Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

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A novel minimum zone method for cylindricity error evaluation based on rotation projection method and adaptive particle swarm optimisation
IF 3.5 2区 工程技术
Rongjun Cheng , Hebang Jian , Yu Li , Qiangxian Huang , Liansheng Zhang , Hongli Li
{"title":"A novel minimum zone method for cylindricity error evaluation based on rotation projection method and adaptive particle swarm optimisation","authors":"Rongjun Cheng ,&nbsp;Hebang Jian ,&nbsp;Yu Li ,&nbsp;Qiangxian Huang ,&nbsp;Liansheng Zhang ,&nbsp;Hongli Li","doi":"10.1016/j.precisioneng.2025.02.025","DOIUrl":"10.1016/j.precisioneng.2025.02.025","url":null,"abstract":"<div><div>To realize an accurate and rapid evaluation of cylindricity error, a novel minimum zone algorithm based on rotation projection method and adaptive particle swarm optimisation (RPM–APSO) is proposed. The principle of this method is to firstly transform the three-dimensional cylindrical coordinates into two-dimensional circular coordinates via rotation and projection, and then calculate the minimum zone roundness error that is equivalent to the minimum zone cylindricity error. APSO algorithm is adopted twice to determine the optimal rotation angles and accurate roundness error of the projected coordinates respectively. Owing to the dimensionality reduction, the calculation difficulty is reduced and the computational efficiency is substantially improved. The effectiveness and accuracy of the proposed algorithm are verified by constructing two groups of cylindrical simulation datasets. Compared with other five intelligent optimisation algorithms and the results of the published literature, the RPM–APSO algorithm is proved to be superior in terms of computational accuracy and convergence speed, which can provide an accurate, efficient and reliable method for the cylindricity error evaluation of micro-nano coordinate measuring machine.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 149-158"},"PeriodicalIF":3.5,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143551104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of disk-shaped tools on ECDM performance in micro-hole drilling
IF 3.5 2区 工程技术
Akhilesh Kumar Tiwari, Sudhansu Sekhar Panda
{"title":"Effect of disk-shaped tools on ECDM performance in micro-hole drilling","authors":"Akhilesh Kumar Tiwari,&nbsp;Sudhansu Sekhar Panda","doi":"10.1016/j.precisioneng.2025.02.022","DOIUrl":"10.1016/j.precisioneng.2025.02.022","url":null,"abstract":"<div><div>Electrochemical discharge machining (ECDM) is a non-conventional machining process popular for creating microfeatures such as micro holes and microchannels in non-conductive materials like glass and alumina samples. However, the quality of the drilled holes through ECDM severely decreases as the machining depth increases due to the scarcity of electrolytes and the challenges of debris removal from the machining zone. The present study aims to enhance the machining efficiency and improve the quality of blind holes at higher depths. The disk-shaped tools are fabricated to improve electrolyte supply at higher depths, ensuring effective gas film formation and providing better electrolyte circulation for debris removal. The effect of disk-shaped tools is compared with cylindrical tools using material removal rate (MRR), hole entrance overcut, and aspect ratio as response parameters. The input variables are the applied pulse voltage, pulse frequency, and machining depth. The ANSYS Fluent computational fluid dynamics (CFD) software is used for numerical simulation of the crater profile and mushy zone in single-discharge machining. The mushy zone properties are modeled in between the solidus (&lt;893 K) and liquidus (&gt;1093 K) temperatures of the workpiece. The temperature-dependent physical properties of the borosilicate glass, including thermal conductivity, viscosity, and specific heat, are considered in the range of 500 °C–1500 °C. Results showed that disk tools improved the MRR by 34.5 % and aspect ratio by 26 %, compared to the cylindrical tools. The experimental and simulation results are consistent, with an average deviation of 10 %.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 218-235"},"PeriodicalIF":3.5,"publicationDate":"2025-02-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143562396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Detection model of electroplated diamond wire surface abrasive distribution characteristics based on YOLO-EDW
IF 3.5 2区 工程技术
Wenbin Huang , Yufei Gao , Guanzheng Li , Zhenyu Shi
