Flexible micro-processing by multiple miniature robots in SEM vacuum chamber

Abstract

We describe the newly developed flexible micro processing system organized by insect size robots in SEM. The small robots, composed of piezo elements and electromagnets, can move and control their position with submicron resolution. Also, these robots are small enough to be installed in the SEM vacuum chamber in which conventional machines cannot be easily set up without special procedures. As a basic function, one small robot which has a micro sliding table can transport it at the SEM focus point precisely and this sliding table can be also positioned by the other small robot. This two robots combination can provide x-y accurate positioning at any location within the chamber. On the sample table, the small robot with a micromanipulator can handle the small object for picking up and down. Also, as an advanced micro processing system, the fiber guided YAG-laser is also employed to provide the special material treatment. The operator can control each small robot easily with the help of real time monitoring of the SEM image. This collaboration of small robots in SEM has great benefit for providing both flexible and accurate micro processing performance with low cost.