MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)最新文献

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Movable microstructures made by two-photon three-dimensional microfabrication 双光子三维微加工的可移动微结构
S. Maruo, K. Ikuta
{"title":"Movable microstructures made by two-photon three-dimensional microfabrication","authors":"S. Maruo, K. Ikuta","doi":"10.1109/MHS.1999.820002","DOIUrl":"https://doi.org/10.1109/MHS.1999.820002","url":null,"abstract":"Movable microstructures were made by the use of two-photon three-dimensional (3D) microfabrication with submicron resolution beyond the diffraction limit of light. In our method, movable microstructures are fabricated by fast scanning a focal point through the inside of the liquid photopolymerizable resin. Therefore, unlike silicon micromachining, neither sacrificial layers nor supporting parts are needed to produce movable mechanism. Furthermore truly three-dimensional movable parts, which have not been produced by silicon micromachining, are easy to make. This method is useful to make complicated 3D microfluidic systems, which include various movable device. In our experiment, a micro gear with a shaft was successfully fabricated within 7 minutes. The rapid fabrication makes mass production of 3D MEMS possible.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126611075","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
Mechatronic micro devices 机电微型设备
F. Michel, W. Ehrfeld
{"title":"Mechatronic micro devices","authors":"F. Michel, W. Ehrfeld","doi":"10.1109/MHS.1999.819978","DOIUrl":"https://doi.org/10.1109/MHS.1999.819978","url":null,"abstract":"Nowadays, novel trends can be observed in micro system technology: Micro systems more and more develop into stand-alone devices for multi-purpose applications, and they do not only comprise detector elements but really interact mechanically by micro actuators with their surroundings. A modular concept especially for high performance actuators which proved to be a main prerequisite for these developments is illustrated in the contribution. With dimensions of a few millimeters, piezo-driven valves and membrane pumps overcome fluid pressures of 1,000 hPa. Electromagnetic motors generate torques of 7 to 100 /spl mu/Nm which are multiplied by adapted micro gears. Gear motors serve as a key unit for high force micro positioning systems or micro gear pumps which are first examples for the device level. With the integration of electronics and optics the actuator performance can considerably be increased by establishing a feedback control and the systems become really micro mechatronic devices. Additionally, interface components like electrical and fiber-optical connectors with pitches as small as 250 /spl mu/m, special gears and miniaturized clamping structures enable the implementation of complex optical fiber networks, micro robots or chemical micro reactors from these mechatronic devices in a construction kit. A wide range of 3D-micro fabrication techniques, from design and simulation, micro spark erosion (/spl mu/-EDM) for the prototypes to mass technologies like LIGA including injection molding, allows a fast commercialization into \"micro product lines\" and will round the circle of the considerations on the mechatronic micro devices.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115619068","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application 平面型高纵横比光刻胶微电磁距离传感器的研制及其应用
Xianhe Ding, K. Kuribayashi, T. Hashida
{"title":"Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application","authors":"Xianhe Ding, K. Kuribayashi, T. Hashida","doi":"10.1109/MHS.1999.820010","DOIUrl":"https://doi.org/10.1109/MHS.1999.820010","url":null,"abstract":"In this paper, a planar type micro electromagnetic distance sensor has been developed for the distance sensor of micro mobile robot. So far, because of the use of common photoresist, the thickness of the sensors has in the past only reached several /spl mu/m. Therefore the sensors fabricated had low measuring accuracy. In order to obtain high sensitivity, using ultrathick high aspect ratio photoresist SU-8, a 300-/spl mu/m-thick microcoil has been fabricated by micromachining technique based on sputtering and electroplating methods. The microcoil has a spiral planar ultrathick structure. The static characteristics and frequency response of the microcoil have been measured, and sensitivity and position control of the microcoil were determined. The experimental results show that the electromagnetic distance sensor has wide frequency response and high measuring accuracy.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"139 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115042898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Study on fabrication of sub-micron structures for MEMS using deep X-ray lithography 利用深x射线光刻技术制备MEMS亚微米结构的研究
H. Ueno, N. Nishi, S. Sugiyama