{"title":"Detection model of electroplated diamond wire surface abrasive distribution characteristics based on YOLO-EDW","authors":"Wenbin Huang ,&nbsp;Yufei Gao ,&nbsp;Guanzheng Li ,&nbsp;Zhenyu Shi","doi":"10.1016/j.precisioneng.2025.02.020","DOIUrl":"10.1016/j.precisioneng.2025.02.020","url":null,"abstract":"<div><div>Electroplated diamond wire (EDW), a primary cutting tool for hard and brittle materials such as monocrystalline silicon, polycrystalline silicon, and sapphire, demonstrates processing efficiency and quality that are directly influenced by its surface abrasive distribution density. While computer vision-based methods have been proposed for efficient abrasive detection, current approaches exhibit limited accuracy in handling complex scenarios involving small abrasive sizes, dense distributions, and occlusions. This study introduces YOLO-EDW, an enhanced YOLOv8-based object detection model that utilizes EDW scanning electron microscope (SEM) images. The proposed model significantly enhances detection accuracy for small, densely distributed, and occluded abrasives through the integration of four key components: the Separation Enhanced Attention Module (SEAM), Spatial Depth Convolution Module (SPD-Conv), Optimized Object Detection Layer, and Wise-IoU Loss Function. Experimental results on the EDW-SEM dataset demonstrate that YOLO-EDW achieves improvements of 6.61 % and 7.16 % in mAP50 and mAP50:95 metrics, respectively, compared to the original YOLOv8. Compared with eight mainstream models such as FCOS-nas, YOLOF, and Faster-RCNN, YOLO-EDW shows excellent performance in dealing with abrasive densities and occlusions. This study achieves precise identification of abrasive distribution features, enabling efficient quantification of effective abrasives along the EDW's semicircular circumference and establishing a robust foundation for accurate abrasive density calculations.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 67-79"},"PeriodicalIF":3.5,"publicationDate":"2025-02-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143510994","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
New method for testing the laser tracker length measuring unit using a large-scale horizontal arm CMM and its application for assessing the accuracy of distance measurements
IF 3.5 2区 工程技术
Maciej Gruza , Piotr Gąska , Wiktor Harmatys , Adam Gąska
{"title":"New method for testing the laser tracker length measuring unit using a large-scale horizontal arm CMM and its application for assessing the accuracy of distance measurements","authors":"Maciej Gruza ,&nbsp;Piotr Gąska ,&nbsp;Wiktor Harmatys ,&nbsp;Adam Gąska","doi":"10.1016/j.precisioneng.2025.02.017","DOIUrl":"10.1016/j.precisioneng.2025.02.017","url":null,"abstract":"<div><div>The paper presents a method for determining systematic errors and variability in the readings of a laser interferometer used in laser tracking systems. The method utilizes standalone interferometers treated as references and a large-scale CMM as a system for moving the measurement point, allowing continuous measurement up to a maximum distance of 15 m. Both interferometers use the same corner cube reflector and remain stationary during measurements. The concept and assumptions of the developed method are described as well as key technical issues and their solutions. The research setup, characteristics of the tested and reference systems and the research methodology together with the measurement strategy, are presented. Results obtained with the developed methodology can be used as input data to the simulation model of the laser tracker measuring unit. This model can be used to estimate the length measurement uncertainty after a single measurement of the assessed distance. This paper presents uncertainties obtained by means of the simulation and compares them with ones estimated using statistical analysis of a series of measurements. The conducted validation proved the metrological consistency of the results with uncertainties associated to them for both considered methods. Advantages of the presented method over previously developed methods were also shown. They include faster and simpler adjustment of the tested and reference systems, the general availability of the systems used for moving a measuring mirror (corner cube reflector), use of a single corner cube reflector for both laser systems, making the measurement results independent of the influence of translation and rotation errors of the guide/system responsible for moving the corner cube reflector and considerable reduction of the impact of environmental conditions on the obtained results.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 54-66"},"PeriodicalIF":3.5,"publicationDate":"2025-02-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143508236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Physics-driven precision reliability prediction modelling for the condition estimation of worm gear turntable
