Dongpo Zhao , Benliang Zhu , Hanheng Du , Zhichao Shi , Zhiwei Zhu
{"title":"Topology optimization of a dual-axial piezo-actuated fast tool servo with decoupled kinematics","authors":"Dongpo Zhao , Benliang Zhu , Hanheng Du , Zhichao Shi , Zhiwei Zhu","doi":"10.1016/j.precisioneng.2025.04.023","DOIUrl":null,"url":null,"abstract":"<div><div>This paper presents the design and development of a novel dual-axial piezo-actuated fast tool servo (FTS) based on a four-node finite element topology optimization design method for application in diamond machining of micro/nano-structured functional surfaces. Utilizing a solid isotropic material with penalization (SIMP) approach to express and analyze topological structure, a design model for multi-performance coupling dynamic optimization was developed. This model defines the natural frequency as the objective function, with constraints on in-plane motion coupling between the input and output ports, input–output compliance, stress, and other performance indicators. By solving the optimal design variables with the method of moving asymptotes (MMA) algorithm, a multi-performance optimization design for FTS systems with fully decoupled motion was achieved. The open-loop test of prototype validates the estimated strokes with low coupling and high natural frequencies. In closed-loop testing, the results demonstrate a minimal tracking error of <span><math><mrow><mo>±</mo><mn>0</mn><mo>.</mo><mn>1</mn><mtext>%</mtext></mrow></math></span> for the Lissajous trajectory, showcasing its precision in tracking desired trajectories for intricate micro/nano-structure formation.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"95 ","pages":"Pages 262-271"},"PeriodicalIF":3.5000,"publicationDate":"2025-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0141635925001357","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
引用次数: 0
Abstract
This paper presents the design and development of a novel dual-axial piezo-actuated fast tool servo (FTS) based on a four-node finite element topology optimization design method for application in diamond machining of micro/nano-structured functional surfaces. Utilizing a solid isotropic material with penalization (SIMP) approach to express and analyze topological structure, a design model for multi-performance coupling dynamic optimization was developed. This model defines the natural frequency as the objective function, with constraints on in-plane motion coupling between the input and output ports, input–output compliance, stress, and other performance indicators. By solving the optimal design variables with the method of moving asymptotes (MMA) algorithm, a multi-performance optimization design for FTS systems with fully decoupled motion was achieved. The open-loop test of prototype validates the estimated strokes with low coupling and high natural frequencies. In closed-loop testing, the results demonstrate a minimal tracking error of for the Lissajous trajectory, showcasing its precision in tracking desired trajectories for intricate micro/nano-structure formation.
期刊介绍:
Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.