Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"Study on ultrasonic-assisted scratching and mirror grinding of silicon carbide based on truncated coarse diamond wheel","authors":"Yanjun Lu ,&nbsp;Xiaobu Liu ,&nbsp;Jiaxuan Du ,&nbsp;Xiaoshuang Rao","doi":"10.1016/j.precisioneng.2025.02.012","DOIUrl":"10.1016/j.precisioneng.2025.02.012","url":null,"abstract":"<div><div>Ultrasonic vibration-assisted grinding (UVAG) has been proven to be an effective method for processing hard and brittle materials such as silicon carbide (SiC). However, most UVAG processes use fine-grained diamond grinding wheels to achieve higher accuracy, which brings about the problems of heavy wear and frequent dressing, and lower material removal rates. Therefore, a new UVAG method based on coarse-grained diamond grinding wheel was proposed to realize mirror grinding of SiC. In this paper, the effects of ultrasonic power on the critical depth and grinding force were investigated during the brittle-ductile transition of SiC material removal. The effects of grinding process parameters and ultrasonic power on the ground surface quality were also analyzed and compared. The results show that the ductile removal region and the critical depth of brittle-ductile transition increase while the critical scratching force decreases when the ultrasonic power increase in a certain range. When the ultrasonic power is 40 % (ultrasonic amplitude of 2.36 μm), the longest ductile domain length, the largest critical brittle-ductile transition depth and the least critical scratching force of the scratched SiC surface reached 257.49 μm, 0.608 μm and 4.47 N, respectively. This indicates a significant positive impact of ultrasonic vibration on grinding of SiC. Compared with traditional mechanical grinding, coarse diamond grinding wheels assisted by ultrasonic vibration can achieve better surface quality, reducing the surface roughness of SiC by approximately 65.38 %. The surface roughness reaches the minimum value of 36 nm at the wheel speed of 12000 r/min, feed rate of 20 mm/min, grinding depth of 2 μm, and ultrasonic power of 40 %, resulting in a mirror-like macroscopic surface.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 587-603"},"PeriodicalIF":3.5,"publicationDate":"2025-02-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143474679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The design concept and implementation of ultra-precision thinning grinder for SiC wafers","authors":"Tianyu Li,&nbsp;Xianglong Zhu,&nbsp;Renke Kang,&nbsp;Lihao Dai,&nbsp;Meng Li","doi":"10.1016/j.precisioneng.2025.02.011","DOIUrl":"10.1016/j.precisioneng.2025.02.011","url":null,"abstract":"<div><div>With the rapid development of mobile communications, intelligent driving, aerospace, and other high-tech fields, the performance requirements for power semiconductor devices continue to improve. Silicon carbide (SiC), a third-generation semiconductor, has gradually replaced monocrystalline silicon (Si) due to its superior material properties. Constrained by the high hardness of the SiC, it is hard to guarantee the grinding accuracy and quality of SiC wafers using a traditional grinder with a cantilever structure. Herein, this paper elaborated the design concept of the ultra-precision thinning grinder from two aspects of material characteristics and processing requirements, and developed an ultra-precision thinning grinder for SiC wafers with an embedded gantry structure, and configured an inclination automatic adjustment mechanism, which is capable of quantitatively adjusting the relative tilting angle between the turntable and the grinding wheel spindle to realize the regulation of the total thickness deviation (TTV) of SiC wafers. The simulation and grinding comparison experiments show that the designed grinder has superior dynamic characteristics and machining quality compared to the traditional cantilever structure grinder. The grinder successfully processed 6-inch SiC wafers with a TTV of 2.26 μm and a roughness (<em>Sa</em>) of less than 3.8 nm, verifying that the design concept and structural design can ensure excellent machining performance.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 251-263"},"PeriodicalIF":3.5,"publicationDate":"2025-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143578834","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Design of a novel Z-shaped flexure hinge and a 2DOF XY precision positioning platform","authors":"Jinqiang Gan ,&nbsp;Wenlong Xie ,&nbsp;Wenjian Yang ,&nbsp;Shihe Lei ,&nbsp;Bo Lei","doi":"10.1016/j.precisioneng.2025.01.026","DOIUrl":"10.1016/j.precisioneng.2025.01.026","url":null,"abstract":"<div><div>To solve the problem of inadequate amplification ratio within the precision positioning platforms, a novel Z-shaped flexure hinge (ZFH) is proposed firstly in this paper. Meanwhile, a 2DOF XY precision positioning platform which realizes secondary amplification with bridge-shaped mechanisms and novel ZFHs is designed. The novel ZFH and the platform are analyzed by static modeling with compliance matrix method and the principle of force equilibrium. The simulation results show that the errors in both stiffness and amplification ratios of the platform are within 7%, and the performance of novel ZFH is improved by 50.70%. Finally, A prototype of the platform is fabricated for performance testing. The experimental results well validate the superior performance of the platform and novel ZFH.