of the lens, and even cause mold damage. In this study, the characterization of glass viscoelastic parameters and the friction mechanism at the glass-mold interface were analyzed, and a material parameter inversion optimization method to achieve accurate prediction and process optimization of aspheric glass lens molding was proposed. The uniaxial compression creep tests (CCT) were carried out and a viscoelastic fitting algorithm was proposed to obtain the viscoelastic parameters of the glass. Uniaxial compression creep simulation based on these parameters verified the accuracy of the fitting algorithm. The glass-mold interface friction coefficient tests were carried out, and the glass-mold interface friction mechanism was proposed. The aspheric glass molding simulations and experiments were conducted and the reasons for the significant deviation in the deformation curve were analyzed. A material parameter inversion optimization strategy based on aspheric glass molding experimental data was proposed, and the simulation curves of the optimized model matched the experimental data significantly better, with the sum of squared errors (SSE) lower than 0.2. The aspheric glass molding experiments were conducted using the optimized process parameters, and the form errors of the aspheric glass lens were within the design specifications. The result indicated that the optimization method can significantly improve the accuracy of molding prediction and product yield.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 68-79"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145020253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Two-way steady and transient fluid-structure interaction analysis for aerostatic thrust bearings","authors":"Hui Zhuang ,&nbsp;Jianguo Ding ,&nbsp;Peng Chen ,&nbsp;Yu Chang","doi":"10.1016/j.precisioneng.2025.10.025","DOIUrl":"10.1016/j.precisioneng.2025.10.025","url":null,"abstract":"<div><div>The performances of aerostatic bearings are significantly influenced by the fluid-structure interaction (FSI) effect. However, the research on the performances of the aerostatic thrust bearing considering the FSI effect is not sufficient, especially for the dynamic characteristics such as the dynamic stiffness of the aerostatic bearing air film. In this paper, two-way steady and transient FSI analyses for the aerostatic thrust bearing are carried out using the finite difference method-finite element method (FDM-FEM) and the finite difference method-computational structural dynamics (FDM-CSD), respectively. The static performances of the thrust bearing and the dynamic characteristics of the air film are studied. The parametric modeling and simulation platform is developed based on the in-house code. The proposed FSI analysis methods are verified numerically and experimentally. Moreover, an improved model considering frequency-varying stiffness and damping of the air film is proposed to further facilitate FSI modeling and improve computational efficiency in dynamic stiffness evaluation. The results indicate that the load-carrying capacity and static stiffness of the thrust bearing decrease when introducing the structural deformation. For the dynamic stiffness of the aerostatic bearing air film when considering the FSI effect, it continues to increase as the perturbation frequency approaches the natural frequency of the thrust plate. The analysis method and conclusion of this study are beneficial to the performance evaluation and optimization of aerostatic bearings.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 851-878"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel point cloud-based method for electrode wear simulation in electro-discharge machining of complex geometries","authors":"Hongfei Wei,&nbsp;Jing Zhou,&nbsp;Long Cheng,&nbsp;Bowen Shen,&nbsp;Xiaoming Kang","doi":"10.1016/j.precisioneng.2025.09.010","DOIUrl":"10.1016/j.precisioneng.2025.09.010","url":null,"abstract":"<div><div>Electro-discharge machining (EDM) is widely used in mold and aerospace manufacturing, but inevitable electrode wear can affect the geometric accuracy of machined parts. Existing wear prediction methods mainly focus on hole drilling and milling, with no studies addressing multi-axis EDM for complex electrode shapes. This paper proposed a point cloud-based method for simulating and predicting electrode wear. First, the mechanism and patterns of electrode wear for complex-shaped electrodes were investigated through discharge craters and continuous-pulse experiments. Then, the point cloud method was used to discretize the workpiece and electrode models, followed by kinematic planning. Discharge points were determined based on the minimum discharge distance, and material removal and electrode wear were simulated according to wear patterns. To improve simulation efficiency, a KD-Tree search algorithm was employed to accelerate the identification of discharge points, and a parallel