Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics最新文献_第2页

Improvement of polycrystalline silicon wafer solar cell efficiency by forming nanoscale pyramids on wafer surface using a self-mask etching technique. 利用自掩膜蚀刻技术在多晶硅晶片表面形成纳米锥体以提高多晶硅太阳电池效率。

4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2013-05-01 Epub Date: 2013-03-19 DOI: 10.1116/1.4795862

Hsin-Han Lin, Wen-Hwa Chen, Franklin C-N Hong

{"title":"Improvement of polycrystalline silicon wafer solar cell efficiency by forming nanoscale pyramids on wafer surface using a self-mask etching technique.","authors":"Hsin-Han Lin, Wen-Hwa Chen, Franklin C-N Hong","doi":"10.1116/1.4795862","DOIUrl":"https://doi.org/10.1116/1.4795862","url":null,"abstract":"The creation of nanostructures on polycrystalline silicon wafer surface to reduce the solar reflection can enhance the solar absorption and thus increase the solar-electricity conversion efficiency of solar cells. The self-masking reactive ion etching (RIE) was studied to directly fabricate nanostructures on silicon surface without using a masking process for antireflection purpose. Reactive gases comprising chlorine (Cl2), sulfur hexafluoride (SF6), and oxygen (O2) were activated by radio-frequency plasma in an RIE system at a typical pressure of 120-130 mTorr to fabricate the nanoscale pyramids. Poly-Si wafers were etched directly without masking for 6-10 min to create surface nanostructures by varying the compositions of SF6, Cl2, and O2 gas mixtures in the etching process. The wafers were then treated with acid (KOH:H2O = 1:1) for 1 min to remove the damage layer (100 nm) induced by dry etching. The damage layer significantly reduced the solar cell efficiencies by affecting the electrical properties of the surface layer. The light reflectivity from the surface after acid treatment could be significantly reduced to <10% for the wavelengths between 500 and 900 nm. The effects of RIE and surface treatment conditions on the surface nanostructures and the optical performance as well as the efficiencies of solar cells will be presented and discussed. The authors have successfully fabricated large-area (156 × 156 mm2) subwavelength antireflection structure on poly-Si substrates, which could improve the solar cell efficiency reproducibly up to 16.27%, higher than 15.56% using wet etching.","PeriodicalId":38110,"journal":{"name":"Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics","volume":"31 3","pages":"31401"},"PeriodicalIF":0.0,"publicationDate":"2013-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1116/1.4795862","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"31574627","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 11

X-ray tube with a graphite field emitter inflamed at high temperature. x射线管与石墨场发射器在高温下发炎。

4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2013-03-01 Epub Date: 2012-12-05 DOI: 10.1116/1.4769970

Yusuke Iwai, Takayoshi Koike, Youhei Hayama, Atsuo Jouzuka, Tomonori Nakamura, Yoshihiro Onizuka, Motosuke Miyoshi, Hidenori Mimura

引用次数: 8

Arrays of topographically and peptide-functionalized hydrogels for analysis of biomimetic extracellular matrix properties. 用于分析仿生细胞外基质性质的地形和肽功能化水凝胶阵列。

4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2012-11-01 Epub Date: 2012-10-29 DOI: 10.1116/1.4762842

Michelle J Wilson, Yaming Jiang, Bernardo Yañez-Soto, Sara Liliensiek, William L Murphy, Paul F Nealey

{"title":"Arrays of topographically and peptide-functionalized hydrogels for analysis of biomimetic extracellular matrix properties.","authors":"Michelle J Wilson, Yaming Jiang, Bernardo Yañez-Soto, Sara Liliensiek, William L Murphy, Paul F Nealey","doi":"10.1116/1.4762842","DOIUrl":"https://doi.org/10.1116/1.4762842","url":null,"abstract":"Epithelial cells reside on specialized extracellular matrices that provide instructive cues to regulate and support cell function. The authors have previously demonstrated that substrate topography with dimensions similar to the native extracellular matrix (submicrometer and nanoscale features) significantly impacts corneal epithelial proliferation and migration. In this work, synthetic hydrogels were modified with both topographic and biochemical cues, where specified peptide ligands were immobilized within nanopatterned hydrogels. The efficient, systematic study of multiple instructive cues (peptide, peptide concentration, topographic dimensions), however, is contingent on the development of higher throughput platforms. Toward this goal, the authors developed a hydrogel array platform to systematically and rapidly evaluate combinations of two different peptide motifs and a range of nanoscale topographic dimensions. Specifically, distinct functional pegylated peptide ligands, RGD (GGGRGDSP) and AG73 (GRKRLQVQLSIRT), were synthesized for incorporation into an inert hydrogel network. Elastomeric stencils with arrays of millimeter-scale regions were used to spatially confine hydrogel precursor solutions on elastomeric stamps with nanoscale patterns generated by soft lithography. The resulting topographically and peptide-functionalized hydrogel arrays were used to characterize single cell migration. Epithelial cell migration speed and persistence were governed by both the biochemical and topographical cues of the underlying substrate.","PeriodicalId":38110,"journal":{"name":"Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics","volume":"30 6","pages":"6F903"},"PeriodicalIF":0.0,"publicationDate":"2012-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1116/1.4762842","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"31574625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 8

