Alexander Pechhacker , Tobias Schopf , Ernst Csencsics , Georg Schitter
{"title":"用于大范围快速转向镜的紧凑混合磁阻式尖端/倾斜驱动器","authors":"Alexander Pechhacker , Tobias Schopf , Ernst Csencsics , Georg Schitter","doi":"10.1016/j.precisioneng.2025.09.021","DOIUrl":null,"url":null,"abstract":"<div><div>This work presents a compact tip/tilt fast steering mirror (FSM) based on a linearized hybrid reluctance actuation topology. The actuation principle is analyzed using a magnetic equivalent circuit model and finite-element method simulations. The proposed design achieves a large range of <span><math><mrow><mo>±</mo><mn>5</mn><mo>/</mo><mn>10</mn></mrow></math></span> deg (mechanical/optical) with an optical aperture of 1 × 1.5 inch, delivering higher torque and linearity compared to the state of the art. To maintain compactness, the system uses magnetically coupled axes while achieving a decoupling of over 30<!--> <!-->dB. Independent control loops for each yield position bandwidths of 1.06<!--> <!-->kHz and 1.13<!--> <!-->kHz, enabling a precision below 1.2 mdeg, and Lissajous scanning up to 110<!--> <!-->Hz with 4 deg. Overall, the compact FSM demonstrates the highest range-bandwidth product (+22%) with the largest range of hybrid reluctance actuated systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 317-325"},"PeriodicalIF":3.7000,"publicationDate":"2025-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Compact hybrid reluctance based tip/tilt actuator for large range fast steering mirrors\",\"authors\":\"Alexander Pechhacker , Tobias Schopf , Ernst Csencsics , Georg Schitter\",\"doi\":\"10.1016/j.precisioneng.2025.09.021\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This work presents a compact tip/tilt fast steering mirror (FSM) based on a linearized hybrid reluctance actuation topology. The actuation principle is analyzed using a magnetic equivalent circuit model and finite-element method simulations. The proposed design achieves a large range of <span><math><mrow><mo>±</mo><mn>5</mn><mo>/</mo><mn>10</mn></mrow></math></span> deg (mechanical/optical) with an optical aperture of 1 × 1.5 inch, delivering higher torque and linearity compared to the state of the art. To maintain compactness, the system uses magnetically coupled axes while achieving a decoupling of over 30<!--> <!-->dB. Independent control loops for each yield position bandwidths of 1.06<!--> <!-->kHz and 1.13<!--> <!-->kHz, enabling a precision below 1.2 mdeg, and Lissajous scanning up to 110<!--> <!-->Hz with 4 deg. Overall, the compact FSM demonstrates the highest range-bandwidth product (+22%) with the largest range of hybrid reluctance actuated systems.</div></div>\",\"PeriodicalId\":54589,\"journal\":{\"name\":\"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology\",\"volume\":\"97 \",\"pages\":\"Pages 317-325\"},\"PeriodicalIF\":3.7000,\"publicationDate\":\"2025-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0141635925002879\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, MANUFACTURING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0141635925002879","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
Compact hybrid reluctance based tip/tilt actuator for large range fast steering mirrors
This work presents a compact tip/tilt fast steering mirror (FSM) based on a linearized hybrid reluctance actuation topology. The actuation principle is analyzed using a magnetic equivalent circuit model and finite-element method simulations. The proposed design achieves a large range of deg (mechanical/optical) with an optical aperture of 1 × 1.5 inch, delivering higher torque and linearity compared to the state of the art. To maintain compactness, the system uses magnetically coupled axes while achieving a decoupling of over 30 dB. Independent control loops for each yield position bandwidths of 1.06 kHz and 1.13 kHz, enabling a precision below 1.2 mdeg, and Lissajous scanning up to 110 Hz with 4 deg. Overall, the compact FSM demonstrates the highest range-bandwidth product (+22%) with the largest range of hybrid reluctance actuated systems.
期刊介绍:
Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.