Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第5页

Surface oxidation properties of GaN wafers in chemical magnetorheological polishing process by ultrasonic action 超声作用下化学磁流变抛光过程中氮化镓晶片表面氧化特性研究

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-22 DOI: 10.1016/j.precisioneng.2025.03.019

Huazhuo Liang , Wenjie Chen , Youzhi Fu , Yue Jian , Wenjie Zhou , Dawei Liu , Junfeng He

{"title":"Surface oxidation properties of GaN wafers in chemical magnetorheological polishing process by ultrasonic action","authors":"Huazhuo Liang , Wenjie Chen , Youzhi Fu , Yue Jian , Wenjie Zhou , Dawei Liu , Junfeng He","doi":"10.1016/j.precisioneng.2025.03.019","DOIUrl":"10.1016/j.precisioneng.2025.03.019","url":null,"abstract":"<div><div>To overcome the difficulty of ultraprecision processing of GaN wafers, an ultrasonic chemical magnetorheological composite polishing method using the ultrasonic Fenton method is proposed. The effects of the catalyst type, catalyst concentration and oxidant concentration on the generation of the hydroxyl radical ·OH by ultrasonic Fenton were examined, and the reaction principle of ultrasonic Fenton was determined by using the ·OH and Fe<sup>2+</sup> content as the main evaluation indices. Compared with those of the ultrasonic Fenton/Fenton reaction under the same conditions, the oxidation‒reduction potential, temperature, ·OH content and Fe<sup>2+</sup> content all continuously increased within 60 min; thus, ultrasonication promoted the Fenton reaction. A higher catalyst concentration correlated to a higher ionised Fe<sup>2+</sup> content. A high ·OH content was rapidly generated at the beginning of the reaction, and the ·OH content subsequently decreased after the rapid consumption of the oxidant as the reaction proceeded. The amount of O on the GaN surface increased after oxidation, and the main product of the oxide layer on the GaN surface was Ga<sub>2</sub>O<sub>3</sub>. Comparative polishing tests have shown that the combination of ultrasound and Fenton action results in higher polishing efficiency and quality.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 412-421"},"PeriodicalIF":3.5,"publicationDate":"2025-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683580","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A novel miniature multi-DOF three-ring-shaped piezoelectric actuator for small and lightweight robot joints 一种新型的微型多自由度三环压电驱动器，用于小重量机器人关节

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-21 DOI: 10.1016/j.precisioneng.2025.03.008

Zhiyao Bian , Xiaoniu Li , Zhixin Geng , Boquan Wang , Jiaqi Wei , Dawei Wu

{"title":"A novel miniature multi-DOF three-ring-shaped piezoelectric actuator for small and lightweight robot joints","authors":"Zhiyao Bian , Xiaoniu Li , Zhixin Geng , Boquan Wang , Jiaqi Wei , Dawei Wu","doi":"10.1016/j.precisioneng.2025.03.008","DOIUrl":"10.1016/j.precisioneng.2025.03.008","url":null,"abstract":"<div><div>Piezoelectric actuators are extensively used in aerospace and precision instruments due to their high precision and simple structure. However, conventional piezoelectric actuators intended for multi-degree-of-freedom (multi-DOF) motion typically have high mass and low space utilization due to their complex structures. This makes them unsuitable for use in the joints of lightweight robots. To address these issues, we propose a novel one-piece multi-DOF piezoelectric actuator. This actuator can achieve multi-DOF motions with the mover such as flat plates or spherical shells. Through finite element simulation analysis, we determined the primary dimensional parameters of the stator. We then fabricated an experimental prototype with dimensions of approximately Φ40 × 3 mm, weighing about 23.5g. Experimental results indicate that the prototype achieves a maximum rotary motion speed of 5.03 rad/s and a maximum linear motion speed of 9.17 mm/s, with a maximum load capacity of 50g. The actuator exhibits a minimum rotary motion resolution of 18 μrad and a minimum linear motion resolution of 2 μm. This study demonstrates that such multi-DOF actuators have great potential in areas such as small and lightweight precision robots due to their compact structure, small volume, light weight, and high precision.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 749-760"},"PeriodicalIF":3.5,"publicationDate":"2025-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143799401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A novel 3D dimension estimation approach in additive manufacturing based on virtual-real hybrid point cloud data and semantic segmentations 基于虚实混合点云数据和语义分割的增材制造三维尺寸估计新方法

