Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

{"title":"Global calibration of an on-machine measurement system using a chromatic confocal sensor","authors":"Qiang Liu ,&nbsp;Zhiyang Yuan ,&nbsp;Haiyang Di ,&nbsp;Shouli Sun","doi":"10.1016/j.precisioneng.2025.08.004","DOIUrl":"10.1016/j.precisioneng.2025.08.004","url":null,"abstract":"<div><div>In ultra-precision machining, real-time measurement is typically conducted using non-contact on-machine measurement (OMM) systems to satisfy the stringent accuracy requirements of manufactured workpieces. However, during the OMM process, deviations in the beam direction of sensor may introduce measurement errors, thereby compromising machining precision. To address this challenge, this study proposes an on-machine measurement system based on a chromatic confocal sensor, capable of accurately inspecting freeform surfaces, such as spherical workpieces. Initially, an OMM system was implemented on a three-axis alignment turning lathe, followed by the calibration of the beam direction of sensor using a standard sphere. To simultaneously estimate the beam direction vector and sphere center coordinates, a novel hybrid optimization algorithm combining a Genetic Algorithm (GA) and the Levenberg–Marquardt (L–M) method was developed. Compared to conventional optimization methods, the proposed algorithm reduces calibration residual error by approximately 61.4 %, as measured by the sum of squared residuals. Finally, planar surface measurement experiments were conducted using the developed OMM system alongside a precision interferometer to validate calibration accuracy. This study achieves submicron measurement precision, facilitating accuracy, enabling integrated machining and measurement on ultra-precision turning platforms and ensuring reliable process control.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 864-873"},"PeriodicalIF":3.7,"publicationDate":"2025-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144852737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A mathematical model on improved material removal mechanism in fixed agglomerated diamond abrasive lapping","authors":"Jiapeng Chen ,&nbsp;Yanan Peng ,&nbsp;Ying Wei ,&nbsp;Yulong Ding ,&nbsp;Ke Dai ,&nbsp;Bing Liu ,&nbsp;Wenbo Bie ,&nbsp;Jianxiu Su","doi":"10.1016/j.precisioneng.2025.08.006","DOIUrl":"10.1016/j.precisioneng.2025.08.006","url":null,"abstract":"<div><div>The manufacture of agglomerated diamond (AD) abrasives involves the combination of ceramic adhesives with single - crystal diamond (SCD) abrasives. This combination results in an abrasive that plays a pivotal role in the semiconductor production process, thus making it an integral material in the manufacturing process. Nevertheless, there exists a notable paucity of numerical and analytical models capable of comprehensively and precisely expounding upon the enhanced material - removal mechanism in the processing of lapping superhard and brittle semiconductor workpieces with fixed AD abrasives. In this treatise, the AD abrasive is ingeniously converted into an equivalent SCD abrasive. Based on the previous research on the removal model of superhard and brittle materials in the fixed SCD abrasive lapping, this paper has deepened the field. The mechanism of material removal and enhancement in fixed AD abrasive lapping was investigated in detail by using an equivalent single - crystal model. A comprehensive review of the interaction of physical and chemical factors aims to achieve efficient and accurate material removal, providing a theoretical basis and technical guidance for the precision machining of superhard and brittle materials. Through a scrupulous and detailed comparison of the correlations between the penetration depths of the AD and SCD abrasives into the sapphire wafer and the deformations occurring during the yielding process in the two types of abrasives incorporated into the matrix material of the fixed abrasive pad (FAP) that is intended to support the abrasives, an exhaustive exploration is carried out on the mapping between the FAP matrix characteristics and lapping parameters and the abrasive cutting depths. Consequently, the underlying and profound causes for the mechanism of performance improvement of fixed AD abrasive pads during material removal are clearly and systematically elucidated and summarized, thereby providing valuable insights and contributions to the relevant research domain.