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 459-469"},"PeriodicalIF":3.5,"publicationDate":"2025-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143376732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Numerical and experimental study of material removal characteristics for magnetorheological micro-jet polishing","authors":"Dunlan Song ,&nbsp;Wenze Wang ,&nbsp;Jieqiong Lin ,&nbsp;Lingwei Qiu ,&nbsp;Hang Cui ,&nbsp;Xiaoqin Zhou","doi":"10.1016/j.precisioneng.2025.02.008","DOIUrl":"10.1016/j.precisioneng.2025.02.008","url":null,"abstract":"<div><div>Magnetorheological micro jet polishing (MMJP) technology has great potential for polishing components with complex surfaces, cavities, and microstructures. However, there is a lack of in-depth and systematic research on the material removal characteristics of MMJP under different processing parameters, which hinders its engineering application. This study developed a numerical model for MMJP using the Volume of Fluid (VOF) multiphase flow model and the K-W turbulence model, which was used to analyze the interaction between the flow field and the workpiece during the polishing process. To clarify the material removal process, the material removal mechanism of MMJP was investigated. The forces acting on individual abrasives in the flow field were analyzed, and a material removal model for MMJP was established based on the Preston equation. Additionally, a combined approach of simulation and experimentation was used to study the effects of different processing parameters on material removal and polishing performance. The experimental results were consistent with the numerical predictions, demonstrating the reliability of the CFD model. Finally, an orthogonal optimization experiment was designed to determine the influence hierarchy of various process factors on the polishing results. Using the optimal process parameter combination, aluminum alloy workpieces were polished, with the surface roughness reduced from 355 nm to 253 nm. This study provides theoretical support and processing guidance for the industrial application of MMJP.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 497-514"},"PeriodicalIF":3.5,"publicationDate":"2025-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143387968","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Investigation on the machining mechanism and surface integrity in ultrasonic elliptical vibration cutting of Al-Si alloys","authors":"Dachuan Chen ,&nbsp;Zhengding Zheng ,&nbsp;DongXu Wu ,&nbsp;Chong Zeng ,&nbsp;Yikai Zang ,&nbsp;Zhongdi She ,&nbsp;Jianguo Zhang ,&nbsp;Xiao Chen ,&nbsp;Jianfeng Xu","doi":"10.1016/j.precisioneng.2025.02.007","DOIUrl":"10.1016/j.precisioneng.2025.02.007","url":null,"abstract":"<div><div>The incorporation of reinforcing particles makes the high-quality machining of particle-reinforced metal matrix composites, exemplified by Al-Si alloys, extremely difficult. Ultrasonic elliptical vibration cutting (UEVC) has been proven potentially advantageous in Al-Si alloys machining. Within this article, by combining finite element (FE) and experimental analysis, the machining mechanism and surface integrity of Al-Si alloys under traditional cutting (TC) and UEVC are discussed. The influence of the relative position of particle and cutting path on the coordinated deformation behavior of particle and matrix was investigated. Then, further analysis was conducted on the cutting force, chip formation, surface residual stress, and tool wear mechanism. Finally, the influence of different process parameters on surface integrity was studied in detail. The results indicated that the intermittent disengagement of the tool from the workpiece in UEVC avoids continuous tool-workpiece compression. Additionally, the elliptical trajectory induces friction reversal and facilitates chip removal, suppressing the damage formation. With the characteristics above, UEVC can significantly enhance surface integrity and suppress tool wear. It can also increase surface residual compressive stress and reduce both the mean cutting force and surface roughness. Current findings provide novel insights and practical guidance for high-quality machining of Al-Si alloys by UEVC.