Electronic Materials Letters最新文献

筛选
英文 中文
Kinetic Investigation of CuSx Formation on Cu Substrates for Enhanced Electrochemical CO2 Reduction to HCOOH Cu衬底上CuSx形成的电化学强化CO2还原成HCOOH的动力学研究
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-02-13 DOI: 10.1007/s13391-025-00546-y
Jin Wook Lim, Won Seok Cho, Jong-Lam Lee
{"title":"Kinetic Investigation of CuSx Formation on Cu Substrates for Enhanced Electrochemical CO2 Reduction to HCOOH","authors":"Jin Wook Lim,&nbsp;Won Seok Cho,&nbsp;Jong-Lam Lee","doi":"10.1007/s13391-025-00546-y","DOIUrl":"10.1007/s13391-025-00546-y","url":null,"abstract":"<div><p>Copper sulfide (CuS<sub>x</sub>) is an electrocatalyst which selectively converts CO<sub>2</sub> into HCOOH under harsh conditions. Here, we investigate the formation and kinetics of CuS<sub>x</sub> nanostructures on various multi-metal substrates to understand their catalytic properties in sulfur-containing environments. Using a combination of morphological, structural, and electrochemical analyses, we elucidate the time-dependent growth behavior of CuS<sub>x</sub> nanostructures with progressive void formation over time. Notably, we discover that CuS<sub>x</sub> formation is accelerated on substrates with galvanic corrosion-promoting metals such as Ag and Au, leading to enhanced selectivity for HCOOH during CO<sub>2</sub> reduction. In contrast, coating Cu with corrosion-inhibiting metals like Sn, Ni, or In reduce HCOOH selectivity, highlighting the critical role of galvanic corrosion in the CuS<sub>x</sub> formation mechanism and its kinetics. This study experimentally identifies the impact of galvanic corrosion on CuS<sub>x</sub> formation mechanisms and offers insights for optimizing electrocatalytic systems.</p><h3>Graphical Abstract</h3><div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"245 - 251"},"PeriodicalIF":2.1,"publicationDate":"2025-02-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143570987","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Adaptable Low-Temperature Resistor Standard Composed of ITO thin Film 可适应低温电阻标准由ITO薄膜组成
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-02-11 DOI: 10.1007/s13391-025-00548-w
Sebastian Złotnik, Małgorzata Nyga, Przemysław Morawiak, Witold Rzodkiewicz, Patryk Bruszewski, Marek A. Kojdecki, Jerzy Wróbel, Jarosław Wróbel
{"title":"Adaptable Low-Temperature Resistor Standard Composed of ITO thin Film","authors":"Sebastian Złotnik,&nbsp;Małgorzata Nyga,&nbsp;Przemysław Morawiak,&nbsp;Witold Rzodkiewicz,&nbsp;Patryk Bruszewski,&nbsp;Marek A. Kojdecki,&nbsp;Jerzy Wróbel,&nbsp;Jarosław Wróbel","doi":"10.1007/s13391-025-00548-w","DOIUrl":"10.1007/s13391-025-00548-w","url":null,"abstract":"<div><p>Herein, we present indium tin oxide (ITO) as a promising candidate for developing adaptable standard resistors. The ITO thin-film device structures exhibit an average resistivity of approx. 1.5 × 10<sup>–4</sup> Ω ⋅ cm, demonstrating remarkable stability in resistance values over time and showcasing temperature-independent magnetoresistance, making them reliable for various applications. ITO resistor structures were found to be optimal with an area ≥10<sup>–7</sup> cm<sup>2</sup>, without observed additional series resistance. The temperature dependence of resistance values changes by approx. 10% within a broad temperature range of 5–310 K in a predictable and repeatable way. Unlike traditional 2D materials, ITO can be processed without the necessity of a protective layer, facilitating easier integration into electronic circuits. Moreover, ITO demonstrates single-type electron characteristics, without hole-like contributions, being particularly suitable as a charge carrier transport control. Our experimental findings indicate that resistors made of ITO-coated glass thin films present a viable alternative to standard chip-type passive components, which are commonly used in electronic devices. This work highlights the potential of ITO as a durable and flexible material for advanced electronics, enabling the design of next-generation resistive elements that can adapt to varying operational conditions.</p><h3>Graphical Abstract</h3><div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"193 - 199"},"PeriodicalIF":2.1,"publicationDate":"2025-02-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1007/s13391-025-00548-w.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143571060","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dielectric Bonding Method for 3D Integration Packaging Using Self-Assembled Monolayer 自组装单层三维集成封装的介电键合方法