Automating tumor classification with pixel-by-pixel contrast-enhanced ultrasound perfusion kinetics. 逐像素增强超声灌注动力学自动肿瘤分类。

4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2012-03-01 Epub Date: 2012-03-22 DOI: 10.1116/1.3692962

Casey N Ta, Yuko Kono, Christopher V Barback, Robert F Mattrey, Andrew C Kummel

{"title":"Automating tumor classification with pixel-by-pixel contrast-enhanced ultrasound perfusion kinetics.","authors":"Casey N Ta, Yuko Kono, Christopher V Barback, Robert F Mattrey, Andrew C Kummel","doi":"10.1116/1.3692962","DOIUrl":"https://doi.org/10.1116/1.3692962","url":null,"abstract":"Contrast-enhanced ultrasound (CEUS) enables highly specific time-resolved imaging of vasculature by intravenous injection of ∼2 μm gas filled microbubbles. To develop a quantitative automated diagnosis of breast tumors with CEUS, breast tumors were induced in rats by administration of N-ethyl-N-nitrosourea. A bolus injection of microbubbles was administered and CEUS videos of each tumor were acquired for at least 3 min. The time-intensity curve of each pixel within a region of interest (ROI) was analyzed to measure kinetic parameters associated with the wash-in, peak enhancement, and wash-out phases of microbubble bolus injections since it was expected that the aberrant vascularity of malignant tumors will result in faster and more diverse perfusion kinetics versus those of benign lesions. Parameters were classified using linear discriminant analysis to differentiate between benign and malignant tumors and improve diagnostic accuracy. Preliminary results with a small dataset (10 tumors, 19 videos) show 100% accuracy with fivefold cross-validation testing using as few as two choice variables for training and validation. Several of the parameters which provided the best differentiation between malignant and benign tumors employed comparative analysis of all the pixels in the ROI including enhancement coverage, fractional enhancement coverage times, and the standard deviation of the envelope curve difference normalized to the mean of the peak frame. Analysis of combinations of five variables demonstrated that pixel-by-pixel analysis produced the most robust information for tumor diagnostics and achieved 5 times greater separation of benign and malignant cases than ROI-based analysis.","PeriodicalId":38110,"journal":{"name":"Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics","volume":"30 2","pages":"2C103"},"PeriodicalIF":0.0,"publicationDate":"2012-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1116/1.3692962","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"31476333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 18

Structural and magnetic characterization of superparamagnetic iron platinum nanoparticle contrast agents for magnetic resonance imaging. 磁共振成像用超顺磁性铁铂纳米颗粒造影剂的结构和磁性表征。

4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2012-03-01 Epub Date: 2012-03-05 DOI: 10.1116/1.3692250

Robert M Taylor, Dale L Huber, Todd C Monson, Victor Esch, Laurel O Sillerud

{"title":"Structural and magnetic characterization of superparamagnetic iron platinum nanoparticle contrast agents for magnetic resonance imaging.","authors":"Robert M Taylor, Dale L Huber, Todd C Monson, Victor Esch, Laurel O Sillerud","doi":"10.1116/1.3692250","DOIUrl":"https://doi.org/10.1116/1.3692250","url":null,"abstract":"The authors report the synthesis, from simple salts, and the physical characterization of superparamagnetic iron platinum nanoparticles (SIPPs) suitable for use as contrast agents in magnetic resonance imaging. The properties of these particles were determined by means of transmission electron microscopy (TEM), thermogravimetric analysis, inductively coupled plasma-optical emission spectroscopy (ICP-OES), superconducting quantum interference device (SQUID) magnetometry, and nuclear magnetic resonance relaxivity at 4.7 T. TEM showed that the diameters of the particles ranged from 9.3 to 10 nm, depending on the mole ratio of iron to platinum precursors, and on the concentration of octadecylamine (ODA) used in their preparation. The iron to platinum stoichiometry determined by ICP-OES varied from 1.4:1 to 3.7:1 and was similarly dependent on the initial mole ratios of iron and platinum salts, as well as on the concentration of ODA in the reaction. SQUID magnetometry showed that the SIPPs were superparamagnetic and had magnetic moments that increased with increasing iron content from 62 to 72 A·m2/kg Fe. The measured relaxivities of the SIPPs at 4.7 T were higher than commercially available superparamagnetic iron oxide nanoparticles, suggesting that these particles may be superior contrast agents in T2-weighted magnetic resonance imaging.","PeriodicalId":38110,"journal":{"name":"Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics","volume":"30 2","pages":"02C101"},"PeriodicalIF":0.0,"publicationDate":"2012-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1116/1.3692250","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"32748619","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Probing Albumin Adsorption onto Calcium Phosphates by XPS and ToF-SIMS. 用XPS和ToF-SIMS研究白蛋白在磷酸钙上的吸附。

