{"title":"Tool wear suppression in diamond turning NAK80 via carbon nanofluids composite cryogenic nitrogen","authors":"Guoqing Zhang , Zejiang Xu , Zexuan Huo , Jiabao Zhang","doi":"10.1016/j.precisioneng.2025.10.001","DOIUrl":"10.1016/j.precisioneng.2025.10.001","url":null,"abstract":"<div><div>Diamond turning is an essential machining method for precision molds and dies. However, iron-carbon chemical affinity leads to severe graphitization of diamond tools when machining iron-based materials. Therefore, it is important to develop new techniques to suppress diamond graphitization. In the present study, an assisted machining method based on carbon nanofluid composite cryogenic nitrogen (CNFCCN) is proposed. Firstly, the influence of different concentrations of carbon nanofluid (CNF) and temperatures of cryogenic nitrogen (CN) on the machining performance was investigated. Secondly, by analyzing the negative effects of CNF-assisted machining at different concentrations and CN-assisted machining at different temperatures on the machined surface quality, CNFCCN-assisted machining at the appropriate concentrations and temperatures were selected, and the effects of CNFCCN-assisted machining on the machined surface quality were investigated. Thirdly, the suppression of graphitization wear of diamond tools by different assisted machining was evaluated by comparing the changes in tool material composition. Finally, the suppression effect of different assisted machining on diamond tool wear was assessed by analyzing the wear width of the flank face. The results show that the machined surface quality is improved by 25.7 % and a 50.9 % tool wear suppression effect is achieved under the machining of 0.25 % CNF composite −20 °C CN. This study provides valuable theoretical and experimental guidance for ultra-precision turning of iron-based materials.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 367-379"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145220357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Kaiqi Huang , Cheng Hong , Zhiliang Deng , Jingbo Shen , Jinyuan Tang , Yuqin Wen
{"title":"A regularized reconstruction and contact modelling method for asperities based on real machined surface topography","authors":"Kaiqi Huang , Cheng Hong , Zhiliang Deng , Jingbo Shen , Jinyuan Tang , Yuqin Wen","doi":"10.1016/j.precisioneng.2025.10.019","DOIUrl":"10.1016/j.precisioneng.2025.10.019","url":null,"abstract":"<div><div>The accuracy of contact analysis for rough surfaces is fundamentally determined by the asperity model, the computational precision of which primarily depends on the geometric characterization and mechanical deformation description of individual asperities. To achieve accurate asperity characterization and contact modeling of rough surfaces, this study proposes a method for segmenting surface asperities based on reference lines and peak-valley heights. According to the principle of area conservation, a regularization reconstruction approach is established for various asperity geometries, including parabolic, circular arc, sinusoidal, triangular, and ellipsoidal shapes. Using surface topography data from workpieces fabricated through different machining processes, the optimal asperity shape that best represents real surface topography is determined through a minimum error criterion. Subsequently, an analytical contact model for single asperity is developed. The results indicate: (1) the ellipsoidal asperity shape most closely matches the actual surface topography of machined workpieces; (2) contact models based on ellipsoidal asperity can enhance computational accuracy by more than 35 %. The proposed model enables effective regularization and contact analysis of asperities, offering a novel approach and valuable reference for improving the accuracy of rough surface contact simulations.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 690-705"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145416861","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jun Zha , Kai Cheng , Dongxu Wu , Huijie Zhang , Fei Xue
{"title":"Error motions in hydrostatic bearings: Mechanisms, analysis, and control","authors":"Jun Zha , Kai Cheng , Dongxu Wu , Huijie Zhang , Fei Xue","doi":"10.1016/j.precisioneng.2025.11.019","DOIUrl":"10.1016/j.precisioneng.2025.11.019","url":null,"abstract":"<div><div>Hydrostatic bearings play an indispensable role in high precision machines and equipment such as precision machine tools, measuring instruments, optical equipment, and large-scale scientific facilities, owing to their high precision potential, high stiffness, high damping, low friction, and high loading capacity. However, the error motion of hydrostatic bearings as defined indicates the deviation of their actual motion trajectory or altitude from their ideal state, which is a key factor limiting their performance and the ultimate accuracy of the precision machines and equipment they support. This paper provides a systematic and comprehensive review and the insights on the research and development progress of hydrostatic bearing error motions in the contexts of past, present and the future. Firstly, it elaborates in details on the definition, classification, and standardized characterization and evaluation metrics of hydrostatic bearing error motions. Secondly, it provides an in-depth analysis of the main generation mechanisms of the error motions. Building upon this, it further reviews and categorizes the modeling and analysis methods for the error motions, and systematically formulates and summarizes their suppression and control strategies. Finally, it discusses the existing scientific and technological challenges, and highlights the future research trends and directions. This review aims to provide researchers and engineering practitioners with a comprehensive overview of the current research status, key enabling technologies, and future trends in hydrostatic bearing error motions. It is also intended to promote further improvements in the motion accuracy of hydrostatic bearings and thus enhance their further development in precision engineering applications with higher precision and accuracy requirements particularly in an industrial scale.