原子力显微镜在编码器上的应用

M. Shimodaira, A. Torii, A. Ueda
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引用次数: 9

摘要

精密工程领域需要微小的位置测量。我们提出了一种利用原子力显微镜(AFM)原理的编码器,称为原子力显微镜编码器。由于原子力显微镜实现了原子尺度分辨率,因此将实现具有原子尺度分辨率的编码器。AFM编码器是一个多探针AFM。用迈克尔逊干涉仪同时检测AFM悬臂梁的挠度。采用线聚焦红色半导体激光器作为光源,光电二极管阵列作为探测器。晶格的周期性,例如高度定向的热解石墨,被用作位移的标准。原子力显微镜悬臂梁以原子分辨率检测表面形貌,并利用检测到的信号测量位移。本文采用两根AFM悬臂梁作为AFM编码器的探头。采用光栅作为位移标准,光栅的间距为1.1 /spl mu/m。表面形貌由两个AFM悬臂梁同时获得。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Application of atomic force microscopy to an encoder
Minute position measurement is needed in the field of precision engineering. We have proposed an encoder using the principle of the an atomic force microscopy (AFM), which is called the AFM encoder. Since the AFM realizes atomic scale resolution, an encoder having the atomic scale resolution will be realized. The AFM encoder is a multiple probe AFM. The deflections of AFM cantilevers are detected by a Michelson interferometer simultaneously. A line-focused red color semiconductor laser is used as a light source and a photodiode array is used as a detector. The periodicity of a crystal lattice, for example the highly oriented pyrolytic graphite, is used as the standard of displacement. The AFM cantilevers detect surface topography with atomic resolution and measure the displacement by using the detected signals. In this paper, two AFM cantilevers are used as the probes of the AFM encoder. An optical grating is used as a displacement standard and a pitch of the optical grating is 1.1 /spl mu/m. Surface topography is obtained by two AFM cantilevers simultaneously.
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