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-18 DOI: 10.1016/j.precisioneng.2025.03.016

Shuo Shan, Hans Nørgaard Hansen, Yang Zhang, Matteo Calaon

{"title":"A novel 3D dimension estimation approach in additive manufacturing based on virtual-real hybrid point cloud data and semantic segmentations","authors":"Shuo Shan, Hans Nørgaard Hansen, Yang Zhang, Matteo Calaon","doi":"10.1016/j.precisioneng.2025.03.016","DOIUrl":"10.1016/j.precisioneng.2025.03.016","url":null,"abstract":"<div><div>The advancements in additive manufacturing (AM) technology, while empowering the manufacturing of complex structures, have also increased the demand for corresponding measurement techniques. While 3D scanning and reconstruction have been employed for quality inspection in AM, there remains a gap between scan results and specific dimensions, hindering the progress of AM processes toward greater precision and speed. Aiming to bridge the gap between AM components and dimensional features, this paper introduces a novel method to estimate pre-defined dimensions from point cloud of AM objects. Building upon the foundation of semantic segmentation and post-processing calculations, hybrid data and down sampling are applied and evaluated. Comparisons with Coordinate Measuring Machine (CMM) measurements confirm that the proposed method in this paper significantly reduces measurement time and simplifies the measurement process, cutting the computation time down to 12 % of the original while maintaining high accuracy. The segmentation accuracy can reach 89 % when using a hybrid dataset with virtual data. The measurement uncertainty of the proposed method is quantified, confirming that the dominant contributor to the measurement uncertainty comes from the scanning instrument, validating the reliability of the proposed method.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 388-399"},"PeriodicalIF":3.5,"publicationDate":"2025-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683578","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Analysis of dynamic characteristics of heavy-duty gantry machine tool in bolt loosening 重型龙门机床螺栓松动动态特性分析

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-18 DOI: 10.1016/j.precisioneng.2025.03.015

Zhifeng Liu , Yiming Wu , Tao Zhang , Congbin Yang , Ying Li , Jingjing Xu

{"title":"Analysis of dynamic characteristics of heavy-duty gantry machine tool in bolt loosening","authors":"Zhifeng Liu , Yiming Wu , Tao Zhang , Congbin Yang , Ying Li , Jingjing Xu","doi":"10.1016/j.precisioneng.2025.03.015","DOIUrl":"10.1016/j.precisioneng.2025.03.015","url":null,"abstract":"<div><div>There are many bolted structures in heavy-duty gantry machine tools, and the structural performance of these components greatly impacts the dynamic properties of the entire machine. Firstly, based on the fractal theory, a bolt preload-contact stiffness and damping model was established by characterizing the load, deformation and strain energies of the bolted joint surfaces. In order to precisely forecast the dynamic features, a dynamic response model of the tip point of the gantry machine was first proposed by adopting the multi-body system transfer matrix method. The feasibility of the contact mechanism and the dynamic response model were verified by modal tests respectively. Finally, the effect of bolt preload loosening on the dynamic response of the whole machine is analyzed. In the scaled model of the gantry machine, when the bolt preloads on the lathe bed-column and crossing beam-column joint surfaces are loosened by 30 %, the displacement response of the tool tip point increases by 41.2 % and 40.1 % respectively, which indicates that the effect of lathe bed-column interface is more significant. This paper seeks out the weak link in the gantry machine tool, which helps to carry out the design optimization of its assembly processing afterward.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 486-504"},"PeriodicalIF":3.5,"publicationDate":"2025-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143737766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Hybrid physics and data-driven modeling for edge control and form correction in the surface adaptive polishing of the optical surface 光学表面自适应抛光中边缘控制和形状校正的混合物理和数据驱动建模

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-18 DOI: 10.1016/j.precisioneng.2025.03.017