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1060-1086"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Guangye Qing , Bing Chen , Wenzhang Yang , Shunshun Li , Jun Yi , Lishu Lv , Bing Guo , Zhaohui Deng
{"title":"Research on precision dressing of resin-bonded arc-shaped diamond grinding wheel via tantalum metal.","authors":"Guangye Qing , Bing Chen , Wenzhang Yang , Shunshun Li , Jun Yi , Lishu Lv , Bing Guo , Zhaohui Deng","doi":"10.1016/j.precisioneng.2025.10.017","DOIUrl":"10.1016/j.precisioneng.2025.10.017","url":null,"abstract":"<div><div>High-precision curved optical components are widely used in aerospace, precision molds, medical devices, and other fields, which require higher profile accuracy and grinding stability in the resin-bonded arc-shaped diamond grinding wheels employed for processing these workpieces. However, the green silicon carbide (GC) dresser wears easily during the dressing process, leading to large arc profile errors and insufficient exposure of abrasive grains, which limits further improvements in grinding wheel performance. Therefore, this paper proposes using high-melting-point metal tantalum (Ta) as a dressing tool for resin-bonded diamond grinding wheels and investigates the mechanism of tantalum dressing using Raman spectroscopy, X-ray diffraction (XRD), and energy dispersive spectroscopy (EDS). The results indicate that during the dressing process, tantalum reacts with carbon and oxygen on the grinding wheel surface, which leads to the formation of new phases, including TaC, TiC and Ta<sub>2</sub>O<sub>5</sub>. The transition layer formed by these reaction products at the interface of the abrasive materials exhibits both lubrication and thermal barrier functions, effectively preventing diamond graphitization and enhancing the mechanical stability of the abrasive structure. Based on this, to further verify the effectiveness of tantalum in dressing arc-shaped diamond grinding wheels, a comparative experiment was conducted using tantalum and GC grinding rods. The dressing performance of the two tools was systematically evaluated through both quantitative and qualitative analyses of the grinding wheel run-out error, form error, and surface morphology. Experimental results show that using tantalum as the dressing tool significantly enhances grinding wheel profile precision, reducing run-out error from 62.4 μm to 4.3 μm and limiting form error to 7.5 μm. Compared to GC grinding rod dressing, tantalum dressing reduces run-out and form errors by 65.87 % and 52.83 %, respectively, clearly demonstrating the advantages of tantalum in enhancing shape accuracy. Moreover, tantalum dressing markedly improves the grinding wheel's surface characteristics, facilitating the full exposure of cutting edges on abrasive grains, which is essential for improving grinding performance.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 839-850"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473597","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jianyi Huang , Xianwen Liu , Hongwei Zhang , Tao Zhu , Hongyan Shi
{"title":"Challenges and optimization progress in high aspect ratio micro-hole formation for high-frequency and high-speed PCBs:A review","authors":"Jianyi Huang , Xianwen Liu , Hongwei Zhang , Tao Zhu , Hongyan Shi","doi":"10.1016/j.precisioneng.2025.10.008","DOIUrl":"10.1016/j.precisioneng.2025.10.008","url":null,"abstract":"<div><div>With the rapid development of artificial intelligence servers, data centers, and next-generation communication systems, the demand for ultra-high-density interconnects has accelerated the evolution of high-frequency and high-speed printed circuit boards (HFHSPCBs) toward higher levels of board-level integration, increased stack thicknesses, and finer substrate microvias. The continuous increase in the depth-to-diameter ratio of micro-holes has made the challenges of high-aspect-ratio micro-hole formation increasingly prominent. The resulting instability in hole quality and high defect rates severely constrain the development of the information industry. Therefore, overcoming the challenges in high-aspect-ratio micro-hole formation has become a pressing task, yet existing studies lack a systematic synthesis of key issues and countermeasures.To fill the gap in recent reviews on this topic, this paper analyzes the issues arising during the formation of high aspect ratio micro-holes, including poor micro drill positioning accuracy, severe drill tip wear, poor chip breaking performance, difficulties in chip removal, drill breakage, chipping, misalignment, and severe burr formation at micro-hole entrances, based on the material properties of HFHSPCBs and the structure of traditional long aspect ratio micro drills. To address these challenges, this paper reviews the current research and latest developments from four perspectives: the design of long aspect ratio micro drills, the use of coatings, the drilling process, and the application of novel drill materials. The shortcomings of existing solutions in the literature are discussed, and future trends in these four directions are proposed, with the aim of advancing micro-hole quality and industry progress.