Investigation of machining characteristics near resonance based on a custom-built vibration platform for atomic force microscopy

Nanomanufacturing using the tip of an atomic force microscope (AFM) probe has emerged as a powerful technique for fabricating nanostructures with exceptional precision. Incorporating vibration-assisted machining into AFM systems further improves processing efficiency without compromising accuracy. In this study, a calibrated diamond-tipped probe was employed as the cutting tool on a custom-built AFM platform, enabling high-precision micro/nanofabrication under vibration assistance. Experimental results demonstrated precise control over groove depth, with measured values closely aligning with theoretical predictions. The influence of vibration on machining performance was systematically investigated, particularly near the resonance frequency. Vibration assistance was found to reduce the cutting force and increase material removal volume. However, significant cutting force fluctuations and degraded groove quality were observed near resonance. To further understand the cutting mechanics, a mathematical model of vibration-assisted cutting forces was developed, and finite element simulations, calibrated with experimental data, were conducted to analyze variations in cutting force, temperature distribution, and stress-strain behavior. Simulation results confirmed that operating slightly below the resonance frequency optimizes machining precision while minimizing material damage. These findings highlight the potential of vibration-assisted AFM nanomanufacturing for advanced applications that demand high precision and enhanced processing efficiency.