Honglie Ma , Qingkai Shen , Xiaolei Deng , Congbin Yang , Hongyao Shen
{"title":"Study on the static-dynamic characteristics of hydrostatic module based on membrane fluid-structure coupling","authors":"Honglie Ma , Qingkai Shen , Xiaolei Deng , Congbin Yang , Hongyao Shen","doi":"10.1016/j.precisioneng.2026.01.002","DOIUrl":"10.1016/j.precisioneng.2026.01.002","url":null,"abstract":"<div><div>To address the issue of poor predictability in the static and dynamic characteristics of membrane-type hydrostatic module, this study proposes a load capacity solution method, accounting for fluid-structure interaction effects of the membrane. The oil circuit flow resistance model is refined, enabling the accurate determination of oil recess pressure under arbitrary oil film thickness variations. Based on this, a static and dynamic characteristic analysis model for the hydrostatic module is established, investigating the effects of parameters such as oil film thickness and throttle gap on its static and dynamic performance. Finally, a multi-field coupled simulation model is developed to analyze the interaction between oil recess pressure and membrane deformation. Additionally, a high-precision experimental testing platform for hydrostatic modules is designed and implemented, effectively validating the proposed method. This study provides valuable guidance for the practical application of membrane-type restricting devices.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 160-171"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928262","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Jerk-segmented adaptive iterative learning control for ball screw feed systems","authors":"Hongda Liu, Wentie Niu, Yonghao Guo","doi":"10.1016/j.precisioneng.2026.01.004","DOIUrl":"10.1016/j.precisioneng.2026.01.004","url":null,"abstract":"<div><div>Feedforward compensation can reduce dynamic errors and improve tracking accuracy and response speed, but residual errors often exist in engineering applications. This study proposes a jerk-segmented adaptive iterative learning control (ILC) strategy to address this limitation. The surrogate model's feedforward compensation generates high-quality initial inputs. The trajectory is divided into segments based on jerk. Within each segment, tracking errors are filtered using a zero-phase Butterworth filter to extract their low-frequency trend. A nonlinear PID-type learning law is then applied: the proportional term acts on the raw error with nonlinear scaling and saturation, while the integral and derivative terms operate on the filtered trend to improve stability. All control parameters are adaptively adjusted based on the filtered error's energy. Simulation and experimental results under 10 kHz sampling show that the proposed method significantly improves tracking accuracy. Compared with norm-optimal ILC and the case without ILC, the technique reduces steady-state RMSE by up to 57.40 % and peak tracking error by up to 38.19 % during high-dynamic motion phases. The proposed method ensures consistent performance across simulation and physical experiments.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 57-77"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Research on the acoustic softening effect of ultrasonic vibration-assisted cutting of nickel-based superalloys","authors":"Yihang Fan , Zhongyue Liu , Zhaopeng Hao","doi":"10.1016/j.precisioneng.2026.01.005","DOIUrl":"10.1016/j.precisioneng.2026.01.005","url":null,"abstract":"<div><div>During ultrasonic vibration-assisted cutting, the application of an ultrasonic energy field induces material softening in metals, thereby reducing the cutting force. This technique thus offers significant advantages in the machining of nickel-based super alloys. However, the microscopic mechanisms underlying metal deformation under ultrasonic effects remain not fully understood. To address this, the present study employs molecular dynamics simulations to investigate the acoustic softening effect in nickel-based superalloys at the microscale, focusing on the plastic deformation zone during ultrasonic vibration cutting. Based on dislocation theory, the influence of ultrasonic vibration on dislocation density, potential energy barriers, and dislocation mobility is systematically analyzed, enabling a theoretical exploration of the microscopic mechanisms responsible for acoustic softening. Analysis of dislocation density and motion velocity from the simulations indicates that ultrasonic vibration promotes dislocation movement and annihilation while reducing dislocation entanglement and pile-up. Furthermore, comparative turning experiments between ultrasonic-assisted and conventional turning demonstrate that the application of ultrasonic vibration leads to a reduction in internal dislocation density and fewer dislocation obstacles within the workpiece. These findings provide enhanced insight into the microstructural mechanisms underlying the acoustic softening effect induced by ultrasonic vibration.