Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

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Quality enhancement of interferometric fringe pattern based on deep-learning-based denoising of combined noise 基于深度学习组合噪声去噪的干涉条纹图质量增强
IF 3.5 2区 工程技术
Juncheol Bae , Yangjin Kim , Yusuke Ito , Naohiko Sugita , Mamoru Mitsuishi
{"title":"Quality enhancement of interferometric fringe pattern based on deep-learning-based denoising of combined noise","authors":"Juncheol Bae ,&nbsp;Yangjin Kim ,&nbsp;Yusuke Ito ,&nbsp;Naohiko Sugita ,&nbsp;Mamoru Mitsuishi","doi":"10.1016/j.precisioneng.2025.04.021","DOIUrl":"10.1016/j.precisioneng.2025.04.021","url":null,"abstract":"<div><div>Optical interferometry is a highly accurate method for measuring the properties of optical components. This method uses fringe patterns obtained using an interferometer to extract the phase based on the properties of the measurement target. Noiseless fringe patterns are ideal for precise measurements. However, owing to unavoidable factors in real-world environments, noise is inevitably introduced into fringe patterns. Therefore, a denoising process is essential for enhancing the phase extraction results. Among the different types of noise, the second-harmonic component has been reported to be the most dominant. In this study, the combination of the second-harmonic component and Gaussian noise is defined as combined noise. In addition, a combined noise decomposition method using deep learning is proposed. Specifically, the denoising residual attention UNet (DRAUNet) model was designed and trained to decompose combined noise from fringe patterns. The model can uniformly increase the contrast of noisy fringe patterns. The proposed method was validated using simulation data, confirming its superior denoising performance compared with those of other methods. Furthermore, the necessity of considering the second-harmonic component in the denoising process was verified. Finally, the effectiveness and superiority of the developed method were further validated using real fringe patterns from the surface shape measurements of a silicon wafer obtained using a Fizeau interferometer.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 75-88"},"PeriodicalIF":3.5,"publicationDate":"2025-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143854980","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Improvement of electrochemical drilling deep holes using combinatorial tube electrode with a suitable leading flow structure 采用合适导流结构的组合管电极改进电化学钻深孔
IF 3.5 2区 工程技术
Rongjun Liu , Jinxing Luo , Xiaolong Fang , Bin Luo , Zhenhua Jiao , Lingchao Meng
{"title":"Improvement of electrochemical drilling deep holes using combinatorial tube electrode with a suitable leading flow structure","authors":"Rongjun Liu ,&nbsp;Jinxing Luo ,&nbsp;Xiaolong Fang ,&nbsp;Bin Luo ,&nbsp;Zhenhua Jiao ,&nbsp;Lingchao Meng","doi":"10.1016/j.precisioneng.2025.04.017","DOIUrl":"10.1016/j.precisioneng.2025.04.017","url":null,"abstract":"<div><div>Deep holes with high quality are extensively demanded in such industrial applications as aviation. Electrochemical drilling (ECD) is a promising technique for fabricating deep holes in difficult-to-machine materials. However, at the initial machining stage, the electrolyte flow in the inter-electrode gap changes dramatically from expansion flow to converging flow, which may affect the machining process. To address this, a leading flow structure is developed to confine the electrolyte flow when machining the hole entrance, which helps to improve processing stability. A height of 10.0 mm for the leading flow structure is found to be sufficient for ensuring the fine entrance profile and machining stability. Furthermore, the normal tube electrode commonly causes misdistribution of electrolyte flow and current density at the hole bottom, generating defects such as spikes and striations, which limits its application in deep holes requiring a flat bottom. Therefore, a combinatorial tube electrode is proposed to enhance the distribution of flow and electric fields by changing the cross-section at the tube tip, resulting in a defect-free flat bottom. Based on these findings, two typical deep holes, a through hole and a flat-bottomed blind hole, were successfully fabricated with high quality, as so the machining capability and processing stability had been prominently enhanced.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 59-74"},"PeriodicalIF":3.5,"publicationDate":"2025-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143854440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and development of a 3-DOF compliant gripper with in-plane and out-of-plane motion 平面内外运动三自由度柔性夹持器的设计与研制
