Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"Sustainable micro-milling of Ti6Al4V: Role of MoS2 and CuO nanofluids in minimum quantity lubrication","authors":"Hamed Hassanpour ,&nbsp;Amir Rasti ,&nbsp;Sina Sabbaghi Farshi ,&nbsp;Hossein Sabzi","doi":"10.1016/j.precisioneng.2025.09.020","DOIUrl":"10.1016/j.precisioneng.2025.09.020","url":null,"abstract":"<div><div>The current research explores how various nano minimum quantity lubrication (NMQL) techniques impact surface integrity in the micro-milling of Ti6Al4V. Accordingly, three combinations including MQL, NMQL + CuO, and NMQL + MoS₂ were evaluated across three different spindle speeds. Surface roughness was assessed using areal surface roughness (Sa). Findings show that increasing spindle speeds up to 32,000 rpm leads to lower Sa values across all lubrication methods. The inclusion of nanoparticles like MoS₂ enhances surface finish, with a significant reductions in Sa of 21 %. Increasing spindle speed from 16,000 to 32,000 rpm also effectively decreases burr width. Among the methods, NMQL + MoS₂ achieved the smallest burr width of approximately 110 μm. Furthermore, surface hardness increased under all test conditions, with NMQL + MoS₂ achieving the highest hardness. White layer formation is one of the challenges of micromachining. Regarding of the thickness of this layer, NMQL + MoS₂ showed the thinnest layer, and at 32,000 rpm, the white layer was completely removed. It also proves that white layer can be totally eliminated by optimizing cutting parameters under NMQL condition. Corrosion resistance evaluation revealed that NMQL + CuO had the highest resistance. Overall, the findings suggest that adding nanoparticles, particularly MoS₂, to the MQL system can significantly enhance surface properties during the micro-milling of Ti6Al4V alloy, offering a viable solution for a consistent and high-quality micro-milling process.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 226-234"},"PeriodicalIF":3.7,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145121217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Modeling and experimental research on the front edge chipping characteristics of dicing monocrystalline silicon with ultra-thin diamond dicing blades","authors":"Jiao Lin,&nbsp;Jingyu Li,&nbsp;Dingxin Li,&nbsp;Chuang Zhang,&nbsp;Jun Cheng","doi":"10.1016/j.precisioneng.2025.09.014","DOIUrl":"10.1016/j.precisioneng.2025.09.014","url":null,"abstract":"<div><div>Monocrystalline silicon is crucial for manufacturing integrated circuits in modern electronics. Dicing is a key semiconductor fabrication step that improves production efficiency, reduces material waste, and ensures chip conformity. Ultra-thin diamond dicing blades are preferred for dicing monocrystalline silicon wafers due to their exceptional precision and efficiency in producing high-quality chips with minimal material waste and damage. However, the material removal mechanism during the dicing of hard and brittle semiconductor materials remains unclear. This study presents a comprehensive front edge chipping (FEC) model to predict the motion trajectory of diamond abrasive grains, grinding force, crack length, and chipping width during monocrystalline silicon dicing. The models reveal that dicing parameters affect chipping quality by altering the grinding force of diamond grains and lateral crack propagation, thus changing the chipping width. To verify these models, ultra-micro-scale dicing experiments were conducted using self-developed ultra-thin diamond blades. The experimental results are analyzed to derive empirical formulas and variation laws of chipping width with respect to process parameters. This study shows the key role of dicing parameters in surface quality and offers a foundation for optimizing dicing quality. It addresses chipping width control challenges, meeting modern semiconductor manufacturing requirements for precision, efficiency, and quality. The findings deepen the understanding of material behavior during dicing hard and brittle materials, benefiting the advancement of ultra-micro-scale monocrystalline silicon dicing. They provide a foundation for future work in this field.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 195-212"},"PeriodicalIF":3.7,"publicationDate":"2025-09-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145121027","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Hard-turning-induced surface integrity and fatigue performance of 18CrNiMo7-6 steel for V-notched specimens","authors":"Yinxia Zhang ,&nbsp;Man Liu ,&nbsp;Jinyong Han ,&nbsp;Siyu Zhai ,&nbsp;Xiuwu Liu ,&nbsp;Xiaodong Yan ,&nbsp;Fuquan Nie ,&nbsp;Zhenlong Peng","doi":"10.1016/j.precisioneng.2025.09.016","DOIUrl":"10.1016/j.precisioneng.2025.09.016","url":null,"abstract":"<div><div>In conventional grinding processes for hardened steel, excessive residual tensile stress can negatively affect part performance. Additionally, using cutting fluids during grinding often causes environmental pollution. To address these issues, this study adopted dry hard turning (DHT) instead of grinding processing for fatigue specimens. This study focused on the DHT of 18CrNiMo7-6 hardened steel and examined how the DHT processing parameters affect the surface roughness, surface residual stress, and 3D surface morphology of 18CrNiMo7-6 hardened steel V-notch specimens. Additionally, fatigue tests and fracture analyses were