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 45-56"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A comparative study of precision abrasive machining using a customized novel additively manufactured flexible tool","authors":"Dawid Zieliński , Tesfaye Mengesha Medibew , Sisay Workineh Agebo , Mariusz Deja","doi":"10.1016/j.precisioneng.2026.01.008","DOIUrl":"10.1016/j.precisioneng.2026.01.008","url":null,"abstract":"<div><div>Currently, research is investigating how advancements in abrasive machining, a post-processing method in manufacturing, can benefit from additive manufacturing (AM) technology. The study evaluated the machining performance of flexible abrasive tools produced by mSLA with ABS-like resin + and ABS-like resin V2, FDM with ABS and TPU, and SLS with PA12 industrial for processing 41Cr4 alloy steel samples. The portable 5-axis CNC milling machine conducted extensive machining trials on 41Cr4 alloy steel samples at various depths of cut (0.1–0.3 mm) to assess material removal rates, surface quality parameters, and tool wear behavior. The study investigated how technology affected specimen material loss through surface quality evaluation by measuring 2D (Wt) and 3D (Sa, Sz) roughness and waviness parameters using a 3D optical profilometer. The research showed TPU tools delivered superior surface quality but achieved lower material removal rates. The mass material removal rates of SLS-printed PA12 industrial tools exceeded those of ABS tools while maintaining stability under machining conditions. The performance of resin-based tools declined due to excessive tool wear, which resulted from their brittle nature. The study also suggested specific applications for the materials, indicating where they are most effective for removing aggressive materials. Resin-based tools excel in shallow-depth precision work, while TPU tools are well-suited for precision finishing tasks. The research reveals critical performance trade-offs in precision abrasive machining operations, while demonstrating the ability of AM to generate customized abrasive tools.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 140-159"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145928261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yujie Liu , Lingzhong Li , Fukun Li , Guanbo Qiao , Haixiang Hu , Yang Bai , Xuejun Zhang
{"title":"Response of surface micro-topography of monocrystalline silicon to physical characteristics of polishing pads","authors":"Yujie Liu , Lingzhong Li , Fukun Li , Guanbo Qiao , Haixiang Hu , Yang Bai , Xuejun Zhang","doi":"10.1016/j.precisioneng.2026.01.012","DOIUrl":"10.1016/j.precisioneng.2026.01.012","url":null,"abstract":"<div><div>X-ray mirrors commonly employ monocrystalline silicon as the core optical element, whose surface roughness directly impacts the transmission efficiency and spot quality of the light source system. For X-ray mirrors, an initial polishing stage employing a polishing pad, to achieve superior surface roughness under conditions of high-efficiency material removal and figure convergence, thereby enabling high-precision and highly efficient manufacturing. This study investigates the correlation mechanism between polishing pad characteristics and the surface roughness of monocrystalline silicon, this study established a contact mechanics model for the polishing pad monocrystalline silicon interface. Systematic experiments and simulation analyses revealed the governing rules of asperity morphology on surface quality. The results indicate that polishing pads with a high elastic modulus exhibit superior dynamic conformity to the surface topography, a larger elastic contact ratio, more concentrated contact pressure, and more uniform local pressure. Polishing pads with low surface roughness demonstrate excellent spatial uniformity in asperity height distribution, facilitating the formation of an effective support network where asperities undergo coordinated deformation, leading to uniform stress distribution during polishing. Under optimized colloidal silica slurry concentration, the polishing pad featuring high elastic modulus and low surface roughness yielded the best monocrystalline silicon surface quality. Surface roughness measured by White Light Interferometry (Zogo 10X) reached 0.237 nm, while characterization via Atomic Force Microscopy (AFM) achieved 0.0807 nm. This study provides guidance for the selection and optimization of polishing pads in the manufacturing of high-precision optical components.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 221-234"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145978611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zijun Zhu , Xianglong Zhu , Yindi Cai , Renke Kang , Shuli Wang , Quanbao Sheng
