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MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)最新文献

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Collaboration between industry and university for the creation of new business 工业和大学之间的合作，以创造新的业务
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819974
T. Ikoma
{"title":"Collaboration between industry and university for the creation of new business","authors":"T. Ikoma","doi":"10.1109/MHS.1999.819974","DOIUrl":"https://doi.org/10.1109/MHS.1999.819974","url":null,"abstract":"","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"142 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128602049","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A design and production framework for modular microsystems 模块化微系统的设计和生产框架
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820005
V. Grosser, M. Schuenemann, B. Michel, H. Reichl
{"title":"A design and production framework for modular microsystems","authors":"V. Grosser, M. Schuenemann, B. Michel, H. Reichl","doi":"10.1109/MHS.1999.820005","DOIUrl":"https://doi.org/10.1109/MHS.1999.820005","url":null,"abstract":"The trend to higher integration in microelectronics and the integration of micromechanical, microfluidic and microoptical components require new packaging solutions. A highly flexible design and production framework for microsystems, suitable for mid-scale production at reasonable costs, was developed.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122753480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
In situ measurement and micromachining of glass 玻璃的原位测量和微加工
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820004
R. Wuthrich, V. Fascio, D. Viquerat, H. Langen
{"title":"In situ measurement and micromachining of glass","authors":"R. Wuthrich, V. Fascio, D. Viquerat, H. Langen","doi":"10.1109/MHS.1999.820004","DOIUrl":"https://doi.org/10.1109/MHS.1999.820004","url":null,"abstract":"Glass substrates were micromachined using electro chemical discharge machining. The developed tool holder allows to scan the substrate surface as well as machining it in a closed loop. The developed control algorithm for drilling holes allows to achieve relatively high machining speeds (up to 30 /spl mu/m/s) and deep structures (up to 1 mm). Micro-channels up to a depth of 100 /spl mu/m were machined in one step with a removal rate of 4.5/spl middot/10/sup 5/ /spl mu/m/sup 3//s. Reported are some examples of machining micro-holes, micro-channels and modification of existing pattering.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"165 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124051045","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 45
Mechanical and electrical characteristics of polysilicon film deposited by new LPCVD using lamp heating 灯加热下新型LPCVD沉积多晶硅膜的力学和电学特性
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819989
T. Ueda, K. Kuribayashi, S. Hasegawa
{"title":"Mechanical and electrical characteristics of polysilicon film deposited by new LPCVD using lamp heating","authors":"T. Ueda, K. Kuribayashi, S. Hasegawa","doi":"10.1109/MHS.1999.819989","DOIUrl":"https://doi.org/10.1109/MHS.1999.819989","url":null,"abstract":"The newly developed LPCVD apparatus using lamp heating was shown to be valid for obtaining the same polysilicon film for micromachines as that produced by the conventional LPCVD apparatus, by analysing the metallurgical properties of the polysilicon film deposited by the new LPCVD apparatus. However, when producing a micromachine using the polysilicon film deposited with this apparatus, it is necessary to know the mechanical and electrical characteristics of the film. Therefore, this report describes the analysis of Young's modulus, resistivity and gauge factor of polysilicon deposited by the new LPCVD apparatus.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123341633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Challenge to micro/nanomanipulation using atomic force microscope 原子力显微镜对微纳操作的挑战
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819979
H. Hashimoto, M. Sitti
{"title":"Challenge to micro/nanomanipulation using atomic force microscope","authors":"H. Hashimoto, M. Sitti","doi":"10.1109/MHS.1999.819979","DOIUrl":"https://doi.org/10.1109/MHS.1999.819979","url":null,"abstract":"With the improving micro/nanotechnologies recently, micro/nanomanipulation technology has also become indispensable where such technology is in its early infancy. Thus, this presentation focuses on using Atomic Force Microscope (AFM) as a promising sensory robotic tool for challenging micro/nanomanipulation applications. AFM probe is proposed to be utilized as a mechanically contact pushing manipulator, and force and topology sensor. The focused task is the 2-D pushing of micro/nanometer size particles on a substrate in ambient conditions. Thus, the modeling of interaction forces and dynamics during pushing operation is analyzed for understanding the nano scale physical phenomenon which is different from macro robotics physics. Experiments of 2-D precise positioning of micro/nano gold-coated particles are reported. The results show that latex particles can be positioned on silicon substrates successfully, and AFM probe can be a promising sensory manipulator.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127701396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Distributed behavior arbitration network: an autonomous control architecture for humanoid robots 分布式行为仲裁网络:一种仿人机器人自主控制体系结构
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820025
M. Shimizu, T. Furuta, K. Tomiyama
