MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)最新文献_第2页

Contact motion control of a micro operation hand 微操作手的接触运动控制

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819984

T. Nakamura, Y. Kogure, K. Shimamura

引用次数: 0

Thermal analysis of fingerprint sensor having a microheater array 具有微加热器阵列的指纹传感器热分析

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820006

Ji-song Han, T. Kadowaki, K. Sato, M. Shikida

{"title":"Thermal analysis of fingerprint sensor having a microheater array","authors":"Ji-song Han, T. Kadowaki, K. Sato, M. Shikida","doi":"10.1109/MHS.1999.820006","DOIUrl":"https://doi.org/10.1109/MHS.1999.820006","url":null,"abstract":"For the purpose of properties security, in particular of information systems, demands for portable fingerprint sensors are increasing. We proposed a new type of fingerprint sensor having an arrayed microheater, and successfully fabricated one-dimensional array of sensor elements on a silicon wafer using micromachining technologies. Electric resistance of each heater element is measured as signals of temperature difference between elements that are in contact or non-contact with ridges of the fingerprints. In this paper, we analyzed thermal characteristics of our sensor device using computer modeling. Effects of the following parameters were investigated; cavity under heater, SiO/sub 2/ film between heater and sensor base, heater size, input power and pulse time duration applied to the heater, material properties contacting to sensor surface etc. We concluded that making cavities under the microheater elements and having SiO/sub 2/ film layer between heater element and sensor base both for the purpose of thermal insulation, is necessary to realize the performance of the proposed sensor system. From the simulation results, it was clarified that such a miniaturized heater element will work quite effective for detecting fingerprint patterns.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129580119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 8

3D bio-micromanipulation (bilateral control system using micro tri-axial force sensor) 三维生物显微操作(采用微型三轴力传感器的双侧控制系统)

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819985

F. Arai, T. Sugiyama, P. Luangjarmekorn, A. Kawaji, T. Fukuda, K. Itoigawa, A. Maeda

引用次数: 10

Study on XeF/sub 2/ pulse etching using wagon wheel pattern 货车车轮图样XeF/ sub2 /脉冲刻蚀的研究

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819999

K. Sugano, O. Tabata

引用次数: 4

Fabrication of micromotors using LIGA process 用LIGA工艺制造微电机

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820009

S. Takimoto, R. Kondo, K. Suzuki, S. Sugiyama

{"title":"Fabrication of micromotors using LIGA process","authors":"S. Takimoto, R. Kondo, K. Suzuki, S. Sugiyama","doi":"10.1109/MHS.1999.820009","DOIUrl":"https://doi.org/10.1109/MHS.1999.820009","url":null,"abstract":"An electrostatic wobble micromotor and a comb drive microactuator were fabricated by the LIGA process. The following design rules for the micromotors were decided: a height of 100 /spl mu/m, a maximum width for movable parts of 10 /spl mu/m, a minimum width for fixed parts of 40 /spl mu/m, a driving voltage of about 100 V, and a minimum gap of 2 /spl mu/m between movable parts and fixed parts. Calculated torque outputs for the wobble motor and the comb drive actuator were 3.19/spl times/10/sup -8/ Nm and 11.33/spl times/10/sup -8/ Nm respectively under a driving voltage of 100 V. The basic structure of the micromotors was composed of movable and fixed electrodes of Ni and a sacrificial layer of SiO/sub 2/ on a Si substrate. These micromotors were fabricated by a single mask process using LIGA. In this process, the difficult phase is removing the PMMA molds before the sacrificial layer etching of SiO/sub 2/. The residual PMMA was removed by the GG developer after a second X-ray exposure without a mask. When the residual PMMA was left between the micropatterns, it was removed completely by using an organic solvent and so on. Therefore, the sacrifice layer etching and drive of the micromotors were successful. Actuation of the micromotors was confirmed. The applied voltage to the wobble motor and the comb drive actuator were 125 V and 65 V respectively. The maximum oscillation of the comb drive actuator was 4.54 /spl mu/m under a frequency of 2.0/spl times/10/sup 3/ Hz.","PeriodicalId":423453,"journal":{"name":"MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1999-11-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127418998","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 10

3D microstructuring of glass using electrochemical discharge machining (ECDM) 电化学放电加工(ECDM)玻璃三维微结构研究

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820003

V. Fascio, R. Wuthrich, D. Viquerat, H. Langen

引用次数: 65

Excimer laser processing in nano-technology 纳米技术中的准分子激光加工

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820000

Y. Kathuria

引用次数: 3

Application of atomic force microscopy to an encoder 原子力显微镜在编码器上的应用

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819983

M. Shimodaira, A. Torii, A. Ueda

引用次数: 9

Recent trend of piezoelectric actuator developments 压电驱动器的最新发展趋势

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.819975

K. Uchino

引用次数: 31

Fuzzy-neural based multi-agent strategy for biped motion control 基于模糊神经网络的多智能体双足运动控制策略

MHS'99. Proceedings of 1999 International Symposium on Micromechatronics and Human Science (Cat. No.99TH8478) Pub Date : 1999-11-23 DOI: 10.1109/MHS.1999.820026

A. Khoukhi, L. Khoukhi

引用次数: 0