Development and performance evaluation of a multi-mode piezoelectric motion platform for high-precision optical measurements

This study presents a novel multi-mode XY piezoelectric motion platform designed to resolve the inherent metrological conflict between travel range and positioning accuracy in existing optical measurement systems during multi-scale measurement operations. The platform employs a V-shaped piezoelectric stator and applies specific electrical signals to achieve three modes: the elliptical drive mode (EDM), the stick-slip drive mode (SDM), and the inertial drive mode (IDM). Dynamic modeling was first used to analyze the step characteristics of the platform, followed by fabrication and testing of a prototype to validate the output performance. Experimental results show that the prototype successfully achieves high precision motion in all three modes: SDM, EDM, and IDM, with maximum speeds of 21.61 mm/s, 39.71 mm/s, and 52.2 mm/s, and maximum loads of 7 N, 6 N, and 9 N, respectively. The IDM mode exhibits millimeter speed, while the SDM mode provides nanometer precision. In addition, the prototype was successfully applied to semiconductor component defect inspection and microelectronics component manipulation, using the IDM for fast motion and the SDM for precise micro-adjustment. This study provides valuable insights into the control of non-resonant piezoelectric systems and expands their potential applications in optical measurements.