Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第8页

Dynamic modeling and damping-induced suppression of cross-coupling in an XY flexure-based stage

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-20 DOI: 10.1016/j.precisioneng.2025.01.012

Siyue Li , Zhong Chen , Xineng Zhong , Xianmin Zhang

{"title":"Dynamic modeling and damping-induced suppression of cross-coupling in an XY flexure-based stage","authors":"Siyue Li , Zhong Chen , Xineng Zhong , Xianmin Zhang","doi":"10.1016/j.precisioneng.2025.01.012","DOIUrl":"10.1016/j.precisioneng.2025.01.012","url":null,"abstract":"<div><div>Compliant mechanisms are widely utilized in micro-nano motion applications. Cross-coupling in multi-axis motion is a significant source of errors in precision motion systems. Although the static and dynamic properties of flexure-based nanopositioning stages have been extensively studied, their unified parametric expressions for motion cross-coupling are still lacking, and the impact of damping on cross-coupling has not been thoroughly analyzed. In this paper, we further model the force–displacement relationship of compliant mechanisms and present an analytical framework for the dynamic cross-coupling of a precision motion stage based on the Beam Constraint Model (BCM). We predict the cross-coupling effect and analytically quantify cross-coupling errors in geometry. As a case study, this model is applied to the static and dynamic cross-coupling analysis of a flexure-based nanopositioning stage, examining the effective of damping on cross-coupling reduction. Experimental results show that the dynamic cross-coupling ratio decreased by 6.52% at low frequencies and 10.37% at the resonant frequency when the stage was equipped with passive damping. The nonlinear dynamic cross-coupling model effectively predicts cross-coupling behavior and the impact of damping, offering a simpler and clearer approach for forecasting the damping characteristics of cross-coupling. This model can be integrated into control systems for error compensation and the rejection of damping-induced cross-coupling, providing new insights into damping control in compliant mechanisms.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 272-284"},"PeriodicalIF":3.5,"publicationDate":"2025-01-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286930","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of a customized novel additively manufactured honing tool: Surface integrity and Abbott-Firestone assessment of the honed part

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-19 DOI: 10.1016/j.precisioneng.2025.01.013

Mohsen Barmouz , Bahman Azarhoushang

引用次数: 0

High dynamic wavefront stability control for high-uniformity periodic microstructure fabrication

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-13 DOI: 10.1016/j.precisioneng.2025.01.006

Zijian Zhong , Jingwen Li , Tianshi Lu , Xinghui Li

{"title":"High dynamic wavefront stability control for high-uniformity periodic microstructure fabrication","authors":"Zijian Zhong , Jingwen Li , Tianshi Lu , Xinghui Li","doi":"10.1016/j.precisioneng.2025.01.006","DOIUrl":"10.1016/j.precisioneng.2025.01.006","url":null,"abstract":"<div><div>Periodic microstructures are widely used in optical communication, sensing, and imaging systems for their superior performance in optical modulation. Among their fabrication methods, interference lithography stands out for its high precision and uniformity, making it applicable for the fabrication of large-area periodic microstructures. However, the exposure wavefront is subject to the environmental perturbations, and the resulted drifts compromise the quality of produced photoresist mask. To address this problem, a method for exposure wavefront control aimed at high-uniformity periodic microstructures fabricating is proposed. Embedded in a dual-beam interference lithography system, the method monitors the drifts based on high-speed CCD image acquisition of the Moiré pattern generated by a reference grating, computes the magnitude of drifts based on a line-sampling cross-correlation algorithm and compensates for the drifts based on mirrors driven by piezoelectric actuators. The proposed method achieves simultaneous monitoring and controlling of phase and period drifts at a bandwidth of over 250 Hz. Experiments demonstrate that this system can effectively suppress low-frequency disturbances-induced drifts and reduce the root mean square (RMS) value of phase drifts to <span><math><mrow><mn>9</mn><mo>×</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>3</mn></mrow></msup></mrow></math></span> grating periods and period drifts to <span><math><mrow><mn>2</mn><mo>.</mo><mn>27</mn><mo>×</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>5</mn></mrow></msup></mrow></math></span> grating periods during exposure, providing a solid foundation for fabricating high-uniformity periodic microstructures.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 216-223"},"PeriodicalIF":3.5,"publicationDate":"2025-01-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