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-02-08 DOI: 10.1007/s13391-025-00547-x
Wonbin Kim, Sungjae Choi, Seongi Lee, Young-Chang Joo, Byoung-Joon Kim
{"title":"Dielectric Bonding Method for 3D Integration Packaging Using Self-Assembled Monolayer","authors":"Wonbin Kim,&nbsp;Sungjae Choi,&nbsp;Seongi Lee,&nbsp;Young-Chang Joo,&nbsp;Byoung-Joon Kim","doi":"10.1007/s13391-025-00547-x","DOIUrl":"10.1007/s13391-025-00547-x","url":null,"abstract":"<div><p>The emergence of big data and artificial intelligence has promoted the semiconductor industry to increasingly adopt advanced three-dimensional stacking packaging technologies due to the limitations of device scaling. Traditional packaging methods, which rely on micro bumps and adhesives, struggle to meet the growing demands for sub-micrometer fine pitches. To address these challenges, bump-less direct bonding techniques, such as Cu/SiO₂ hybrid bonding, have gained attention, along with surface-activated bonding (SAB) using plasma treatment. However, plasma treatment poses risks, including Cu oxidation and potential short circuits from Cu particle transfer in fine-pitch applications. This study presents a novel plasma-free method that utilizes self-assembled monolayers (SAMs), thin molecular layers that spontaneously create ordered structures on surfaces, for dielectric surface activation. We deposited 3-aminopropyltriethoxysilane (APTES) on silicon dioxide (SiO₂), resulting in a hydrophilic layer that enhances bonding. Notably, a heat treatment significantly improved interfacial adhesion strength through the formation of an amorphous silicon (Si) layer. This SAM-based bonding technique, which enables dielectric surface without the need for plasma, holds promise for future fine-pitch hybrid bonding applications in 3D integrated packaging.</p><h3>Graphical abstract</h3><div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"184 - 192"},"PeriodicalIF":2.1,"publicationDate":"2025-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143571147","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhanced Light-Scattering Properties of Aqueous Chemical Bath Deposited ZnO Nanowires: Influence of Zinc Source Concentration 化学浴沉积ZnO纳米线增强光散射性能:锌源浓度的影响
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-01-18 DOI: 10.1007/s13391-025-00545-z
Vinaya Kumar Arepalli, Eunyeong Yang, Choong-Heui Chung
{"title":"Enhanced Light-Scattering Properties of Aqueous Chemical Bath Deposited ZnO Nanowires: Influence of Zinc Source Concentration","authors":"Vinaya Kumar Arepalli,&nbsp;Eunyeong Yang,&nbsp;Choong-Heui Chung","doi":"10.1007/s13391-025-00545-z","DOIUrl":"10.1007/s13391-025-00545-z","url":null,"abstract":"<div><p>This study investigates the light-diffusing capabilities of ZnO nanowires synthesized using the aqueous chemical bath deposition method on PET substrates. By systematically varying Zn source concentrations, the morphology and optical performance of ZnO nanowires were tuned. Scanning electron microscopy revealed that nanowires grown at optimal Zn sources (0.75 g and 1.2 g) exhibited sharp tip morphologies, while higher or lower Zn sources led to flatter tips due to isotropic growth or insufficient precursor availability. Optical characterization demonstrated that ZnO nanowires grown at 1.2 g of the Zn source achieved a maximum total transmittance of ~ 58% and a scattering angle of 53°, outperforming commercial optical diffusers. The transmission haze values peaked at 98.5% for nanowires grown at 1.2 g of the Zn source, attributed to the enhanced refractive index boundaries and optimized structural properties. These findings highlight the potential of ZnO nanowires as high-performance optical diffusers for advanced optoelectronic applications.</p><h3>Graphical Abstract</h3><div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"177 - 183"},"PeriodicalIF":2.1,"publicationDate":"2025-01-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143571119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thickness-Dependent Electrical and Optoelectrical Properties of SnSe2 Field-Effect Transistors SnSe2场效应晶体管的厚度相关电学和光电学特性
