Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

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Practical simulator generation using a simple feedforward element design method for precision motion systems abbreviated title: Practical precision simulator generation 实用模拟器的生成采用一种简单的前馈元件设计方法,用于精密运动系统简称:实用精密模拟器的生成
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-11-22 DOI: 10.1016/j.precisioneng.2025.11.022
Kaiji Sato, Mizuki Takeda
{"title":"Practical simulator generation using a simple feedforward element design method for precision motion systems abbreviated title: Practical precision simulator generation","authors":"Kaiji Sato,&nbsp;Mizuki Takeda","doi":"10.1016/j.precisioneng.2025.11.022","DOIUrl":"10.1016/j.precisioneng.2025.11.022","url":null,"abstract":"<div><div>The growing demand for automation and labor-saving solutions has intensified interest in digital technology applications that replicate real-world systems and utilize analytical results in physical settings. Fulfilling these needs requires the development of a high-precision simulator that can be automatically and effortlessly generated from data easily obtainable from a physical machine. This paper proposes an innovative method for generating a precision simulator for motion systems. The proposed method uses feedforward elements derived through our feedforward design methodology. In this approach, following a specified procedure, a learning controller distinguishes four operational characteristics based on specific types of motion profiles, and the derived elements are combined according to predetermined rules to produce a simulator. We applied this method to a ball-screw mechanism and assessed the performance of the generated simulator by comparing it with experimental data. In the experimental setup, we observed position-dependent submicrometer vibrations, which cannot be represented by conventional mechanical models. The simulator, constructed by combining FF elements from high-resolution measured or reconstructed data, replicated vibrations with similar frequencies. However, its ability to effectively mimic certain responses, including the observed submicrometer vibrations, was limited. Notably, the vibration amplitude varied with velocity. Nevertheless, the results demonstrated that straightforward refinement of the simulator generation process could produce a simulator with high simulation accuracy.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 13-26"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618677","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Inter-reflection error correction method based on phase-difference look-up-table for fringe projection profilometry 基于相位差查表的条纹投影轮廓间反射误差校正方法
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-11 DOI: 10.1016/j.precisioneng.2025.11.028
Peng Tang , Zhenyu Liu , Guodong Sa , Jianrong Tan
{"title":"Inter-reflection error correction method based on phase-difference look-up-table for fringe projection profilometry","authors":"Peng Tang ,&nbsp;Zhenyu Liu ,&nbsp;Guodong Sa ,&nbsp;Jianrong Tan","doi":"10.1016/j.precisioneng.2025.11.028","DOIUrl":"10.1016/j.precisioneng.2025.11.028","url":null,"abstract":"<div><div>Fringe projection profilometry (FPP) is an efficient and high-precision approach to establish surface measurement, which assumes the measured object receives only direct illumination from the measurement device instead of global illumination. However, in practice, the inter-reflective structure of the object surface itself introduces indirect illumination, which leads to inter-reflection errors and severely limits the measurement accuracy of FPP. Existing inter-reflection error correction methods typically require carefully chosen pattern parameters or additional installed hardware, reducing the measurement flexibility and efficiency. To address this issue, a method based on phase-difference look-up-table (PD-LUT) is proposed without additional patterns or hardware. The influence of inter-reflection errors on the FPP measurement is first analyzed. Besides, the optimal function for inter-reflection error correction is defined in the form of complex modulation-phase representation. To optimize this optimal function, the relationship between the modulation of global illumination and phase difference between direct and indirect illumination is constructed as PD-LUT. PD-LUT is utilized to obtain candidate wrapped phase corresponding to direct illumination and then the final optimal absolute phase is identified from these candidates. Qualitative and quantitative contrast experiments demonstrate that the proposed method exhibits excellent performance in dealing with inter-reflection errors and achieves accurate and reliable measurements even under challenging conditions.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 236-247"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145790628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamic image blurring analysis and vibration suppression in reflective lithography projection objective 反射式光刻投影物镜动态图像模糊分析及振动抑制
