Xuebin Yao , Jianhao Peng , Ruihong Zhou , Rui Wang , Guojun Li , Wenfeng Ding , Biao Zhao
{"title":"Material removal and damage formation mechanisms during ultrasonic vibration-assisted grinding of high volume fraction SiCp/Al composites","authors":"Xuebin Yao , Jianhao Peng , Ruihong Zhou , Rui Wang , Guojun Li , Wenfeng Ding , Biao Zhao","doi":"10.1016/j.precisioneng.2025.07.023","DOIUrl":"10.1016/j.precisioneng.2025.07.023","url":null,"abstract":"<div><div>High volume fraction silicon carbide particle-reinforced aluminum matrix (SiC<sub>p</sub>/Al) composites are applied in aerospace industries owing to their superior properties. However, the hardness, brittleness, and uneven distribution of SiC particles often lead to fluctuations in grinding force and surface damage during conventional grinding (CG). At high volume fraction, the overall brittleness of SiC particles increases, resulting in a higher grinding force and exacerbated machining defects. Ultrasonic vibration-assisted grinding (UVAG) has shown significant advantages in machining brittle and hard materials. In this study, comparative experiments were performed on SiCp/Al composites with 60 vol% SiC particles using a single abrasive grain under CG and UVAG conditions, aiming to reveal the material removal and damage formation mechanisms. The results indicate that UVAG reduced the normal grinding force <em>F</em><sub>n</sub> by 19.8 %–29.3 % and the tangential grinding force <em>F</em><sub>t</sub> by 21.3 %–30.1 %, while also decreasing the specific grinding energy by 26.7 %–35.4 % compared to CG. Additionally, the scratching quality was also improved, with the surface roughness <em>S</em><sub>a</sub> reduced by 16.0 %–23.2 % and the average pile-up ratio lowered by 17.1 %–20.8 %. UVAG also effectively suppressed radial crack propagation due to the dense interactions between SiC particles, which inhibited slip and reduced severe subsurface damage. This study promotes the practical application of UVAG in high volume fraction SiC<sub>p</sub>/Al composites.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 625-639"},"PeriodicalIF":3.5,"publicationDate":"2025-07-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144703391","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zewei Tang , Mingfeng Ke , Jiahuan Wang , Lanying Shao , Binghai Lyu
{"title":"Electrochemistry assisted shear thickening polishing of Ti-6Al-4V","authors":"Zewei Tang , Mingfeng Ke , Jiahuan Wang , Lanying Shao , Binghai Lyu","doi":"10.1016/j.precisioneng.2025.07.020","DOIUrl":"10.1016/j.precisioneng.2025.07.020","url":null,"abstract":"<div><div>In order to obtain a high-quality Ti-6Al-4V surface, an electrochemistry assisted shear thickening polishing (E-STP) method is proposed in this paper. In order to investigate the material removal synergistic effect of mechanical and electrochemical in the polishing process, this paper mainly investigates the effects of current, voltage, and polishing speed on surface roughness (<em>S</em><sub>a</sub>) and material removal rate (MRR). The results show that at the same polishing speed, as the current intensity or voltage intensity increases, the surface material removal rate first rises and then falls, and the surface roughness <em>S</em><sub>a</sub> first falls and then rises. At a polishing speed of 80 rpm with a 160 mA current, the optimal synergy between the electrochemical effect and the shear thickening effect was achieved, resulting in the highest MRR of 543.4 nm/min and the lowest surface roughness Sa of 1.4 nm. As polishing speed increases, a higher current density is required to achieve the highest MRR and lowest <em>S</em><sub>a</sub>. This is because faster speeds enhance mechanical removal, necessitating stronger electrochemical action to maintain balance. According to the EDS results, at 80 mA and 80 rpm, the oxide content is 0, indicating a balance between mechanical and electrochemical effects, leading to efficient material removal and optimal surface roughness. At 160 mA, the oxide content is 4.57 %, with the electrochemical effect slightly stronger, achieving the optimal synergy and polishing results.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 609-624"},"PeriodicalIF":3.5,"publicationDate":"2025-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144703390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Qingwei Wang , Peng Yao , Haizhong Wang , Xuerui Xin , Dongkai Chu , Shuoshuo Qu , Hongtao Zhu , Hanlian Liu , Bin Zou , Chuanzhen Huang
{"title":"Wet etching after femtosecond laser machining for efficient fabrication of consistent inverted pyramid microstructures on monocrystalline silicon surfaces","authors":"Qingwei Wang , Peng Yao , Haizhong Wang , Xuerui Xin , Dongkai Chu , Shuoshuo Qu , Hongtao Zhu , Hanlian Liu , Bin Zou , Chuanzhen Huang","doi":"10.1016/j.precisioneng.2025.07.017","DOIUrl":"10.1016/j.precisioneng.2025.07.017","url":null,"abstract":"<div><div>Monocrystalline silicon is an important semiconductor material. Monocrystalline silicon with appropriate surface structure has been used in the field of microelectronics and microsolar cells due to its improved mechanical and optical properties. However, due to its brittle and hard properties, the high-quality preparation of microstructures is difficult. In this study, femtosecond laser-assisted wet chemical etching was utilized to fabricate well-defined inverted pyramidal etch pits and array structures on monocrystalline silicon surfaces, while the actual angle between the (100) and (111) crystallographic planes was determined. Firstly, the morphology of ablation holes under different laser parameters was studied. Secondly, wet etching was conducted at 20 °C and 80 °C to investigate the morphology evolution of inverted pyramid etching pits. The optical properties of monocrystalline silicon were tested. The experimental results demonstrate that the inverted pyramid-structured m-Si exhibits an absorptivity exceeding 95 % within the wavelength range of 400–900 nm. This is of great significance for improving the optical performance of monocrystalline silicon.