Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第5页

Toolpath smoothing and motion planning for the diamond turning of microlens arrays with improved uniformity 提高微透镜阵列金刚石车削均匀性的刀路平滑和运动规划

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-12 DOI: 10.1016/j.precisioneng.2025.05.005

Yangqin Yu, Zhiyue Wang, Shaozhi Zhang, Mingjun Ren, Limin Zhu, Xinquan Zhang

{"title":"Toolpath smoothing and motion planning for the diamond turning of microlens arrays with improved uniformity","authors":"Yangqin Yu, Zhiyue Wang, Shaozhi Zhang, Mingjun Ren, Limin Zhu, Xinquan Zhang","doi":"10.1016/j.precisioneng.2025.05.005","DOIUrl":"10.1016/j.precisioneng.2025.05.005","url":null,"abstract":"<div><div>Microlens arrays fabricated by ultra-precision machining commonly suffer from surface nonuniformity, which results in the inconsistency and degradation of their optical performances. One major possible cause is the uneven distribution of toolpath kinematic characteristics, especially the excessive local acceleration and jerk values concentrated at lens edges. To address the issue, this study proposes an optimization strategy comprising toolpath smoothing and motion planning. The toolpath directly generated using equal-angle discretization is first processed by spline interpolation-based smoothing to eliminate the abrupt turnings at lens edges. The smoothed toolpath is then optimized by a replanning process which adaptively adjusts the cutter location point (CLP) density according to local curvature. Lastly, the replanned toolpath and CLPs are further finely tuned by genetic algorithm in which acceleration and jerk feedbacks are integrated using penalty terms. Theoretical analysis demonstrates greatly reduced acceleration and jerk peak values by over 90 % compared to equal-angle discretization. Significantly improved surface uniformity, both among differently located lenses and within a single lens, is verified by experimental investigation. These findings provide a potential solution to the nonuniformity of machined microstructured surfaces, enabling the advanced and consistent performances of optical systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 350-363"},"PeriodicalIF":3.5,"publicationDate":"2025-05-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144069589","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

In-process identification of feed drive dynamics considering machining forces 考虑加工力的进给传动动力学过程辨识

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-10 DOI: 10.1016/j.precisioneng.2025.04.027

J.D. McPherson, M. Mehrabi, K. Ahmadi

{"title":"In-process identification of feed drive dynamics considering machining forces","authors":"J.D. McPherson, M. Mehrabi, K. Ahmadi","doi":"10.1016/j.precisioneng.2025.04.027","DOIUrl":"10.1016/j.precisioneng.2025.04.027","url":null,"abstract":"<div><div>This paper presents a new closed-loop dynamics model for ballscrew feed drives in CNC machine tools, enabling non-intrusive, in-process model calibration and motion prediction even in the presence of unmeasured machining forces. The presented model employs a Partially Linear Auto-Regressive with Exogenous input (PL-ARX) structure, where the linear component captures the servo drive and rigid-body dynamics, and the nonlinear component represents unknown machining forces. Kernel-based regression is then used to simultaneously identify the linear dynamics and machining force disturbances from internal controller signals during milling.</div><div>The model is validated on two different CNC machines under experimental milling conditions. Results confirm the approach accurately identifies unbiased linear dynamics despite unmeasured disturbances and achieves precise online motion prediction. These capabilities are critical for enabling real-time feedrate optimization and model-predictive control in advanced machining systems.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 468-483"},"PeriodicalIF":3.5,"publicationDate":"2025-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144099160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of an optimized smart tool holder using symmetrical structure for three-axis cutting force measurement in diamond cutting 基于对称结构的三轴切削力测量智能刀架的研制

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-10 DOI: 10.1016/j.precisioneng.2025.05.002