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 437-464"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145320336","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Mechanistic investigation of chemically assisted magnetic compound fluid polishing of titanium capillary tube inner surfaces","authors":"Yufeng Xue , Wentao Zhang , Hanqiang Wu , Yangke Zheng , Gengzhuo Li , Yongbo Wu","doi":"10.1016/j.precisioneng.2025.09.012","DOIUrl":"10.1016/j.precisioneng.2025.09.012","url":null,"abstract":"<div><div>The inner surface quality of titanium capillary tubes is directly linked to the precision and reliability of associated biomedical devices. However, the chemical stability of titanium and the spatial constraints of capillary structures present significant challenges for inner-surface finishing. In this study, the chemically assisted magnetic compound fluid (CAMCF) polishing process was systematically investigated with a focus on its underlying mechanism. This process couples abrasive motion under an applied magnetic field with in-situ chemical reactions triggered by hydrogen peroxide (H<sub>2</sub>O<sub>2</sub>) and malic acid (MA), enabling synergistic surface softening and material removal. Combined-condition and single-variable experiments were conducted to systematically evaluate the effects of H<sub>2</sub>O<sub>2</sub> and MA concentrations on surface roughness <em>Ra</em> and material removal rate (MRR, defined as the removed material volume per unit time, μm<sup>3</sup>/h). Under optimized conditions (7.2 wt% H<sub>2</sub>O<sub>2</sub> and 5 wt% MA), the CAMCF process achieved a maximum MRR of 42.78 μm<sup>3</sup>/h, reducing the surface roughness from <em>Ra</em> 3.10 μm to <em>Ra</em> 65.3 nm. To elucidate the material removal mechanism in CAMCF processes of titanium, a series of characterization techniques were employed, including surface morphology observation, static etching, Raman spectroscopy, and nano-scratching tests. Results revealed that under synergistic chemical conditions, a porous and structurally weakened titanium oxide film was formed on the surface, exhibiting reduced mechanical strength and facilitating brittle fracture and efficient removal by abrasive particles. Based on these findings, a dynamic “oxidation–complexation–removal–regeneration” mechanism is proposed, which effectively describes the coupling among surface modification, oxide layer renewal, and mechanical abrasion. This mechanistic perspective constitutes the main originality of this work, providing fundamental understanding for CAMCF process optimization and offering guidance for the development of high-precision polishing techniques for the inner surfaces of titanium capillary components.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 179-194"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145106126","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Alexander Pechhacker, Christoph Palka, Ernst Csencsics, Georg Schitter
{"title":"Hybrid reluctance actuator topology for enhanced linearity and high torque in fast steering mirrors","authors":"Alexander Pechhacker, Christoph Palka, Ernst Csencsics, Georg Schitter","doi":"10.1016/j.precisioneng.2025.08.014","DOIUrl":"10.1016/j.precisioneng.2025.08.014","url":null,"abstract":"<div><div>This paper presents a topology for tilting hybrid reluctance actuators (HRAs) that improves linearity while maintaining high torque output. The primary source of non-linear behavior is identified, and design requirements for the new actuator topology are established using a magnetic equivalent circuit model. Finite element method simulations demonstrate that the proposed design achieves greater linearity and a higher torque to current ratio compared to state of the art actuators. For validation, a fast steering mirror, actuated by the proposed HRA topology, with a <span><math><mo>±</mo></math></span>1° range is designed and implemented. Experimental results confirm a threefold reduction in the variation of the torque to current ratio and stiffness, along with a 76% increase in the torque to current ratio compared to the state of the art HRAs.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 16-23"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144988715","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Joffray Guillory , Jean-Pierre Wallerand , Daniel Truong , Ben Sargeant , Charles Richards , Stuart Robson , Asier García Berdote , Pablo Puerto , Pierre-Elie Hervé , Marc Gouttefarde
