Fabrication of hierarchical micro/nano structure using UV laser for application in PANI electrodes of supercapacitors

IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING
Yeeu-Chang Lee , Kuo-Tung Tseng , Wei-Fu Ji , Jui-Ming Yeh
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引用次数: 0

Abstract

This study employed an ultraviolet (UV) laser to create structures with micro- and nanoscale features. Initially, microstructures were fabricated by combining UV laser irradiation with 3D μ-printing technology utilizing monomer polymerization and crosslinking chemical reactions. Subsequently, UV laser interference lithography is applied to expose a positive photoresist on top of the microstructures, inducing a photochemical reaction that, after development, forms nanopatterns. These micro/nano hierarchical structures can then be replicated using PDMS (polydimethylsiloxane) molding to produce inverse molds for the structures. Finally, a solution of chemically oxidative polymerized polyaniline (PANI) is coated onto the PDMS mold. After baking and demolding, a PANI film with micro/nano hierarchical structures was obtained and used as the working electrode in supercapacitors. Compared to planar-coated PANI films, hierarchical structures increase the electrode surface area, contributing to an enhanced specific capacitance. To understand its electrochemical properties, cyclic voltammetry (CV) and galvanostatic charge–discharge measurements were performed. Compared to the non-structured PANI, the specific capacitance of the microstructured PANI and the micro/nano hierarchical structured PANI increased by approximately 30 % and 60 %, respectively.
用紫外激光制备分层微纳结构在超级电容器聚苯胺电极中的应用
本研究使用紫外激光来创建具有微纳米尺度特征的结构。首先,利用单体聚合和交联化学反应,将UV激光照射与3D μ打印技术相结合,制备微结构。随后,应用紫外激光干涉光刻技术在微观结构的顶部暴露正光刻胶,诱导光化学反应,该反应在显影后形成纳米图案。然后可以使用PDMS(聚二甲基硅氧烷)模塑来复制这些微/纳米分层结构,以生产结构的逆模具。最后,将化学氧化聚合聚苯胺(PANI)溶液涂在PDMS模具上。经过烘烤和脱模,得到了具有微纳层次化结构的聚苯胺薄膜,并将其用作超级电容器的工作电极。与平面涂覆的聚苯胺薄膜相比,分层结构增加了电极表面积,有助于提高比电容。为了了解其电化学性能,进行了循环伏安法(CV)和恒流充放电测量。与非结构化聚苯胺相比,微结构聚苯胺和微/纳米分层结构聚苯胺的比电容分别提高了约30%和60%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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