Zhongwei Li, Liang An, Huanbin Lin, Yuan-Liu Chen

{"title":"Development of an optimized smart tool holder using symmetrical structure for three-axis cutting force measurement in diamond cutting","authors":"Zhongwei Li, Liang An, Huanbin Lin, Yuan-Liu Chen","doi":"10.1016/j.precisioneng.2025.05.002","DOIUrl":"10.1016/j.precisioneng.2025.05.002","url":null,"abstract":"<div><div>Cutting force measurement is an important technique for monitoring the machining process in diamond cutting. This paper presents an optimized smart tool holder using the symmetrical structure of a fast tool servo (FTS) for three-axis cutting force measurement by utilizing six piezoelectric force sensors. The cutting force along each axis was measured by using the differential result of two sensors to eliminate the influence from environmental noise, bias current of charge amplifier, and temperature drift on the measured forces. The symmetrical structure of the tool holder was designed based on a flexible hinge, and the theoretical model was constructed and optimized for high stiffness and low coupling. An improved algorithm combining differential and dynamic accumulation method was developed for stable and accurate static force measurement. Tests were carried out to verify the effectiveness of the algorithm in improving the stability and accuracy of output voltage and static force measurement. The results demonstrated that the influence from environmental noise, bias current, and temperature drift on measured force could be effectively reduced. Subsequently, the smart tool holder was integrated on an FTS for cutting experiments. Compared with a commercial dynamometer, the proposed tool holder system was verified to have excellent performance of high sensitivity and high accuracy in three-axis cutting force measurement, and have capacity of identification of nanometric scale microdefects.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 505-514"},"PeriodicalIF":3.5,"publicationDate":"2025-05-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144124096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Topology optimization of a dual-axial piezo-actuated fast tool servo with decoupled kinematics 解耦双轴压电驱动快速刀具伺服系统拓扑优化

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-06 DOI: 10.1016/j.precisioneng.2025.04.023

Dongpo Zhao , Benliang Zhu , Hanheng Du , Zhichao Shi , Zhiwei Zhu

{"title":"Topology optimization of a dual-axial piezo-actuated fast tool servo with decoupled kinematics","authors":"Dongpo Zhao , Benliang Zhu , Hanheng Du , Zhichao Shi , Zhiwei Zhu","doi":"10.1016/j.precisioneng.2025.04.023","DOIUrl":"10.1016/j.precisioneng.2025.04.023","url":null,"abstract":"<div><div>This paper presents the design and development of a novel dual-axial piezo-actuated fast tool servo (FTS) based on a four-node finite element topology optimization design method for application in diamond machining of micro/nano-structured functional surfaces. Utilizing a solid isotropic material with penalization (SIMP) approach to express and analyze topological structure, a design model for multi-performance coupling dynamic optimization was developed. This model defines the natural frequency as the objective function, with constraints on in-plane motion coupling between the input and output ports, input–output compliance, stress, and other performance indicators. By solving the optimal design variables with the method of moving asymptotes (MMA) algorithm, a multi-performance optimization design for FTS systems with fully decoupled motion was achieved. The open-loop test of prototype validates the estimated strokes with low coupling and high natural frequencies. In closed-loop testing, the results demonstrate a minimal tracking error of <span><math><mrow><mo>±</mo><mn>0</mn><mo>.</mo><mn>1</mn><mtext>%</mtext></mrow></math></span> for the Lissajous trajectory, showcasing its precision in tracking desired trajectories for intricate micro/nano-structure formation.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 262-271"},"PeriodicalIF":3.5,"publicationDate":"2025-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143922113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The structure optimization of aerostatic bearings with radial wedge grooves to improve static Performance: Theoretical predictions and experimental measurements 径向楔槽空气静压轴承的结构优化以提高静力性能：理论预测和实验测量

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-06 DOI: 10.1016/j.precisioneng.2025.05.001