{"title":"Study on fabrication of sub-micron structures for MEMS using deep X-ray lithography","authors":"H. Ueno, N. Nishi, S. Sugiyama","doi":"10.1109/MHS.1999.819987","DOIUrl":"https://doi.org/10.1109/MHS.1999.819987","url":null,"abstract":"It is necessary for practical MEMS with high performance to be fabricated microstructures with sub-micron widths and gaps (lines and spaces). In sub-micron deep X-ray lithography, one of the most crucial considerations is the fabrication of an X-ray mask with thick X-ray absorbers having sub-micron width. An X-ray mask, composed of 1 /spl mu/m-thick Au with a 0.6 /spl mu/m line width and a 0.2 /spl mu/m space as absorbers, 2 /spl mu/m-thick SiC with 240 MPa of tensile stress as a membrane and 625 /spl mu/m-thick Si as a frame, was fabricated. A procedure for the fabrication process of the X-ray mask that obtains the smallest deformation of the X-ray absorbers, was adopted. On the other hand, in order to reduce the influence of Fresnel diffraction on lithography accuracy, a PMMA resist was polymerized without residual stress, which had been the main cause of a warp in the substrate, by controlling of the polymerization process. As a result, a submicron PMMA structure with 0.23 /spl mu/m-minimum width and 15 /spl mu/m height was fabricated by deep X-ray lithography.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124516456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
LAMAlice: a nanorover for planetary exploration LAMAlice:用于行星探测的纳米飞行器
M. Freese, M. Kaelin, Jiri Lehky, G. Caprari, T. Estier, R. Siegwart
{"title":"LAMAlice: a nanorover for planetary exploration","authors":"M. Freese, M. Kaelin, Jiri Lehky, G. Caprari, T. Estier, R. Siegwart","doi":"10.1109/MHS.1999.819993","DOIUrl":"https://doi.org/10.1109/MHS.1999.819993","url":null,"abstract":"Over the last years considerable efforts in miniaturisation have been made in autonomous robotics, especially in the domain of space missions in order to reduce costs and increase chances of success if using several robots. This has led us to imagine and realise a prototype of a nanorover which shows an example of what planetary exploration could look like in the future. The robot is a four-wheel drive rover which is composed of two separate parts linked together with a flexible passive coupling. This configuration allows a \"push-pull\" effect improving the overcoming of an obstacle and offers good gripping. The wheels are made of flexible blades radially fixed on the axis. On the one hand this permits the wheel to be rolled up for transport, on the other hand a smooth movement of the gravity centre is reached, which increases power efficiency of the obstacle overcome. The robot also presents a simple structure and it is possible to equip it with a passive sensor like a very low-power camera as well as with active sensors. The power consumption is less than 50 mW which allows an operating time of roughly 20 hours with on-board batteries. LAMAlice is 11 cm long, 6 cm wide and 4 cm high and has a weight of 30 grams. The maximum speed is 1 cm/s and it overcomes steps of its own height.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"120 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116245427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Stochastic dynamics of molecular machine: it's nanomachine which is based on Nyquist theory 分子机器的随机动力学:基于奈奎斯特理论的纳米机器
H. Matsuura, M. Nakano
{"title":"Stochastic dynamics of molecular machine: it's nanomachine which is based on Nyquist theory","authors":"H. Matsuura, M. Nakano","doi":"10.1109/MHS.1999.819981","DOIUrl":"https://doi.org/10.1109/MHS.1999.819981","url":null,"abstract":"A new model of actin myosin system named Stochastic Inclined Rods Model (SIRM), whose energy of motion is supplied from random noise (or thermal noise) and always moves to one direction, has been proposed. SIRM has a simple structure, which is composed of an inclined spring, a myosin head, and bundle of rods. In the SIRM, the energy of motion is supplied from random noise (or thermal noise) of water molecules generated through the heat energy of ATP hydrolysis. In an open and dissipative system, the myosin head works as a resonator of random noise, which accepts the energy through resonance. It is shown that the inclined rod and the spherical shape of G-actin are very important elements for the purpose of breaking the symmetry in the vibration of stochastic resonance (SR) and of generating a one directional motion. When the myosin head interacts with the spherical potential of G-actin, the trigonometric wave of stochastic resonance is distorted by the collision between the head and G-actin, and then it obliquely kicks the actin fiber by using the spring. It is thus shown that the inclined rod and the shape of the G-actin makes the SIRM move in one direction, even if the potentials between the myosin head and G-actin are perfectly symmetric.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130837374","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
The design and synthesis of magnetic ultra-fine polysaccharide particles 磁性超细多糖颗粒的设计与合成
K. Yagi, M. Tokuda, T. Kobayashi, T. Kishita