{"title":"Nonlinear vibration analysis and global sensitivity-driven optimization of large-length-to-diameter ratio grinding spindles under mass eccentricity excitation","authors":"Zijun Zhu , Xianglong Zhu , Yindi Cai , Renke Kang , Shuli Wang , Quanbao Sheng","doi":"10.1016/j.precisioneng.2026.01.022","DOIUrl":"10.1016/j.precisioneng.2026.01.022","url":null,"abstract":"<div><div>Grinding spindles with a large length-to-diameter (L/D) ratio exhibit low structural stiffness and are susceptible to mass eccentricity, which can lead to dynamic instability. To accurately predict their vibration characteristics, this study establishes a coupled dynamic model of the shell, core shaft, and bearing system, incorporating structural flexibility and nonlinear excitation. The model explicitly accounts for the excitation induced by the mass eccentricity inherent in the coupling structure of the spindle. Using a combined approach of Morris global sensitivity analysis and multiple regression, the influence laws and weight coefficients of bearing stiffness, material properties, and eccentric mass on the dynamic response are investigated both qualitatively and quantitatively. Experimental validation confirms a high consistency between the measured and predicted vibration displacements and dominant frequencies. The results indicate that rotor eccentric mass and rotational speed are the dominant factors affecting radial vibration displacement, with eccentric mass being the most sensitive parameter. Furthermore, mass eccentricity excitation is found to prominently excite vibrations at the 10th harmonic frequency. Based on the sensitivity analysis, an optimal material combination is identified, which achieves a 5.1 % reduction in dynamic vibration amplitude compared to the original configuration. This work provides a validated methodology for optimizing the design of high-precision grinding spindles and predicting their dynamic performance at the design stage, particularly for spindles with large L/D ratios under mass eccentricity excitation.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"99 ","pages":"Pages 329-345"},"PeriodicalIF":3.7,"publicationDate":"2026-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146023463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Weipeng Li , Weidong Yu , Zhengyan Dai , Yukai Zhu , Guangyuan Wang , Xiantao Li
{"title":"Linearization design of a XY stage based on hybrid reluctance actuators","authors":"Weipeng Li , Weidong Yu , Zhengyan Dai , Yukai Zhu , Guangyuan Wang , Xiantao Li","doi":"10.1016/j.precisioneng.2025.11.027","DOIUrl":"10.1016/j.precisioneng.2025.11.027","url":null,"abstract":"<div><div>The nonlinearity of hybrid reluctance actuators (HRA) significantly restricts their applications in XY stage requiring long stroke, high bandwidth, and high precision. This paper presents an improved design methodology and experimental verification focusing on nonlinearity reduction of a XY stage based on hybrid reluctance actuators (HRA-XYS). Initially, the primary sources of nonlinearity in conventional HRA were analyzed, leading to a magnetic flux topological optimization approach for nonlinearity mitigation. Subsequently, a comprehensive dynamic model incorporating nonlinear characteristics was established, followed by a nonlinear optimization framework for key parameter design. Based on the optimization results, a prototype was fabricated for comprehensive performance evaluation and a proportional-derivative (PD)-based feedback compensator was implemented to extend bandwidth by actively modifying system stiffness and damping. Experimental results demonstrate significant improvements: nonlinearity <3.2 %, cross-axis coupling <0.4 %, positioning accuracy better than 0.1 μm, working stroke exceeding ±500 μm, and bandwidth of 375 Hz. These achievements verify the effectiveness of the proposed linearity-oriented design methodology and underscore its advance compared to similar works, indicating that the optimized actuator exhibits superior comprehensive performance in precision, stroke capability, and dynamic response characteristics.