用于高性能红外成像系统的单晶锗自由曲面光学的超精密金刚石车削延展性加工

IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING
Kundan Kumar Prasad , M.P. Singh , Vipender Singh Negi , Vinod Mishra , Sunil Jha , Gufran Sayeed Khan
{"title":"用于高性能红外成像系统的单晶锗自由曲面光学的超精密金刚石车削延展性加工","authors":"Kundan Kumar Prasad ,&nbsp;M.P. Singh ,&nbsp;Vipender Singh Negi ,&nbsp;Vinod Mishra ,&nbsp;Sunil Jha ,&nbsp;Gufran Sayeed Khan","doi":"10.1016/j.precisioneng.2025.06.020","DOIUrl":null,"url":null,"abstract":"<div><div>This study focuses on the precise fabrication of cubic phase freeform optics on single-crystal germanium (sc-Ge) for infrared (IR) imaging systems, addressing thermal-induced defocus challenges. Achieving nanometric surface finish and high form accuracy in sc-Ge via diamond turning machining (DTM) is challenging due to the material's brittleness. To overcome this, a novel groove generation model is developed to optimize DTM parameters and minimize brittle fractures using various cutting approaches. Additionally, the study demonstrates that a hybrid cutting approach, which combines constant angle and arc methods, achieves ductile-based machining and enhances surface quality significantly. Precise workpiece alignment is vital for ensuring high form accuracy in freeform optics; therefore, a fiducial-based method is developed for characterization using a mechanical profilometer, and a long-wavelength interferometry measurement. Final surface evaluation utilized a computer-generated hologram (CGH) in a Fizeau interferometer, achieving a form error of 0.47 μm and surface roughness (Sa) of 2 nm for cubic freeform optics which is acceptable in the infrared imaging system. The developed optics are integrated into an infrared camera within a wavefront coding setup to counteract thermal defocus. This work provides valuable insights into brittle-ductile transitions and nano-surface generation, enhancing machining techniques for IR freeform optics.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 380-397"},"PeriodicalIF":3.7000,"publicationDate":"2025-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ductile machining of single-crystal germanium freeform optics via ultra-precision diamond turning for high-performance infrared imaging systems\",\"authors\":\"Kundan Kumar Prasad ,&nbsp;M.P. Singh ,&nbsp;Vipender Singh Negi ,&nbsp;Vinod Mishra ,&nbsp;Sunil Jha ,&nbsp;Gufran Sayeed Khan\",\"doi\":\"10.1016/j.precisioneng.2025.06.020\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This study focuses on the precise fabrication of cubic phase freeform optics on single-crystal germanium (sc-Ge) for infrared (IR) imaging systems, addressing thermal-induced defocus challenges. Achieving nanometric surface finish and high form accuracy in sc-Ge via diamond turning machining (DTM) is challenging due to the material's brittleness. To overcome this, a novel groove generation model is developed to optimize DTM parameters and minimize brittle fractures using various cutting approaches. Additionally, the study demonstrates that a hybrid cutting approach, which combines constant angle and arc methods, achieves ductile-based machining and enhances surface quality significantly. Precise workpiece alignment is vital for ensuring high form accuracy in freeform optics; therefore, a fiducial-based method is developed for characterization using a mechanical profilometer, and a long-wavelength interferometry measurement. Final surface evaluation utilized a computer-generated hologram (CGH) in a Fizeau interferometer, achieving a form error of 0.47 μm and surface roughness (Sa) of 2 nm for cubic freeform optics which is acceptable in the infrared imaging system. The developed optics are integrated into an infrared camera within a wavefront coding setup to counteract thermal defocus. This work provides valuable insights into brittle-ductile transitions and nano-surface generation, enhancing machining techniques for IR freeform optics.</div></div>\",\"PeriodicalId\":54589,\"journal\":{\"name\":\"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology\",\"volume\":\"96 \",\"pages\":\"Pages 380-397\"},\"PeriodicalIF\":3.7000,\"publicationDate\":\"2025-06-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0141635925002089\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, MANUFACTURING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0141635925002089","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
引用次数: 0

摘要

本研究的重点是红外成像系统中单晶锗(sc-Ge)的立方相自由光学元件的精确制造,以解决热致离焦的挑战。由于材料的脆性,通过金刚石车削加工(DTM)实现sc-Ge的纳米表面光洁度和高形状精度是具有挑战性的。为了克服这一问题,开发了一种新的凹槽生成模型,以优化DTM参数,并使用各种切割方法最大限度地减少脆性断裂。此外,研究还表明,将定角法和圆弧法相结合的混合切削方法可以实现基于韧性的加工,并显著提高表面质量。在自由曲面光学中,精确的工件对准是保证高精度的关键;因此,开发了一种基于基准的方法,使用机械轮廓仪和长波长干涉测量来进行表征。最后利用菲索干涉仪中的计算机生成全息图(CGH)进行表面评估,得到了三次自由曲面光学的形状误差为0.47 μm,表面粗糙度(Sa)为2 nm,在红外成像系统中可以接受。开发的光学元件集成到红外相机内的波前编码设置,以抵消热散焦。这项工作为脆性-韧性转变和纳米表面生成提供了有价值的见解,增强了红外自由曲面光学的加工技术。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Ductile machining of single-crystal germanium freeform optics via ultra-precision diamond turning for high-performance infrared imaging systems

Ductile machining of single-crystal germanium freeform optics via ultra-precision diamond turning for high-performance infrared imaging systems
This study focuses on the precise fabrication of cubic phase freeform optics on single-crystal germanium (sc-Ge) for infrared (IR) imaging systems, addressing thermal-induced defocus challenges. Achieving nanometric surface finish and high form accuracy in sc-Ge via diamond turning machining (DTM) is challenging due to the material's brittleness. To overcome this, a novel groove generation model is developed to optimize DTM parameters and minimize brittle fractures using various cutting approaches. Additionally, the study demonstrates that a hybrid cutting approach, which combines constant angle and arc methods, achieves ductile-based machining and enhances surface quality significantly. Precise workpiece alignment is vital for ensuring high form accuracy in freeform optics; therefore, a fiducial-based method is developed for characterization using a mechanical profilometer, and a long-wavelength interferometry measurement. Final surface evaluation utilized a computer-generated hologram (CGH) in a Fizeau interferometer, achieving a form error of 0.47 μm and surface roughness (Sa) of 2 nm for cubic freeform optics which is acceptable in the infrared imaging system. The developed optics are integrated into an infrared camera within a wavefront coding setup to counteract thermal defocus. This work provides valuable insights into brittle-ductile transitions and nano-surface generation, enhancing machining techniques for IR freeform optics.
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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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