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 600-608"},"PeriodicalIF":3.5,"publicationDate":"2025-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144702842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Xiaopeng Liu , Jiru Wang , Langlang Yan , Dubang Mao , Baoshan Tong , Hongwei Zhao
{"title":"A-novel adjustable pre-pressure ultrasonic motor designed for variable temperature rotational speed environments","authors":"Xiaopeng Liu , Jiru Wang , Langlang Yan , Dubang Mao , Baoshan Tong , Hongwei Zhao","doi":"10.1016/j.precisioneng.2025.07.018","DOIUrl":"10.1016/j.precisioneng.2025.07.018","url":null,"abstract":"<div><div>The traveling wave ultrasonic motors (TWU-motors), operating based on the friction drive method have the advantages of low speed and large torque, fast response speed, no electromagnetic interference. However, the friction driving effect is very sensitive to the changes of the pre-pressure and friction contact area, and the inappropriate contact mode will not only reduce the performance of the TWU-motor, but also accelerate the wear of the TWU-motor and produce noise. In this study, we propose a novel TWU-motor design that incorporates a flexible rotor (FR) to enhance both speed and load capacity. The FR is designed to increase the contact area between the rotor and stator. Furthermore, the stator structure and rotor vibration performance of the TWU-motor were optimized through experiments and finite element simulations. An experimental setup was constructed to evaluate the electromechanical performance of the TWU-motor and to test how its performance varies with changes in ambient temperature. Experimental results revealed that the TWU-motor achieved a maximum rotational speed of 101 r/min, a minimum speed of 1 r/min, a peak torque of 878 mN m, and maintained normal operation within a temperature range of 20 °C–190 °C. This study has potential applications in camera autofocus systems, precision control of miniature robots, and spacecraft control systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 653-662"},"PeriodicalIF":3.5,"publicationDate":"2025-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144704127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Revealing the microscopic material removal process and mechanism of electrical discharge machining of silicon carbide: A molecular dynamics study","authors":"Ruirui Cui, Xiaodong Yang, Xiaoming Duan","doi":"10.1016/j.precisioneng.2025.07.010","DOIUrl":"10.1016/j.precisioneng.2025.07.010","url":null,"abstract":"<div><div>Electrical discharge machining (EDM) presents strong potential as a preferred machining process for silicon carbide (SiC) wafers due to its thermal removal mechanism, which is not constrained by the high hardness and brittleness of SiC. Furthermore, its cost-effectiveness enhances its feasibility for industrial applications. Therefore, a thorough understanding the material removal mechanisms of SiC in EDM is crucial for enhancing machining efficiency and improving surface quality. However, the above mechanisms are difficult to reveal due to the complexity of the machining process. To address this issue, a molecular dynamics (MD) model is developed in this study to investigate the material removal process and the formation of discharge craters at the micro-scale during the EDM of SiC. The results showed that different from ordinary metal materials, chemical changes such as thermal decomposition reaction and combination reaction, as well as physical changes such as gasification, melting and peritectic reaction occur in the EDM of SiC, generating the elemental carbon (C), elemental silicon (Si), and carbon-silicon compound (Si<sub>x</sub>C<sub>y</sub>). The removed material includes a significant amount of Si<sub>x</sub>C<sub>y</sub> gases, C vapor, Si vapor, and molten Si<sub>x</sub>C<sub>y</sub>. After discharge, the surface of the discharge crater mainly contains a large amount of amorphous Si<sub>x</sub>C<sub>y</sub> with a small amount of amorphous C and amorphous Si. The amorphous Si<sub>x</sub>C<sub>y</sub> and amorphous C collect on the surface of the discharge crater to form particles causing rough surface. Additionally, a large amount of thermally decomposed material, which is not removed, re-solidifies on the surface of the SiC during EDM, limiting machining efficiency and deteriorating surface quality. This study enhances the understanding of the material removal mechanisms of SiC during EDM, providing a foundation for the optimization of processing techniques.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 548-562"},"PeriodicalIF":3.5,"publicationDate":"2025-07-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144663215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Wanjun Zhang , Baomin Wang , Zaixin Wu , Feng Zhang , Jingxuan Zhang , Siyan Zhang , Jingyi Zhang , Jingyan Zhang , Honghong Sun , Kristian E. Waters , Hao Ma