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 822-839"},"PeriodicalIF":3.7,"publicationDate":"2025-08-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144841728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Advanced back grinding of semiconductor wafers using an angle-feedback TTV compensation controller","authors":"Byung-Hyun Hwang,&nbsp;Kyoung-Su Park","doi":"10.1016/j.precisioneng.2025.08.001","DOIUrl":"10.1016/j.precisioneng.2025.08.001","url":null,"abstract":"<div><div>As the semiconductor industry advances toward higher performance and integration, precise wafer back grinding has become increasingly vital. This study introduces an innovative, in-house wafer back grinding system that features a non-contact laser displacement sensor for inline Total Thickness Variation (TTV) measurement—eliminating the need to detach wafers during processing. By integrating real-time measurement and feedback, the proposed system minimizes process-induced errors, streamlines workflow, and significantly boosts manufacturing efficiency. A novel algorithm based on rotation matrix-based angle compensation adjusts the α and β tilting angles to align the wafer and grinding wheel planes accurately. Experimental validation shows that TTV was improved by an average of 510 % with TTV distribution errors reduced by 74.6 %, bringing values consistently within micron-level tolerances. This research marks a major step toward real-time optimization of the back grinding process. The proposed method is compatible with both rough and fine grinding wheels, offering scalable improvements in wafer quality and throughput. These results underscore the critical role of integrated measurement and adaptive angle-feedback algorithms in next-generation semiconductor manufacturing.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 851-863"},"PeriodicalIF":3.7,"publicationDate":"2025-08-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144852736","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Statistical variation of porous aerostatic bearings","authors":"Valtteri Vainio ,&nbsp;Mikael Miettinen ,&nbsp;Onni Leutonen ,&nbsp;Jaakko Majuri ,&nbsp;René Theska ,&nbsp;Raine Viitala","doi":"10.1016/j.precisioneng.2025.07.013","DOIUrl":"10.1016/j.precisioneng.2025.07.013","url":null,"abstract":"<div><div>This study investigates the statistical variation of the performance of porous aerostatic bearings. A novel Repeatability Performance Parameter (<span><math><msub><mrow><mi>R</mi></mrow><mrow><mi>p</mi><mi>p</mi></mrow></msub></math></span>) is introduced to quantify bearing performance similarity across key performance variables, such as air gap height, bearing load capacity, stiffness, air flow, and air gap pressure distribution. An automated high precision measurement setup was developed to measure these parameters.</div><div>Four sample bearing sets, consisting of three commercially available and one in-house manufactured, were analyzed. Surface roughness and planarity of the samples were evaluated using coherence scanning interferometry. Load capacity, air film stiffness, and pressure distribution were measured under varying loads.</div><div>The results highlight significant variability in bearing performance both within and between manufacturers, emphasizing the need for improved manufacturing repeatability. The findings contribute to the advancement of aerostatic bearing technology by providing a quantitative assessment of bearing performance similarity.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 840-850"},"PeriodicalIF":3.7,"publicationDate":"2025-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144841729","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Enhancing 3D coordinate measurements in laser scanner by friction compensation","authors":"Oleg Sergiyenko ,&nbsp;José A. Núñez-López ,&nbsp;Vera Tyrsa ,&nbsp;Ruben Alaniz-Plata ,&nbsp;Oscar M. Pérez-Landeros ,&nbsp;Fernando Lopez-Medina ,&nbsp;Wendy Flores-Fuentes ,&nbsp;Julio C. Rodríguez-Quiñonez ,&nbsp;Iván Y. Alba-Corpus ,&nbsp;Fabian N. Murrieta-Rico ,&nbsp;Artur Kaspariants ,&nbsp;Vladimir Kartashov ,&nbsp;Marina Kolendovska ,&nbsp;Cesar Selpulveda-Valdez","doi":"10.1016/j.precisioneng.2025.07.024","DOIUrl":"10.1016/j.precisioneng.2025.07.024","url":null,"abstract":"<div><div>This study addresses the challenge of precise laser ray spatial positioning in the presence of nonlinear friction dynamics during 3D coordinates measurement. We developed a novel control strategy integrating friction compensation to enhance the reliability and accuracy of 3D laser scanning instrument to enhance measurement quality. Our approach updates the classic LuGre friction model using Scanning Electron Microscope (SEM) analysis of micro-relieved surfaces, aiding in the dynamic characterization of the internal variable ‘z’ for the laser positioner control synthesis. The global asymptotic stability of the system was proven using Lyapunov’s direct method and Barbalat’s lemma. Experimental results validate the improved accuracy in positioning, demonstrating a significant reduction in the uncertainty of measurement spatial coordinates using the friction-compensated laser scanning system. Our study implemented and evaluated three control algorithms, including two advanced compensation controls, highlighting their effectiveness in reducing friction-induced errors and improving laser positioning accuracy. Our contribution advances the instrumentation precision through friction compensation, improving the nonlinear friction dynamics to enhance the stable laser ray positioning and, correspondingly, the accuracy of 3D coordinate measurements.