discharge strategy was proposed for high-density point clouds. The results show that in two-dimensional simulations, electrode axial length and corner feature errors are under 0.1 mm, and the KD-Tree algorithm, with a point cloud density of 400 points/mm², improves search efficiency by 78 times compared to sequential searching. The 3D simulation of blisk flow channel machining demonstrates high consistency with the actual electrode wear morphology. With a point cloud density of 125 points/mm³, the parallel discharge strategy increases simulation efficiency by more than 225 times compared to single-point material removal. The proposed method can efficiently and accurately predict the electrode shape for various electrical parameters, arbitrary electrode shapes, and any motion path in EDM.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 131-146"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145106128","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Characterization of subsurface micro-crack initiation in orthogonal cutting of nickel-based cast superalloy","authors":"Dong Zhang,&nbsp;Guang-Chao Nie,&nbsp;Zheng-Yan Yang,&nbsp;Xiao-Ming Zhang","doi":"10.1016/j.precisioneng.2025.09.007","DOIUrl":"10.1016/j.precisioneng.2025.09.007","url":null,"abstract":"<div><div>The occurrence of subsurface micro-cracks during machining poses a significant challenge in manufacturing engineering, contributing to the degradation of components’ machined surface integrity. However, the process of micro-crack formation lacks direct in-situ experimental characterization, creating a gap in understanding the micro-crack initiation mechanisms on the machined subsurface. This study addresses this gap by utilizing an ultra-high-speed in-situ imaging system to capture micro-crack formation within the machined subsurface during the orthogonal cutting of nickel-based cast superalloy. The moment of crack initiation can be estimated by analyzing the displacement increment gradient between successive images. A quantitative analysis of displacement fields and accumulated strain fields during subsurface micro-crack initiation using the digital image correlation (DIC) approach has been presented. The localized tensile tangential strain on the machined subsurface before crack initiation is found to be approximately constant under various cutting parameters, and the maximum machined micro-cracks can reach around 59.7 μm in width and 158.6 μm in length. Furthermore, the observed cracking phenomenon in the machined subsurface demonstrates attributes typical of cleavage fracture, characterized by brittle cracking with low plasticity.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 118-130"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145049786","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Enhancing measurement precision of superluminescent diode-based chromatic confocal sensor by real-time spectral correction","authors":"Lóránt Tibor Csőke ,&nbsp;Szabolcs Károly Kautny ,&nbsp;Zsolt Kollár","doi":"10.1016/j.precisioneng.2025.09.024","DOIUrl":"10.1016/j.precisioneng.2025.09.024","url":null,"abstract":"<div><div>Chromatic confocal sensors are widely used in high-resolution, non-contact distance measurements. Despite their advantages, conventional implementations often suffer from low light utilization efficiency and instability in the illumination spectrum, both of which degrade measurement accuracy, particularly when using broadband semiconductor sources such as superluminescent diodes. In this study, we address these limitations by introducing a chromatic confocal system that incorporates a high-brightness SLD alongside a real-time spectral correction mechanism. The proposed optical setup features a dual-beam spectrometer capable of simultaneously capturing the reflected axial intensity signal and the intrinsic spectrum of the light source using a global shutter camera. This architecture enables frame-by-frame normalization of the measured signal, reducing the impact of spectral fluctuations and inherent source nonuniformities. Simulation and experimental results demonstrate that, in the previously introduced system, this method reduces the wavelength-to-distance encoding error from <span><math><mo>±</mo></math></span>0.4<!--> <!-->µm to below 0.2<!--> <!-->µm, and decreases distance uncertainty due to source instability by 20%. The system is particularly suited for applications involving low-reflectivity surfaces or requiring high-speed scanning at rates up to tens of kHz.