{"title":"High-precision electro-hydraulic position servo system for machine tools utilizing mathematical model identification and control techniques","authors":"Wanjun Zhang , Baomin Wang , Zaixin Wu , Feng Zhang , Jingxuan Zhang , Siyan Zhang , Jingyi Zhang , Jingyan Zhang , Honghong Sun , Kristian E. Waters , Hao Ma","doi":"10.1016/j.precisioneng.2025.07.011","DOIUrl":"10.1016/j.precisioneng.2025.07.011","url":null,"abstract":"<div><div>The electro-hydraulic servo control system often suffers from low accuracy and poor stability due to its nonlinear and time-varying parameters. To tackle this, an experimental model was created using a third-order nonlinear open-loop system with a unit step input. Through xPC semi-physical simulation, stability and identification analyses led to the development of a mathematical identification model. A composite control switching method was proposed, highlighting the relationship between control methods and self-adjusting factors. An online self-adjusting fuzzy PID control approach allows real-time adjustments of control rules, aiming to enhance performance. The proposed algorithm's stability is set for theoretical and quantitative analysis, with feasibility validated through simulation. Additionally, challenges arise from severe nonlinearity, time-varying internal parameters, and external load interference, impacting both static and dynamic control performance. To mitigate these issues, a switching control method combining fuzzy PID schemes was suggested. This approach effectively reduces response times and errors while improving stability and control accuracy near operating points. Simulations using xPC semi-physical setups and MATLAB demonstrated that the online self-adjusting fuzzy PID method significantly enhanced control accuracy in high-precision electro-hydraulic servo systems, boosting speed and dynamic performance while eliminating stability errors.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 563-586"},"PeriodicalIF":3.5,"publicationDate":"2025-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144663216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Kuangbing Wang , Zhan Li , Bin Wu , Donglei Yan , Ziwen Kang , Yongda Yan , Shunyu Chang , Yanquan Geng
{"title":"Modeling and experimental investigation of the effect of sample tilt on the machining performance in AFM-based nanofabrication","authors":"Kuangbing Wang , Zhan Li , Bin Wu , Donglei Yan , Ziwen Kang , Yongda Yan , Shunyu Chang , Yanquan Geng","doi":"10.1016/j.precisioneng.2025.07.012","DOIUrl":"10.1016/j.precisioneng.2025.07.012","url":null,"abstract":"<div><div>Atomic force microscope (AFM)-based nanoscale machining has been proven to be an effective method for fabricating nanostructures. Through a combination of theoretical analysis and experimental investigation, the impact of sample tilt on the performance of AFM-based nanoscale machining is systematically examined. Three typical scratching directions, along the cantilever axis, perpendicular to the cantilever axis, and away from the cantilever axis, are considered in this study. Theoretical models are developed for each of these directions, and experimental validation is conducted. The results demonstrate that sample tilt has a significant impact on machining outcomes, primarily attributed to variations in the force applied by the AFM tip and the load-bearing area. These factors are influenced by both the tilt angle and the scratching direction. Experimental tests reveal that the developed models can precisely predict the impact of sample tilt on machining outcomes. Furthermore, this study investigates the relationship between machining depth and load for the three scratching directions under tilted sample conditions. Finally, we explored the impact of the friction coefficient and probe geometry on the machining results. This research provides robust theoretical support for comprehending the influence of sample tilt on AFM-based nanoscale machining and offers significant insights into optimizing the machining process.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 497-506"},"PeriodicalIF":3.5,"publicationDate":"2025-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144633319","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Design, optimization, and testing of a compliant quasizero constant-force mechanism for linear motion guidance","authors":"Zeyi Wu, Qingsong Xu","doi":"10.1016/j.precisioneng.2025.07.002","DOIUrl":"10.1016/j.precisioneng.2025.07.002","url":null,"abstract":"<div><div>Constant-force compliant mechanisms (CCFMs) offer certain advantages in motion guidance through actuation force reduction. However, existing CCFMs typically require an initial input to activate the constant-force characteristics, resulting in complex force behavior. To overcome such limitations and enhance the force reduction performance, this paper proposes a novel compliant quasizero constant-force mechanism (QZ-CCFM) design using a stiffness combination configuration. It has a mirror-symmetrical structure composed of two halves, with each half integrating a negative-stiffness mechanism and a positive-stiffness mechanism. When the constant-force feature is activated by preloading a specific displacement to each half, the opposite reaction forces can be self-balanced, thereby initializing the mechanism to the constant-force region. By optimizing the key design variables, the mechanism achieves a maximized constant-force stroke while minimizing force fluctuations. Several prototypes have been fabricated for experimental study. The results indicate that the QZ-CCFM can offer a quasizero constant force of 0<span><math><mo>±</mo></math></span>0.10<!