performed to compare the fatigue performance of the specimens machined via DHT and grinding processing with the preferred parameters. The experimental results show that as the rotational speed (<em>n</em>) increases, the surface roughness (<em>Ra</em>) first decreases and then increases, whereas the residual compressive stress of the V-notch fatigue specimens first increases and then decreases. As the feed velocity (<em>v</em>_<em>f</em>) increases, <em>Ra</em> increases, and the residual compressive stress decreases. Under specific conditions, when <em>n =</em> 1200 rpm and <em>v</em>_<em>f</em> = 5 mm/min, <em>Ra</em> reaches a minimum of 0.259 μm, the axial residual stress reaches a maximum of −580.0 MPa and the tangential residual stress reaches a maximum of −420.6 MPa. Additionally, the surface integrity of the specimens machined via DHT is significantly superior to that of the specimens processed via conventional grinding, and the fatigue resistance of the DHT-machined specimens is superior to that of the specimens processed via grinding. The fatigue resistance of the DHT specimens is better than that of the ground specimens, which can realize “Turning instead of Grinding.”</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 268-278"},"PeriodicalIF":3.7,"publicationDate":"2025-09-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Defect analysis by computed tomography in metallic materials: Optimisation, uncertainty quantification and classification","authors":"Emanuele Avoledo ,&nbsp;Marco Petruzzi ,&nbsp;Marco Pelegatti ,&nbsp;Alessandro Tognan ,&nbsp;Francesco De Bona ,&nbsp;Michele Pressacco ,&nbsp;Riccardo Toninato ,&nbsp;Enrico Salvati","doi":"10.1016/j.precisioneng.2025.09.008","DOIUrl":"10.1016/j.precisioneng.2025.09.008","url":null,"abstract":"<div><div>This paper presents a methodology to optimise post-processing parameters in X-ray Computed Tomography (CT) for defect detection in metallic materials. The approach addresses three main goals: minimisation of systematic errors in defect reconstruction, quantification of uncertainty, and reliable defect classification. The proposed methodology aims to remove the systematic error that impacts defect reconstruction, thereby improving the accuracy of defect size and morphology assessment, which is essential for fatigue life prediction, particularly in materials produced through additive manufacturing (AM). An iterative comparison between CT-based defect and fractographic measurements is involved to identify the optimal CT post-processing parameters, such as the grey threshold (GT). The methodology was applied to 11 dog-bone-shaped titanium alloy samples (5.5 mm nominal gauge diameter) produced via electron beam melting. The optimisation procedure resulted in a GT value that was 134% of that obtained using a commercial algorithm, effectively removing the systematic uncertainty associated with Murakami’s parameter <span><math><msqrt><mrow><mtext>area</mtext></mrow></msqrt></math></span>. The uncertainty of various defect features, such as equivalent diameter, sphericity and aspect ratio, was calculated by propagating the remaining stochastic uncertainty of <span><math><msqrt><mrow><mtext>area</mtext></mrow></msqrt></math></span>. An unsupervised K-means algorithm categorised unlabelled defects into three major types often encountered in AM: gas pores, keyholes, and lack of fusion. Finally, the labelled defects were processed through a support vector machine to infer the analytical form of the decision boundaries, achieving an accuracy of 99%.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 235-248"},"PeriodicalIF":3.7,"publicationDate":"2025-09-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Variable convolution-based prediction of surface profiles in polishing pad conditioning","authors":"Ping Zhou,&nbsp;Kaiqiang Li,&nbsp;Yinhui Tang,&nbsp;Changyu Hou","doi":"10.1016/j.precisioneng.2025.09.017","DOIUrl":"10.1016/j.precisioneng.2025.09.017","url":null,"abstract":"<div><div>Polishing pad conditioning is a crucial step in the chemical mechanical polishing (CMP) process, where establishing a relationship between conditioning parameters and pad wear profile is essential for process control. Traditional models based on diamond abrasive trajectory analysis are computationally intensive and time-consuming, creating a significant bottleneck for practical applications and forcing a reliance on inefficient trial-and-error process adjustments. To address this, a novel kinematic model is proposed, utilizing spatially varying convolution to predict pad wear profiles. The accuracy and effectiveness are validated through conditioning experiments. Benefiting from the improvement in prediction efficiency, extensive numerical simulations are conducted to investigate the influence of different conditioning parameters. The results indicate that matching the rotational speeds of the conditioner and the polishing pad, combined with reducing the conditioner size, produces pad wear profiles that closely align with the sweep time distribution. By adjusting the sweep mode, diverse pad wear profiles can be achieved. This study provides an efficient and accurate analytical framework for precise conditioning control, offering valuable insights for optimization conditioning process of CMP.