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-02 DOI: 10.1016/j.precisioneng.2025.12.003
Shiyu Li , Ji Zhou , Chi Tu , Xia Kang , Jingteng Liu , Haifeng Sun , Junbo Liu
{"title":"Dynamic image blurring analysis and vibration suppression in reflective lithography projection objective","authors":"Shiyu Li ,&nbsp;Ji Zhou ,&nbsp;Chi Tu ,&nbsp;Xia Kang ,&nbsp;Jingteng Liu ,&nbsp;Haifeng Sun ,&nbsp;Junbo Liu","doi":"10.1016/j.precisioneng.2025.12.003","DOIUrl":"10.1016/j.precisioneng.2025.12.003","url":null,"abstract":"<div><div>Dynamic image degradation in reflective projection objectives limits sub-nanometer chip fabrication in high-numerical aperture (NA) extreme ultraviolet (EUV) lithography systems. Micro-vibrations induce optical misalignments via opto-mechanical coupling, causing spatial image blur. An opto-mechanical coupled model and a multi-parameter optimization method are proposed to evaluate the mirror position offset and reduce the vibration response. Based on the second Lagrange equations, a multi-body dynamics model considering the internal stiffness, damping and mass of the objective is established. The predicted mirror displacement errors along the X, Y and Z axes are 3.01 %, 3.39 % and 0.12 % respectively. Hopkins’ partially coherent imaging theory and wavefront aberration transfer functions are used to develop a dynamic image blur evaluation model. On this basis, a hybrid genetic algorithm-particle swarm optimization (GA-PSO) method is proposed to optimize stiffness and damping parameters, reducing mirror displacement responses and spatial image pattern errors (PE) by over 36 % and 40 % respectively.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 96-107"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145684906","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of pH on the electrochemical dissolution behavior of a (TiVCr)95W5 refractory high-entropy alloy and the machining of various structures pH对(TiVCr)95W5难熔高熵合金电化学溶解行为及不同组织加工的影响
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-06 DOI: 10.1016/j.precisioneng.2025.12.007
Juchen Zhang , Haitao Xu , Wenjun Tang , Zhonghao Lian , Yixiang Qiao , Xiaokang Yue , Shunhua Chen
{"title":"Effect of pH on the electrochemical dissolution behavior of a (TiVCr)95W5 refractory high-entropy alloy and the machining of various structures","authors":"Juchen Zhang ,&nbsp;Haitao Xu ,&nbsp;Wenjun Tang ,&nbsp;Zhonghao Lian ,&nbsp;Yixiang Qiao ,&nbsp;Xiaokang Yue ,&nbsp;Shunhua Chen","doi":"10.1016/j.precisioneng.2025.12.007","DOIUrl":"10.1016/j.precisioneng.2025.12.007","url":null,"abstract":"<div><div>Refractory high-entropy alloys (RHEAs), showing excellent mechanical properties at high temperature, are expected to have promising applications in various industries, for instance, the key components of aero engines. On account of high strength and hardness as well as good corrosion resistance, electrochemical machining (ECM) brings in a promising but challenging way to process RHEAs efficiently. In this work, to implement a practicable ECM process for RHEAs, the electrochemical dissolution behavior of a (TiVCr)<sub>95</sub>W<sub>5</sub> RHEA in different pH conditions was investigated using different solutions, namely 10 % NaNO<sub>3</sub>, 10 % NaNO<sub>3</sub>+0.5 % HNO<sub>3,</sub> and 10 % NaNO<sub>3</sub>+0.5 % NaOH. The results show that the RHEA exhibits a more significant corrosion tendency, lower resistance, and more uniform dissolution for each refractory element in the 10 % NaNO<sub>3</sub>+0.5 % NaOH solution than that in the other two solutions, and the heterogeneous corrosions in interdendritic areas are also eliminated. The effects of OH<sup>−</sup> ion concentration, cathode feed rate, machining voltage, and duty cycle on the ECM performance of the RHEA were then investigated. Further, a dissolution model for the dissolution behavior of RHEAs during ECM has been established. Besides, an orthogonal experiment was also carried out to optimize the processing parameters, where the best performance was achieved by an electrolyte of 10 % NaNO<sub>3</sub>+0.5 % NaOH, a cathode feed rate of 5.4 μm/s, a machining voltage of 23 V, and a pulsed power duty cycle of 30 %. Finally, a round hole of 1.224 mm diameter (the standard deviation of diameter is 0.0176 mm and the relative error is 2.04 %) and a 0.9778 × 0.9746 mm square hole were successfully machined using ECM (the standard deviation of transverse and longitudinal are 0.0183 and 0.0126 mm respectively), which further verified the feasibility of machining RHEAs using the ECM technique.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 148-165"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fast prototyping of complex-shaped fused silica micro-optics through diamond turning of silica nanocomposites 利用金刚石车削二氧化硅纳米复合材料快速成型复杂形状熔融二氧化硅微光学元件