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-01-16 DOI: 10.1007/s13391-025-00544-0
Han-Woong Choi, Dong Hyun Seo, Ji Won Heo, Sang-Il Kim, TaeWan Kim
{"title":"Thickness-Dependent Electrical and Optoelectrical Properties of SnSe2 Field-Effect Transistors","authors":"Han-Woong Choi,&nbsp;Dong Hyun Seo,&nbsp;Ji Won Heo,&nbsp;Sang-Il Kim,&nbsp;TaeWan Kim","doi":"10.1007/s13391-025-00544-0","DOIUrl":"10.1007/s13391-025-00544-0","url":null,"abstract":"<div><p>Two-dimensional semiconductors such as SnSe<sub>2</sub> hold great promise for electronic and optoelectronic applications. Factors such as the intrinsic carrier concentration and interfacial scattering strongly influence device performance. In this study, SnSe<sub>2</sub>-based field-effect transistors were fabricated with precise thickness control by reactive ion etching. Electrical measurements revealed that reducing the thickness from 300 to 21 nm led to an increase in carrier mobility from 3.76 to 26.6 cm² V<sup>− 1</sup> s<sup>− 1</sup> and an improvement in conductivity from 0.31 to 7.72 S/cm. This enhancement is attributed to a rise in carrier concentration, from 1.48 × 10<sup>18</sup> to 1.66 × 10<sup>19</sup> cm⁻³, along with better screening of interfacial Coulomb potential. Furthermore, the photoresponsivity varied with thickness, with thinner devices exhibiting a peak of 484 A/W under a 700-nm laser, compared to 260 A/W under a 900-nm laser for thicker devices. These findings highlight the critical role of thickness optimization in fine-tuning the electrical and optoelectronic properties of SnSe<sub>2</sub>-based devices.</p></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"154 - 161"},"PeriodicalIF":2.1,"publicationDate":"2025-01-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143571157","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Phase Transition and Thermoelectric Performance of NixCu12−xSb4Se13 NixCu12−xSb4Se13的相变与热电性能
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-01-07 DOI: 10.1007/s13391-024-00543-7
Sang Jun Park, Il-Ho Kim
{"title":"Phase Transition and Thermoelectric Performance of NixCu12−xSb4Se13","authors":"Sang Jun Park,&nbsp;Il-Ho Kim","doi":"10.1007/s13391-024-00543-7","DOIUrl":"10.1007/s13391-024-00543-7","url":null,"abstract":"<div><p>Ternary compounds of the Cu–X–Q system (where X = Fe, Sb, Sn and Q = S, Se), such as Cu<sub>5</sub>FeS<sub>4</sub>, Cu<sub>3</sub>SbS<sub>4</sub>, and Cu<sub>2</sub>SnSe<sub>3</sub>, have garnered considerable attention for their potential applications in electronics, optics, and energy technologies. These compounds are noted for their low thermal conductivity and narrow band gaps, making them promising candidates for thermoelectric materials. However, detailed experimental investigations into the phase transitions and thermoelectric properties of synthetic hakite, particularly with Ni substitution, have been limited. This study focused on synthesizing Ni-substituted hakite (Ni<sub>x</sub>Cu<sub>12−x</sub>Sb<sub>4</sub>Se<sub>13</sub>; x = 0.5–2) through mechanical alloying and hot pressing techniques, while also exploring the phase transitions and thermoelectric characteristics as a function of Ni content. Despite the charge compensation effect of Ni, a pure hakite phase could not be achieved. Instead, the resultant phases comprised mixtures of secondary phases including bytizite, pribramite, and permingeatite, or their composites. This indicates that the introduction of Ni into the system did not promote the formation of a single-phase hakite but rather stabilized a multi-phase system. The introduction of Ni resulted in a decrease in electrical conductivity across all specimens. Notably, the materials exhibited non-degenerate semiconductor behavior. The measured Seebeck coefficients were significantly high and positive, confirming p-type behavior. However, these coefficients decreased with increasing temperature. The thermal conductivity of the materials displayed minimal temperature dependence, consistently remaining below 0.65 Wm<sup>−1</sup> K<sup>−1</sup>. This low thermal conductivity is advantageous for thermoelectric efficiency, as it minimizes heat loss while maintaining charge transport. For the composition Ni<sub>0.5</sub>Cu<sub>11.5</sub>Sb<sub>4</sub>Se<sub>13</sub>, we achieved a maximum power factor of 0.09 mWm<sup>−1</sup> K<sup>−2</sup> and a peak dimensionless figure of merit (ZT) of 0.18 at 623 K.