Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"High dynamic wavefront stability control for high-uniformity periodic microstructure fabrication","authors":"Zijian Zhong ,&nbsp;Jingwen Li ,&nbsp;Tianshi Lu ,&nbsp;Xinghui Li","doi":"10.1016/j.precisioneng.2025.01.006","DOIUrl":"10.1016/j.precisioneng.2025.01.006","url":null,"abstract":"<div><div>Periodic microstructures are widely used in optical communication, sensing, and imaging systems for their superior performance in optical modulation. Among their fabrication methods, interference lithography stands out for its high precision and uniformity, making it applicable for the fabrication of large-area periodic microstructures. However, the exposure wavefront is subject to the environmental perturbations, and the resulted drifts compromise the quality of produced photoresist mask. To address this problem, a method for exposure wavefront control aimed at high-uniformity periodic microstructures fabricating is proposed. Embedded in a dual-beam interference lithography system, the method monitors the drifts based on high-speed CCD image acquisition of the Moiré pattern generated by a reference grating, computes the magnitude of drifts based on a line-sampling cross-correlation algorithm and compensates for the drifts based on mirrors driven by piezoelectric actuators. The proposed method achieves simultaneous monitoring and controlling of phase and period drifts at a bandwidth of over 250 Hz. Experiments demonstrate that this system can effectively suppress low-frequency disturbances-induced drifts and reduce the root mean square (RMS) value of phase drifts to <span><math><mrow><mn>9</mn><mo>×</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>3</mn></mrow></msup></mrow></math></span> grating periods and period drifts to <span><math><mrow><mn>2</mn><mo>.</mo><mn>27</mn><mo>×</mo><mn>1</mn><msup><mrow><mn>0</mn></mrow><mrow><mo>−</mo><mn>5</mn></mrow></msup></mrow></math></span> grating periods during exposure, providing a solid foundation for fabricating high-uniformity periodic microstructures.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 216-223"},"PeriodicalIF":3.5,"publicationDate":"2025-01-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"TSP-based depth-first search algorithms for enhanced path planning in laser-based directed energy","authors":"Bingjie Xiao ,&nbsp;Zhihui Zhang ,&nbsp;Qi Wang ,&nbsp;Baoyu Zhang ,&nbsp;Shaopeng Zheng","doi":"10.1016/j.precisioneng.2025.01.009","DOIUrl":"10.1016/j.precisioneng.2025.01.009","url":null,"abstract":"<div><div>In the field of laser-directed energy deposition, it is crucial to optimize the path planning to improve the mechanical properties and ensemble fidelity of the precision printed samples. The traditional path planning methods typically require layer-by-layer calculation of the intersections between the scan lines and the contour loops, which leads to substantial redundant computations and low forming precision. In order to solve these problems, this paper transforms the path optimization into the Travelling Salesman Problem (TSP), followed by realizing the strategy of continuous inter-layer scanning through depth-first search. This method can generate efficient, non-intersecting connection paths in a short time, effectively reducing the total length of the connection path and processing time. Experimental results show that compared with the conventional zig-zag strategy, the path planning method based on TSP performs well in terms of near-net shape, compactness, and hardness of the molding samples. By shifting the intersection areas of the path to the outer contour and interacting the long and short sides, the method can realize the high precision joint part without gap forming and reduce the internal defects of the component.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 224-236"},"PeriodicalIF":3.5,"publicationDate":"2025-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286928","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The innovation in planar optics: Technological breakthroughs and application prospects of metalens","authors":"Dong Li ,&nbsp;Manna Gu ,&nbsp;Chenxia Li ,&nbsp;Ying Tian ,&nbsp;Bo Fang ,&nbsp;Jingxiang Wang ,&nbsp;Zhi Hong ,&nbsp;Xufeng Jing","doi":"10.1016/j.precisioneng.2025.01.011","DOIUrl":"10.1016/j.precisioneng.2025.01.011","url":null,"abstract":"<div><div>As a branch of metasurfaces, metalens have demonstrated unparalleled potential in optical manipulation and imaging shaping. By altering the structure of meta-atoms, metalens can achieve various functions, such as diffraction-limited focusing and aberration correction. This paper introduces the principles and modulation methods of metalens, categorizing them into plasmonic and dielectric types based on the materials used. It also covers tunable metalens and achromatic metalens, highlighting some of the latest advancements in the field. The aim of this paper is to provide readers with a comprehensive understanding of metalens and offer new ideas and methods for designing high-performance optical systems in the future.