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-02 DOI: 10.1016/j.precisioneng.2025.12.002
Ya Xu , Xiaotong Du , Xiaodong Su , Suet To , LiMin Zhu , Zhiwei Zhu
{"title":"Fast prototyping of complex-shaped fused silica micro-optics through diamond turning of silica nanocomposites","authors":"Ya Xu ,&nbsp;Xiaotong Du ,&nbsp;Xiaodong Su ,&nbsp;Suet To ,&nbsp;LiMin Zhu ,&nbsp;Zhiwei Zhu","doi":"10.1016/j.precisioneng.2025.12.002","DOIUrl":"10.1016/j.precisioneng.2025.12.002","url":null,"abstract":"<div><div>By processing photocurable silica-polymer-based nanocomposites, the additive and subtractive manufacturing techniques have recently emerged as powerful tools for fast prototyping fused silica components with complex structures. However, the inherently low form accuracy and low surface smoothness achieved by current additive and subtractive manufacturing of the nanocomposites prohibit their application in generating fused silica glass optics. To satisfy the requirements for producing high-quality optical surfaces with high efficiency, we proposed an innovative fast-prototyping technique for creating complex-shaped fused silica optics by shaping silica nanocomposites through ultra-precision diamond cutting. Unlike fused silica glass, which has high hardness and low fracture toughness, silica nanocomposites are easier to cut due to the coexistence of soft and ductile polymers. The shaped components are then converted into conforming fused silica optics through high-temperature debinding and sintering. To enable high-performance prototyping of fused silica optics, the silica nanocomposites were first optimized by balancing machinability and sinterability. For the optimized nanocomposites, evolutions of surface micro/nanotopographies and dimensions from cutting to sintering were characterized, and the achievable sizes were investigated by generating micro-gratings with various widths. Finally, a diffractive/refractive hybrid lens and a spherical microlens array were successfully fabricated with further characterization of their optical performance, demonstrating the superiority of the proposed technique for the rapid prototyping of fused silica micro-optics.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 75-86"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145684904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Repeatability of stylus measurements in a multiscale approach 多尺度方法中手写笔测量的可重复性
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-01 DOI: 10.1016/j.precisioneng.2025.12.001
Damian Gogolewski
{"title":"Repeatability of stylus measurements in a multiscale approach","authors":"Damian Gogolewski","doi":"10.1016/j.precisioneng.2025.12.001","DOIUrl":"10.1016/j.precisioneng.2025.12.001","url":null,"abstract":"<div><div>This paper describes a method for assessing the repeatability of stylus measurements based on a direct comparison of the profiles measured without shifting the position of a sample. The analysis was conducted based on ISO 21920–2, H-H plots, coefficient of determination R<sup>2</sup> and using Wavelet coherence analysis. The samples for research were manufactured using two technologies to ensure different surface topographies and to verify the method on a wide spectrum. The conducted analysis showed a high correlation (R<sup>2</sup> &gt; 0.97) between measurements with differences in profiles for subsequent measurements in relation to the scale. The application of the multiscale method allowed for recording the occurrence of differences (for scale up to 64 μm) and to define the place and potential reason for their occurrence, which was not possible with the use of classical parametric assessment. A different mapping of selected morphological features, as well as a profile shifts in subsequent measurements were also noted. The research has the potential for practical use in both the research field and industrial applications, and can contribute to supplementing the current standards.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 87-95"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145684905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamic axial force prediction model and method for controlling burr height in Longitudinal-torsional ultrasonic pecking micro-drilling of GH4169 superalloy GH4169高温合金纵扭超声微孔动态轴向力预测模型及毛刺高度控制方法
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-05 DOI: 10.1016/j.precisioneng.2025.12.005