IF 3.5 2区 工程技术
Xiaogang Zhang , Wei Chen , Hongwei Wang , Wan Zhang , Zongyi Mu , Jian Li , Zizhen Ding
{"title":"Physics-driven precision reliability prediction modelling for the condition estimation of worm gear turntable","authors":"Xiaogang Zhang ,&nbsp;Wei Chen ,&nbsp;Hongwei Wang ,&nbsp;Wan Zhang ,&nbsp;Zongyi Mu ,&nbsp;Jian Li ,&nbsp;Zizhen Ding","doi":"10.1016/j.precisioneng.2025.02.015","DOIUrl":"10.1016/j.precisioneng.2025.02.015","url":null,"abstract":"<div><div>The worm gear turntable is a crucial rotary indexing component for machining sculptured surfaces and plays a vital role in modern precision manufacturing. However, the limited availability of data during the design phase and the challenges posed by multi-source uncertainties in complex mechanical structures hinder the effectiveness of traditional physics-based precision reliability studies. To address these issues, this paper proposes a novel physics-driven precision reliability prediction model for worm gear turntables, accounting for multiple random and time-variant errors. Firstly, the accumulation process of initial random errors is explored using the meta-action method, and a precision model is constructed to estimate the initial condition of the worm gear turntable. Next, the mechanism by which time-variant factors reduce precision reliability is explained. Specifically, wear errors, derived from a wear model, and thermal errors, obtained through a numerical model, are incorporated into the precision model to establish a comprehensive precision reliability prediction framework. Finally, a precision reliability experiment is conducted to generate a test dataset for validation. A comparison of theoretical predictions and experimental results demonstrates the accuracy and effectiveness of the proposed approach.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 43-53"},"PeriodicalIF":3.5,"publicationDate":"2025-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143508383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Coaxial melt pool monitoring with pyrometer and camera for hybrid CNN-based bead geometry prediction in directed energy deposition
IF 3.5 2区 工程技术
Seong Hun Ji , Tae Hwan Ko , Jongcheon Yoon , Seung Hwan Lee , Hyub Lee
{"title":"Coaxial melt pool monitoring with pyrometer and camera for hybrid CNN-based bead geometry prediction in directed energy deposition","authors":"Seong Hun Ji ,&nbsp;Tae Hwan Ko ,&nbsp;Jongcheon Yoon ,&nbsp;Seung Hwan Lee ,&nbsp;Hyub Lee","doi":"10.1016/j.precisioneng.2025.02.016","DOIUrl":"10.1016/j.precisioneng.2025.02.016","url":null,"abstract":"<div><div>During the blown powder directed energy deposition (DED) process, optimizing key parameters such as laser power, travel speed, and powder feed rate is crucial for maintaining process stability. However, these conditions often require real-time adjustments due to thermal accumulation and excessive cooling over prolonged operations. To achieve this, accurately predicting bead geometry through real-time monitoring is essential. This study presents a coaxial melt pool monitoring approach that integrates a two-color pyrometer and a CMOS vision camera on the deposition head, enabling the simultaneous acquisition of temperature and image data. This configuration provides a comprehensive understanding of melt pool dynamics, improving predictive performance in bead geometry estimation. Given that precise bead geometry prediction (i.e., width, height, and depth) is critical for ensuring deposition quality and final component performance, we propose a hybrid CNN regression model that combines 1D CNN-based temporal analysis with 2D CNN-based spatial feature extraction. The proposed model outperforms both unimodal CNNs and conventional regression models, achieving high R<sup>2</sup> values of 0.988, 0.970, and 0.978 for bead width, height, and depth, respectively, with notably low RMSE values. This multi-modal data-driven hybrid model demonstrates strong potential for advancing real-time melt pool monitoring in DED, contributing to improved process stability and part quality.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 1-12"},"PeriodicalIF":3.5,"publicationDate":"2025-02-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143471463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Glass-glass molding of concave-convex double-sided microlens arrays with high alignment accuracy