TSP-based depth-first search algorithms for enhanced path planning in laser-based directed energy

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-11 DOI: 10.1016/j.precisioneng.2025.01.009

Bingjie Xiao , Zhihui Zhang , Qi Wang , Baoyu Zhang , Shaopeng Zheng

{"title":"TSP-based depth-first search algorithms for enhanced path planning in laser-based directed energy","authors":"Bingjie Xiao , Zhihui Zhang , Qi Wang , Baoyu Zhang , Shaopeng Zheng","doi":"10.1016/j.precisioneng.2025.01.009","DOIUrl":"10.1016/j.precisioneng.2025.01.009","url":null,"abstract":"<div><div>In the field of laser-directed energy deposition, it is crucial to optimize the path planning to improve the mechanical properties and ensemble fidelity of the precision printed samples. The traditional path planning methods typically require layer-by-layer calculation of the intersections between the scan lines and the contour loops, which leads to substantial redundant computations and low forming precision. In order to solve these problems, this paper transforms the path optimization into the Travelling Salesman Problem (TSP), followed by realizing the strategy of continuous inter-layer scanning through depth-first search. This method can generate efficient, non-intersecting connection paths in a short time, effectively reducing the total length of the connection path and processing time. Experimental results show that compared with the conventional zig-zag strategy, the path planning method based on TSP performs well in terms of near-net shape, compactness, and hardness of the molding samples. By shifting the intersection areas of the path to the outer contour and interacting the long and short sides, the method can realize the high precision joint part without gap forming and reduce the internal defects of the component.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 224-236"},"PeriodicalIF":3.5,"publicationDate":"2025-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286928","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The innovation in planar optics: Technological breakthroughs and application prospects of metalens

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-11 DOI: 10.1016/j.precisioneng.2025.01.011

Dong Li , Manna Gu , Chenxia Li , Ying Tian , Bo Fang , Jingxiang Wang , Zhi Hong , Xufeng Jing

引用次数: 0

Automated visual roughness evaluation of ground surface based on vertical incidence of circular structured light

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-10 DOI: 10.1016/j.precisioneng.2025.01.010

Enhui Lu , Long Zheng , Wenxiang Ren , Xinglong Zhu , Jian Liu

{"title":"Automated visual roughness evaluation of ground surface based on vertical incidence of circular structured light","authors":"Enhui Lu , Long Zheng , Wenxiang Ren , Xinglong Zhu , Jian Liu","doi":"10.1016/j.precisioneng.2025.01.010","DOIUrl":"10.1016/j.precisioneng.2025.01.010","url":null,"abstract":"<div><div>In response to the significant influence of workpiece texture placement direction on the accuracy and reliability of visual roughness evaluation, a high-precision approach for measuring surface roughness using vertical incidence of circular structured light is proposed. Initially, the theory of vertical incidence method of circular structured light is described. Subsequently, the feasibility of the proposed imaging approach and its robustness against texture interference are validated using TRACEPRO simulations. The superiority of the proposed approach is confirmed by comparative analysis with oblique incidence method. An experimental setup is then designed based on the simulation model to capture images of samples with varying roughness and texture orientations. A model correlating structured light area features with roughness confirms the method's effectiveness and resistance to texture interference. Experimental results demonstrate that the proposed method effectively mitigates texture effects, achieving an average roughness prediction error of 0.02 μm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 192-203"},"PeriodicalIF":3.5,"publicationDate":"2025-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286921","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Parametric and theoretical study of hole quality in conventional micro-machining and rotary ultrasonic micro-machining of silicon