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 559-575"},"PeriodicalIF":3.5,"publicationDate":"2025-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143420696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Time delay compensation in high-speed diamond turning of freeform surface using independent fast tool servo with a long stroke","authors":"Takeshi Hashimoto,&nbsp;Jiwang Yan","doi":"10.1016/j.precisioneng.2025.02.006","DOIUrl":"10.1016/j.precisioneng.2025.02.006","url":null,"abstract":"<div><div>The demand for wearable device applications has continuously grown in recent years, especially with the significant rise of augmented and virtual reality technologies. Freeform optics plays a crucial role in these devices by enhancing optical performance, shortening the light path, and reducing the weight, all while allowing for smaller, lighter systems with higher efficiency. The independent fast tool servo (FTS)-based diamond-turning method stands out as a highly effective technique for fabricating freeform shapes with high accuracy and productivity. However, microsecond-order time delays occur within the system, significantly impacting form accuracy as machining speeds increase. This study explores the sources of form errors in freeform surface fabrication associated with the FTS diamond-turning process, with particular attention to the effects of clocking angle errors caused by the time delay. These errors were found to greatly affect form accuracy, especially at higher machining speeds. The FTS position data were analyzed, and time delays under various operational conditions due to servo control were confirmed. To precisely identify the extent of the time delay, a cylindrical surface was machined under high-speed conditions, and the clocking angle error was measured using a non-contact chromatic probe. Results showed that time delays originating from the machine platform had a significant effect on form accuracy. By accurately identifying and compensating for these time delays, the clocking angle error was eliminated. To validate the effectiveness of the time-delay compensation strategy, a cylindrical freeform surface was machined after the compensation, and the clocking angle error was minimized down to 0.00014° evaluated by on-machine measurement. The form accuracy of the freeform machining result after compensation was achieved at 0.85 μm PV. This study establishes a methodology for identifying and compensating for time delays in an independent FTS system, contributing to improved form accuracy in freeform optics fabrication.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 515-527"},"PeriodicalIF":3.5,"publicationDate":"2025-02-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143396076","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Avoid the influence of error point cloud registration homogenization on the evaluation of blade machining allowance distribution","authors":"Xingzhao Wang ,&nbsp;Xu Zhang ,&nbsp;Limin Zhu","doi":"10.1016/j.precisioneng.2025.01.024","DOIUrl":"10.1016/j.precisioneng.2025.01.024","url":null,"abstract":"<div><div>The homogenization or abandonment of local machining error point cloud in machining allowance evaluation will bring negative effects. Therefore, a regional unilateral control point cloud registration algorithm based on directed distance function is proposed. The rapid extraction and classification of errors are realized by hierarchical identification with the change rate of distance value as the parameter. According to the error type, the error region is expanded to achieve in the solution: the non-error region is the minimum iterative value selection interval and the fixed maximum error region is the maximum iterative value selection interval. The simulation results show that the distribution of machining allowance in the non-error region obtained by the proposed method is close to the ideal value. The blade measurement test shows that compared with the standard method and the removal point method, the new method can ensure the distribution of blade machining allowance is more reasonable.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 470-480"},"PeriodicalIF":3.5,"publicationDate":"2025-02-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143378627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Combining laser texturing and remelting for reducing friction and corrosive wear in Ti-based amorphous alloys","authors":"Kunpeng Guan,&nbsp;Jing Yu,&nbsp;Fengtao Wang,&nbsp;Xiulin Ji","doi":"10.1016/j.precisioneng.2025.02.001","DOIUrl":"10.1016/j.precisioneng.2025.02.001","url":null,"abstract":"<div><div>Ti-based amorphous alloys are known for their high strength, hardness, and excellent corrosion resistance, but generally limited tribological performance. To reduce the coefficient of friction (COF) and mitigate corrosive