MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)最新文献_第4页

A magnetic suspension parallel motion hand and its application to micro processes 磁悬浮并联机械手及其在微加工中的应用

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903306

Taku Nakamura, K. Shimamura, Toshio Ando

引用次数: 1

Artificial larynx using PZT ceramic vibrator as a sound source (the characteristic improvement of PZT ceramic vibrator) 采用PZT陶瓷振子作为声源的人工喉头(PZT陶瓷振子的特性改进)

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903311

K. Ooe, T. Fukuda, F. Arai

引用次数: 0

Deep X-ray exposure system with multistage for 3D microfabrication 用于三维微加工的多级深x射线曝光系统

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903289

H. You, N. Matsuzuka, T. Yamaji, O. Tabata

{"title":"Deep X-ray exposure system with multistage for 3D microfabrication","authors":"H. You, N. Matsuzuka, T. Yamaji, O. Tabata","doi":"10.1109/MHS.2000.903289","DOIUrl":"https://doi.org/10.1109/MHS.2000.903289","url":null,"abstract":"This paper reports a new deep X-ray exposure system to realize 3D microstructures with controllable curved and inclined walls. Based on a compact synchrotron light source, a dedicated X-ray beamline and the exposure device have been constructed. They could work in exposure environments of vacuum or helium gas. The exposure device was mainly made up of 5 stages and had as many as 6 degrees of freedom, which enabled the system to have more functions than the normal one. Besides the scan in its plane, the substrate surface could also rotate round one of its normal and tangent respectively. Driven by a PZT stage, the X-ray mask could move freely in its plan against the substrate behind, which were used to control the wall inclination and flexure of the substrate structure. The system also had off-line mask-substrate alignment function. Various 3D PMMA microstructures can be realized by the system, such as lens array, nozzles, tube connector, conical tubes, inclined channels, long circle channels, angle pipe with smooth joint, cone, gear rack, long column with curve cross-section etc., which are impossible with the normal X-ray lithography system. A series of deep X-ray lithography experiments have been completed and obtained some interesting 3D PMMA microstructures and the relationship between the etching depth and the dose energy of the exposure. It demonstrated the potential of the system, which will greatly enlarge the application fields of deep X-ray lithography and LIGA process.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121143744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

Miniature robots with three degrees of freedom 三自由度微型机器人

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903314

T. Koyanagi, R. Fukui, A. Torii, A. Ueda

引用次数: 10

Micro connector fabricated by micro process technology 微加工技术制造的微连接器

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903295

M. Bhuiyan, A. Unno, Y. Yokoyama, T. Toriyama, S. Sugiyama

引用次数: 7

Vibration transmission of an USM: rotor observed by phase-shift interferometry 用相移干涉法观察超声电机转子的振动传输

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903299

T. Yamamoto, A. Torii, A. Ueda, K. Hane

{"title":"Vibration transmission of an USM: rotor observed by phase-shift interferometry","authors":"T. Yamamoto, A. Torii, A. Ueda, K. Hane","doi":"10.1109/MHS.2000.903299","DOIUrl":"https://doi.org/10.1109/MHS.2000.903299","url":null,"abstract":"We evaluate the performance of vibration-type microdevices. Stroboscopic phase-shift interferometry is capable of imaging high speed (/spl sim/MHz) and small(/spl sim/10 nm) vibration and is applied to displacement measurement of the microdevices. A laser diode, which is used as a light source of the interferometry, is irradiated stroboscopically in order to observe an object vibrating at high frequency. A phase-shift algorithm is used to obtain high contrast images. The optical system is a Fizeau-type interferometer which eliminates optical noises. An ultrasonic motor (USM), consisting of a rotor and a stator, is used as test object. The vibration frequency of the stator is about 50 kHz. In our previous work, several vibration distributions of the stator with different vibration phases were measured. A vibration state on the stator surface has been obtained by some vibration distributions. In this paper, we measure the vibration state of the rotor surface of the USM. When the rotor of the USM is driven by small vibration of the stator, the rotor surface is deformed. Therefore, some vibration distributions on the rotor surface with different vibration phases are measured according to the phase of the driving signal. The vibration distributions are compared with each other. As a result, the change of the vibration distribution proves the movement of the surface of the rotor.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129647233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4