Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第3页

SelfA-inclinometer: A novel device for evaluating the accuracy of tilting rotary tables in five-axis machine tools 自动倾斜仪：一种评估五轴机床倾斜转台精度的新装置

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-04-10 DOI: 10.1016/j.precisioneng.2025.04.009

Naoyuki Takahashi , Tsukasa Watanabe , Kazuteru Tobita

{"title":"SelfA-inclinometer: A novel device for evaluating the accuracy of tilting rotary tables in five-axis machine tools","authors":"Naoyuki Takahashi , Tsukasa Watanabe , Kazuteru Tobita","doi":"10.1016/j.precisioneng.2025.04.009","DOIUrl":"10.1016/j.precisioneng.2025.04.009","url":null,"abstract":"<div><div>In this study, we developed a compact, high-precision angle measuring device called the “SelfA-inclinometer”. The purpose of the SelfA-inclinometer is to enhance the performance of a tilting rotary table, a crucial component of five-axis machine tools responsible for positioning the tilt and rotation axes. This device measures the tilt angle of the working surface of the table, where a workpiece is mounted, as it rotates around the tilt axis. The measurements are highly accurate, providing indicators for improving design, machining, and assembly accuracy. The measuring device comprises a compact self-calibrating rotary encoder (the SelfA), a rotating device, and a precision level. It mounts directly onto the surface to be measured and can measure a wide 360° range with precision on the order of an arc-second (1 arc-second:″ being 1/3600th of a degree). Comparing it with a national standard angle calibration system as a higher-level device revealed a measurement accuracy of ±2 arc-sec or better. Simultaneous measurements were conducted to compare the results with those obtained from a conventional measuring device like a rotary encoder, assessing the validity and superiority of the measurement.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 38-51"},"PeriodicalIF":3.5,"publicationDate":"2025-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143851983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Surface quality and formation mechanism of Ti-6Al-4V by in-situ laser-assisted ball-burnishing 原位激光辅助球磨Ti-6Al-4V表面质量及形成机理

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-04-09 DOI: 10.1016/j.precisioneng.2025.04.006

Siwei Meng , Jifeng Zhang , Deshi Kong , Guangfeng Shi , Xin Wang , Hongda Li

{"title":"Surface quality and formation mechanism of Ti-6Al-4V by in-situ laser-assisted ball-burnishing","authors":"Siwei Meng , Jifeng Zhang , Deshi Kong , Guangfeng Shi , Xin Wang , Hongda Li","doi":"10.1016/j.precisioneng.2025.04.006","DOIUrl":"10.1016/j.precisioneng.2025.04.006","url":null,"abstract":"<div><div>Titanium alloys are widely used in aerospace, rail transportation, and other fields. As components operating in complex environments, high surface finish and excellent fatigue resistance are required. Ball-burnishing is one of the common techniques for surface strengthening of workpieces. However, when dealing with high-strength, low-plasticity materials, ball-burnishing faces issues such as poor surface quality, inadequate strengthening effects, and severe tool wear. Therefore, this study proposes an in-situ laser-assisted ball-burnishing (In-LAB) technology. Unlike the laser pre-assisted ball-burnishing, in this technology, the laser beam is directed to the workpiece machined area by passing through the transparent diamond ball-burnishing tool. The heating and burnishing effects act simultaneously on the workpiece, efficiently utilizing the laser energy and avoiding unnecessary thermal damage. This study has established a finite element model (FEM) for In-LAB and found that, compared to normal ball-burnishing, the maximum residual compressive stress in the workpiece surface increased by 131 %. Through a Taguchi experiment with the objective of minimizing surface roughness, the relevant parameters are: rotation speed 300 r/min, press amount 0.05 mm, feed rate 0.05 mm/r, and laser power 25 W. Compared to normal ball-burnishing, the surface roughness decreased by 51 %, the surface hardness increased by 7.5 %, and tool wear was significantly reduced. This technology combines in-situ laser-assisted machining with ball-burnishing technology. Related research results indicate that it can provide lower surface roughness, higher residual compressive stress, and greater surface hardness. In-LAB technology offers a new approach for surface finishing and strengthening of hard-to-machine materials, expanding the application scope of In-LAM technology.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 151-162"},"PeriodicalIF":3.5,"publicationDate":"2025-04-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143873385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Model-free tool path modification in ultra-precision diamond turning of freeform surfaces using iterative learning control 基于迭代学习控制的自由曲面超精密金刚石车削无模型刀轨修正