wear, laser surface texturing and remelting were applied. Three distinct groove textures were fabricated: an asymmetric double-depth groove (AG), a remelting-formed dense low-depth groove (DLDG), and a combination of both textures (DLDG + AG). The tribocorrosion behavior were evaluated using reciprocating sliding tests against a Si₃N₄ ball in a 3.5 % NaCl solution. The AG sample demonstrated a 21.5 % reduction in COF and a 27.4 % reduction in wear rate. Due to remelting-induced oxidation and partial crystallization, the DLDG sample increased the COF but significantly enhanced wear resistance, improving it by approximately 40.6 times. Furthermore, the DLDG + AG sample effectively combined the advantages of laser texturing and remelting, reducing the COF by 26.9 % and enhancing wear resistance by 15.5 times. Regarding the corrosion without sliding, the DLDG sample exhibited the best corrosion resistance, while the AG sample showed deteriorated corrosion resistance. However, the DLDG + AG sample demonstrated the best corrosion resistance under sliding conditions with about 96.6 % reduction in corrosion current density. In conclusion, the combination of laser surface texturing and remelting offers a promising strategy to improve the tribocorrosion performance of Ti-based amorphous alloys by simultaneously reducing COF, enhancing wear resistance, and improving corrosion resistance.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 417-424"},"PeriodicalIF":3.5,"publicationDate":"2025-02-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143350507","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Piecewise system identification and trajectory acceleration reallocating for diamond turning of microlens arrays","authors":"Zhiyue Wang ,&nbsp;Zhenhua Jiang ,&nbsp;Hao Wu ,&nbsp;Yangqin Yu ,&nbsp;Limin Zhu ,&nbsp;Xinquan Zhang","doi":"10.1016/j.precisioneng.2025.02.005","DOIUrl":"10.1016/j.precisioneng.2025.02.005","url":null,"abstract":"<div><div>The use of microlens arrays (MLAs) manufactured through slow tool servo (STS) machining is becoming increasingly common in the field of complex surface optics. However, the current STS technique presents a significant challenge in balancing machining efficiency and surface profile accuracy, mainly due to the rapid variations in the spatial frequency of the microlenses. To address this challenge, this study proposes a piecewise system identification method along with trajectory acceleration reallocating. Specifically, the proposed method models the machine lathe Z-axis as a dynamic system piecewise, segmented by different trajectory acceleration intervals, to accurately approximate the nonlinear dynamic response of Z-axis. Tracking error prediction and trajectory acceleration reallocating are developed based on the piecewise system identification. To validate the proposed approach, diamond turning experiments were conducted on an ultraprecision machine lathe. The proposed approach significantly enhances the surface form accuracy while marginally improving the machining efficiency.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 425-436"},"PeriodicalIF":3.5,"publicationDate":"2025-02-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143373097","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A selection method of key temperature points for thermal error modeling of machine tools featuring multiple heat sources","authors":"Lei Cao ,&nbsp;Gyungho Khim ,&nbsp;Seung Guk Baek ,&nbsp;Sung-Chong Chung ,&nbsp;Chun-Hong Park","doi":"10.1016/j.precisioneng.2025.01.021","DOIUrl":"10.1016/j.precisioneng.2025.01.021","url":null,"abstract":"<div><div>A method that integrates grey relational and thermal sensitivity analyses, and fuzzy c-means clustering, called GTF method, is proposed to select key temperature points for thermal error modeling of machine tools featuring multiple heat sources. A two-dimensional temperature-error index is employed to prevent candidate temperature points with high correlations from being excluded when selecting the temperature points to improve thermal error compensation. To verify the method effectiveness and versatility, prediction accuracies were estimated for a vertical machining center and a floor-type boring machine with multiple heat sources. The root mean square error average reduction rates of the GTF method were approximately 28.0 % and 25.8 % in comparison with the conventional method for the two machine tools, respectively. From the results, it was confirmed that the proposed GTF method ensures accurate thermal predictions for machine tools with multiple heat sources, and is versatile.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 528-539"},"PeriodicalIF":3.5,"publicationDate":"2025-02-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143396077","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}