IF 3.5 2区 工程技术
Zihao Zeng , Tianfeng Zhou , Zhikang Zhou , Gang Wang , Xiuwen Sun , Qian Yu , Jia Zhou , Yubing Guo
{"title":"Glass-glass molding of concave-convex double-sided microlens arrays with high alignment accuracy","authors":"Zihao Zeng ,&nbsp;Tianfeng Zhou ,&nbsp;Zhikang Zhou ,&nbsp;Gang Wang ,&nbsp;Xiuwen Sun ,&nbsp;Qian Yu ,&nbsp;Jia Zhou ,&nbsp;Yubing Guo","doi":"10.1016/j.precisioneng.2025.02.014","DOIUrl":"10.1016/j.precisioneng.2025.02.014","url":null,"abstract":"<div><div>The utilization of a double-sided microlens array (DSMLA) eliminates optical energy loss, eliminates assembly errors, simplifies the optical system's structure, and enhances overall performance efficiency. Precision glass molding (PGM) has been applied to fabricate DSMLAs, and the accuracy of aligning the molded DSMLAs significantly impacts optical performance. This study delves into the thermal deformation mechanisms of glass to present a novel approach: utilizing a metal mold core for manufacturing a high transition temperature (<em>T</em><sub>g</sub>) glass microlens array (MLA). Subsequently, this high-<em>T</em><sub>g</sub> glass MLA is combined with the metal mold core, serving as upper and lower cores, to manufacture low-<em>T</em><sub>g</sub> glass concave-convex DSMLAs. The study scrutinizes the impact of optical energy loss rate and alignment errors in concave-convex DSMLAs on optical performance. Moreover, a method to control alignment errors in concave-convex DSMLAs is proposed to boost lens alignment accuracy. A finite element simulation model was established to evaluate the forming speed and stress distribution of the concave-convex DSMLAs. Experimental findings demonstrate that high-<em>T</em><sub>g</sub> glass as a mold core facilitates high-precision shape transfer, resulting in concave-convex DSMLAs with high alignment accuracy. Optical measurements reveal that the DSMLAs exhibit excellent beam shaping effects with spot uniformity at 97.23 %. The method provides a strategy for creating concave-convex DSMLAs with high alignment accuracy.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 80-90"},"PeriodicalIF":3.5,"publicationDate":"2025-02-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143526652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A novel error compensation method for a redundant parallel mechanism based on adaptive differential evolution algorithm and RBF neural network
IF 3.5 2区 工程技术
Chen-dong Zeng, Zhi-cheng Qiu, Fen-hua Zhang, Xian-min Zhang
{"title":"A novel error compensation method for a redundant parallel mechanism based on adaptive differential evolution algorithm and RBF neural network","authors":"Chen-dong Zeng,&nbsp;Zhi-cheng Qiu,&nbsp;Fen-hua Zhang,&nbsp;Xian-min Zhang","doi":"10.1016/j.precisioneng.2025.02.013","DOIUrl":"10.1016/j.precisioneng.2025.02.013","url":null,"abstract":"<div><div>Accuracy plays an important role in the advanced industrial application of parallel mechanisms, and the related research is valuable. Taking a (6 + 3)-DOF kinematic redundant parallel mechanism (KRPM) as an example, a novel error compensation method is proposed. Firstly, the error model of the KRPM is established based on vector method. Secondly, adaptive differential evolution (ADE) algorithm and radial basis function neural network (RBFNN) are introduced, and they are combined as a novel error compensation method. Numerical simulation is carried out based on three cases, and compared with typical error compensation method, which verifies the effectiveness of the proposed method. Finally, the experiments are conducted based on laser tracker to verify the proposed method. Under the proposed method, the average effect of error prediction can reach 90.2 %, which is better than the typical error compensation method. After error compensation, the pose error of the KRPM is significantly reduced.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 26-42"},"PeriodicalIF":3.5,"publicationDate":"2025-02-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143487619","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamic balancing of a flexure-based Watt’s linkage horological oscillator
IF 3.5 2区 工程技术
H. Schneegans, F. Cosandier, S. Henein
