MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)

Movable microstructures made by two-photon three-dimensional microfabrication

Pub Date : 1999-12-01 DOI: 10.1109/MHS.1999.820002 S. Maruo, K. Ikuta

Mechatronic micro devices

Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819978 F. Michel, W. Ehrfeld

Development of a planar type micro electro magnetic distance sensor using high aspect ratio photoresist and its application

Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820010 Xianhe Ding, K. Kuribayashi, T. Hashida