--> <!-->N over a stroke of 4.40<!--> <!-->mm (i.e., <span><math><mo>±</mo></math></span>2.20<!--> <!-->mm relative to the initial position) without an initial input. The quasizero constant-force feature of the QZ-CCFM provides a promising guiding mechanism for improving actuation efficiency and performance in practical applications, such as precision positioning systems and biomedical devices.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 522-532"},"PeriodicalIF":3.5,"publicationDate":"2025-07-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144655083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Investigation of a parallel contact force robotic end-effector for thin-walled parts grinding and deburring with uncertain position","authors":"Du Xu , Haijie Mo , Zhiguo Zhong , Lairong Yin","doi":"10.1016/j.precisioneng.2025.06.021","DOIUrl":"10.1016/j.precisioneng.2025.06.021","url":null,"abstract":"<div><div>This paper focuses on the force overshoot problem that occurs in the initial contact phase of a robotic end-effector, a novel passive compliant constant-force end-effector designed to address the challenge of contact force stabilization and response in robotic grinding and deburring of thin-walled parts. Unlike conventional active force control methods that suffer from force overshoot due to dynamic response limitations, the proposed solution integrates a hybrid stiffness mechanism combining positive (multi-layer bending structures) and negative (inclined beams) stiffness elements to achieve sensor-less force regulation. The design features a parallel architecture with 120° distributed limbs, ensuring coaxial force distribution and vibration suppression. A comprehensive analytical model is developed, incorporating combined stiffness theory and elliptic integrals to characterize the negative stiffness beam's buckling behavior, with parameter optimization to maximize the constant-force stroke. Finite element analysis confirms uniform stress distribution under multi-axis loading (100N force/20N·m torque), while experimental validation on magnesium-aluminum alloy workpieces demonstrates the mechanism's ability to maintain contact force within ±5 % deviation over a 4.5 mm stroke range, even with ±2 mm positional errors. The passive design eliminates the need for complex control systems, offering significant advantages in cost reduction, process adaptability through quick-change couplings, and scalability for diverse thin-wall geometries. This paper provides an insight into the potential of purely passive methods in achieving accurate and smooth force control.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 587-599"},"PeriodicalIF":3.5,"publicationDate":"2025-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144662921","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jie Li , Rong-Wei Lin , Cheng-Yao Zhang , Zhen-Ying Cheng , Qiang-Xian Huang , Rui-Jun Li
{"title":"Online volumetric error compensation for micro-CMMs using embedded multi-DOF (degree-of-freedom) measurement systems based on Abbe and Bryan principles","authors":"Jie Li , Rong-Wei Lin , Cheng-Yao Zhang , Zhen-Ying Cheng , Qiang-Xian Huang , Rui-Jun Li","doi":"10.1016/j.precisioneng.2025.07.009","DOIUrl":"10.1016/j.precisioneng.2025.07.009","url":null,"abstract":"<div><div>The measurement accuracy of micro coordinate measuring machines (micro-CMMs) is limited by the volumetric errors. In this paper, the volumetric errors caused by geometric errors are analyzed, and the volumetric error model is built firstly, which is based on Abbe and Bryan principles. Correspondingly, this article proposes embedded multi-DOF measurement systems (EMDMS) for global volumetric error online compensation, which is consist of laser interferometers and autocollimators. The EMDMS enables real-time simultaneous measurement of 15 straightness and tilting errors. While the acquired error data are integrated into the developed volumetric error model, the control unit, equipped with three PID controllers, leverages the EMDMS data and the error model to achieve online error compensation of a micro-CMM. A Zero-class gauge block was tested based on ISO 10360–2 to evaluate the effectiveness of the EMDMS and volumetric error model. After volumetric error compensation, the standard deviations and indication errors of the length measurements in different directions were reduced by more than 90 % and 94 % respectively, and the measurement expanded uncertainty along <em>Y</em> direction is 216 nm (<em>k</em> = 2). Furthermore, the standard measurement uncertainty of the EMDMS evaluated with values of 50 nm, 49 nm, and 58 nm in the <em>X-</em>, <em>Y</em>-, and <em>Z</em>-directions, respectively. The proposed method and system can be used in the volumetric error compensation of micro-CMMs effectively.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 533-547"},"PeriodicalIF":3.5,"publicationDate":"2025-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144655084","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}