{"title":"Dynamic balancing of a flexure-based Watt’s linkage horological oscillator","authors":"H. Schneegans,&nbsp;F. Cosandier,&nbsp;S. Henein","doi":"10.1016/j.precisioneng.2025.02.009","DOIUrl":"10.1016/j.precisioneng.2025.02.009","url":null,"abstract":"<div><div>Mechanical watches are generally regulated by a balance and a spring constituting a harmonic oscillator. This mechanism is intrinsically force-balanced, which makes it essentially insensitive to gravity as well as to the linear accelerations of the watch. Nevertheless, this mechanism is not dynamically balanced, i.e., its motion is affected by the angular accelerations of the watch around axes parallel to the pivoting axis of the balance. This phenomenon degrades the chronometric precision of the watch when worn on the wrist. This article presents a novel dynamically-balanced oscillator mechanism dedicated to mechanical watches, which solves this issue: a 1-DOF mechanism relying on a flexure-based Watt’s linkage equipped with two balances rotating in opposite directions. The use of flexures brings additional advantages: absence of friction, no need for lubrication, increased quality factor, and monolithic design. The mechanism is presented with its Pseudo-Rigid-Body-Model and the numerical model used to predict force and dynamic-balancing residual defects: this includes sag and frequency variations under in-plane gravitational loads and pose sensitivity to in-plane angular accelerations. Experimental results from a 2:1 scale titanium prototype, compared to a watch-scale prototype, validated both the analytical and numerical models for large force and dynamic-balancing defects. An iterative tuning method achieved a sag variation below <span><math><mrow><mn>5</mn><mspace></mspace><mi>μ</mi><mi>m</mi></mrow></math></span>, a daily rate variation of less than 18 seconds per day for all in-plane gravity orientations, and sensitivity to angular accelerations 250 times lower than its single-balance version.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 576-586"},"PeriodicalIF":3.5,"publicationDate":"2025-02-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143428773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microwave plasma modification-assisted shear-thickening polishing of single-crystal silicon carbide
IF 3.5 2区 工程技术
Mengmeng Shen , Min Wei , Lingwei Wu , Binbin Hong , Jiahao Ye , Hongyu Chen , Julong Yuan , Binghai Lyu , Chuansheng Wang , Hui Deng , Wei Hang
{"title":"Microwave plasma modification-assisted shear-thickening polishing of single-crystal silicon carbide","authors":"Mengmeng Shen ,&nbsp;Min Wei ,&nbsp;Lingwei Wu ,&nbsp;Binbin Hong ,&nbsp;Jiahao Ye ,&nbsp;Hongyu Chen ,&nbsp;Julong Yuan ,&nbsp;Binghai Lyu ,&nbsp;Chuansheng Wang ,&nbsp;Hui Deng ,&nbsp;Wei Hang","doi":"10.1016/j.precisioneng.2025.02.010","DOIUrl":"10.1016/j.precisioneng.2025.02.010","url":null,"abstract":"<div><div>This study addressed existing limitations on the efficiency and efficacy of SiC processing by introducing an innovative microwave plasma modification-assisted shear-thickening polishing (MPM-STP) technology. First, the modification mechanism and effects of microwave plasma irradiation on the surface of a single-crystal SiC workpiece were explored. The formation of SiO<sub>2</sub> product by plasma modification was confirmed by X-ray photoelectron spectroscopy, and nanoindentation testing indicated an accompanying significant reduction in the hardness and elastic modulus of the SiC from 37.04 GPa to 4.71 GPa and from 504.57 GPa to 68.96 GPa, respectively, enhancing its processability. A systematic investigation of the changes in workpiece surface morphology under various microwave irradiation times, power levels, and distances revealed that a longer irradiation time and higher power level intensified the surface modification effect, and the irradiation distance had a crucial influence on the uniformity of the modified film, which could be optimized through precise adjustment of the irradiation parameters. Next, plasma-modified SiC workpieces were subjected to shear-thickening polishing using a CeO<sub>2</sub> abrasive, resulting in the complete removal of the modified film within 15 min and a substantial reduction in surface roughness <em>R</em><sub>a</sub> from 9.74 nm to 0.31 nm, indicating significantly improved surface quality. Finally, the results of nanoscratch experiments conducted on the surfaces of SiC workpieces before and after plasma modification indicated the transformation of the material removal mode from brittle fracture to plastic removal, which is crucial for improving processing efficiency and surface quality. The successful construction of a surface modification model for single-crystal SiC processed by MPM-STP in this study opens a new path for the high-precision machining of SiC materials.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 13-25"},"PeriodicalIF":3.5,"publicationDate":"2025-02-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143479218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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