Puliang Yu , Jie Shen , Jinhui Luo , Xu Ding

{"title":"The structure optimization of aerostatic bearings with radial wedge grooves to improve static Performance: Theoretical predictions and experimental measurements","authors":"Puliang Yu , Jie Shen , Jinhui Luo , Xu Ding","doi":"10.1016/j.precisioneng.2025.05.001","DOIUrl":"10.1016/j.precisioneng.2025.05.001","url":null,"abstract":"<div><div>Aerostatic bearings play a vital role as a fundamental support component in ultra-precision manufacturing and measuring equipment. However, due to the air compressibility, the loading capacity and stiffness of aerostatic bearings are lower than that of traditional bearings, which limits their application in high-precision manufacturing fields. This study introduced a novel design of aerostatic bearing with radial wedge grooves (RWG) aimed at enhancing static performance. The influence of RWG structural factors on the static performance of aerostatic bearings was examined using computational fluid dynamics (CFD). Three-dimensional large eddy simulation (LES) methods were used to examine the transient flow properties of aerostatic bearings with three distinct structures. To confirm the correctness and validity of the CFD model, experimental measurements of the static performance and micro-vibration in aerostatic bearings with three different wedge groove structures were carried out. The results revealed that the loading capacity of aerostatic bearings with RWG gradually increased with the increase of the groove radial angle <em>θ</em> and groove wedge angle <em>γ</em>, exhibiting an initial rise followed by a subsequent decrease with an increase in groove radius. Furthermore, the stiffness of aerostatic bearings demonstrated progressive improvement with an increase in wedge groove radius, groove radial angle and groove wedge angle. The mass flow rate of aerostatic bearings shows an increase as the wedge groove radius, groove radial angle, and groove wedge angle are increased. This study presents new insights into the application of aerostatic bearing in grooves throttling.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 298-308"},"PeriodicalIF":3.5,"publicationDate":"2025-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143927991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Research progress of shear-thickening polishing technology: A review 剪切增厚抛光技术的研究进展

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-05 DOI: 10.1016/j.precisioneng.2025.04.030

Baochen Sun , Zixuan Wang , Yang Zhao , Qingchun Zhang , Qi Liu , Lu Wen , Tianbiao Yu , Ji Zhao

{"title":"Research progress of shear-thickening polishing technology: A review","authors":"Baochen Sun , Zixuan Wang , Yang Zhao , Qingchun Zhang , Qi Liu , Lu Wen , Tianbiao Yu , Ji Zhao","doi":"10.1016/j.precisioneng.2025.04.030","DOIUrl":"10.1016/j.precisioneng.2025.04.030","url":null,"abstract":"<div><div>Shear-thickening polishing (STP) is an emerging precision polishing technology that dynamically adjusts the viscosity of polishing fluid by precisely controlling the shear rate, thereby enhancing material removal rate (MRR) and surface accuracy while effectively suppressing surface defects such as scratches and microcracks commonly found in conventional polishing methods. This expands its potential applications in high-tech fields such as precision manufacturing and microelectronics. Studies have shown that under optimized parameters (polishing speed: 70 rpm, polishing angle: 70°, abrasive particle concentration: 12 wt%), STP achieves an MRR of up to 813.63 nm/min on optical glass. Additionally, under conditions of 38 °C, abrasive particle size of 0.6 μm, polishing speed of 600 rpm, and abrasive particle concentration of 12 vol%, adaptive shear-gradient thickening polishing (AS-GTP) can reduce the subsurface damage depth and surface roughness (Ra) of lithium niobate (LN) crystals to below 1 nm. However, research on STP remains fragmented, and a comprehensive review is currently lacking. To bridge this gap, this article systematically reviews the primary types of shear-thickening polishing fluid based on the shear-thickening characteristics of non-Newtonian fluids and provides an in-depth discussion of the working mechanisms and process optimization strategies of different STP methods. Finally, the latest advancements in STP are summarized, and its future development trends and industrialization challenges are analyzed.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 322-349"},"PeriodicalIF":3.5,"publicationDate":"2025-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144069590","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Development of a novel nickel-based metal force microsensor using bottom-up approach 基于自底向上方法的新型镍基金属力微传感器的研制