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 237-252"},"PeriodicalIF":3.5,"publicationDate":"2025-01-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143287290","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Automated visual roughness evaluation of ground surface based on vertical incidence of circular structured light","authors":"Enhui Lu ,&nbsp;Long Zheng ,&nbsp;Wenxiang Ren ,&nbsp;Xinglong Zhu ,&nbsp;Jian Liu","doi":"10.1016/j.precisioneng.2025.01.010","DOIUrl":"10.1016/j.precisioneng.2025.01.010","url":null,"abstract":"<div><div>In response to the significant influence of workpiece texture placement direction on the accuracy and reliability of visual roughness evaluation, a high-precision approach for measuring surface roughness using vertical incidence of circular structured light is proposed. Initially, the theory of vertical incidence method of circular structured light is described. Subsequently, the feasibility of the proposed imaging approach and its robustness against texture interference are validated using TRACEPRO simulations. The superiority of the proposed approach is confirmed by comparative analysis with oblique incidence method. An experimental setup is then designed based on the simulation model to capture images of samples with varying roughness and texture orientations. A model correlating structured light area features with roughness confirms the method's effectiveness and resistance to texture interference. Experimental results demonstrate that the proposed method effectively mitigates texture effects, achieving an average roughness prediction error of 0.02 μm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 192-203"},"PeriodicalIF":3.5,"publicationDate":"2025-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286921","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Parametric and theoretical study of hole quality in conventional micro-machining and rotary ultrasonic micro-machining of silicon","authors":"Yunze Li ,&nbsp;Zhijian Pei ,&nbsp;Weilong Cong","doi":"10.1016/j.precisioneng.2025.01.008","DOIUrl":"10.1016/j.precisioneng.2025.01.008","url":null,"abstract":"<div><div>Microhole machining for silicon is an essential process in the manufacturing of several semiconductor devices, such as solar panels, pressure and flow sensors, the stacking of micro-electromechanical systems, and complementary metal-oxide semiconductors. Due to the device miniaturization, there is a growing need for micro-machining on silicon wafers. Compared with the thermal machining processes for micro-drilling (such as laser machining), mechanical micro-machining processes can avoid the generation of heat-affected-zone, recast layers, and silicon oxidation. Conventional mechanical micro-machining (CμM) of brittle materials generates a higher cutting force and severe quality issues (such as cracking and edge chipping). To address the quality issues, drilling with rotary ultrasonic micro-machining (RUμM) has been proposed and applied. There are no reported investigations on comparisons of micro-machining quality in CμM and RUμM. In this study, the effects of ultrasonic vibration, tool diameter, and feed rate on cutting force and edge chipping were investigated experimentally. To explain machined hole quality (edge chipping) and cutting force, effects on indentation depth were also investigated. We developed the mechanistic models to describe the relationships between input variables and single abrasive indentation depth for both CμM and RUμM processes. Finally, the relationships among ultrasonic indentation, cutting force, and hole quality were established.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 167-176"},"PeriodicalIF":3.5,"publicationDate":"2025-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143369643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Sensitivity study of parameters in a hybrid electrochemical-mechanical polishing process for 316L stainless steel","authors":"Daniel Krzak ,&nbsp;Florian Roy ,&nbsp;Ferdinando Salvatore ,&nbsp;Antoine Gidon ,&nbsp;Stéphane Guerin ,&nbsp;Joël Rech","doi":"10.1016/j.precisioneng.2025.01.007","DOIUrl":"10.1016/j.precisioneng.2025.01.007","url":null,"abstract":"<div><div>The PEMEC process is a new polishing process designed for complex metal parts with high surface roughness. This new hybrid process has been developed by simultaneously coupling tribofinishing and electrochemical polishing. The PEMEC process improves surface roughness in just a few minutes, while preserving edge shape, and is based on a strong synergistic effect between abrasive and chemical mechanisms. To better understand this synergy, it is essential to know which parameters have the greatest influence on polishing results. To this end, it was decided to study the most influential parameters of the two processes combined in PEMEC: drag speed (tribofinishing) as well as temperature and voltage (electropolishing).