磁悬浮并联机械手及其在微加工中的应用

Taku Nakamura, K. Shimamura, Toshio Ando
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引用次数: 1

摘要

在微观世界中,力的控制是实现人体或机械部件灵巧操作的有效手段。为此,研制了一种具有两根手指约束并联运动机构的微操作手原型。采用磁悬浮技术,实现了不需要力传感器的精细力控制。定位精度为几/spl μ /m,范围为几十mm。力控制精度为30 μ g,范围为数百gf。通过对包括机械在内的各种微观操作的应用,验证了所提出的机械手的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A magnetic suspension parallel motion hand and its application to micro processes
Force control is effective to dexterous operations for a human body or mechanical parts even in the micro world. For this purpose, a prototype micro operation hand with two fingers constrained to parallel motion linkages was developed. It uses magnetic suspension technology so that fine force control without force sensor is realized. The accuracy of positioning is a few /spl mu/m with the range of tens mm. The accuracy of force control is 30 mgf with a range of hundreds gf. The effectiveness of the proposed hand was verified by the application to various micro operations including mechanical.
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