</p><h3>Graphical Abstract</h3><div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"235 - 244"},"PeriodicalIF":2.1,"publicationDate":"2025-01-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143571038","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Ultra-Effective Methylene Blue Detection by Nanoporous Gold for Surface-Enhanced Raman Spectroscopy 纳米孔金表面增强拉曼光谱超有效检测亚甲基蓝
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-01-04 DOI: 10.1007/s13391-024-00541-9
Yoonseo Huh, Sangwoo Ryu
{"title":"Ultra-Effective Methylene Blue Detection by Nanoporous Gold for Surface-Enhanced Raman Spectroscopy","authors":"Yoonseo Huh,&nbsp;Sangwoo Ryu","doi":"10.1007/s13391-024-00541-9","DOIUrl":"10.1007/s13391-024-00541-9","url":null,"abstract":"<div><p>This study presents the fabrication and optimization of nanoporous gold (Au) substrates for Surface-Enhanced Raman Spectroscopy (SERS). These substrates were obtained by the high-pressure thermal evaporation method, which utilizes a relatively high pressure of a few Torr to form highly porous structures. These nanoporous structures were induced by homogeneous nucleation and growth of the evaporated metal atoms that occurred through repeated collisions during the deposition process. By controlling deposition pressure and film thickness, optimal conditions to achieve enhanced SERS activity were established. The Au nanoporous structures consisted of randomly connected Au nanoparticles and demonstrated numerous nanogaps between these nanoparticles. These nanogaps act as hot spots of localized surface plasmon resonance, enabling significant amplification of Raman signals. The optimized nanoporous Au substrate, deposited at 2.0 Torr with a thickness of 1.65 μm, achieved a limit of detection (LOD) of 10<sup>− 8</sup> M for Rhodamine 6G (R6G). Furthermore, the substrate’s applicability was extended to the detection of methylene blue (MB), an organic dye with known environmental impacts. MB could be detected up to 10<sup>− 6</sup> M by using these nanoporous Au substrates for SERS. This work successfully demonstrated the potential of nanoporous Au for SERS as an effective analytical platform for trace-level detection of MB, paving the way for advancements in environmental monitoring and biological sensing applications.</p><h3>Graphical Abstract</h3><div><figure><div><div><picture><img></picture></div></div></figure></div></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"260 - 267"},"PeriodicalIF":2.1,"publicationDate":"2025-01-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143570931","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Pribramite CuSbSe2: Solid-State Synthesis and Thermoelectric Properties Pribramite CuSbSe2:固态合成及热电性质
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-01-03 DOI: 10.1007/s13391-024-00542-8
Min Ji Choi, Sang Jun Park, Il-Ho Kim
{"title":"Pribramite CuSbSe2: Solid-State Synthesis and Thermoelectric Properties","authors":"Min Ji Choi,&nbsp;Sang Jun Park,&nbsp;Il-Ho Kim","doi":"10.1007/s13391-024-00542-8","DOIUrl":"10.1007/s13391-024-00542-8","url":null,"abstract":"<div><p>Pribramite (CuSbSe<sub>2</sub>) is gaining attention as a potential thermoelectric material due to its high thermopower and low thermal conductivity, although it remains relatively underexplored compared to more widely studied thermoelectric compounds. This study focused on optimizing the synthesis and sintering processes of CuSbSe<sub>2</sub> using mechanical alloying (MA) and hot pressing (HP) methods to enhance its thermoelectric performance. The desired pribramite phase was successfully synthesized in both mechanically alloyed powders and hot-pressed specimens, though secondary phases such as bytizite (Cu<sub>3</sub>SbSe<sub>3</sub>) and permingeatite (Cu<sub>3</sub>SbSe<sub>4</sub>) were identified. Thermogravimetric and differential scanning calorimetry