Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第7页

Development of micro-nibbling method based on dieless punching 基于无模冲孔的微蚕食方法的发展

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-11-12 DOI: 10.1016/j.precisioneng.2025.11.010

Kai Egashira, Taiki Mizutani

{"title":"Development of micro-nibbling method based on dieless punching","authors":"Kai Egashira, Taiki Mizutani","doi":"10.1016/j.precisioneng.2025.11.010","DOIUrl":"10.1016/j.precisioneng.2025.11.010","url":null,"abstract":"<div><div>The nibbling process is a method used to cut arbitrary features from thin sheets by continuously piercing partially overlapping holes to form slits. While laser processing is currently the dominant method for such cutting, nibbling offers several advantages, including lower operational costs and the absence of thermal effects on the workpiece. In microfabrication, laser processing has inherent limitations that present both technical and financial challenges. Therefore, this study developed a micro-nibbling method for fabricating microfeatures using a dieless punching technique, where the workpiece is supported from underneath by a backing material, eliminating the need for a die and die set assembly and enabling the practical use of micropunches. A punching device specifically designed for micropunches, fabricated from cemented tungsten carbide using electrical discharge machining, was employed with stainless steel sheets as the workpiece. Initial experiments used a 20 μm-diameter punch on a 5 μm-thick sheet, varying the punch feed pitch from 5 to 15 μm, and successfully produced slits at all pitches, demonstrating the feasibility of the method. Subsequently, punches with diameters below 10 μm were used on 3 μm-thick sheets with feed pitches ranging from 3 to 8 μm. Additionally, slit-and-space patterns were produced using a 5 μm-diameter punch on 2 μm-thick sheets, yielding slits approximately 5 μm wide with comparable spacing. Rotating the punch at 1000 min<sup>−1</sup> significantly reduced the punch load compared with non-rotating punches. Finally, the fabrication of cut-out pieces, including a 120 μm square and a 300 μm-radius sector on 5 μm-thick sheets, demonstrated the versatility and applicability of the proposed micro-nibbling method.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 953-960"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145528426","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Diameter measurement of nano/micro-optical fiber based on effective refractive index including uncertainty analysis with Monte Carlo simulation 基于有效折射率的纳米/微光纤直径测量及蒙特卡罗模拟不确定性分析

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-09-12 DOI: 10.1016/j.precisioneng.2025.09.009

Masaki Michihata, Yushen Liu, Shuzo Masui, Satoru Takahashi

{"title":"Diameter measurement of nano/micro-optical fiber based on effective refractive index including uncertainty analysis with Monte Carlo simulation","authors":"Masaki Michihata, Yushen Liu, Shuzo Masui, Satoru Takahashi","doi":"10.1016/j.precisioneng.2025.09.009","DOIUrl":"10.1016/j.precisioneng.2025.09.009","url":null,"abstract":"<div><div>Optical fibers with diameters of a few micrometers or less are essential devices in next-generation optical circuits and quantum photonics, so an accurate measurement technique of the fiber diameter is indispensable for performing their functions. Because nano/micro-optical fibers form an evanescent light field around their surface, the effective refractive index depends on the cross-sectional area of the optical fiber and the surrounding air, which also determines the propagation constant of the propagating light in the fiber. Based on the optical relationship, we proposed a principle to measure the fiber diameter by measuring the propagation constant with the scanning near field optical (SNOM) probe, and evaluated its measurement performance by means of uncertainty analysis. The proposed method is measurable in the single mode region, so that, for example, using 1550 nm, a diameter range from 350 nm to 1.1 μm can be measured. Detailed experimental evaluations of the measurement reliability were conducted, and then, the uncertainty of measurement was evaluated using Monte Carlo simulation. Based on the results of the uncertainty analysis, it was stated that the uncertainty of measurement can be minimized in diameter measurement by optimizing the working wavelength of the measurement system. It was experimentally shown that a relative uncertainty of about ±5.7 % (<em>k</em> = 2) was possible.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 303-316"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Research on polishing trajectory planning method for leading/trailing edge based on polishing removal model of counter torus flexible tool 基于反环面柔性刀具抛光去除模型的前尾缘抛光轨迹规划方法研究

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-11-12 DOI: 10.1016/j.precisioneng.2025.11.008