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 279-289"},"PeriodicalIF":3.7,"publicationDate":"2025-09-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158622","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel low-friction pneumatic actuator optimization design method for high-precision position servo control in grinding processes","authors":"Yan Shi ,&nbsp;Zhanxin Li ,&nbsp;Yulong Nie ,&nbsp;Zhibo Sun ,&nbsp;Yanxia Niu ,&nbsp;Jiange Kou ,&nbsp;Zhiguo Yang ,&nbsp;Yixuan Wang","doi":"10.1016/j.precisioneng.2025.09.015","DOIUrl":"10.1016/j.precisioneng.2025.09.015","url":null,"abstract":"<div><div>Friction in traditional pneumatic actuator (TPA) limits high-precision positioning and force control in grinding. This study developed an aerostatically suspended low-friction pneumatic actuator (LFPA). An internal air film flow model was developed to relate radial load capacity to air consumption. A hybrid multi-objective optimization algorithm (NGC-HMWOA) was then used to optimize the piston geometry to improve load capacity and reduce air consumption. A prototype was built and tested, and friction benchmarking confirmed the stability of the hydrostatic gas film formation and demonstrated an approximately 99.7 % reduction in static friction compared to the TPA. In servo positioning experiments under constant, sinusoidal, and random references, the LFPA achieved approximately 55 % faster settling time and approximately 21.7 % lower root mean square error, consistently delivering faster transient response and higher accuracy. These results demonstrate the superior performance of a low-friction pneumatic actuator suitable for high-precision grinding and highlight its potential in high-precision grinding and polishing applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 213-225"},"PeriodicalIF":3.7,"publicationDate":"2025-09-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145121218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Algorithm for sensor nonlinearity compensation in measurements of geometric deviations of rotating elements with variable diameter","authors":"Dariusz Janecki,&nbsp;Krzysztof Stepien","doi":"10.1016/j.precisioneng.2025.09.011","DOIUrl":"10.1016/j.precisioneng.2025.09.011","url":null,"abstract":"<div><div>In the area of mechanical engineering, rotating components are not always nominally cylindrical. Sometimes, we also deal with rotating parts with variable diameters. Examples of such parts are rolling elements of bearings shaped like barrels or cones. In industrial practice, rotating components with tight dimensional tolerances are usually measured with the so-called radius-change measuring instruments. The analysis of the measurement of nominally noncylindrical elements showed that the nonlinear characteristics of the measuring sensor have a significant impact on the measurement accuracy. Taking this into account, the authors developed the concept of compensation of the nonlinear characteristics of the sensor in radius-change measuring instruments. The work contains a theoretical description of the concept developed and the results of its experimental verification.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 168-178"},"PeriodicalIF":3.7,"publicationDate":"2025-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145106125","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Mechanistic investigation of chemically assisted magnetic compound fluid polishing of titanium capillary tube inner surfaces","authors":"Yufeng Xue ,&nbsp;Wentao Zhang ,&nbsp;Hanqiang Wu ,&nbsp;Yangke Zheng ,&nbsp;Gengzhuo Li ,&nbsp;Yongbo Wu","doi":"10.1016/j.precisioneng.2025.09.012","DOIUrl":"10.1016/j.precisioneng.2025.09.012","url":null,"abstract":"<div><div>The inner surface quality of titanium capillary tubes is directly linked to the precision and reliability of associated biomedical devices. However, the chemical stability of titanium and the spatial constraints of capillary structures present significant challenges for inner-surface finishing. In this study, the chemically assisted magnetic compound fluid (CAMCF) polishing process was systematically investigated with a focus on its underlying mechanism. This process couples abrasive motion under an applied magnetic field with in-situ chemical reactions triggered by hydrogen peroxide (H₂O₂) and malic acid (MA), enabling synergistic surface softening and material removal. Combined-condition and single-variable experiments were conducted to systematically evaluate the effects of H₂O₂ and MA concentrations on surface roughness <em>Ra</em> and material removal rate (MRR, defined as the removed material volume per unit time, μm³/h). Under optimized conditions (7.2 wt% H₂O₂ and 5 wt% MA), the CAMCF process achieved a maximum MRR of 42.78 μm³/h, reducing the surface roughness from <em>Ra</em> 3.10 μm to <em>Ra</em> 65.3 nm. To elucidate the material removal mechanism in CAMCF processes of titanium, a series of characterization techniques were employed, including surface morphology observation, static etching, Raman spectroscopy, and nano-scratching tests. Results revealed that under synergistic chemical conditions, a porous and structurally weakened titanium oxide film was formed on the surface, exhibiting reduced mechanical strength and facilitating brittle fracture and efficient removal by abrasive particles. Based on these findings, a dynamic “oxidation–complexation–removal–regeneration” mechanism is proposed, which effectively describes the coupling among surface modification, oxide layer renewal, and mechanical abrasion. This mechanistic perspective constitutes the main originality of this work, providing fundamental understanding for CAMCF process optimization and offering guidance for the development of high-precision polishing techniques for the inner surfaces of titanium capillary components.