{"title":"Distributed behavior arbitration network: an autonomous control architecture for humanoid robots","authors":"M. Shimizu, T. Furuta, K. Tomiyama","doi":"10.1109/MHS.1999.820025","DOIUrl":"https://doi.org/10.1109/MHS.1999.820025","url":null,"abstract":"This paper proposs an autonomous control architecture for humanoid robots that is called Distributed Behavior Arbitration Network. In the proposed architecture, robot’s competence is differentiated based on the concept of behavior-based AI and these differentiated competencies are realized in individual agents. Here, ’fall avoidance’ and ’goal search’ behaviors are implemented on humanoid robots using proposed architecture to demonstrate its validity.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"42 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123508554","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Chemical processing and properties of functional ceramics 功能陶瓷的化学加工与性能
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819976
S. Hirano, T. Yogo, W. Sakamoto, K. Kikuta, K. Kato, Y. Takeichi, Y. Araki, M. Saitoh, S. Ogasahara, T. Kohigashi, Y. Ito, K. Suzuki, H. Ukai
{"title":"Chemical processing and properties of functional ceramics","authors":"S. Hirano, T. Yogo, W. Sakamoto, K. Kikuta, K. Kato, Y. Takeichi, Y. Araki, M. Saitoh, S. Ogasahara, T. Kohigashi, Y. Ito, K. Suzuki, H. Ukai","doi":"10.1109/MHS.1999.819976","DOIUrl":"https://doi.org/10.1109/MHS.1999.819976","url":null,"abstract":"Functional ceramic films have been receiving great attention because of their potentials for emerging applications, which include integrated sensors, actuators and other devices responding to magnetic, electric, optic and stress fields. Many methods, such as liquid phase epitaxial growth, chemical vapor deposition, molecular beam epitaxial growth, sputtering, laser ablation and chemical solution deposition, have been developed to fabricate thin films with desired properties. Among these methods, the chemical solution deposition method has the advantages of good homogeneity, ease of compositional control, low temperature processing, and large area and versatile shaping with integrated functionalities over vacuum deposition techniques. This paper reviews a part of the authors' results on the chemical processing of some epitaxial ferroelectric, pyroelectric, and piezoelectric films as well as nonlinear optic films. In addition, the processing and properties of nano-sized functional ceramic particles/organic hybrids is presented as an example of novel and promising materials, which are expected to create a emerging area.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"136 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115669798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of an artificial fish microrobot 人工鱼微型机器人的研制
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819994
Shuxiang Guo, T. Fukuda, Keisuke Oguro
{"title":"Development of an artificial fish microrobot","authors":"Shuxiang Guo, T. Fukuda, Keisuke Oguro","doi":"10.1109/MHS.1999.819994","DOIUrl":"https://doi.org/10.1109/MHS.1999.819994","url":null,"abstract":"It is our purpose to develop an underwater microrobot that has the characteristics of flexibility, driven by a low voltage, good response and safety in body. In this paper, we propose a new prototype model of an underwater microrobot utilizing ICPF (Ionic Conducting Polymer Film) actuator as the servo actuator. Biomimetic fish-like propulsion using ICPF actuator as a propulsion tail fin for microrobot swimming structure in water or aqueous medium is developed. The overall size of the underwater microrobot prototype shaped as a boat is 40 mm in length, 10 mm in width and 2 mm in thickness. There is a pair of fins. Characteristic of the underwater microrobot is measured by changing the frequency of input voltage from 0.1 Hz to 5 Hz. The experimental results indicate that the swimming speed of proposed underwater microrobot can be controlled by changing the frequency of input voltage.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132850979","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
Frequency modulation velocity control of multiple cybernetic actuators for two-lead-wire drive 双引线驱动多控制器的调频速度控制
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819992
M. Nokata, K. Ikuta
{"title":"Frequency modulation velocity control of multiple cybernetic actuators for two-lead-wire drive","authors":"M. Nokata, K. Ikuta","doi":"10.1109/MHS.1999.819992","DOIUrl":"https://doi.org/10.1109/MHS.1999.819992","url":null,"abstract":"A new concept for an active endoscope with hyper redundancy has been already proposed. This medical tool called \"Hyper Endoscope\" for minimally invasive surgery is driven by miniature cybernetic actuators. A dynamic model of the cybernetic actuator, taking into account its piezoelectric effect, is proposed and its detailed performance analyzed. Based on the result, a new technique to minimize the number of lead wires is proposed and verified experimentally. FMVC (Frequency Modulation Velocity Control) with two lead wires as an analog control method has been perfected.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121326203","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Improvement of characteristics of in-pipe micro robot 管道微型机器人特性的改进
MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819997
Linzhi Sun, P. Sun, L. Lian, Xin-jie Qin, Zhenbang Gong
{"title":"Improvement of characteristics of in-pipe micro robot","authors":"Linzhi Sun, P. Sun, L. Lian, Xin-jie Qin, Zhenbang Gong","doi":"10.1109/MHS.1999.819997","DOIUrl":"https://doi.org/10.1109/MHS.1999.819997","url":null,"abstract":"This paper describes improvement of structure design based on previous study. The new micro robot with electromagnetic actuator possesses two opposite leg-sets mounting around main body instead of unidirectional mounting of old type. The moving speed characters of the new robot and other two small micro robots are studied. The new prototype can climb in a /spl phi/20 mm pipe forward or backward by applied voltage with different frequency.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131720725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
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