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 178-190"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Tilt-translational analysis and enhanced LQG control with a virtual sensor fusion configuration: in application to ultra-low frequency seismic vibration isolation","authors":"X. Yin , Z. Zhang , W. Bai, J. Lian, G. Zhao","doi":"10.1016/j.precisioneng.2025.12.004","DOIUrl":"10.1016/j.precisioneng.2025.12.004","url":null,"abstract":"<div><div>The goal of this study is to explore the underlying mechanisms to achieve ultra-low frequency active seismic vibration isolation, with a focus on dynamic analysis and multi-input-multi-output control algorithms. To this purpose, a dedicated seismic isolation system is constructed. A theoretical study is firstly performed in order to accurately derive the dynamic model of the system. This is done by individually modelling the dynamics of each sub-system and then connecting the sub-systems via a feedback approach. With the derived model, the couplings between the inertial sensor and the active platform are clearly presented. As for the controller, an LQG controller augmented with a virtual sensor fusion control scheme is proposed. In such a configuration, the influence induced by the high-frequency flexible modes can be suppressed so that the real states of the system can be accurately predicted by the Kalman filter. Experiments are then conducted for validating the theoretical analysis and examining the vibration isolation performance. A reduction of the transmitted motion of up to 60 dB in a frequency range from 0.1 Hz to 10 Hz is obtained, where the 60 dB reduction is achieved around the resonances of the system.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 191-205"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Synergistic mechanism of green corrosion inhibitors COS and CMC-Na in Co electrochemical mechanical polishing","authors":"Chunlin Cai, Min Zhong, Meirong Yi, Xiaobing Li, Jianfeng Chen, Wenhu Xu","doi":"10.1016/j.precisioneng.2025.12.008","DOIUrl":"10.1016/j.precisioneng.2025.12.008","url":null,"abstract":"<div><div>Electrochemical mechanical polishing (ECMP), through the introduction of electric field, promotes the chemical reaction during polishing. However, the addition of electric field will accelerate the oxidative corrosion, at this time the effective corrosion inhibitor must be added in the polishing solution. Nevertheless, most traditional corrosion inhibitors are toxic and inhibition efficiency is low. In order to meet this technical challenge, this paper investigates the effect of two green corrosion inhibitors, chitosan oligosaccharide (COS) and carboxymethylcellulose sodium (CMC-Na), on Co ECMP, and compares them with the traditional inhibitor TAZ. The results show that when COS and CMC-Na are added at the same time, the polished Co surface quality can be greatly improved, and the surface roughness decreases by 94.6 %. It indicates that adding COS and CMC-Na simultaneously can play the best corrosion inhibition effect and achieve the best surface quality. The synergistic behavior and action mechanism of COS/CMC-Na are analyzed by polishing experiments, static corrosion, electrochemical tests, XPS, and AFM. This study provides a reference for the development of green polishing solutions for Co ECMP.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 108-119"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"NURBS-based freeform surface reconstruction from sparse and unstructured contact measurement data using iterative control point optimization","authors":"Zhifu Ma, Yong Lu, Kenan Deng","doi":"10.1016/j.precisioneng.2025.11.025","DOIUrl":"10.1016/j.precisioneng.2025.11.025","url":null,"abstract":"<div><div>High-precision surface reconstruction is crucial for freeform surface measurement, and the Non-Uniform Rational B-Spline (NURBS) surface fitting is widely used in this process. To improve the NURBS surface fitting accuracy based on sparse and unstructured contact measurement data, this paper proposes a freeform surface reconstruction method that integrates NURBS surface fitting with iterative control point coordinate optimization. The proposed method begins by employing cubic spline interpolation to generate uniformly spaced fitting points from measurement data. Then, the fitting point is parameterized by chord length parameterization and the initial NURBS surface parameter is obtained with least squares fitting. Subsequently, an iterative control point coordinate optimization strategy is applied to reconstruct the surface. In this strategy, the distance between measurement points and the fitted NURBS surface is calculated, and then a new index, the sum of local squared distances (SLSD) is introduced. According to the calculated SLSD, the NURBS surface is reconstructed locally and iteratively by optimizing the control point coordinates corresponding to the max SLSD. With the proposed strategy, only one control point is optimized at a time, and the parameterization results of measurement points within the influence region of the control point are optimized simultaneously. Experiment result shows that the reconstruction accuracy of the proposed method is higher than 0.02 mm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 37-48"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618676","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}