IF 1.5 4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2011-07-01 DOI: 10.1116/1.3613919

J E Baio, T Weidner, G Interlandi, C Mendoza-Barrera, H E Canavan, R Michel, D G Castner

{"title":"Probing Albumin Adsorption onto Calcium Phosphates by XPS and ToF-SIMS.","authors":"J E Baio, T Weidner, G Interlandi, C Mendoza-Barrera, H E Canavan, R Michel, D G Castner","doi":"10.1116/1.3613919","DOIUrl":"10.1116/1.3613919","url":null,"abstract":"In this study the binding and assembly of bovine serum albumin (BSA) onto three different calcium phosphate phases (hydroxyapatite, dibasic calcium phosphate dihydrate, and β-tricalcium phosphate) was investigated using a combination of X-ray photoelectron spectroscopy (XPS) and time-of-flight secondary ion mass spectrometry (ToF-SIMS). XPS was used to record adsorption isotherms and to quantify the amount of BSA adsorbed onto the different CaP surfaces. On all three surfaces a monolayer of adsorbed BSA was formed. ToF-SIMS was then used to investigate how the structure of BSA changes upon surface binding. ToF-SIMS data from BSA films on the three CaP surfaces showed intensity differences of secondary ions originating from both hydrophobic and hydrophilic amino acids. For a more quantitative examination of structural changes, we developed a ratio comparing the sum of intensities of secondary ions from hydrophobic and hydrophilic residues. A small, but statistically significant, increase in the value of this ratio (7%) was observed between a BSA film on hydroxyapatite versus dibasic calcium phosphate dihydrate. From this ratio we can make some initial hypotheses about what specific changes in BSA structure relate to these differences observed in the ToF-SIMS data.","PeriodicalId":38110,"journal":{"name":"Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics","volume":"29 4","pages":"4D113"},"PeriodicalIF":1.5,"publicationDate":"2011-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3260791/pdf/JVTBD9-000029-04D113_1.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"30405403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Rapid serial prototyping of magnet-tipped attonewton-sensitivity cantilevers by focused ion beam manipulation. 利用聚焦离子束操作的磁头式牛顿敏感悬臂梁的快速连续原型设计。

4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2011-05-01 Epub Date: 2011-05-10 DOI: 10.1116/1.3581102

Jonilyn G Longenecker, Eric W Moore, John A Marohn

{"title":"Rapid serial prototyping of magnet-tipped attonewton-sensitivity cantilevers by focused ion beam manipulation.","authors":"Jonilyn G Longenecker, Eric W Moore, John A Marohn","doi":"10.1116/1.3581102","DOIUrl":"https://doi.org/10.1116/1.3581102","url":null,"abstract":"The authors report a method for rapidly prototyping attonewton-sensitivity cantilevers with custom-fabricated tips and illustrate the method by preparing tips consisting of a magnetic nanorod overhanging the leading edge of the cantilevers. Micron-long nickel nanorods with widths of 120-220 nm were fabricated on silicon chips by electron beam lithography, deposition, and lift-off. Each silicon chip, with its integral nanomagnet, was attached serially to a custom-fabricated attonewton-sensitivity cantilever using focused ion beam manipulation. The magnetic nanorod tips were prepared with and without an alumina capping layer, and the minimum detectable force and tip magnetic moment of the resulting cantilevers was characterized by cantilever magnetometry. The results indicate that this serial but high-yield approach is an effective way to rapidly prepare and characterize magnetic tips for the proposed single-electron-spin and single-proton magnetic resonance imaging experiments. The approach also represents a versatile route for affixing essentially any vacuum-compatible sample to the leading edge of an attonewton-sensitivity cantilever.","PeriodicalId":38110,"journal":{"name":"Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics","volume":"29 3","pages":"32001"},"PeriodicalIF":0.0,"publicationDate":"2011-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1116/1.3581102","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"30946200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 8