</div><div>This article focusses on the influence of each of these parameters on the PEMEC process, using a multi-scale analysis that simultaneously considers surface roughness, edge geometry, and sample dimensions. For each of the three parameters, the various observable impacts on the sample are described and quantified. Analysis of the results showed that temperature and voltage have a considerable impact on the PEMEC process and are able to modify the mechanisms of the process, as well as material removal rate. In comparison, drag speed has a smaller influence on the process.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 285-301"},"PeriodicalIF":3.5,"publicationDate":"2025-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286931","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Wear mechanisms of diamond tools and their material basis in machining iron-based materials","authors":"Zejiang Xu ,&nbsp;Guoqing Zhang ,&nbsp;Jiabao Zhang ,&nbsp;Zejia Huang ,&nbsp;Wenqi Zhang ,&nbsp;Minghua Pan","doi":"10.1016/j.precisioneng.2025.01.004","DOIUrl":"10.1016/j.precisioneng.2025.01.004","url":null,"abstract":"<div><div>Diamond tools are widely used in ultra-precision machining due to their excellent physicochemical properties, enabling workpiece materials to achieve mirror surface quality. However, when machining iron-based materials, diamond tools are prone to graphitization due to electrochemistry reactions between carbon and iron atoms, this reduces the sharpness of the tool cutting edge, which further affects or even seriously damages the machined surface quality. Therefore, understanding the diamond tools wear mechanism and corresponding wear suppression methods is crucial for enhancing the machined surface quality. This paper reviews the wear mechanisms of diamond tools and their material basis in machining iron-based materials. Firstly, the paper reviews the affinity between iron and carbon atoms from the perspective of material basis and reviews the selection of diamond tool crystal plane orientations for machining iron-based materials. Secondly, this paper summarizes the wear mechanisms for diamond tools used in machining iron-based materials. Finally, aiming at the wear mechanism, the paper emphasizes suppression methods for diamond tool wear during machining iron-based materials. Through the comprehensive study of these aspects, this review combines the material basis and diamond tool wear mechanism, contributes to the suppression of diamond tool wear in ultra-precision machining of iron-based materials and the improvement of machined surface quality, and also provides theoretical support and reference for subsequent scholars to propose new schemes that may suppress the graphitization of diamond tools.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 110-152"},"PeriodicalIF":3.5,"publicationDate":"2025-01-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143287291","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effects from the stiffness and damping of O-rings on the stability and nonlinear dynamic characteristics of a rotor supported by flexible porous gas bearings","authors":"Kang Zhang ,&nbsp;Yu Huang ,&nbsp;Wenjun Li ,&nbsp;Hailong Cui ,&nbsp;Youmin Rong ,&nbsp;Kai Feng","doi":"10.1016/j.precisioneng.2025.01.003","DOIUrl":"10.1016/j.precisioneng.2025.01.003","url":null,"abstract":"<div><div>In the field of high-speed rotating machinery, it is a common phenomenon that the rotor is liable to lose stability when rotating at high speeds. Installing a layer of damping structure between the bearing and the housing is a potential means to restrain the vibration of the rotor. In this article, it is useful to improve the stability of the rotor in the way of increasing the damping of the bearing by installing several O-rings on the porous air journal bearing (PAJB). The rotor-bearing test rig is set up to study the vibration of the rigid rotor supported by PAJBs with three types of O-rings mounted for different supply pressures. Moreover, a nonlinear numerical model is established to predict the rotor responses. The accuracy of the numerical model is verified by comparing the calculated results with the data tested by the above experiment. Based on the experimental and simulation results, the effects of the supply pressures, stiffness and damping of O-rings on the stability of the rotor-PAJB system are investigated. The influence of the stiffness and damping of O-rings on the nonlinear dynamic characteristics of the systems is further studied by expanding the parameter range of the numerical simulation, and the relevant laws are summarized. The results demonstrate that both the stiffness and damping of O-rings have significant influence on the stability of the rotor-PAJB system. When the stiffness of O-rings is in the unstable stiffness interval, the stability of the rotor at high speeds will decrease. Meanwhile, larger damping produces better stability. By both the experimental and theoretical studies, the investigation is expected to promote the development of turbomachinery towards higher speeds and better stability.