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 803-813"},"PeriodicalIF":3.7,"publicationDate":"2025-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144830189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A parametrically excited MEMS gyroscope with optical readout: Design and simulation","authors":"Reza Gholamzadeh ,&nbsp;Mohammadreza Salehi Moghaddam ,&nbsp;Hassan Salarieh ,&nbsp;Javad Akbari ,&nbsp;Gholam Mohammad Parsanasab","doi":"10.1016/j.precisioneng.2025.07.027","DOIUrl":"10.1016/j.precisioneng.2025.07.027","url":null,"abstract":"<div><div>Design and simulation of a Micro-Opto-Electro-Mechanical (MOEMS) Gyroscope are presented. Compared to common gyroscopes, it features lower linear acceleration sensitivity and requires a lower drive voltage. The mechanical design ensures a high resonance frequency. It also has a smaller footprint and is insensitive to environmental variations. To improve shock resistance, four two-dimensional stoppers have been employed, which limit the gyroscope’s movement in two directions and increase the acceleration tolerance of the structure. Furthermore, an optical method is utilized to detect the gyroscope displacement such that the intensity of the output light is proportional to the displacement of the mechanical structure along the sense axis. A variable gap between two strip SOI waveguides modulates the output light intensity. The drive and sense mode resonance frequencies are obtained as <span><math><mrow><mn>21</mn><mo>.</mo><mn>9</mn><mspace></mspace><mi>kHz</mi></mrow></math></span> and <span><math><mrow><mn>22</mn><mspace></mspace><mi>kHz</mi></mrow></math></span> respectively; the measurement range is <span><math><mrow><mo>±</mo><mn>50</mn><mspace></mspace><mi>deg</mi><mo>/</mo><mi>s</mi></mrow></math></span>, the mechanical sensitivity is 0.56 <span><math><mfrac><mrow><mi>nm</mi></mrow><mrow><mi>deg</mi><mo>/</mo><mi>s</mi></mrow></mfrac></math></span> and the overall sensitivity is <span><math><mrow><mn>1</mn><mo>.</mo><mn>6</mn><mspace></mspace><mfrac><mrow><mtext>%</mtext></mrow><mrow><mi>deg</mi><mo>/</mo><mi>s</mi></mrow></mfrac></mrow></math></span>.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 814-821"},"PeriodicalIF":3.7,"publicationDate":"2025-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144841725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An adaptive sampling method based on simplified mesh with multi-constraint for free-form surface measurement","authors":"Ma Zhifu ,&nbsp;Lu Yong ,&nbsp;Ma Shoudong ,&nbsp;Deng Kenan","doi":"10.1016/j.precisioneng.2025.07.025","DOIUrl":"10.1016/j.precisioneng.2025.07.025","url":null,"abstract":"<div><div>In terms of contact-based measurement, the sampling points distribution affects measurement efficiency and accuracy significantly. In this study, an adaptive sampling method based on simplified mesh with multi-constraint for free-form surface measurement is proposed. Firstly, the edge contraction strategy is used for mesh simplification. To improve the contraction efficiency, contraction target vertices are mapped to existing vertices. Subsequently, the mesh simplification procedure is established. To avoid mesh degradation during simplification, mesh edge types are defined. The construction of vertex pairs used for edge contraction is investigated. In simplification cost calculation, an area preservation factor is introduced to improve the simplification result, and the multi-constraint-based simplification cost calculation procedure is developed. Sampling points are then distributed according to the simplified mesh. Finally, simulations and experiments are conducted to validate the effectiveness of the proposed sampling method.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 757-769"},"PeriodicalIF":3.7,"publicationDate":"2025-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144771870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Experimental investigation of actual rolling element distribution in recirculating linear guideways using integrated inductive proximity sensors","authors":"Yutao Lan ,&nbsp;Danny Staroszyk ,&nbsp;Mukesh Moga ,&nbsp;Jens Müller ,&nbsp;Steffen Ihlenfeldt","doi":"10.1016/j.precisioneng.2025.07.014","DOIUrl":"10.1016/j.precisioneng.2025.07.014","url":null,"abstract":"<div><div>The demand for precision in linear motion systems has led to increased efforts to minimize motion errors in linear guideways (LGWs). A