Zhang Yun , An Di , Ye Huan , Chen Zhitong , Cheng Geng , Liu Jingqing

{"title":"Research on polishing trajectory planning method for leading/trailing edge based on polishing removal model of counter torus flexible tool","authors":"Zhang Yun , An Di , Ye Huan , Chen Zhitong , Cheng Geng , Liu Jingqing","doi":"10.1016/j.precisioneng.2025.11.008","DOIUrl":"10.1016/j.precisioneng.2025.11.008","url":null,"abstract":"<div><div>To address the challenge of collaborative optimization between material removal efficiency and surface consistency caused by non-uniform machining allowances in the polishing of aero-engine blade leading/trailing edges, this paper proposes a trajectory planning method based on a removal model and a counter torus flexible polishing tool. By defining the counter torus flexible tool, a material removal model incorporating parameters such as curvature radius and preload is established through Hertz contact theory and orthogonal experimental data. Based on this model, a tool positioning coordinate system is constructed, and the tool posture is optimized by adjusting the yaw angle and rake angle to establish a trajectory optimization model with the goal of minimizing the average absolute deviation of cutting depth. Experiments show that when machining simple and complex blades with the counter torus flexible tool, the number of tool paths required is 9.8 % and 23.1 % of that of conventional convex tools, respectively. The surface roughness is better than Ra 0.4 μm, and the uniformity of material removal depth at the leading/trailing edges is significantly improved. This method provides theoretical and technical support for high-precision and high-efficiency polishing of aero-engine blade leading/trailing edges.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 986-996"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578685","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

High-precision construction method for laser tracker measurement network 激光跟踪仪测量网高精度施工方法

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-11-13 DOI: 10.1016/j.precisioneng.2025.11.013

Lang Zou , Chen Luo , Gang Zhang , Yuanmin He , Qihang Zhang , Yijun Zhou

{"title":"High-precision construction method for laser tracker measurement network","authors":"Lang Zou , Chen Luo , Gang Zhang , Yuanmin He , Qihang Zhang , Yijun Zhou","doi":"10.1016/j.precisioneng.2025.11.013","DOIUrl":"10.1016/j.precisioneng.2025.11.013","url":null,"abstract":"<div><div>Efficient and precise automatic measurement is essential for evaluating the manufacturing accuracy of industrial components. The measurement network composed of multiple laser tracker measurement stations (LTMSs) as the foundation for achieving automated measurement of large-scale industrial components, it is particularly important to improve its measurement accuracy. However, the measurement accuracy of the measurement network, which is constructed according to the existing methods, often deviates from its optimal state. To address this, a high-precision construction method for laser tracker measurement network is developed. Firstly, the weight coefficient matrix based on the measurement errors of enhanced reference system points and the iterative optimization algorithm are used to improve the accuracy of the transformation parameters between adjacent LTMSs. Secondly, the optimal number of LTMSs is determined based on the principle of minimizing overall measurement errors for any two measurement points. Finally, the spatial position of each LTMS is optimized according to the principle of minimum measurement errors. The transformation parameters verification experiment and the simulation measurement experiment prove the effectiveness of the proposed method, which can significantly reduce the transformation errors and the overall measurement errors. The proposed method provides a valuable way for industries to improve the performance of automatic measurement of laser tracker measurement networks in real environment.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1006-1018"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Forming mechanism and performance evaluation of ultrasonic vibration-assisted laser melting structured CBN grinding wheel 超声振动辅助激光熔化结构CBN砂轮成形机理及性能评价

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-10-10 DOI: 10.1016/j.precisioneng.2025.10.006

Zhelun Ma , Chi Zhang , Yanchong Gao , Liaoyuan Chen , Changsheng Liu , Tianbiao Yu

{"title":"Forming mechanism and performance evaluation of ultrasonic vibration-assisted laser melting structured CBN grinding wheel","authors":"Zhelun Ma , Chi Zhang , Yanchong Gao , Liaoyuan Chen , Changsheng Liu , Tianbiao Yu","doi":"10.1016/j.precisioneng.2025.10.006","DOIUrl":"10.1016/j.precisioneng.2025.10.006","url":null,"abstract":"<div><div>The structured grinding wheel being fabricated using additive manufacturing has been a potential method in the past decade. In this paper, ultrasonic vibration-assisted laser melting (UV-LM) was used to fabricate a structured grinding wheel. The introduction of ultrasonic can control the motion and position of the abrasive grain. Firstly, the time-dependent temperature field and flow field in the molten pool were modeled and discussed. The motion of the abrasive grain in the molten pool during the UV-LM process was simulated, and the results showed that the abrasive grains in the molten pool tend to move upward in the UV-LM process. Relative experiments were carried out to prove this phenomenon, showing that the experimental results had a good agreement with the simulation. When the ultrasonic amplitude increases from 0 μm to 6.5 μm, the average height of the abrasive grain improved by 21.1 %. Subsequently, the grinding wheel was fabricated via UV-LM technology, and the grinding performance was evaluated. The surface morphology of the fabricated grinding wheel is discussed, and the number of active grains and inter-grain spacing were analyzed. When the ultrasonic amplitude increases from 0 μm to 6.5 μm, the number of active grains increases by 143.84 %, the average inter-grain spacing also decreases by 59.85 %; The surface roughness decreases by 42.31 %; The tangential and normal grinding forces were reduced by 36.93 % and 41.82 %, respectively. The surface morphology and grinding force characterization were also discussed. This study can provide significant guidance for the fabrication of structured grinding wheels by additive manufacturing.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 465-477"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145320498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Manufacturing processes for microscale metallic hollow structures: numerical investigation and analysis 微尺度金属空心结构制造工艺：数值研究与分析