IF 3.5 2区 工程技术
Min Liu , Jia Zhang , Jinqing Zhan , Benliang Zhu , Ruizhou Wang , Hua Wang , Xianmin Zhang
{"title":"Design and development of a 3-DOF compliant gripper with in-plane and out-of-plane motion","authors":"Min Liu ,&nbsp;Jia Zhang ,&nbsp;Jinqing Zhan ,&nbsp;Benliang Zhu ,&nbsp;Ruizhou Wang ,&nbsp;Hua Wang ,&nbsp;Xianmin Zhang","doi":"10.1016/j.precisioneng.2025.04.019","DOIUrl":"10.1016/j.precisioneng.2025.04.019","url":null,"abstract":"<div><div>This paper presents a novel piezoelectric-driven, three-axis compliant gripper with in-plane and out-of-plane motion for grasping and rubbing tiny rigid objects. The gripper features in-plane motion actuated by two piezoelectric actuators and out-of-plane motion enabled by a piezoelectric sheet. The displacement amplification ratio of the in-plane motion is derived using elastic beam theory, and static analysis is performed using the pseudo-rigid body model (PRBM). An out-of-plane bending displacement model of a piezoelectric cantilever beam is established based on piezoelectric theory. Finite element simulations and experimental tests validate the theoretical models. The gripper achieves a gripping stroke of 914.3 μm, an in-plane rubbing stroke of 317.2 μm, and an out-of-plane rubbing stroke of 165.8 μm. The gripper successfully grasps and rubs metal wires (diameters of 200 μm–800 μm) and a small steel ball with a diameter of 500 μm, demonstrating excellent spatial manipulation for small cylindrical and spherical objects.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 136-150"},"PeriodicalIF":3.5,"publicationDate":"2025-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143868596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultrasonic power adaptive adjustment for ultrasonic assisted die-sinking electrical discharge machining based on deep deterministic policy gradient 基于深度确定性策略梯度的超声波功率自适应调整,用于超声波辅助沉模放电加工
IF 3.5 2区 工程技术
Cheng Guo , Hao Li , Xuesong Geng , Xiang Chen , Kangsen Li , Feng Gong
{"title":"Ultrasonic power adaptive adjustment for ultrasonic assisted die-sinking electrical discharge machining based on deep deterministic policy gradient","authors":"Cheng Guo ,&nbsp;Hao Li ,&nbsp;Xuesong Geng ,&nbsp;Xiang Chen ,&nbsp;Kangsen Li ,&nbsp;Feng Gong","doi":"10.1016/j.precisioneng.2025.04.013","DOIUrl":"10.1016/j.precisioneng.2025.04.013","url":null,"abstract":"<div><div>Ultrasonic assisted electrical discharge machining (UAEDM) has gained traction, with numerous investigations demonstrating its potential to enhance machining efficiency and surface quality under specific conditions. Ultrasonic vibration is widely recognized for increasing the inter-electrode flow rate, which improves the removal efficiency of discharge debris. However, the inherent complexity of the discharge process makes it difficult to establish a precise mathematical relationship between discharge states and ultrasonic vibration. Consequently, research on the adaptive adjustment of ultrasonic power (amplitude) based on real-time measurement and discharge state statistics throughout the entire machining process remains limited. This paper presents a novel ultrasonic power adaptive adjustment system for die-sinking EDM, leveraging online measurement and deep deterministic policy gradient (DDPG), a state-of-the-art deep reinforcement learning (DRL) approach. By harnessing the powerful nonlinear mapping capabilities of deep learning, the proposed system uses two-dimensional discharge signals measured online as the model input to dynamically modulate ultrasonic power. Experimental results demonstrate that the DDPG-based adaptive system outperforms the fixed ultrasonic power method, achieving improved discharge continuity. Moreover, the servo system significantly reduces retraction servo commands, minimizing reverse motion of the servo system and thereby enhancing overall machining efficiency.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 808-819"},"PeriodicalIF":3.5,"publicationDate":"2025-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143835187","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Unveiling surface roughness in Inconel 718 fabricated by LPBF using high-productivity parameters: A dual method exploration 利用高生产率参数揭示LPBF制备的Inconel 718表面粗糙度:双方法探索
IF 3.5 2区 工程技术
M. Abruzzo, G. Macoretta, B.D. Monelli, Luca Romoli