Dingyi Tao , Zhen Yin , Qinglong An , Qing Miao , Chenwei Dai , Ming Zhang , Hua Li , Zehui Liang , Yue Kou
{"title":"Dynamic axial force prediction model and method for controlling burr height in Longitudinal-torsional ultrasonic pecking micro-drilling of GH4169 superalloy","authors":"Dingyi Tao ,&nbsp;Zhen Yin ,&nbsp;Qinglong An ,&nbsp;Qing Miao ,&nbsp;Chenwei Dai ,&nbsp;Ming Zhang ,&nbsp;Hua Li ,&nbsp;Zehui Liang ,&nbsp;Yue Kou","doi":"10.1016/j.precisioneng.2025.12.005","DOIUrl":"10.1016/j.precisioneng.2025.12.005","url":null,"abstract":"<div><div>The GH4169 nickel-based superalloy, owing to its outstanding tensile strength, excellent creep resistance, and long fatigue life, has become a key material for manufacturing critical hot-section components in aero-engines, such as turbine blades. When machining the cooling holes on the surface of turbine blades, large axial forces and burrs at the outlet are prone to occur. To overcome the aforementioned problems, a longitudinal–torsional ultrasonic vibration-assisted peck drilling (LTUPD) method is presented in this study. A simulation of the LTUPD drill's cutting-edge motion trajectory is carried out, and the mechanical behavior during the three stages of burr formation is investigated(stable cutting → critical transition → tearing and separation). A dynamic axial force prediction model for burr formation was developed based on discrete cutting-edge modeling and the Johnson–Cook constitutive law. The effects of ultrasonic amplitude, spindle speed, feed rate, and pecking depth on the axial force–burr height relationship were investigated through a series of single-factor experiments. Experimental validation indicates that the axial force prediction model achieves an error within 8 % compared with measurements; Ultrasonic vibration markedly reduces axial force and inhibits burr generation.; A reduction in feed rate and pecking depth leads to lower axial force and burr height; The axial force and burr height decrease with increasing spindle speed up to 9000 r/min, whereas a further increase in speed results in their growth. The optimal drilling conditions were obtained at 9000 r/min spindle speed, 6.3 mm/min feed rate, 6 μm ultrasonic amplitude, and 0.03 mm pecking depth. Using this combination, axial force in LTUPD decreased by 40 %, while burr height was lowered by more than 20 % relative to conventional drilling.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 131-147"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737092","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
In-situ integrated ultrasonic vibration-assisted grain refinement for suppressing anisotropic diamond cutting behavior of polycrystalline Cu 原位集成超声振动辅助晶粒细化抑制多晶铜的各向异性金刚石切削行为
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-12-05 DOI: 10.1016/j.precisioneng.2025.12.009
Wenxin Zhang , Zhanfeng Wang , Junjie Zhang
{"title":"In-situ integrated ultrasonic vibration-assisted grain refinement for suppressing anisotropic diamond cutting behavior of polycrystalline Cu","authors":"Wenxin Zhang ,&nbsp;Zhanfeng Wang ,&nbsp;Junjie Zhang","doi":"10.1016/j.precisioneng.2025.12.009","DOIUrl":"10.1016/j.precisioneng.2025.12.009","url":null,"abstract":"<div><div>While inherent heterogeneous microstructures introduce significant anisotropic machining response of polycrystalline metals, reducing the anisotropy by grain refinement is crucial for achieving the ultrahigh surface integrity. In the present work, we propose an in-situ integrated grain refinement strategy of polycrystalline Cu by firstly ultrasonic vibration-assisted diamond cutting for suppressing the anisotropic cutting behavior in subsequent conventional diamond cutting, the two processes of which are carried out within one experimental setup. Specifically, the promoted propensity and underlying mechanisms of cutting-induced grain refinement within subsurface by vibration assistance are discovered by experiments and multiscale numerical simulations. A maximum decrease of average grain size in subsurface from initial 13.5 μm–5.3 μm accompanied by dislocation glide-dominated dynamic recrystallization is revealed. Subsequent in-situ conventional diamond cutting on the fine-grained Cu yields an ultrasmooth surface formation with significantly suppressed grain boundary surface steps, accompanied with a 71.1 % reduction of surface roughness from its coarse-grained counterpart. Subsequent instrumented nanoindentation tests on retaining refinement layer with a 4 μm thickness demonstrate the enhanced mechanical performance of machined surface of fine-grained Cu in terms of increased hardness and elastic modulus. This study demonstrates the feasibility and effectiveness of applying grain refinement by in-situ integrated vibration-assisted diamond cutting for improving the machining performance of polycrystalline metals.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 166-177"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hybrid reluctance-actuated Stewart platform for high-precision position control 用于高精度位置控制的混合磁阻驱动Stewart平台
