Movable microstructures made by two-photon three-dimensional microfabrication

Abstract

Movable microstructures were made by the use of two-photon three-dimensional (3D) microfabrication with submicron resolution beyond the diffraction limit of light. In our method, movable microstructures are fabricated by fast scanning a focal point through the inside of the liquid photopolymerizable resin. Therefore, unlike silicon micromachining, neither sacrificial layers nor supporting parts are needed to produce movable mechanism. Furthermore truly three-dimensional movable parts, which have not been produced by silicon micromachining, are easy to make. This method is useful to make complicated 3D microfluidic systems, which include various movable device. In our experiment, a micro gear with a shaft was successfully fabricated within 7 minutes. The rapid fabrication makes mass production of 3D MEMS possible.