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-05 DOI: 10.1016/j.precisioneng.2025.05.003

Wojciech J. Dera , Hanna Konopacka , Dariusz M. Jarząbek

{"title":"Development of a novel nickel-based metal force microsensor using bottom-up approach","authors":"Wojciech J. Dera , Hanna Konopacka , Dariusz M. Jarząbek","doi":"10.1016/j.precisioneng.2025.05.003","DOIUrl":"10.1016/j.precisioneng.2025.05.003","url":null,"abstract":"<div><div>The advancement of force microsensors has shifted towards alternative fabrication methods offering enhanced flexibility, cost efficiency, and adaptability. Traditional silicon-based sensors face limitations such as mechanical fragility, thermal expansion mismatches, and high fabrication costs, necessitating alternative approaches. This study explores a bottom-up fabrication approach using electro-galvanic deposition to develop nickel-based capacitive force microsensors. Unlike conventional methods, electro-galvanic deposition enables precise control over material thickness and microstructure, allowing for the fabrication of robust, metal-based sensors with superior toughness and mechanical reliability. Nickel, chosen for its high tensile strength, corrosion resistance, and adaptability to high temperatures, is well-suited for demanding applications. The fabrication process involves UV maskless lithography for mold patterning, followed by electro-galvanic deposition in a modified Watt's bath with saccharin additives to control grain structure. This enables fine-tuning of nickel's mechanical properties, enhancing hardness and ductility. The capacitive comb sensor structure, integrated with a high-resolution capacitance-to-digital converter, enables precise force measurements with a linear response and high sensitivity. Experimental validation included mechanical testing, calibration, and stability analysis under controlled loading conditions. Results confirmed a strong linear force-capacitance relationship (R<sup>2</sup> = 0.9898) and excellent long-term stability, with minimal capacitance drift under sustained load.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 251-261"},"PeriodicalIF":3.5,"publicationDate":"2025-05-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143918364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Tilt-to-length coupling noise suppression method for the manufacturing of space gravitational wave telescopes 空间引力波望远镜斜长耦合噪声抑制方法

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-05-03 DOI: 10.1016/j.precisioneng.2025.04.032

Miao Yu , Yanxiong Wu , Hong-an Lin , Lanjun Huang , Donglan Zou , Yinghong Liu , Hongbo Li , Jiancong Li , Lintong lin

{"title":"Tilt-to-length coupling noise suppression method for the manufacturing of space gravitational wave telescopes","authors":"Miao Yu , Yanxiong Wu , Hong-an Lin , Lanjun Huang , Donglan Zou , Yinghong Liu , Hongbo Li , Jiancong Li , Lintong lin","doi":"10.1016/j.precisioneng.2025.04.032","DOIUrl":"10.1016/j.precisioneng.2025.04.032","url":null,"abstract":"<div><div>Tilt-to-length (TTL) coupling noise is an essential index for evaluating the performance of space gravitational wave telescope optical systems. Manufacturing errors can cause wavefront error, low-order aberration ratio, and TTL coupling noise cancellation ratio to deviate from the ideal design value, degrading the performance of telescopes. This study proposes a method for suppressing TTL coupling noise in space gravitational wave telescope manufacturing. We first analyzed the influencing mechanism of manufacturing error on TTL coupling noise and established a mathematical model for the relationship. The relationship between manufacturing error and TLL coupling noise within the entire range of jitter angle was analyzed, and a maximum value model for TTL coupling noise in manufacturing was established. A maximum value model was used to establish an evaluation function for suppressing TTL coupling noise in telescope manufacturing. Taking the typical structure of a space gravitational wave detection telescope system as an example for design optimization. The results indicate that the probability of TTL coupling noise coefficient being less than ±25 p.m./μrad is 99 % and 50 %, respectively, when optimizing the telescope using and without the method proposed in this paper.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 309-321"},"PeriodicalIF":3.5,"publicationDate":"2025-05-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143947501","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Trajectory optimization of the center-inlet elastic polishing tool for uniform material removal and mid-spatial frequency error suppression on optical elements 中心进气弹性抛光刀轨迹优化及光学元件中频误差抑制