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 153-166"},"PeriodicalIF":3.5,"publicationDate":"2025-01-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143287498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Surface microstructure design and validation of flexible interventional guidewires: A comprehensive comparative study","authors":"Pan Li ,&nbsp;Xue Zhang ,&nbsp;Jing Feng ,&nbsp;Chunqing Yu ,&nbsp;Cunman Liang","doi":"10.1016/j.precisioneng.2025.01.002","DOIUrl":"10.1016/j.precisioneng.2025.01.002","url":null,"abstract":"<div><div>The intricate and narrow vascular networks present significant challenges for the compliance, flexibility, and maximum bending capabilities of interventional instruments. By focusing on the constrained bending capacity of guidewires in vascular procedures, the research delves into the surface microstructure design of flexible interventional guidewires to enhance their bending angles. This advancement facilitates smooth interventional procedures within limited workspaces. The research investigates how various structural size parameters of the surface microstructure affect the maximum bending capability of interventional guidewires. It encompasses the design and manufacture of four types of flexible interventional guidewires featuring rectangular, triangular, arc-shaped, and concave-pit-shaped microstructures. A theoretical model for guidewire bending angles is established, and through theoretical numerical analysis, the correlations between different microstructures, microstructural size parameters, and bending angles are elucidated. The study examines the bending characteristics of the four microstructured flexible interventional guidewires under tendon stretching displacement. Simulation analysis is employed to assess the influence of microstructural size parameters on the bending angles of the guidewires, confirming that guidewires with concave-pit-shaped microstructures can achieve greater bending angles, thereby enhancing their bending capabilities. An experimental setup is arranged to explore the bendable angles of the flexible interventional guidewires with the four types of microstructures. Furthermore, experiments on the interactive compliance between the microstructured flexible interventional guidewires and blood vessels are conducted to validate the guidewires’ deformation capabilities. The study affirms that the flexible interventional guidewire with concave-pit-shaped microstructures displays a greater bending angle. Specifically, the concave-pit-shaped microstructured flexible interventional guidewire, measuring 50 mm in length, can achieve a bending angle of 195° when subjected to a tendon stretching displacement of 4 mm, enabling successful interventions in intricate and narrow vascular networks like those encountered in heart/brain vasculature.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 70-86"},"PeriodicalIF":3.5,"publicationDate":"2025-01-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143287494","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A two-stage collision detection method of a multi-axis CNC machine tool based on bounding box and basic primitive","authors":"Changjun Wu ,&nbsp;Piaoyang Zhao ,&nbsp;Qiaohua Wang ,&nbsp;Guoyong Ye ,&nbsp;Zhifeng Liu ,&nbsp;Ri Pan","doi":"10.1016/j.precisioneng.2025.01.001","DOIUrl":"10.1016/j.precisioneng.2025.01.001","url":null,"abstract":"<div><div>A fast and accurate two-stage collision detection method is proposed to ensure the normal processing of multi-axis CNC machine tools (MACMT) and avoid collision between the tool and the workpiece. Taking the machining of complex curved parts using a large gantry milling machine as an example, the motion relationship between the key components of the machine tool and the collision detection model are described in detail. Then, collision detection is performed on CNC machining through grading. In the first stage, the repeated projection method quickly eliminates long-distance non-intersecting collision detection. In the second stage, in order to further accurately detect, a hierarchical bounding box tree is constructed to divide the bounding boxes into layers and traverse the intersection states of each node layer by layer. A point set determination method is proposed for the basic primitive of leaf nodes to perform the most accurate collision detection. Finally, accuracy testing and real-time experimental verification are conducted in the self-developed MACMT virtual simulation system. The experimental results show that the proposed method can meet the requirements of accuracy and real-time performance. The lowest running frame rate of the proposed method is 89.1 FPS, and the average frame rate is 117.3 FPS. The detection efficiency is improved by 28.3 %, 12.9 %, 10.6 % and 9.8 % compared to traditional methods and other reference methods, respectively. Therefore, the method proposed in this paper can perform collision detection faster and more accurately, avoiding economic losses and ensuring personal safety.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 177-191"},"PeriodicalIF":3.5,"publicationDate":"2025-01-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143286920","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}