模块化微系统的设计和生产框架

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI:10.1109/MHS.1999.820005

V. Grosser, M. Schuenemann, B. Michel, H. Reichl

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引用次数: 2

摘要

微电子技术和微机械、微流体和微光学元件集成的趋势要求新的封装解决方案。开发了一种高度灵活的微系统设计和生产框架，适用于中等规模的生产，成本合理。

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A design and production framework for modular microsystems

The trend to higher integration in microelectronics and the integration of micromechanical, microfluidic and microoptical components require new packaging solutions. A highly flexible design and production framework for microsystems, suitable for mid-scale production at reasonable costs, was developed.

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来源期刊

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)

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