Cao Zhong-Chen , Zhao Chenyao , Wu Dongxu , Liu Haitao

{"title":"Hybrid physics and data-driven modeling for edge control and form correction in the surface adaptive polishing of the optical surface","authors":"Cao Zhong-Chen , Zhao Chenyao , Wu Dongxu , Liu Haitao","doi":"10.1016/j.precisioneng.2025.03.017","DOIUrl":"10.1016/j.precisioneng.2025.03.017","url":null,"abstract":"<div><div>The novel surface adaptive polishing (SAP) process is a promising approach for ultra-precision polishing of optical free-form surfaces. However, further investigation into the damage control mechanism and form control theory of this approach is required. A series of experimental studies has been conducted to determine the influencing mechanisms of the polishing parameters on the surface and subsurface states. The surface quality can be significantly improved, and the surface and subsurface damage is effectively mitigated when using the SAP tool for polishing, whether applied internally or at the edge of the workpiece. Moreover, theoretical modeling of form correction will be undertaken, focusing on developing a multi-scale physics and data-driven material removal model. The maximum removal depth at the edge exponentially varies with the overhang ratio. Accordingly, a correction coefficient is established to characterize the spatial distribution of the tool in the material removal function. Experimental and simulation results demonstrate high consistency in the validation experiments. The findings of this study are not only significant for ultra-precision polishing of the SAP tool but also provide a comprehensive approach for future research on edge control and form correction.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 400-411"},"PeriodicalIF":3.5,"publicationDate":"2025-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Experimental study on surface finish and tool wear in ultrasonic vibration-assisted milling of nickel-based single-crystal superalloys 超声振动辅助铣削镍基单晶高温合金表面光洁度和刀具磨损试验研究

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-14 DOI: 10.1016/j.precisioneng.2025.03.014

Gaofeng Zhang , Shanghui Yang , Yang Deng , Chang Liang , Tiejun Song , Yu Wu

{"title":"Experimental study on surface finish and tool wear in ultrasonic vibration-assisted milling of nickel-based single-crystal superalloys","authors":"Gaofeng Zhang , Shanghui Yang , Yang Deng , Chang Liang , Tiejun Song , Yu Wu","doi":"10.1016/j.precisioneng.2025.03.014","DOIUrl":"10.1016/j.precisioneng.2025.03.014","url":null,"abstract":"<div><div>Nickel-based single-crystal superalloys have emerged as the primary materials for a new generation of aero-engines, courtesy of their remarkable high-temperature performance, oxidation resistance, microstructure stability, and thermal fatigue resistance. Nevertheless, due to its inherent traits of high hardness and low thermal conductivity, the cutting performance is rather poor. In light of this, ultrasonic vibration and minimum quantity lubrication techniques are incorporated in this paper to assist in milling nickel-based single-crystal superalloy DD5 with the aim of improving the cutting quality and reducing tool wear, The findings reveal that under dry cutting conditions, although the surface roughness of ultrasonic vibration-assisted milling (UM) marginally escalates compared to that of conventional milling (CM), the surface defects are mitigated, and the scratch situation on the back of the chip is significantly alleviated. Moreover, as the cutting speed increments, the chip thickness diminishes. In contrast to UM and CM under dry cutting conditions, the thickness of the subsurface heat-affected layer after minimum quantity lubrication ultrasonic vibration assisted milling (UMQL) is the slightest at 2.0 μm, and in the UM processing under dry cutting conditions, as the cutting speed rises, the thickness of the affected layer marginally reduces. In the CM and UM processes under dry cutting conditions, tool failure occurred when the milling length reaches 0.9 m and 1.3 m respectively. Owing to the efficient cooling and lubricating effects of UMQL, when UMQL is employed for processing, the milling length of the tool can extend up to 2.1 m.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 571-581"},"PeriodicalIF":3.5,"publicationDate":"2025-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143747787","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and analysis of Leaf-spring flexure hinge with adjustable fillet shapes 圆角形状可调叶弹簧柔性铰链的设计与分析

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-14 DOI: 10.1016/j.precisioneng.2025.03.010

Junwei Lin , Hasiaoqier Han , Peiyi Li , Jiaxin Li , Qingwen Wu , Zhenbang Xu

引用次数: 0

Pilot capability evaluation of a modular laser diode-based prototype for beam focusing detection and calibration in laser processing 基于模块化激光二极管的激光加工光束聚焦检测和校准原型的先导能力评估

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-12 DOI: 10.1016/j.precisioneng.2025.03.013