{"title":"Unveiling surface roughness in Inconel 718 fabricated by LPBF using high-productivity parameters: A dual method exploration","authors":"M. Abruzzo,&nbsp;G. Macoretta,&nbsp;B.D. Monelli,&nbsp;Luca Romoli","doi":"10.1016/j.precisioneng.2025.04.012","DOIUrl":"10.1016/j.precisioneng.2025.04.012","url":null,"abstract":"<div><div>Recent advancements in additive manufacturing and its extension to metallic materials have led to the production of highly technological components with complex geometries and mechanical properties comparable to traditional processes. Despite this, the widespread adoption of additive manufacturing remains limited by low productivity. Additionally, optimizing process parameters to enhance productivity while maintaining high surface quality is challenging due to the intricate relationships between process parameters and surface roughness. This study aims to identify the relationship between process parameters and surface roughness using Inconel 718 specimens produced via laser powder bed fusion. Prismatic specimens were printed using seven combinations of process parameters with progressively increasing productivity. Two methods, traditional profilometry and an optical approach, were compared to assess surface quality under varying process conditions. Results show a strong correlation between process productivity and surface roughness, with higher productivity leading to surface roughness increases up to 200 %. The optical method demonstrated superior sensitivity in detecting sharp peaks and valleys, providing higher detail levels than traditional profilometry. Additionally, the optical method was applied to a practical case where traditional techniques fall short, offering crucial insights for advancing LPBF applications in various industrial sectors.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 783-794"},"PeriodicalIF":3.5,"publicationDate":"2025-04-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143835185","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Machine learning based assessment of audio signal features for chatter identification in high-speed micromilling of thin-walled TC4 alloy 基于机器学习的TC4薄壁合金高速微铣削颤振识别音频信号特征评估
IF 3.5 2区 工程技术
Sethurao Gururaja, Kundan K. Singh
{"title":"Machine learning based assessment of audio signal features for chatter identification in high-speed micromilling of thin-walled TC4 alloy","authors":"Sethurao Gururaja,&nbsp;Kundan K. Singh","doi":"10.1016/j.precisioneng.2025.04.011","DOIUrl":"10.1016/j.precisioneng.2025.04.011","url":null,"abstract":"<div><div>The present work identifies the audio signal features that are necessary to detect the chatter onset during high speed micromilling of thin-walled TC4 structure. These features have been derived from the short time Fourier transform of the signal to capture the low magnitude vibration of the micromilling process. Radial micromilling experiments at three different radial depths of cut and four different microphone tilt-angles shows 60° tilt angle as the optimum tilt angle. Entropy, kurtosis and shape factor have been found to be the optimum features based on the principal component analysis. Radial Basis Function has been found to be best suitable kernel with the highest prediction accuracy of 98 % for all the cutting conditions. The optimum features and kernel have been used in support vector machine (SVM) for classification of machining conditions into stable and chatter dominant zone. The presence of chatter marks has been validated using the machined surfaces.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 820-840"},"PeriodicalIF":3.5,"publicationDate":"2025-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143835188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Uncertainty analysis and optimization of contact stress for the centering surface in aviation splines considering surface topography 考虑表面形貌的航空样条定心面接触应力的不确定性分析与优化
IF 3.5 2区 工程技术
Yong Liu , Jie Qu , Wenyan Xu , Fangchao Yan
{"title":"Uncertainty analysis and optimization of contact stress for the centering surface in aviation splines considering surface topography","authors":"Yong Liu ,&nbsp;Jie Qu ,&nbsp;Wenyan Xu ,&nbsp;Fangchao Yan","doi":"10.1016/j.precisioneng.2025.04.008","DOIUrl":"10.1016/j.precisioneng.2025.04.008","url":null,"abstract":"<div><div>The centering surfaces of aviation splines (CSAS) are critical for maintaining alignment and stability in aero-engine rotor systems. Misalignment of CSAS triggers excessive wear, unstable torque transmission, and heightened safety risks. In this study, the deterministic contact mechanics model is established based on the fractal theory to predict the mean contact stress (MCS) of CSAS. Then, the interval model of MCS is derived based on the Chebyshev polynomial expansion and the