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-04-04 DOI: 10.1016/j.precisioneng.2025.04.003

Xinquan Zhang, Hao Wu, Yangqin Yu, Zelong Jia, Xiangyuan Wang, Mingjun Ren, Limin Zhu

{"title":"Model-free tool path modification in ultra-precision diamond turning of freeform surfaces using iterative learning control","authors":"Xinquan Zhang, Hao Wu, Yangqin Yu, Zelong Jia, Xiangyuan Wang, Mingjun Ren, Limin Zhu","doi":"10.1016/j.precisioneng.2025.04.003","DOIUrl":"10.1016/j.precisioneng.2025.04.003","url":null,"abstract":"<div><div>With the aid of the commercial ultra-precision machine tool, the tool servo diamond turning process provides stable and deterministic material removal, meeting the demands for mass production of high-end freeform surface optics. However, in relatively high-speed applications, the machining accuracy is limited by the heavy servo axes, even within the working bandwidth of −3 dB. Therefore, to facilitate the industrial adoption of diamond turning, a cost-effective and user-friendly programming strategy is essential for enhanced motion accuracy in commercial machine tools. This work proposes a model-free tool path modification strategy using iterative learning control (ILC), which adjusts tool path amplitude iteratively based on the error data of servo axes. By aligning the geometry-based tool path with the dynamic properties of the servo axes, such adjustments reduce tracking errors caused by frequency-based phase lag and amplitude variation effects in high-speed applications. Additionally, this strategy eliminates the need for additional complex equipment or model identification, making it well-suited for industrial applications. The fundamental principle of the proposed method is first presented, followed by a demonstration of its convergence. A series of validation experiments are conducted through trajectory tracking and diamond turning. Experimental results indicate that trajectory tracking achieves a reduction of approximately 60 % in peak-to-valley error and about 80 % in root-mean-square error with the proposed strategy. For diamond turning experiments on sinusoidal grid surfaces, the form error is significantly reduced from 903 nm to 527 nm. Further experiments confirm the long-term effectiveness of the ILC-based tool path modification strategy in high-speed applications, offering valuable insights for industrial use.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 736-748"},"PeriodicalIF":3.5,"publicationDate":"2025-04-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143799400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Enhancing the efficiency and determinacy of in-situ monoscopic phase measuring deflectometry by Bayesian approach 利用贝叶斯方法提高原位单镜测相偏转的效率和准确性

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-04-03 DOI: 10.1016/j.precisioneng.2025.04.002

Yunuo Chen, Wei Lang, Ting Chen, Xingman Niu, Xiangchao Zhang

{"title":"Enhancing the efficiency and determinacy of in-situ monoscopic phase measuring deflectometry by Bayesian approach","authors":"Yunuo Chen, Wei Lang, Ting Chen, Xingman Niu, Xiangchao Zhang","doi":"10.1016/j.precisioneng.2025.04.002","DOIUrl":"10.1016/j.precisioneng.2025.04.002","url":null,"abstract":"<div><div>Phase measuring deflectometry is a promising technique for in-situ measurements of optical surfaces. However, the cumbersome system calibration remains a major negative factor limiting its measurement efficiency and determinacy in practical applications. Especially when ray tracing and numerical optimization are employed to assist system calibration and form reconstruction, numerical instability and local optimum problems arise. To address these challenges, a holistic calibration and form reconstruction framework is proposed based on the Bayesian approach. The efficiency decrement caused by sophisticated system calibration is resolved via automatic camera calibration and spherical mirror-based geometrical calibration. The instability issue is tackled by incorporating constraints derived from prior distributions of configuration parameters. Furthermore, a complete uncertainty propagation chain is established. Experimental results demonstrate that the proposed method boosts efficiency while guaranteeing robustness, and enhances the determinacy of measurement results.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":""},"PeriodicalIF":3.5,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143791962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Damage-free and ultra-smooth chemical mechanical polishing of calcium fluoride crystal surfaces 氟化钙晶体表面无损伤超光滑化学机械抛光