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-03-01 Epub Date: 2025-11-19 DOI: 10.1016/j.precisioneng.2025.11.021
Christian Haider, Damian Senoner, Andreas Sinn, Adis Husanović, Benjamin Friedl, Georg Schitter
{"title":"Hybrid reluctance-actuated Stewart platform for high-precision position control","authors":"Christian Haider,&nbsp;Damian Senoner,&nbsp;Andreas Sinn,&nbsp;Adis Husanović,&nbsp;Benjamin Friedl,&nbsp;Georg Schitter","doi":"10.1016/j.precisioneng.2025.11.021","DOIUrl":"10.1016/j.precisioneng.2025.11.021","url":null,"abstract":"<div><div>This paper presents a Stewart platform with hybrid reluctance-actuated struts to achieve six-degrees-of-freedom motion capability. Tailored hybrid reluctance actuators (HRAs) are integrated into a novel strut design to achieve axial force transmission to the Stewart platform’s end effector via flexure-based joints. Each actuator has a motion range of <span><math><mo>±</mo></math></span>1 mm, leading to a platform workspace of <span><math><mo>±</mo></math></span>1.34 mm along the vertical z-axis and <span><math><mo>±</mo></math></span>1.1 mm in x- and y-direction. The rotational range amounts to <span><math><mo>±</mo></math></span>0.66°/0.78° for tip/tilt motion. By implementation of a MIMO decoupling approach using canonical polyadic decomposition (CPD), position control bandwidths of up to 30 Hz are reached in the task space. The platform achieves millimeter stroke with sub-micrometer translational resolution (45 nm RMS), sub-microradian angular resolution (300 nrad RMS) and a bidirectional repeatability (1<span><math><mi>σ</mi></math></span>) of 0.15–0.32 µm and 3.5–4.8 µrad. The overall positioning accuracy (RMSE), quantified against external interferometric measurements, amounts to 1-2.3 µm in translation and 11–15 µrad in rotation.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 27-36"},"PeriodicalIF":3.7,"publicationDate":"2026-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618678","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sustainable micro-milling of Ti6Al4V: Role of MoS2 and CuO nanofluids in minimum quantity lubrication Ti6Al4V的可持续微铣削:MoS2和CuO纳米流体在最小量润滑中的作用
IF 3.7 2区 工程技术
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2026-01-01 Epub Date: 2025-09-22 DOI: 10.1016/j.precisioneng.2025.09.020
Hamed Hassanpour , Amir Rasti , Sina Sabbaghi Farshi , Hossein Sabzi
{"title":"Sustainable micro-milling of Ti6Al4V: Role of MoS2 and CuO nanofluids in minimum quantity lubrication","authors":"Hamed Hassanpour ,&nbsp;Amir Rasti ,&nbsp;Sina Sabbaghi Farshi ,&nbsp;Hossein Sabzi","doi":"10.1016/j.precisioneng.2025.09.020","DOIUrl":"10.1016/j.precisioneng.2025.09.020","url":null,"abstract":"<div><div>The current research explores how various nano minimum quantity lubrication (NMQL) techniques impact surface integrity in the micro-milling of Ti6Al4V. Accordingly, three combinations including MQL, NMQL + CuO, and NMQL + MoS<sub>2</sub> were evaluated across three different spindle speeds. Surface roughness was assessed using areal surface roughness (Sa). Findings show that increasing spindle speeds up to 32,000 rpm leads to lower Sa values across all lubrication methods. The inclusion of nanoparticles like MoS<sub>2</sub> enhances surface finish, with a significant reductions in Sa of 21 %. Increasing spindle speed from 16,000 to 32,000 rpm also effectively decreases burr width. Among the methods, NMQL + MoS<sub>2</sub> achieved the smallest burr width of approximately 110 μm. Furthermore, surface hardness increased under all test conditions, with NMQL + MoS<sub>2</sub> achieving the highest hardness. White layer formation is one of the challenges of micromachining. Regarding of the thickness of this layer, NMQL + MoS<sub>2</sub> showed the thinnest layer, and at 32,000 rpm, the white layer was completely removed. It also proves that white layer can be totally eliminated by optimizing cutting parameters under NMQL condition. Corrosion resistance evaluation revealed that NMQL + CuO had the highest resistance. Overall, the findings suggest that adding nanoparticles, particularly MoS<sub>2</sub>, to the MQL system can significantly enhance surface properties during the micro-milling of Ti6Al4V alloy, offering a viable solution for a consistent and high-quality micro-milling process.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 226-234"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145121217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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