deterministic contact model, and the constructed model is verified by experimental results. Additionally, the multi-objective uncertainty optimization model was proposed to determine the optimal design strategy of CSAS, with the optimization goal of minimizing both the upper bound of MCS and the uncertainty coefficient. Finally, the uncertainty analysis of MCS is carried out, and optimization results are also discussed in detail. Results indicate that the upper bound of MCS is sensitive to topography parameters and the radial offset, and the optimized solution ensures the upper bound of MCS remains within the safety margin while significantly enhancing system robustness. This study provides effective theoretical guidance for improving the design of centering surfaces and enhancing the load-bearing capacity of aviation splines.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 795-807"},"PeriodicalIF":3.5,"publicationDate":"2025-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143835186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Detecting microscale surface imperfections in powder bed fusion through light scattering and machine learning – validation of inspection principles 通过光散射和机器学习检测粉末床熔合中的微尺度表面缺陷-检测原理的验证
IF 3.5 2区 工程技术
Ahmet Koca , Helia Hooshmand , Richard Leach , Mingyu Liu
{"title":"Detecting microscale surface imperfections in powder bed fusion through light scattering and machine learning – validation of inspection principles","authors":"Ahmet Koca ,&nbsp;Helia Hooshmand ,&nbsp;Richard Leach ,&nbsp;Mingyu Liu","doi":"10.1016/j.precisioneng.2025.04.010","DOIUrl":"10.1016/j.precisioneng.2025.04.010","url":null,"abstract":"<div><div>Microscale surface imperfections in laser beam powder bed fusion (PBF-LB) additively manufactured parts, such as balling, spattering, and surface pores, can substantially reduce component quality but are difficult to detect with current real-time measurement and monitoring methods. This paper introduces a novel, rapid, and cost-effective method for detecting microscale surface imperfections in PBF-LB, utilising light scattering combined with machine learning (ML) algorithms. In the proposed method, a laser beam illuminates the measured surface, and the scattered light is captured and analysed to detect surface imperfections. The scattering patterns, which are associated with the illuminated surface and the configuration of the setup, are used to train unsupervised ML algorithms, including autoencoders and anomaly detection models, to classify surfaces as either uniform, without any imperfections or non-uniform, with imperfections. The ML models were trained on simulated scattering patterns of synthetic surfaces generated by a generative adversarial network (GAN) and validated on experimental datasets. The use of unsupervised models eliminates the need for data labelling, whilst the use of simulated and synthetically generated data reduces the time required for actual experiments and data collection. Experimental validation demonstrates that the most effective trained ML model achieved a classification accuracy of over 97 %, highlighting the potential of this technique for detecting microscale surface imperfections. This paper demonstrates the capability of our method to detect such imperfections on PBF-LB surfaces as an ex-situ process. Nonetheless, with further development, this approach has the potential to be adapted as on-machine and real-time defect detection method, by integrating the illumination source into a commercial PBF-LB machine and capturing scattered light information for real-time quality monitoring during the manufacturing process.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 761-772"},"PeriodicalIF":3.5,"publicationDate":"2025-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143823997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A novel method for improving the accuracy of parallel robots based on efficient identification of kinematic parameters 提出了一种提高并联机器人运动参数辨识精度的新方法
IF 3.5 2区 工程技术
Shu-mei Zhang , Jian-wei Ma , Qian Zhang , Ze-xu Li , Guan-lin Li , Zhen-yuan Jia
