MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)最新文献

Flexible micro-processing by multiple miniature robots in SEM vacuum chamber 多微型机器人在扫描电镜真空室中的柔性微加工

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-12-01 DOI: 10.1109/MHS.2000.903304

O. Fuchiwaki, H. Aoyama

{"title":"Flexible micro-processing by multiple miniature robots in SEM vacuum chamber","authors":"O. Fuchiwaki, H. Aoyama","doi":"10.1109/MHS.2000.903304","DOIUrl":"https://doi.org/10.1109/MHS.2000.903304","url":null,"abstract":"We describe the newly developed flexible micro processing system organized by insect size robots in SEM. The small robots, composed of piezo elements and electromagnets, can move and control their position with submicron resolution. Also, these robots are small enough to be installed in the SEM vacuum chamber in which conventional machines cannot be easily set up without special procedures. As a basic function, one small robot which has a micro sliding table can transport it at the SEM focus point precisely and this sliding table can be also positioned by the other small robot. This two robots combination can provide x-y accurate positioning at any location within the chamber. On the sample table, the small robot with a micromanipulator can handle the small object for picking up and down. Also, as an advanced micro processing system, the fiber guided YAG-laser is also employed to provide the special material treatment. The operator can control each small robot easily with the help of real time monitoring of the SEM image. This collaboration of small robots in SEM has great benefit for providing both flexible and accurate micro processing performance with low cost.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130855579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Laser microfabrication/manipulation of dielectric materials 电介质材料的激光微加工/操作

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-12-01 DOI: 10.1109/MHS.2000.903278

H. Misawa, S. Juodkazis, A. Marcinkevičius, V. Mizeikis, A. Yamaguchi, Hongbo Sun, S. Matsuo

引用次数: 3

Forming a rounded etched profile by using two-step anisotropic wet etching 采用两步各向异性湿法刻蚀形成圆形刻蚀轮廓

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903297

M. Shikida, K. Kawasaki, K. Sato

引用次数: 1

Three-dimensional acoustic micromanipulation using four ultrasonic transducers 利用四个超声换能器进行三维声学微操纵

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903313

T. Kozuka, T. Tuziuti, H. Mitome, F. Arai, T. Fukuda

{"title":"Three-dimensional acoustic micromanipulation using four ultrasonic transducers","authors":"T. Kozuka, T. Tuziuti, H. Mitome, F. Arai, T. Fukuda","doi":"10.1109/MHS.2000.903313","DOIUrl":"https://doi.org/10.1109/MHS.2000.903313","url":null,"abstract":"Non-contact micromanipulation is a fundamental technique in micromachine technology. Previously, we proposed a new manipulation technique to transport particles two-dimensionally using an ultrasonic standing wave field generated by three transducers, whose sound beam axes were arranged with an angle of 120/spl deg/ in a plane. The present paper describes an advanced technique to manipulate particles three-dimensionally using four transducers. The transducers were settled at each corner of a regular triangular pyramid with their soundbeam axes crossing at the center of the pyramid. All transducers were driven at the same frequency, and a standing wave field was generated in the crossing region. When polystyrene particles were poured with a pipette into the sound field, the particles were trapped at the node of the sound pressure in the central region of the sound field. Changing the phase of one transducer out of four, the trapped particles were transported along the sound beam axis of the transducer. Combining each movement along the four sound beam axes, three-dimensional non-contact manipulation of a particle was accomplished.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126530216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 13

Effects of etching pressure and aperture width on Si etching with XeF/sub 2/ [for MEMS] 刻蚀压力和孔径宽度对XeF/sub 2/ sic刻蚀的影响[用于MEMS]

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903296

K. Sugano, O. Tabata

引用次数: 1

SMA micro pumps and switching valves for biochemical IC family 用于生化IC系列的SMA微型泵和开关阀

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903308

K. Ikuta, T. Hasegawa, T. Adachi

{"title":"SMA micro pumps and switching valves for biochemical IC family","authors":"K. Ikuta, T. Hasegawa, T. Adachi","doi":"10.1109/MHS.2000.903308","DOIUrl":"https://doi.org/10.1109/MHS.2000.903308","url":null,"abstract":"A versatile micro fluidic device \"Biochemical IC Family\" based on the concept of IC chip-set family has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been already developed and we have demonstrated that a luminous enzyme of firefly was synthesized by using these chips. Since all chemical fluids were supply by the external pumps in the past experiment, the micro pump chip and switching valve chip are demanded for total IC family. In this research, new chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. A new micro stereo lithography process (Hybrid IH Process) to make 3D composite structures consisting of UV polymer and other micro parts was developed and was utilized for total chip fabrication. The micro pump chip succeeded to supply chemical liquids through the connected chips. On the other hand, the micro switching valve chip changed reaction passes quickly. By using these biochemical IC chips, a new era where various kinds of reaction systems can be constructed by chemists in their own laboratory will come.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"136 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127353778","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

Microknife using ultrasonic vibration 微刀采用超声波振动

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903312

F. Arai, T. Amano, T. Fukuda, H. Satoh

引用次数: 11

Micro-assembly for top-down nanotechnology 微组装自上而下的纳米技术

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903276

G. Skidmore, M. Ellis, E. Parker, N. Sarkar, R. Merkle

引用次数: 13

Micropositioners for microscopy applications based on the stick-slip effect 基于粘滑效应的显微定位器

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903315

A. Bergander, J. Breguet, C. Schmitt, R. Clavel

引用次数: 47

Development of super devices for medical applications 医用超级设备的开发

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903275

M. Akiyama

引用次数: 0