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-09-09 DOI: 10.1016/j.precisioneng.2025.09.006

Ningqian Tang , Wanfei Ren , Jinkai Xu , Zhaoqiang Zou , Peng Yu , Lei Feng

{"title":"Manufacturing processes for microscale metallic hollow structures: numerical investigation and analysis","authors":"Ningqian Tang , Wanfei Ren , Jinkai Xu , Zhaoqiang Zou , Peng Yu , Lei Feng","doi":"10.1016/j.precisioneng.2025.09.006","DOIUrl":"10.1016/j.precisioneng.2025.09.006","url":null,"abstract":"<div><div>Hollow metallic structures exhibit extensive applications in the fields of lightweight and energy storage. Nevertheless, fabricating reliable and durable hollow structures at sub-100 μm scales remains challenging. To gain deeper insights into the experimental parameters of hollow structures fabricated via meniscus-confined electrodeposition (MCED), we employed finite element simulation software to numerically model and analyzed the deposition process. This study investigated the influence of parameters, voltage, environmental humidity, and microglass tube diameter, on the formation of hollow structures, thereby guiding subsequent experimental designs. Finally, by applying high voltage, low ambient humidity, and larger microglass tube diameters, the feasibility of directly manufacturing hollow structures smaller than 100 μm in a single step was confirmed using MCED technology. The findings will facilitate the extension of this technique to the deposition of other advanced materials exhibiting tailored microstructures and properties, rendering it highly suitable for diverse applications in fields including aerospace and automotive industries.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 95-108"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145049784","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Algorithm for sensor nonlinearity compensation in measurements of geometric deviations of rotating elements with variable diameter 变直径旋转元件几何偏差测量中传感器非线性补偿算法

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-09-16 DOI: 10.1016/j.precisioneng.2025.09.011

Dariusz Janecki, Krzysztof Stepien

引用次数: 0

A Dual-strategic Adaptive Switching method for high-accuracy speed regulation in piezoelectric stepping motor 压电步进电机高精度调速的双策略自适应开关方法

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-10-08 DOI: 10.1016/j.precisioneng.2025.10.003

Yixiao Yang , Yang Xu , Xuchen Wang , Xiaofeng Yang , Yuping Liu

{"title":"A Dual-strategic Adaptive Switching method for high-accuracy speed regulation in piezoelectric stepping motor","authors":"Yixiao Yang , Yang Xu , Xuchen Wang , Xiaofeng Yang , Yuping Liu","doi":"10.1016/j.precisioneng.2025.10.003","DOIUrl":"10.1016/j.precisioneng.2025.10.003","url":null,"abstract":"<div><div>Piezoelectric stepping motors (PSMs) are widely employed in ultra-precision nanopositioning applications, where highly accurate speed regulation is paramount. However, traditional Frequency-Controlled Speed Regulation (FSR) methods are constrained by their inability to compensate for frequency-related nonlinearities. Furthermore, a pronounced stair-step output emerges in the low-speed range, further degrading positioning performance. To overcome these limitations, this paper introduces a Dual-Strategic Adaptive Switching (DAS) method for PSM speed regulation. The DAS method is underpinned by a modified velocity formula that accounts for these nonlinearities. In the standard speed range, an Improved Frequency-Controlled Speed Regulation (IFSR) method is employed, compensating for frequency-related nonlinearities via a phenomenological model. As the target speed decreases into the low-speed range, the system seamlessly transitions to an Improved Step-Controlled Speed Regulation (ISSR) method. The ISSR method mitigates nonlinearities in the step length-Shear Stack Voltage (SSV) relationship using a polynomial model. A switching criterion ensures a smooth transition between the IFSR and ISSR methods. Experimental results demonstrate that the DAS method significantly enhances speed regulation accuracy compared to the traditional FSR method, reducing real-time positioning errors by 2.1% to 6.0%. The proposed DAS method effectively addresses the speed regulation requirements of the PSM across its entire operational speed range.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 559-571"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145320333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Hough transform guided subpixel edge regression for high precision relocalization of nut geometric parameters Hough变换引导下的亚像素边缘回归用于螺母几何参数的高精度再定位