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-04-01 DOI: 10.1016/j.precisioneng.2025.04.001

Jiaqi Li , Haixiang Hu , Guanbo Qiao , Erhui Qi , Yang Bai , Fukun Li , Zhenyu Liu , Lingzhong Li , Zhifan Yang , Xuejun Zhang

{"title":"Damage-free and ultra-smooth chemical mechanical polishing of calcium fluoride crystal surfaces","authors":"Jiaqi Li , Haixiang Hu , Guanbo Qiao , Erhui Qi , Yang Bai , Fukun Li , Zhenyu Liu , Lingzhong Li , Zhifan Yang , Xuejun Zhang","doi":"10.1016/j.precisioneng.2025.04.001","DOIUrl":"10.1016/j.precisioneng.2025.04.001","url":null,"abstract":"<div><div>Calcium fluoride (CaF<sub>2</sub>) crystal is an important optical material in ultraviolet lithography systems. The low hardness of CaF<sub>2</sub> results in surface damage and poor roughness during surface processing, which is a primary reason for laser-induced damage and can reduce its lifetime. This paper investigates the removal characteristics of CaF<sub>2</sub> crystal materials using chemical mechanical polishing (CMP) technology to achieve damage-free and ultra-smooth surface. The interaction between cerium oxide, water, and CaF<sub>2</sub> crystals is analyzed through molecular dynamics simulations to reveal the chemical reaction mechanisms during the CMP process, as well as the chemical action between abrasive and CaF<sub>2</sub> substrate is revealed. The relationship model for the indentation depth in CaF<sub>2</sub> is established. Based on this model, methods for damage restrain and ultra-smooth are proposed. Experimental results show that the theoretical model is correct and the balance between chemical removal and mechanical removal is achieved. Finally, a damage-free and ultra-smooth surface with surface finish grade of 0/0 and surface roughness better than 0.1 nm RMS is obtained. The research findings offer a robust framework for the ultra-precision polishing of CaF<sub>2</sub> crystals and provide critical technical support for their applications in ultraviolet (UV) optical systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 725-735"},"PeriodicalIF":3.5,"publicationDate":"2025-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143791850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Advancing gear manufacturing: A comprehensive review of gear skiving technology 推进齿轮制造：齿轮削削技术的全面回顾

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-31 DOI: 10.1016/j.precisioneng.2025.03.033

Shuaijie Zhao , Yuhong Du , Jia Li , Yongquan Jin , Shuai Wang , Xinlong Li

{"title":"Advancing gear manufacturing: A comprehensive review of gear skiving technology","authors":"Shuaijie Zhao , Yuhong Du , Jia Li , Yongquan Jin , Shuai Wang , Xinlong Li","doi":"10.1016/j.precisioneng.2025.03.033","DOIUrl":"10.1016/j.precisioneng.2025.03.033","url":null,"abstract":"<div><div>Gear skiving technology is a highly efficient machining method compared to other gear manufacturing techniques. This paper presents a comprehensive review of gear skiving technology. First, the research progress in this field is introduced. Then, key research areas are systematically summarized, including machining principles, cutting process simulation and mathematical modeling, the influence of parameters on the process, tool design, error analysis and correction, tool manufacturing, tool life and wear, as well as related research methods and achievements. Furthermore, this review identifies several critical problems in current studies, such as the limited accuracy of simulation models in describing actual machining processes, the lack of consideration of the interaction between parameters, and the insufficient generality of tool design approaches. Finally, future research directions are outlined, including the development of more accurate multi-physics coupled simulation models, the realization of real-time error compensation, and the integration of artificial intelligence for tool wear monitoring and lifespan prediction. This paper makes up for the gaps in the field of gear skiving technology reviews, not only comprehensively presenting the development history, main research directions, and current challenges of this technology, but also providing a valuable reference for researchers and engineering applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 657-674"},"PeriodicalIF":3.5,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143785693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Real-time control parameter update and stochastic tool wear monitoring framework for nonlinear micro-milling process 非线性微铣削过程控制参数实时更新及刀具磨损随机监测框架