{"title":"A novel method for improving the accuracy of parallel robots based on efficient identification of kinematic parameters","authors":"Shu-mei Zhang ,&nbsp;Jian-wei Ma ,&nbsp;Qian Zhang ,&nbsp;Ze-xu Li ,&nbsp;Guan-lin Li ,&nbsp;Zhen-yuan Jia","doi":"10.1016/j.precisioneng.2025.04.007","DOIUrl":"10.1016/j.precisioneng.2025.04.007","url":null,"abstract":"<div><div>Parallel robots are increasingly used in precision manufacturing and measurement applications. However, factors such as assembly errors and gear clearances can cause the positioning error of the end effector to reach several millimeters, which fails to meet the precision requirements for high-precision machining and measurement. To enhance the positioning accuracy of parallel robots, parameter calibration has become an essential technical approach. As the accuracy of parallel robot systems may gradually decline during long-term operation, regular calibration of the kinematic parameters is particularly important. An efficient and high-precision parameter calibration method for robots is urgently required to avoid disrupting the operation of the measurement system. This paper proposes a two-step method for identifying kinematic parameters based on the kinematic error model of parallel robots, ensuring both calibration accuracy and significant computational efficiency. In the first step, the L2 Regularized Least Squares (L2 RLS) method is used to pre-identify the kinematic parameters, obtaining suboptimal parameter values. Subsequently, the suboptimal values serve as the initial values for the iterative (IT) method, which refines the parameter identification through an iterative process to obtain the optimal parameter values. Numerical simulations have verified the effectiveness of the proposed method, ensuring calibration accuracy while significantly improving computational efficiency. Experimental results further demonstrate that applying the L2 RLS-IT method proposed in this paper reduces the maximum positioning error of the parallel robot from 1.872 mm to 0.294 mm. This significant improvement not only proves the effectiveness of the method, but also plays a crucial role in ensuring the long-term stable operation of parallel robots with high precision.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 24-37"},"PeriodicalIF":3.5,"publicationDate":"2025-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143848269","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Compliant micro-nano multi-axis trajectory tracking with nonlinear coupling stiffness using a predefined-time extended state observer 基于预定义时间扩展状态观测器的非线性耦合刚度柔性微纳多轴轨迹跟踪
IF 3.5 2区 工程技术
Jiaqi Liang , Dunant Halim , Kean How Cheah , Chi Zhang
{"title":"Compliant micro-nano multi-axis trajectory tracking with nonlinear coupling stiffness using a predefined-time extended state observer","authors":"Jiaqi Liang ,&nbsp;Dunant Halim ,&nbsp;Kean How Cheah ,&nbsp;Chi Zhang","doi":"10.1016/j.precisioneng.2025.04.005","DOIUrl":"10.1016/j.precisioneng.2025.04.005","url":null,"abstract":"<div><div>This work proposes a novel control methodology to achieve high-precision multi-axis coordinated trajectory tracking of a compliant micro-nano positioning stage system with nonlinear coupling stiffness. It addresses the problem of a positioning stage control using compliant parallel mechanisms (CPMs) to undertake complex trajectory tracking, in which multi-axis coupled motions and external disturbances significantly affect the tracking accuracy. To address this, the proposed control method is developed by utilizing the predefined-time extended state observer (PTESO) with linear sliding mode control (SMC), in which the PTESO incorporates the nonlinear stiffness model of CPMs with its stability proven through Lyapunov stability analysis. This method ensures reduced uncertainty in system coupling as disturbance observation converges to the desired accuracy within a predefined time, independent of initial conditions. By solely utilizing position signals, the control system achieves faster and more accurate velocity estimation and disturbance compensation in multi-axis coordinated trajectory tracking, thereby enhancing overall the robustness and dynamic performance. Experimental validation on a 4 PPR (Prismatic-Prismatic-Revolute) planar three-degree-of-freedom compliant stage demonstrates a tracking accuracy of 0.1 μm in a 1-Hz circular trajectory experiment. Compared to SMC with traditional ESO, the proposed scheme significantly reduces the root mean square error (RMSE) by 79.17 %. Notably, significant performance improvements are also observed when tracking other complex trajectories, compared to conventional ESO-based control schemes. The proposed control methodology also effectively mitigates time delays and enables high-precision real-time trajectory tracking at the micro-nano level.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 773-782"},"PeriodicalIF":3.5,"publicationDate":"2025-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143835184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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