Rapid serial prototyping of magnet-tipped attonewton-sensitivity cantilevers by focused ion beam manipulation.

IF 1.5 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Jonilyn G Longenecker, Eric W Moore, John A Marohn
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引用次数: 8

Abstract

The authors report a method for rapidly prototyping attonewton-sensitivity cantilevers with custom-fabricated tips and illustrate the method by preparing tips consisting of a magnetic nanorod overhanging the leading edge of the cantilevers. Micron-long nickel nanorods with widths of 120-220 nm were fabricated on silicon chips by electron beam lithography, deposition, and lift-off. Each silicon chip, with its integral nanomagnet, was attached serially to a custom-fabricated attonewton-sensitivity cantilever using focused ion beam manipulation. The magnetic nanorod tips were prepared with and without an alumina capping layer, and the minimum detectable force and tip magnetic moment of the resulting cantilevers was characterized by cantilever magnetometry. The results indicate that this serial but high-yield approach is an effective way to rapidly prepare and characterize magnetic tips for the proposed single-electron-spin and single-proton magnetic resonance imaging experiments. The approach also represents a versatile route for affixing essentially any vacuum-compatible sample to the leading edge of an attonewton-sensitivity cantilever.

利用聚焦离子束操作的磁头式牛顿敏感悬臂梁的快速连续原型设计。
作者报告了一种具有定制尖端的快速原型化牛顿灵敏度悬臂梁的方法,并通过制备悬挂在悬臂梁前缘的磁性纳米棒组成的尖端来说明该方法。通过电子束光刻、沉积、提离等工艺,在硅片上制备了宽度为120 ~ 220 nm的微米长镍纳米棒。每个硅芯片,其集成的纳米磁铁,被连续连接到一个定制的牛顿灵敏度悬臂梁使用聚焦离子束操作。制备了带和不带氧化铝盖层的磁性纳米棒尖端,并用悬臂梁磁强计表征了所制备的悬臂梁的最小可测力和尖端磁矩。结果表明,这种连续而高产的方法是快速制备和表征单电子自旋和单质子磁共振成像实验磁尖的有效方法。该方法还代表了一种通用的路线,基本上可以将任何真空兼容的样品粘贴到一个牛顿灵敏度悬臂梁的前缘。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
CiteScore
2.70
自引率
0.00%
发文量
146
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