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-29 DOI: 10.1016/j.precisioneng.2025.03.031

Pengfei Ding , Zhijie Liu , Xianzhen Huang , Chengying Zhao , Yuxiong Li

{"title":"Real-time control parameter update and stochastic tool wear monitoring framework for nonlinear micro-milling process","authors":"Pengfei Ding , Zhijie Liu , Xianzhen Huang , Chengying Zhao , Yuxiong Li","doi":"10.1016/j.precisioneng.2025.03.031","DOIUrl":"10.1016/j.precisioneng.2025.03.031","url":null,"abstract":"<div><div>In modern manufacturing, micro-milling technology encounters challenges such as unpredictable tool wear and dynamic variations in cutting parameters, which adversely affect machining accuracy and safety. This study presents a nonlinear micro-milling mechanical model that combines tool runout, chip separation, stochastic tool wear, and tool-tip trajectory change to accurately predict cutting forces. The Hippopotamus optimization algorithm is introduced to address the particle impoverishment problem in coefficient recognition and improve the real-time update efficiency of the cutting model. Additionally, a DASAT network model combining Recurrent Neural Networks and Convolutional Neural Networks with an attention mechanism is proposed for more precise tool wear prediction, achieving lower prediction error rates compared to LSTM/TCN-based methods. By correlating the predicted tool state with the wear threshold, the system can perform active maintenance interventions to reduce tool failures. The experiment demonstrates that the machining based on the proposed framework can improve surface accuracy while maintaining a stable cutting state, ensure the safety and reliability of the micro-milling process, and provide strong support for process optimization and equipment maintenance.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 638-656"},"PeriodicalIF":3.5,"publicationDate":"2025-03-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143767963","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Magnetic characteristics and experimental investigations of eccentric magnetic honing for thick-walled, small-aperture stainless steel pipes 厚壁小口径不锈钢管偏心磁珩磨的磁特性及实验研究

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-28 DOI: 10.1016/j.precisioneng.2025.03.021

Zhao-kun Yan , Yong-gang Li , Sheng-qiang Yang , Xiu-hong Li , Xin-gai Yao , Tong-yi Liu , Zhe Tong

{"title":"Magnetic characteristics and experimental investigations of eccentric magnetic honing for thick-walled, small-aperture stainless steel pipes","authors":"Zhao-kun Yan , Yong-gang Li , Sheng-qiang Yang , Xiu-hong Li , Xin-gai Yao , Tong-yi Liu , Zhe Tong","doi":"10.1016/j.precisioneng.2025.03.021","DOIUrl":"10.1016/j.precisioneng.2025.03.021","url":null,"abstract":"<div><div>To tackle the polishing challenges posed by the inner surface of thick-walled, small-aperture stainless steel pipe, the concept of eccentric magnetic honing technology is proposed. The force and motion of the process are realized by the attraction of the outer magnetic pole to a pair of permanent magnets inside the magnetic tool. In order to obtain the magnetic force and torque information of the permanent magnet inside the magnetic tool quickly and accurately, the equivalent magnetic charge method is used to establish the numerical model, and the magnetic force and torque expressions of the outer magnetic pole in translational and rotational motion modes are further derived. On this basis, the finite element model is established and the numerical model for validation. The results show that the modified equivalent magnetic charge model can predict the magnetic force quickly and accurately. Then, the influence of the outer magnetic pole size on the magnetic force and torque is studied, and the influence on the driving point is further explored by combining the kinematic equation. Finally, the preliminary process experiments show that the process can complete the polishing of thick-walled, small-aperture stainless steel inner surfaces.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 700-724"},"PeriodicalIF":3.5,"publicationDate":"2025-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143791849","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Experimental study on in-situ laser-assisted diamond turning of single crystal germanium 原位激光辅助金刚石车削单晶锗的实验研究