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 179-194"},"PeriodicalIF":3.7,"publicationDate":"2025-09-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145106126","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A novel point cloud-based method for electrode wear simulation in electro-discharge machining of complex geometries","authors":"Hongfei Wei,&nbsp;Jing Zhou,&nbsp;Long Cheng,&nbsp;Bowen Shen,&nbsp;Xiaoming Kang","doi":"10.1016/j.precisioneng.2025.09.010","DOIUrl":"10.1016/j.precisioneng.2025.09.010","url":null,"abstract":"<div><div>Electro-discharge machining (EDM) is widely used in mold and aerospace manufacturing, but inevitable electrode wear can affect the geometric accuracy of machined parts. Existing wear prediction methods mainly focus on hole drilling and milling, with no studies addressing multi-axis EDM for complex electrode shapes. This paper proposed a point cloud-based method for simulating and predicting electrode wear. First, the mechanism and patterns of electrode wear for complex-shaped electrodes were investigated through discharge craters and continuous-pulse experiments. Then, the point cloud method was used to discretize the workpiece and electrode models, followed by kinematic planning. Discharge points were determined based on the minimum discharge distance, and material removal and electrode wear were simulated according to wear patterns. To improve simulation efficiency, a KD-Tree search algorithm was employed to accelerate the identification of discharge points, and a parallel discharge strategy was proposed for high-density point clouds. The results show that in two-dimensional simulations, electrode axial length and corner feature errors are under 0.1 mm, and the KD-Tree algorithm, with a point cloud density of 400 points/mm², improves search efficiency by 78 times compared to sequential searching. The 3D simulation of blisk flow channel machining demonstrates high consistency with the actual electrode wear morphology. With a point cloud density of 125 points/mm³, the parallel discharge strategy increases simulation efficiency by more than 225 times compared to single-point material removal. The proposed method can efficiently and accurately predict the electrode shape for various electrical parameters, arbitrary electrode shapes, and any motion path in EDM.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 131-146"},"PeriodicalIF":3.7,"publicationDate":"2025-09-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145106128","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A positioning error prediction method for complex surface milling based on multi-source heterogeneous data fusion and deep interpretable learning","authors":"Jianying Han ,&nbsp;Hua Yang ,&nbsp;Xihuai Lu ,&nbsp;Boren Hou ,&nbsp;Shicheng Yi ,&nbsp;Zirui Li","doi":"10.1016/j.precisioneng.2025.09.002","DOIUrl":"10.1016/j.precisioneng.2025.09.002","url":null,"abstract":"<div><div>The machining of thin-walled parts with complex surfaces, such as aero-engine blades, poses substantial challenges due to their intricate geometry, flexibility, and the multi-axis kinematics involved. Ensuring high precision in such milling processes is crucial, as minute positioning errors can detrimentally affect aerodynamic performance and structural reliability. In this study, we propose a novel Residual-LSTM-iTransformer Network (RLTN) framework to predict and interpret machining positioning errors for complex surfaces under dynamic milling conditions. The RLTN model fuses multi-source heterogeneous data, including low-cost sensor signals (e.g. milling torque), machining parameters (spindle speed, feed rate, depth of cut, etc.), and workpiece attributes (local stiffness and curvature radius), into a unified deep learning architecture. Through hierarchical feature extraction via residual convolutional layers, sequential LSTM units, and a parameter-conditioned transformer, the model captures both local and long-range dependencies in the cutting process. A SHAP-based interpretability module is integrated, enabling quantitative attribution of error predictions to the process and material parameters. The RLTN is evaluated on high-precision blade milling datasets encompassing various cutting conditions. Experimental results demonstrate that the proposed approach outperforms conventional physical models and baseline learning methods in prediction accuracy. Moreover, the RLTN provides deep insight into the influence of key factors on machining errors, facilitating a better understanding of the error-generation mechanism. This interpretable framework paves the way for a closed-loop “predict-interpret-optimize” strategy in high-precision manufacturing, allowing process parameters to be optimized not only for minimum error but also for reduced uncertainty and improved consistency in manufacturing thin-walled parts with complex surface.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 147-167"},"PeriodicalIF":3.7,"publicationDate":"2025-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145106127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}