Suspended, micron-scale corner cube retroreflectors as ultra-bright optical labels. 悬挂，微米尺度的角立方反光镜作为超亮光学标签。

4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2011-01-01 DOI: 10.1116/1.3656801

Tim Sherlock, Azeem Nasrullah, Julia Litvinov, Eliedonna Cacao, Jennifer Knoop, Steven Kemper, Katerina Kourentzi, Archana Kar, Paul Ruchhoeft, Richard Willson

{"title":"Suspended, micron-scale corner cube retroreflectors as ultra-bright optical labels.","authors":"Tim Sherlock, Azeem Nasrullah, Julia Litvinov, Eliedonna Cacao, Jennifer Knoop, Steven Kemper, Katerina Kourentzi, Archana Kar, Paul Ruchhoeft, Richard Willson","doi":"10.1116/1.3656801","DOIUrl":"https://doi.org/10.1116/1.3656801","url":null,"abstract":"Corner cube retroreflectors are objects with three mutually perpendicular reflective surfaces that return light directly to its source and are therefore extremely bright and easy to detect. In this work, we have fabricated suspended corner cube retroreflectors, 5 microns in size, consisting of a transparent epoxy core and three surfaces coated with gold as ultra-bright labels for use in a rapid, low-labor diagnostic platform. The authors have demonstrated that individual cubes are easily imaged using low-cost, low numerical aperture objectives in suspension and that they remain suspended over long periods of time. Moreover, we have demonstrated that the gold outer surfaces can be decorated with proteins, and that individual cubes can be bound to magnetic sample preparation particles bearing antibodies which recognize these proteins. The bound cubes can be imaged and tracked as they move through solution in response to an external magnetic field, and we have, as such, demonstrated the principle of the new biosensing approach.","PeriodicalId":38110,"journal":{"name":"Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics","volume":"29 ","pages":""},"PeriodicalIF":0.0,"publicationDate":"2011-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1116/1.3656801","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"32926677","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 12

Fabrication of Poly(ethylene glycol) Hydrogel Structures for Pharmaceutical Applications using Electron beam and Optical Lithography. 用电子束和光刻技术制备医药用聚乙二醇水凝胶结构。

IF 1.5 4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2010-12-03 DOI: 10.1116/1.3517716

Misuk Bae, Ralu Divan, Kamlesh J Suthar, Derrick C Mancini, Richard A Gemeinhart

{"title":"Fabrication of Poly(ethylene glycol) Hydrogel Structures for Pharmaceutical Applications using Electron beam and Optical Lithography.","authors":"Misuk Bae, Ralu Divan, Kamlesh J Suthar, Derrick C Mancini, Richard A Gemeinhart","doi":"10.1116/1.3517716","DOIUrl":"10.1116/1.3517716","url":null,"abstract":"Soft-polymer based microparticles are currently being applied in many biomedical applications, ranging from bioimaging and bioassays to drug delivery carriers. As one class of soft-polymers, hydrogels are materials, which can be used for delivering drug cargoes and can be fabricated in controlled sizes. Among the various hydrogel-forming polymers, poly(ethylene glycol) (PEG) based hydrogel systems are widely used due to their negligible toxicity and limited immunogenic recognition. Physical and chemical properties of particles (i.e., particle size, shape, surface charge, and hydrophobicity) are known to play an important role in cell-particle recognition and response. To understand the role of physicochemical properties of PEG-based hydrogel structures on cells, it is important to have geometrically precise and uniform hydrogel structures. To fabricate geometrically uniform structures, we have employed electron beam lithography (EBL) and ultra-violet optical lithography (UVL) using PEG or PEG diacrylate polymers. These hydrogel structures have been characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM), optical microscopy, and attenuated total reflection Fourier-transform infrared spectroscopy (ATR-FTIR) confirming control of chemistry, size, and shape.","PeriodicalId":38110,"journal":{"name":"Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics","volume":"28 6","pages":"C6P24-C6P29"},"PeriodicalIF":1.5,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3060791/pdf/nihms277969.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"29757348","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Nanostructured silicon membranes for control of molecular transport. 控制分子运输的纳米结构硅膜。

4区工程技术

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics Pub Date : 2010-11-01 Epub Date: 2010-12-02 DOI: 10.1116/1.3518911

Bernadeta R Srijanto, Scott T Retterer, Jason D Fowlkes, Mitchel J Doktycz

引用次数: 9