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-10-11 DOI: 10.1016/j.precisioneng.2025.10.010

Chang Ding , Jie Zhang , Zhonghua Hu , Haidong Zhu , Zhendong Luo

{"title":"Hough transform guided subpixel edge regression for high precision relocalization of nut geometric parameters","authors":"Chang Ding , Jie Zhang , Zhonghua Hu , Haidong Zhu , Zhendong Luo","doi":"10.1016/j.precisioneng.2025.10.010","DOIUrl":"10.1016/j.precisioneng.2025.10.010","url":null,"abstract":"<div><div>This study addresses the challenge of multiple geometric dimension measurement of nut based on a dual-position opto-electronic imaging platform, and the hardware's core function lies in the rapid acquisition of image information, while the software primarily provides high-precision image measurement algorithms. This study proposes a series of algorithms including preprocessing for noise elimination and illumination improvement, integer edge point extraction, sub-pixel edge point extraction, and Hough Transform-guided sub-pixel edge point-based line segment and ellipse relocation—a decisive algorithm for high-precision measurement—along with a geometric parameter calculation model. These innovations collectively enable the computation of four key metrics: Opposite Side Distance Range (<em>OSDR</em>), Thickness Range (<em>TR</em>), Thread Diameter Range (<em>TDR</em>), and Least Diagonal Distance (<em>LDD</em>). The developed optoelectronic instrument achieved an average measurement accuracy of 0.05 mm due to a 97 % confidence level from M5 to M16 nut specifications. Meanwhile, the instrument's two primary evaluation metrics—Standard Deviation of Machine Measurement (<em>SDMM</em>) and Standard Deviation of Measurement Error (<em>SDME</em>)—are 0.007 mm and 0.020 mm respectively, reflecting its stability and reliability. Extensive experimental testing and statistical analysis across various specifications and measurement standards have demonstrated that the geometric parameter relocation method based on sub-pixel edge point regression is a critical pathway for achieving high-precision measurement.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 527-546"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145320331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Voice coil motor-actuated fast tool servo based on adaptive robust control with cutting force compensation for diamond turning 基于自适应鲁棒控制和切削力补偿的音圈电机驱动快速刀具伺服

IF 3.7 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-11-01 DOI: 10.1016/j.precisioneng.2025.10.022

Kaiyang Xia , Chengshuo Liu , Zhongwei Li , Han Lai , Shiquan Liu , Genshen Liu , Yuan-Liu Chen

{"title":"Voice coil motor-actuated fast tool servo based on adaptive robust control with cutting force compensation for diamond turning","authors":"Kaiyang Xia , Chengshuo Liu , Zhongwei Li , Han Lai , Shiquan Liu , Genshen Liu , Yuan-Liu Chen","doi":"10.1016/j.precisioneng.2025.10.022","DOIUrl":"10.1016/j.precisioneng.2025.10.022","url":null,"abstract":"<div><div>The voice coil motor-actuated fast tool servo (VCM-FTS) is capable of fabricating micro-structured surfaces with ultra-high precision and is widely employed in industrial applications. However, owing to the inherent low axial stiffness of such a system, it is highly susceptible to disturbances caused by cutting forces, resulting in relatively poor machining accuracy. Additionally, parameter variations during machining, such as fluctuations in the force constant of the VCM, can lead to trajectory tracking errors. To address these issues, this paper presents a VCM-FTS controlled by a cutting force compensation-based adaptive robust control (CFC-ARC) controller. Based on prior knowledge of the relationship between the cutting force and uncut chip area from planner trial cutting, the cutting force can be estimated through the ideal uncut chip area and then used as a feedforward term to mitigate disturbances caused by cutting forces. Furthermore, due to the intrinsic properties of ARC, the controller can adjust the system parameters in real time to handle undesired parameter variations. Compared with the traditional controlling method, the adaptation of the CFC-ARC controller improves the system’s positioning resolution, bandwidth and the sinusoidal trajectory tracking accuracy. In the machining of aspheric lens arrays and compound-eye lens arrays, the CFC-ARC controller reduced morphology errors by approximately 30%–45%, confirming its effectiveness in enhancing the machining precision of microstructured surfaces.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 767-776"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473699","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0