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-10 DOI: 10.1016/j.precisioneng.2025.01.008

Yunze Li , Zhijian Pei , Weilong Cong

{"title":"Parametric and theoretical study of hole quality in conventional micro-machining and rotary ultrasonic micro-machining of silicon","authors":"Yunze Li , Zhijian Pei , Weilong Cong","doi":"10.1016/j.precisioneng.2025.01.008","DOIUrl":"10.1016/j.precisioneng.2025.01.008","url":null,"abstract":"<div><div>Microhole machining for silicon is an essential process in the manufacturing of several semiconductor devices, such as solar panels, pressure and flow sensors, the stacking of micro-electromechanical systems, and complementary metal-oxide semiconductors. Due to the device miniaturization, there is a growing need for micro-machining on silicon wafers. Compared with the thermal machining processes for micro-drilling (such as laser machining), mechanical micro-machining processes can avoid the generation of heat-affected-zone, recast layers, and silicon oxidation. Conventional mechanical micro-machining (CμM) of brittle materials generates a higher cutting force and severe quality issues (such as cracking and edge chipping). To address the quality issues, drilling with rotary ultrasonic micro-machining (RUμM) has been proposed and applied. There are no reported investigations on comparisons of micro-machining quality in CμM and RUμM. In this study, the effects of ultrasonic vibration, tool diameter, and feed rate on cutting force and edge chipping were investigated experimentally. To explain machined hole quality (edge chipping) and cutting force, effects on indentation depth were also investigated. We developed the mechanistic models to describe the relationships between input variables and single abrasive indentation depth for both CμM and RUμM processes. Finally, the relationships among ultrasonic indentation, cutting force, and hole quality were established.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 167-176"},"PeriodicalIF":3.5,"publicationDate":"2025-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143369643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Sensitivity study of parameters in a hybrid electrochemical-mechanical polishing process for 316L stainless steel

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-10 DOI: 10.1016/j.precisioneng.2025.01.007

Daniel Krzak , Florian Roy , Ferdinando Salvatore , Antoine Gidon , Stéphane Guerin , Joël Rech

{"title":"Sensitivity study of parameters in a hybrid electrochemical-mechanical polishing process for 316L stainless steel","authors":"Daniel Krzak , Florian Roy , Ferdinando Salvatore , Antoine Gidon , Stéphane Guerin , Joël Rech","doi":"10.1016/j.precisioneng.2025.01.007","DOIUrl":"10.1016/j.precisioneng.2025.01.007","url":null,"abstract":"<div><div>The PEMEC process is a new polishing process designed for complex metal parts with high surface roughness. This new hybrid process has been developed by simultaneously coupling tribofinishing and electrochemical polishing. The PEMEC process improves surface roughness in just a few minutes, while preserving edge shape, and is based on a strong synergistic effect between abrasive and chemical mechanisms. To better understand this synergy, it is essential to know which parameters have the greatest influence on polishing results. To this end, it was decided to study the most influential parameters of the two processes combined in PEMEC: drag speed (tribofinishing) as well as temperature and voltage (electropolishing).</div><div>This article focusses on the influence of each of these parameters on the PEMEC process, using a multi-scale analysis that simultaneously considers surface roughness, edge geometry, and sample dimensions. For each of the three parameters, the various observable impacts on the sample are described and quantified. Analysis of the results showed that temperature and voltage have a considerable impact on the PEMEC process and are able to modify the mechanisms of the process, as well as material removal rate. In comparison, drag speed has a smaller influence on the process.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 285-301"},"PeriodicalIF":3.5,"publicationDate":"2025-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286931","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Wear mechanisms of diamond tools and their material basis in machining iron-based materials

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-08 DOI: 10.1016/j.precisioneng.2025.01.004

Zejiang Xu , Guoqing Zhang , Jiabao Zhang , Zejia Huang , Wenqi Zhang , Minghua Pan