Zhou Su , Mubasher Ali , Feng Lin , Yuanfu Tan , Wei-Hsin Liao , Hay Wong

{"title":"Pilot capability evaluation of a modular laser diode-based prototype for beam focusing detection and calibration in laser processing","authors":"Zhou Su , Mubasher Ali , Feng Lin , Yuanfu Tan , Wei-Hsin Liao , Hay Wong","doi":"10.1016/j.precisioneng.2025.03.013","DOIUrl":"10.1016/j.precisioneng.2025.03.013","url":null,"abstract":"<div><div>Current methods for focus detection and calibration in laser processing face challenges such as limited accuracy, lack of automated self-calibration, compatibility issues with commercial machines, and high costs. This paper introduces a novel method and prototype based on laser diode technology, designed to efficiently detect and self-calibrate the focus state of processing lasers. The prototype utilizes a universal laser diode package as a detector, with the emitted light beam effectively locating the detection area. An integrated photodiode generates digital signal when identifying the beam characteristics of the detected processing laser, facilitating the development of an efficient closed-loop feedback control system. Experimental results demonstrate that when the detected laser beam spot size varies between 231 μm (minimum adjustable size) and 251 μm, the prototype accurately responds to these changes in real time, exhibiting a reliable linear correlation (R<sup>2</sup> > 0.999). Analysis of two types of detectors revealed similar high detection accuracy, with error rates of 0.023 % and 0.022 %, respectively. Furthermore, the prototype maintained a detection error rate ranging from 0.022 % to 0.049 % across detection distances of 100–250 mm, confirming consistent high accuracy under various conditions. The system also showcased self-calibration capabilities, adjusting the optical path to calibrate its focus state with an error rate of only 0.050 %. This cost-effective prototype, designed for high compatibility with existing processing machines, is expected to provide valuable insights into the field of laser processing.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 376-387"},"PeriodicalIF":3.5,"publicationDate":"2025-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143683577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Research on force-position decoupling control technology of bonnet polishing of robotic arm 机械臂阀盖抛光力-位置解耦控制技术研究

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-11 DOI: 10.1016/j.precisioneng.2025.03.012

Shujing Sha , Ning Wang , Shaohang Ma , Baojun Yu , Chao Li , Lulu Jiang , Guanting Liu , Zhuang Qin , Runchuan Zhao

{"title":"Research on force-position decoupling control technology of bonnet polishing of robotic arm","authors":"Shujing Sha , Ning Wang , Shaohang Ma , Baojun Yu , Chao Li , Lulu Jiang , Guanting Liu , Zhuang Qin , Runchuan Zhao","doi":"10.1016/j.precisioneng.2025.03.012","DOIUrl":"10.1016/j.precisioneng.2025.03.012","url":null,"abstract":"<div><div>Among complex curved surface polishing technologies, bonnet polishing has developed rapidly due to its superior polishing performance, but the force-position coupling problem is still a major problem in the polishing process. This study proposes a bonnet polishing system based on a torque servo. First, the force-position coupling problem was theoretically analyzed, and a dual-disc torque servo based on magnetorheological fluid was designed. On this basis, the output-damping torque model was established. Based on the Preston equation, the complex surface grinding and polishing removal function was modeled, and a force-position decoupling model based on the torque servo was further established. Then relevant performance simulation and performance testing were performed on the torque servo to verify the feasibility of its structural design. Finally, a robotic arm bonnet polishing system based on a torque servo was built, and a series of polishing experiments were conducted on complex curved surface workpieces. The results show that the surface quality Sa and Sz values of the workpiece before and after polishing dropped from 902.75 nm to 10.74<em>λ</em> to 32.75 nm and 0.96<em>λ</em> respectively, which significantly improved the surface quality of the processed parts. In order to improve the processing accuracy of complex curved surface workpieces, a reliable polishing solution is provided.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"94 ","pages":"Pages 315-329"},"PeriodicalIF":3.5,"publicationDate":"2025-03-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143628531","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Study on the rotation accuracy of gas hydrostatic bearings based on skin model shapes 基于蒙皮模型形状的气体静压轴承旋转精度研究

IF 3.5 2区工程技术

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2025-03-10 DOI: 10.1016/j.precisioneng.2025.03.007

Jia Luo , Yanlong Cao , Jin Jin , Fan Liu , Junnan Zhi

引用次数: 0