{"title":"Positioning of a cable-driven parallel robot at better than 250 μm using multilateration and photogrammetric measurement systems","authors":"Joffray Guillory , Jean-Pierre Wallerand , Daniel Truong , Ben Sargeant , Charles Richards , Stuart Robson , Asier García Berdote , Pablo Puerto , Pierre-Elie Hervé , Marc Gouttefarde","doi":"10.1016/j.precisioneng.2025.11.020","DOIUrl":"10.1016/j.precisioneng.2025.11.020","url":null,"abstract":"<div><div>Improving the positioning accuracy of cable-driven parallel robots (CDPRs) is crucial for industrial applications. These robots, operating in large volumes and handling heavy loads, have an accuracy limited by several factors, such as variations in ambient temperature or changes of the load being transported, which affect the mechanical structure of the robot or the tensions in the cables. For instance, CoGiRo is a CDPR of dimensions of 11 m × 15 m × 6 m able to move a platform weighing up to 500 kg. Its resolution is a few tens of micrometres, but its positioning, estimated from the winch encoders, lacks accuracy. To accurately place the CoGiRo mobile platform in the desired position and orientation, this paper proposes to use multilateration and photogrammetric measurement systems in a collaborative way. Photogrammetry continuously measured the poses of the mobile platform with worst-case coordinate uncertainties in the depth direction moving away from the cameras, with 0.2 mm being typical for all lines of sight, dropping to 0.5 mm where lines of sight were blocked by occlusion. The photogrammetric system reported poses at 2 Hz to the multilateration system, enabling it to align its stations on the distant targets and measure static poses of the platform with an estimated uncertainty typically less than 70 μm for the position coordinates and less than 110 μrad for the orientation angles. Multilateration measurements were then used by CoGiRo to reduce its positioning errors to less than 250 μm. The technique was validated using a practical assembly of two square-shaped metallic parts equipped with 10 independent capacitive distance sensors that allowed us to demonstrate part alignment to better than 250 μm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1087-1108"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145623799","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Célestin Vallat, Loïc Tissot-Daguette, Florent Cosandier, Simon Henein
{"title":"Optimized design of generalized flexure rotational couplers","authors":"Célestin Vallat, Loïc Tissot-Daguette, Florent Cosandier, Simon Henein","doi":"10.1016/j.precisioneng.2025.11.009","DOIUrl":"10.1016/j.precisioneng.2025.11.009","url":null,"abstract":"<div><div>Four-bar linkages can transmit angular motion between two rigid links, but their transmission ratio is generally not constant due to kinematic nonlinearities. When such linkages are implemented with flexures – replacing joints with elastic elements to eliminate friction, backlash, and wear – additional parasitic motions are introduced. This article demonstrates that nonlinearities arising from both rigid-body kinematics and flexure deformations can be harnessed to compensate for one another, leading to optimized flexure-based couplers, inversors, reducers, and amplifiers. The analytical model merges Euler–Bernoulli beam theory with loop-closure kinematics, providing geometric design rules that exploit these nonlinear effects to improve transmission constancy. Finite element modeling and experiments on polymer prototypes confirm the validity of the approach, showing that optimized flexure couplers can match or even surpass the performance of ideal four-bar linkages. For instance, in a flexure mechanism with a 1:−1 transmission ratio, the error is reduced from 23% to below 1% for angular displacements up to ±20°. These results establish flexure-based transmission mechanisms as a new class of kinematic building blocks for the design of purely rectilinear and purely circular flexures.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 961-976"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145528358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Dongxiao Yan , Nian Duan , Tukun Li , Paul Bills , Leigh Fleming , Hui Huang
{"title":"Hybrid assisted polishing technique for 4H-SiC wafers using parallel plate dielectric barrier discharge plasma and mechanical polishing","authors":"Dongxiao Yan , Nian Duan , Tukun Li , Paul Bills , Leigh Fleming , Hui Huang","doi":"10.1016/j.precisioneng.2025.11.016","DOIUrl":"10.1016/j.precisioneng.2025.11.016","url":null,"abstract":"<div><div>To achieve sustainable and efficient production of 4H-SiC wafers, this study proposes a two-step plasma-assisted polishing method, which combines the parallel plate dielectric barrier discharge (PP-DBD) plasma irradiation with mechanical polishing (MP) using soft abrasives: (1) parallel-plate dielectric barrier discharge (PP-DBD) plasma irradiation to soften the wafer surface, followed by, (2) soft abrasives MP to remove the modified layer and achieve high surface quality. Key processing parameters—electrode spacing, applied voltage, and irradiation duration—were systematically optimised to form a uniform modified layer approximately 35 nm thick. The modified surfaces were characterised using transmission electron microscopy (TEM) and ellipsometry. The process achieved a material removal rate (MRR) of 220 nm/h, reducing the polishing time required to reach the target surface roughness from 300 min to 15 min compared with soft abrasives MP. This two-step, chemical-free approach significantly improves both polishing efficiency and surface quality, offering a scalable and environmentally sustainable solution for ultra-precision finishing of 4H-SiC wafers.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 977-985"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}