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-28 DOI: 10.1016/j.precisioneng.2025.03.032

Chunyang Zou , Guangfeng Shi , Siwei Meng , Deshi Kong , Dong Yao

{"title":"Experimental study on in-situ laser-assisted diamond turning of single crystal germanium","authors":"Chunyang Zou , Guangfeng Shi , Siwei Meng , Deshi Kong , Dong Yao","doi":"10.1016/j.precisioneng.2025.03.032","DOIUrl":"10.1016/j.precisioneng.2025.03.032","url":null,"abstract":"<div><div>For typical optical crystals like silicon and germanium, conventional ultra-precision machining ensures high machining quality but significantly reduces efficiency. Consequently, in-situ laser-assisted turning has emerged as a viable alternative. This study focuses on the single crystal germanium (111) surface and establishes a temperature-dependent model for calculating the critical cutting thickness of ductile-to-brittle transition. Orthogonal experiments were conducted on in-situ laser-assisted turning, followed by variance analysis, signal-to-noise ratio analysis, and mean analysis of the post-machining surface roughness. The contribution of each machining parameter to reducing surface roughness is as follows: rake angle > laser power > spindle speed > feed rate > cutting depth. The optimized parameter combination identified is: rake angle of −35°, laser power of 10 W, spindle speed of 2000 r/min, feed rate of 1 μm/r, and cutting depth of 1 μm. Machining with these parameters reduced surface roughness by 22.4 % compared to conventional machining under the same conditions, resulting in a surface free of fractures and pits.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 608-622"},"PeriodicalIF":3.5,"publicationDate":"2025-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143761132","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Theoretical and experimental characterization of an active ferrofluid pad bearing for nanopositioning 一种用于纳米定位的主动铁磁流体垫轴承的理论和实验表征

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-28 DOI: 10.1016/j.precisioneng.2025.03.018

Pongsiri Kuresangsai, Matthew O.T. Cole, James Moran

{"title":"Theoretical and experimental characterization of an active ferrofluid pad bearing for nanopositioning","authors":"Pongsiri Kuresangsai, Matthew O.T. Cole, James Moran","doi":"10.1016/j.precisioneng.2025.03.018","DOIUrl":"10.1016/j.precisioneng.2025.03.018","url":null,"abstract":"<div><div>The use of actively controlled smart fluids for high-precision manipulation holds significant promise. This paper introduces a novel active ferrofluid pad bearing capable of controlling motion of a platform with nano-scale accuracy. The actuation force and stiffness of the bearing are generated through the fluid magnetization pressure, which can be controlled precisely by adjusting the current through an electromagnetic coil. The combination of passive and active flow properties of the ferrofluid enable the system to achieve fast and precise motion without the need for complicated control strategies or system design, thereby providing a simple and cost-effective solution. A theoretical model of the active bearing system, including both viscous and magnetic pressure fields, is derived from first principles and validated through experimental testing. Based on the modeling results, an optimized PI control system is proposed to achieve a suitable balance of position error minimization and noise attenuation. The experimental results show the capability for motion control within 5 nanometers resolution. The results also show that matching the system and controller design with the viscosity of the ferrofluid is crucial for achieving high performance, as the passive damping effects from the fluid can be leveraged to enhance stability and disturbance rejection.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 596-607"},"PeriodicalIF":3.5,"publicationDate":"2025-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143761131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0