控制分子运输的纳米结构硅膜。

IF 1.5 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Bernadeta R Srijanto, Scott T Retterer, Jason D Fowlkes, Mitchel J Doktycz
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引用次数: 9

摘要

一种允许分子物种选择性运输的膜需要在纳米尺度上进行精确的工程。膜的渗透性可以通过控制孔隙的物理结构和表面化学来调节。在这里,电子束和光学光刻的结合,以及低温深反应离子蚀刻,已被用于制造物理坚固的硅膜,具有均匀的孔径,并直接集成到微流体网络中。通过等离子体增强化学气相沉积和二氧化硅原子层沉积来覆盖膜表面,进一步减小了孔径。利用聚焦离子束铣削膜的横截面来确定涂层前后膜孔的物理形状。膜的功能表征是通过使用定量荧光显微镜来记录分子物种在膜上的运输。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Nanostructured silicon membranes for control of molecular transport.

A membrane that allows selective transport of molecular species requires precise engineering on the nanoscale. Membrane permeability can be tuned by controlling the physical structure and surface chemistry of the pores. Here, a combination of electron beam and optical lithography, along with cryogenic deep reactive ion etching, has been used to fabricate silicon membranes that are physically robust, have uniform pore sizes, and are directly integrated into a microfluidic network. Additional reductions in pore size were achieved using plasma enhanced chemical vapor deposition and atomic layer deposition of silicon dioxide to coat membrane surfaces. Cross sectioning of the membranes using focused ion beam milling was used to determine the physical shape of the membrane pores before and after coating. Functional characterization of the membranes was performed by using quantitative fluorescence microscopy to document the transport of molecular species across the membrane.

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CiteScore
2.70
自引率
0.00%
发文量
146
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