{"title":"The design and synthesis of magnetic ultra-fine polysaccharide particles","authors":"K. Yagi, M. Tokuda, T. Kobayashi, T. Kishita","doi":"10.1109/MHS.1999.819998","DOIUrl":"https://doi.org/10.1109/MHS.1999.819998","url":null,"abstract":"Magnetic iron oxide were synthesized using as the initial materials ferrous chloride (FeCl/sub 2/), ferric chloride (Fe/sub 2/Cl/sub 3/) and ferric Ar gas ambiance. At the same time, the magnetic iron oxide colloid particles were coated by Polysaccharides in a solvent. Polysaccharides magnetite (PSM) complex was synthesized under various conditions. At first, the sample was measured by Dynamic Light Scattering. Next, the influence of the polysaccharide on the saturation magnetization was examined. Third, a sample was observed with the transmission electron microscope. And finally,reduction of the particle diameter was attempted by decreasing polysaccharide molecular weight. It was found that particle diameter and saturation magnetization can be controlled by the methods described.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"66 ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114049466","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Structure of microrobots using electromagnetic actuators 采用电磁作动器的微型机器人结构
A. Torii, T. Koyanagi, A. Ueda
{"title":"Structure of microrobots using electromagnetic actuators","authors":"A. Torii, T. Koyanagi, A. Ueda","doi":"10.1109/MHS.1999.820011","DOIUrl":"https://doi.org/10.1109/MHS.1999.820011","url":null,"abstract":"We have been developing microrobots which are driven by the clamping of electromagnetic actuators and by the thrusting of piezoelectric transducers. The principle of the microrobots is based on an inchworm motion. The microrobots have three degrees of freedom and realize the linear and the rotational displacements not only on a horizontal plane but also on a slope. Less than 1 /spl mu/m resolution in the linear displacement and less than 1 /spl mu/rad resolution in the rotational displacement were obtained on a flat surface. However our microrobot could not climb on a steep slope. In this paper we discuss the structures of microrobots from the viewpoint of an electromagnetic force. We consider the electromagnetic forces of three microrobots theoretically and experimentally. The electromagnetic force is determined by a magnetic flux which is determined by an electromotive force and reluctance of a magnetic path. Since the microrobots differ in their electromagnetic paths, their reluctances and electromagnetic forces are different from each other. We also discuss the linear and rotational displacements of the microrobots theoretically and experimentally.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"635 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117092799","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Evaluation of strength property of HAp-Tyranno fiber composite by flexural test and process of sintering condition 用弯曲试验和烧结工艺评价HAp-Tyranno纤维复合材料的强度性能
K. Yagi, M. Tokuda, K. Suzuki, H. Yoshidome
{"title":"Evaluation of strength property of HAp-Tyranno fiber composite by flexural test and process of sintering condition","authors":"K. Yagi, M. Tokuda, K. Suzuki, H. Yoshidome","doi":"10.1109/MHS.1999.819990","DOIUrl":"https://doi.org/10.1109/MHS.1999.819990","url":null,"abstract":"Hydroxyapatite (HAp) has been used as an implant material because it's similarity to bone in terms of its components and bioactive character. However, it lacks enough mechanical strength, for example, bending strength and elasticity. Therefore, in order to improve these characteristics of HAp, we have been tested a composite of HAp and Tyranno fiber. Taking into consideration the sintering condition, we made tests on HAp-Tyranno fiber composite using 3-point bending, and evaluated several properties. The method of sintering called hot pressing was tried and compared with the former one. We found that hot pressing gave better results than the former.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129295545","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Improvement of sensing and actuating property of parallel beam gyroscope 平行光束陀螺仪传感和驱动性能的改进
H. Sato, T. Fukuda, F. Arai, K. Itoigawa, Y. Tsukahara
{"title":"Improvement of sensing and actuating property of parallel beam gyroscope","authors":"H. Sato, T. Fukuda, F. Arai, K. Itoigawa, Y. Tsukahara","doi":"10.1109/MHS.1999.820013","DOIUrl":"https://doi.org/10.1109/MHS.1999.820013","url":null,"abstract":"Parallel beam structure has many significant features as follows: the tip moves in parallel at the end; the structure converts small displacements into large strain; strain is concentrated at the boundary point between the parallel-beam part and the supporting part; interfere between the units is reduced; lateral rigidity is high. The authors propose this structure for the development of a piezoelectric vibrating gyroscope (angular rate sensor), and detection of the angular rate using this gyroscope. The method for super sensitizing by bringing two resonance frequencies (drive resonance frequency and sensing resonance frequency) close, is presented. A suppression method for mechanical coupling that arises by bringing two resonance frequencies close, is described. It is concluded that the structure described is suitable for the gyroscope.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127628137","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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