analyses indicated a melting point for CuSbSe<sub>2</sub> between 723 and 728 K. Densely sintered samples achieved high relative densities of 98.6–99.4% through the MA–HP process. Electrical characterization revealed non-degenerate semiconductor behavior with temperature-dependent conductivity. Seebeck coefficient measurements confirmed p-type semiconductor characteristics, with holes as the major charge carriers. An intrinsic transition in the Seebeck coefficient was observed, with the transition temperature decreasing as the HP temperature increased. A maximum power factor of 0.23 mWm<sup>−1</sup> K<sup>−2</sup> was achieved at 623 K, while thermal conductivity steadily decreased across the measured temperature range of 323 K to 623 K. The highest dimensionless figure of merit (ZT) reached 0.28 at 623 K, indicating promising thermoelectric potential for CuSbSe<sub>2</sub>.</p><h3>Graphical Abstract</h3>\u0000<div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"216 - 227"},"PeriodicalIF":2.1,"publicationDate":"2025-01-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143570927","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Correction: Rapid Thermal Annealing Under O2 Ambient to Recover the Deterioration by Gamma-Ray Irradiation in a-IGZO TFTs 修正:在O2环境下快速热退火以恢复伽玛射线辐照下a-IGZO tft的劣化
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2025-01-02 DOI: 10.1007/s13391-024-00536-6
Minah Park, Jaewook Yoo, Hongseung Lee, Hyeonjun Song, Soyeon Kim, Seongbin Lim, Seohyeon Park, Jo Hak Jeong, Bongjoong Kim, Kiyoung Lee, Yoon Kyeung Lee, Keun Heo, Jiseok Kwon, Hagyoul Bae
{"title":"Correction: Rapid Thermal Annealing Under O2 Ambient to Recover the Deterioration by Gamma-Ray Irradiation in a-IGZO TFTs","authors":"Minah Park,&nbsp;Jaewook Yoo,&nbsp;Hongseung Lee,&nbsp;Hyeonjun Song,&nbsp;Soyeon Kim,&nbsp;Seongbin Lim,&nbsp;Seohyeon Park,&nbsp;Jo Hak Jeong,&nbsp;Bongjoong Kim,&nbsp;Kiyoung Lee,&nbsp;Yoon Kyeung Lee,&nbsp;Keun Heo,&nbsp;Jiseok Kwon,&nbsp;Hagyoul Bae","doi":"10.1007/s13391-024-00536-6","DOIUrl":"10.1007/s13391-024-00536-6","url":null,"abstract":"","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"289 - 289"},"PeriodicalIF":2.1,"publicationDate":"2025-01-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143570924","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Samarium-Doped Ceria Nanospheres Prepared via Solvothermal Method and the Chemical Mechanical Polishing Properties 溶剂热法制备掺钐铈纳米球及其化学机械抛光性能
IF 2.1 4区 材料科学
Electronic Materials Letters Pub Date : 2024-12-31 DOI: 10.1007/s13391-024-00537-5
Zhenyang Wang, Tongqing Wang, Xinchun Lu
{"title":"Samarium-Doped Ceria Nanospheres Prepared via Solvothermal Method and the Chemical Mechanical Polishing Properties","authors":"Zhenyang Wang,&nbsp;Tongqing Wang,&nbsp;Xinchun Lu","doi":"10.1007/s13391-024-00537-5","DOIUrl":"10.1007/s13391-024-00537-5","url":null,"abstract":"<div><p>As a crucial abrasive in chemical mechanical polishing (CMP), ceria has garnered significant attention regarding its preparation method and surface modification methods. This research investigates the properties for samarium-doped ceria nanospheres prepared via the solvothermal method and their CMP performance on dielectric materials. Ceria nanospheres with various Sm doping concentrations were synthesized using a surfactant-assisted solvothermal method. Doping increased the ratio of Ce<sup>3+</sup> to Ce<sup>4+</sup> and oxygen vacancy in ceria. While, Sm doping reduced the overall amount of Ce, resulting in a decrease in the material removal rate (MRR) of silicon oxide, and an initial decrease followed by an increase in the MRR of silicon nitride. The Ce<sub>0.95</sub>Sm<sub>0.05</sub>O<sub>2</sub> suspension exhibited better material removal selectivity than pristine ceria nanospheres, with an increase in the selection ratio from 7:1 to 25:1.</p><h3>Graphical Abstract</h3>\u0000<div><figure><div><div><picture><source><img></source></picture></div></div></figure></div></div>","PeriodicalId":536,"journal":{"name":"Electronic Materials Letters","volume":"21 2","pages":"252 - 259"},"PeriodicalIF":2.1,"publicationDate":"2024-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143571184","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信