significant source of these errors is ball passage vibration, caused by the recirculating nature of rolling elements (REs). Although gaps between REs may arise during operation and alter RE distribution, most studies of LGWs continue to adopt the simplifying no-gap assumption. Prior research has typically inferred RE distribution indirectly through vibration analysis, while the actual distribution under real operating conditions remains unclear, partly due to the lack of practical measurement methods. In this study, we developed a novel experimental approach using integrated inductive proximity sensors to directly measure the RE distribution in the contact zone of an LGW, and investigated the influence of varying loads and velocities on the RE Distribution. The results revealed that RE distribution is irregular and significantly affected by operating conditions, challenging the conventional no-gap assumption and providing new insight for LGW modeling and design.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 706-720"},"PeriodicalIF":3.7,"publicationDate":"2025-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144725010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Design and experimental validation of a novel compliant micro-positioning stage with nonlinear stiffness","authors":"Wei Wang ,&nbsp;Jinchuan Zheng ,&nbsp;Zhihong Man ,&nbsp;Hai Wang ,&nbsp;Xiaoqi Chen ,&nbsp;Yuan Chen","doi":"10.1016/j.precisioneng.2025.07.015","DOIUrl":"10.1016/j.precisioneng.2025.07.015","url":null,"abstract":"<div><div>This article presents a novel design of a piezoelectric actuated stage with variable nonlinear stiffness to achieve active suppression of residual vibrations in response to a step input command. In the stage design, a nonlinear stiffness mechanism with four leaf-shaped compliant legs is proposed, which possesses a more significant and rapid stiffness variation with respect to output displacement than traditional linear stiffness mechanisms. The analysis of the proposed stage design is established on the basis of large deformation theory of beams and analysed by using the pseudo-rigid method. In addition, the response surface method is employed in multi-objective optimization for the key design parameters of the stage. The static and dynamic performance of the stage is evaluated by finite element analysis. Lastly, experiments were conducted on a real prototype of the micro-positioning stage. The experimental results verify that the proposed stage can achieve a continuously adjustable displacement amplification ratio from 3.6 to 10.8 and its first natural frequency from 208 to <span><math><mrow><mn>251</mn><mspace></mspace><mi>Hz</mi></mrow></math></span> owing to the variable stiffness. The results also demonstrate that the stage can achieve self-suppression of the residual vibrations under a step input signal to the piezoelectric actuator.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 745-756"},"PeriodicalIF":3.7,"publicationDate":"2025-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144750739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Inspection of edge detection using spatial frequency filtering","authors":"Jingwei Wang ,&nbsp;Tatsuki Otsubo ,&nbsp;Megumu Kuroiwa ,&nbsp;Toshiaki Yasaka ,&nbsp;Soichirou Kanemaru ,&nbsp;Takanori Yazawa","doi":"10.1016/j.precisioneng.2025.07.016","DOIUrl":"10.1016/j.precisioneng.2025.07.016","url":null,"abstract":"<div><div>This study proposes a defect detection system based on spatial frequency filtering to measure edge chipping in two types of tools: straight-edged punching blades and closed-curve punching dies, both made of ultrafine grain cemented carbide. Although different optical configurations were applied to accommodate the geometry of each tool, both systems are based on the same measurement principle using high-pass spatial frequency filtering, and they share a unified image processing algorithm for quantifying edge chipping and suppressing the influence of dust and other noise. A spatial filter is placed at the back focal plane of the Fourier transform lens to block the 0-order ray, forming a clear light-dark-light fringe pattern. Combined with the proposed image processing algorithm, this enables accurate extraction of edge positions and robust evaluation of micro-scale defects. Experiments demonstrated that the developed system could detect edge chipping larger than 1 μm in both types of tools. This research presents a practical and adaptable solution for non-contact defect detection and contributes to advanced quality assurance in industrial blade manufacturing.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"96 ","pages":"Pages 721-728"},"PeriodicalIF":3.7,"publicationDate":"2025-07-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144739168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}