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 408-421"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145267814","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effects of cryogenic minimum quantity lubrication on milling force and surface quality of wood-plastic composites","authors":"Feng Zhang ,&nbsp;Weihang Dong ,&nbsp;Yunbo Huang ,&nbsp;Xiaolei Guo ,&nbsp;Jimmy Johansson ,&nbsp;Guanyu Chen ,&nbsp;Zhenhua Qing","doi":"10.1016/j.precisioneng.2025.10.023","DOIUrl":"10.1016/j.precisioneng.2025.10.023","url":null,"abstract":"<div><div>Excessive temperatures in the cutting zone can degrade the machining quality and efficiency of wood–plastic composites (WPC). Instead of parameter optimisation, cryogenic minimum quantity lubrication (CMQL) was introduced to control cutting temperature and improve surface quality. This study investigates the influence of feed per tooth and milling depth on cutting force and surface quality during CMQL milling of WPC, compared to dry cutting. Results show that at shallow cutting depths (0.1 mm), CMQL significantly reduces both cutting force and surface roughness, while weakening the effect of feed per tooth on these outcomes. Thus, CMQL is more suitable for finishing operations, where increasing feed per tooth moderately can further enhance efficiency. At larger depths, CMQL results in higher cutting forces than dry milling but effectively suppresses surface plastic deformation, reduces burrs and pits, and improves surface integrity. Overall, cutting force and roughness increase with greater feed per tooth and milling depth under both methods. These findings highlight the advantages of CMQL in improving surface quality compared with conventional dry milling, and offer guidance for optimising WPC milling performance and process efficiency.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 804-816"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473698","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Error sources in touch-trigger probing by a planar robot arm","authors":"Soichi Ibaraki,&nbsp;Kandai Kawano","doi":"10.1016/j.precisioneng.2025.11.017","DOIUrl":"10.1016/j.precisioneng.2025.11.017","url":null,"abstract":"<div><div>The accuracy of touch-trigger probing by a robotic manipulator is determined by the accuracy of the robot forward kinematic model to estimate the stylus sphere position from angular positions of rotary axes. While many past works employ a robot kinematic model only containing the Denavit-Hartenberg (DH) errors as error sources, this paper presents the application of a novel model, containing the angular positioning and radial error motions of all the rotary axes, to the robotic probing. In the probing of a straightedge, the experiments show that a large portion of a higher frequency component in the probed profiles is attributable to the angular positioning error motion of rotary axes. On the other hand, a lower frequency “waviness” component is attributable more to the DH errors. As a fundamental study, this paper targets the probing by a planar robot arm, as it has a simpler kinematics, with significantly less error parameters, than a six-axis robot.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 997-1005"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578687","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Kinematic calibration of redundantly actuated distributed parallel manipulators based on local POE formula and ridge estimation method","authors":"Sen Liang,&nbsp;Libin Wang,&nbsp;Qiang Fang,&nbsp;Yanding Wei","doi":"10.1016/j.precisioneng.2025.11.001","DOIUrl":"10.1016/j.precisioneng.2025.11.001","url":null,"abstract":"<div><div>Redundantly actuated distributed parallel manipulators (RADPMs) consisting of multiple CNC locators are widely used for assembly and docking of large-scale components. The kinematic calibration is a crucial prerequisite for high-precision posture alignment with lower internal force. This article presents a novel calibration framework for n-PPPS RADPMs aimed at improving the calibration accuracy and addressing the incomplete modeling issues inherent in conventional methods. First, the error model is established based on the product of exponentials (POE) formula in the local frame representation. Then, a closed-loop constraint equation is constructed utilizing the identical posture of the end platform across all limbs to obtain the forward kinematics. The redundant error parameters are eliminated based on identifiability analysis. Furthermore, ridge regression estimation is employed for identification to enhance the computational robustness to measurement noise and random errors. Notably, the non-redundant actuation mode with a major joint set is adopted to avoid over-constraints caused by geometric errors, and motion information of redundant joints is retained and utilized for iterative calculation. Finally, simulations and experiments are conducted to validate the effectiveness and superiority of the proposed calibration framework. The results demonstrate that the error modeling method and the optimized solution algorithm significantly improve the accuracy without depending on excessive measurements.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 879-889"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145528280","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}