{"title":"Wear mechanisms of diamond tools and their material basis in machining iron-based materials","authors":"Zejiang Xu , Guoqing Zhang , Jiabao Zhang , Zejia Huang , Wenqi Zhang , Minghua Pan","doi":"10.1016/j.precisioneng.2025.01.004","DOIUrl":"10.1016/j.precisioneng.2025.01.004","url":null,"abstract":"<div><div>Diamond tools are widely used in ultra-precision machining due to their excellent physicochemical properties, enabling workpiece materials to achieve mirror surface quality. However, when machining iron-based materials, diamond tools are prone to graphitization due to electrochemistry reactions between carbon and iron atoms, this reduces the sharpness of the tool cutting edge, which further affects or even seriously damages the machined surface quality. Therefore, understanding the diamond tools wear mechanism and corresponding wear suppression methods is crucial for enhancing the machined surface quality. This paper reviews the wear mechanisms of diamond tools and their material basis in machining iron-based materials. Firstly, the paper reviews the affinity between iron and carbon atoms from the perspective of material basis and reviews the selection of diamond tool crystal plane orientations for machining iron-based materials. Secondly, this paper summarizes the wear mechanisms for diamond tools used in machining iron-based materials. Finally, aiming at the wear mechanism, the paper emphasizes suppression methods for diamond tool wear during machining iron-based materials. Through the comprehensive study of these aspects, this review combines the material basis and diamond tool wear mechanism, contributes to the suppression of diamond tool wear in ultra-precision machining of iron-based materials and the improvement of machined surface quality, and also provides theoretical support and reference for subsequent scholars to propose new schemes that may suppress the graphitization of diamond tools.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 110-152"},"PeriodicalIF":3.5,"publicationDate":"2025-01-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143287291","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effects from the stiffness and damping of O-rings on the stability and nonlinear dynamic characteristics of a rotor supported by flexible porous gas bearings

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-01-06 DOI: 10.1016/j.precisioneng.2025.01.003

Kang Zhang , Yu Huang , Wenjun Li , Hailong Cui , Youmin Rong , Kai Feng

{"title":"Effects from the stiffness and damping of O-rings on the stability and nonlinear dynamic characteristics of a rotor supported by flexible porous gas bearings","authors":"Kang Zhang , Yu Huang , Wenjun Li , Hailong Cui , Youmin Rong , Kai Feng","doi":"10.1016/j.precisioneng.2025.01.003","DOIUrl":"10.1016/j.precisioneng.2025.01.003","url":null,"abstract":"<div><div>In the field of high-speed rotating machinery, it is a common phenomenon that the rotor is liable to lose stability when rotating at high speeds. Installing a layer of damping structure between the bearing and the housing is a potential means to restrain the vibration of the rotor. In this article, it is useful to improve the stability of the rotor in the way of increasing the damping of the bearing by installing several O-rings on the porous air journal bearing (PAJB). The rotor-bearing test rig is set up to study the vibration of the rigid rotor supported by PAJBs with three types of O-rings mounted for different supply pressures. Moreover, a nonlinear numerical model is established to predict the rotor responses. The accuracy of the numerical model is verified by comparing the calculated results with the data tested by the above experiment. Based on the experimental and simulation results, the effects of the supply pressures, stiffness and damping of O-rings on the stability of the rotor-PAJB system are investigated. The influence of the stiffness and damping of O-rings on the nonlinear dynamic characteristics of the systems is further studied by expanding the parameter range of the numerical simulation, and the relevant laws are summarized. The results demonstrate that both the stiffness and damping of O-rings have significant influence on the stability of the rotor-PAJB system. When the stiffness of O-rings is in the unstable stiffness interval, the stability of the rotor at high speeds will decrease. Meanwhile, larger damping produces better stability. By both the experimental and theoretical studies, the investigation is expected to promote the development of turbomachinery towards higher speeds and better stability.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 153-166"},"PeriodicalIF":3.5,"publicationDate":"2025-01-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143287498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0