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-04-30 DOI: 10.1016/j.precisioneng.2025.04.031

Mingsheng Jin , Minglei Jin , Xiaoxing Dong , Yan Li , Xuan Tang

{"title":"Trajectory optimization of the center-inlet elastic polishing tool for uniform material removal and mid-spatial frequency error suppression on optical elements","authors":"Mingsheng Jin , Minglei Jin , Xiaoxing Dong , Yan Li , Xuan Tang","doi":"10.1016/j.precisioneng.2025.04.031","DOIUrl":"10.1016/j.precisioneng.2025.04.031","url":null,"abstract":"<div><div>To acquire uniform material removal and suppress mid-spatial frequency error of optical elements applied to laser devices, this paper proposed a combined processing scheme based on the center-inlet elastic polishing tool, which is an important component in the computer controlled optical surfacing process. Considering the special structure of the polishing tool, a material removal model under a continuous feed state was established. Trajectory optimization strategy integrating path distance analysis with a novel layered reshaping method was proposed. The optimized path distance significantly enhances material removal uniformity, while the proposed depth-controlled layered reshaping effectively suppresses mid-spatial frequency error caused by excessive path repetition. In addition, a high-precision offline simulation platform demonstrating exceptional predictive capability was established, which achieved less than 10 % deviation between simulated and experimental removal profiles. The experimental results show that the surface roughness Sa and Ra of the samples were improved by 89.4 % and 94.9 % through the combined processing scheme, respectively, while the curve of PSD decreased obviously, which indicates that the mid-spatial frequency error was effectively suppressed. The demonstrated consistency between simulation predictions and physical processing outcomes establishes a valuable reference for precision optical elements’ process optimization.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 272-285"},"PeriodicalIF":3.5,"publicationDate":"2025-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143922091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Evaluation and prediction model of surface slope error for an off-axis aspheric mirror based on ultra-precision envelope grinding 基于超精密包络磨削的离轴非球面镜面斜率误差评价与预测模型

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-04-28 DOI: 10.1016/j.precisioneng.2025.04.029

Honggang Li, Yueming Deng, Renke Kang, Xiaoguang Guo, Shang Gao

{"title":"Evaluation and prediction model of surface slope error for an off-axis aspheric mirror based on ultra-precision envelope grinding","authors":"Honggang Li, Yueming Deng, Renke Kang, Xiaoguang Guo, Shang Gao","doi":"10.1016/j.precisioneng.2025.04.029","DOIUrl":"10.1016/j.precisioneng.2025.04.029","url":null,"abstract":"<div><div>Off-axis aspheric mirrors are critical components in focusing optical systems, where surface slope errors can significantly degrade imaging resolution, necessitating precise control. Envelope grinding is a common method for machining brittle-material optical mirrors. To investigate slope error formation mechanisms, this study developed a surface profile prediction algorithm based on discretized grid modeling and iterative cross-sectional layering. Slope errors were evaluated by analyzing sagittal height deviations between the simulated surface and ideal profiles. Grinding experiments were conducted to analyze the spatial distribution patterns of slope errors under three envelope grinding path strategies including constant step, constant arc-length, and constant scallop-height. Experimental results revealed that subtle differences in residual regions induced distinct spatial error distributions. Constant step grinding concentrated errors near the central region, constant arc-length grinding distributed errors bilaterally adjacent to the center, and constant scallop-height grinding localized errors at the peripheral edges. The algorithm achieved high prediction accuracy with experimental observations. Under identical parameters, constant step grinding achieved the smallest slope error with RMS value of 25.3 arcsec. These findings provide valuable insights for grinding path optimization and slope error mitigation in off-axis aspheric mirror manufacturing.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 238-250"},"PeriodicalIF":3.5,"publicationDate":"2025-04-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143908160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0