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MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)最新文献

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3D nanorobotic manipulation of nano-order objects inside SEM 扫描电镜内纳米级物体的三维纳米机器人操作
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903305
Lixin Dong, F. Arai, T. Fukuda
{"title":"3D nanorobotic manipulation of nano-order objects inside SEM","authors":"Lixin Dong, F. Arai, T. Fukuda","doi":"10.1109/MHS.2000.903305","DOIUrl":"https://doi.org/10.1109/MHS.2000.903305","url":null,"abstract":"3D nanomanipulations of nano-order objects are realized with a 10-DOF nanorobotic manipulator, which is actuated with PZTs and Picomotors and operated inside a SEM. The coarse linear resolutions of the manipulator are better than 30 nm (X, Y, Z stages actuated by Picomotors) and the rotary one 2 mrad, while the resolutions of fine motions (actuated by PZTs) are within nano-order. AFM cantilevers are used as the end-effecters. Several kinds of manipulations are performed with the assistance of dielectrophoresis and van der Waals forces. Pick-and-place of a /spl phi/1 /spl mu/m polystyrene bead shows the effectiveness of dielectrophoresis. To show the manipulation accuracy, several letters are \"written\" with polystyrene /spl phi/3 /spl mu/m and /spl phi/1 /spl mu/m beads. 3D manipulations of multiwall carbon nanotubes are performed including picking up and bending single ones.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128820816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 49
Developing Khepera robot applications in a Webots environment 在Webots环境中开发Khepera机器人应用程序
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903293
L.F. Wang, K. Tan, V. Prahlad
{"title":"Developing Khepera robot applications in a Webots environment","authors":"L.F. Wang, K. Tan, V. Prahlad","doi":"10.1109/MHS.2000.903293","DOIUrl":"https://doi.org/10.1109/MHS.2000.903293","url":null,"abstract":"Khepera is a high performance mini-robot. Its compact power allows an efficient experimentation using a real robot and applying the basic simulation tools. Webots is a high quality Khepera simulator used in the fields of autonomous systems, intelligent robotics, evolutionary robotics, machine learning, computer vision, and artificial intelligence. The simulation program can be transferred to the real robots easily. The aim of this article is to support the development of Khepera applications in the Webots environment. Starting from the introduction of Khepera robot and its development methodologies, the paper presents and analyses an application example of Khepera robot in the Webots environment. Finally, current applications and future research directions are presented.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117063293","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Torsion and strain analysis of left ventricular wall at ejection period by using optical-flow 射血期左室壁扭转应变的光流分析
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903298
K. Yagi, Y. Sawaki, T. Inaba, M. Tokuda, A. Yamamoto, K. Sekioka
{"title":"Torsion and strain analysis of left ventricular wall at ejection period by using optical-flow","authors":"K. Yagi, Y. Sawaki, T. Inaba, M. Tokuda, A. Yamamoto, K. Sekioka","doi":"10.1109/MHS.2000.903298","DOIUrl":"https://doi.org/10.1109/MHS.2000.903298","url":null,"abstract":"In order to get the engineering application of cardiac functions, the quantitative analysis of cardiac movement is necessary. Therefore this research is concentrated on left ventricular wall, which lasts one cardiac cycle is taken as the images. The movements of the pixel between two continuous images are visualized by optical flow calculation. The transition in micro space, displacement, topographic twist, minimum principal strain, angle of torsion, and shearing strain are calculated, and the dynamics evaluations of the myocardial wall motion are tried.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122794852","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of a new type tactile sensor using micro electromagnetic coil for human robot 一种新型微型电磁线圈触觉传感器的研制
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903310
Xianhe Ding, K. Kuribayashi, T. Hashida
{"title":"Development of a new type tactile sensor using micro electromagnetic coil for human robot","authors":"Xianhe Ding, K. Kuribayashi, T. Hashida","doi":"10.1109/MHS.2000.903310","DOIUrl":"https://doi.org/10.1109/MHS.2000.903310","url":null,"abstract":"To realize an artificial finger sensing device for a human robot, a new tactile sensor has been developed. Generally the tactile sensor is required to have high reliability, size miniaturization, high sensitivity and wide frequency response. In view of these requirements, a micro electromagnetic coil was proposed as the main tactile component. The coil was a planar spiral thick structure for increasing sensitivity. Micromachining technology for the size miniaturization and for automatic assembling was applied to the micro coil fabrication. The coil, soft rubber and metal plate formed a new type tactile sensor. Ni micro coil of thickness 300 /spl mu/m and diameter 3 mm was fabricated. Using different soft rubber and metal plate, the sense and force characteristics of the tactile sensor were tested. The experimental results show that the microtactile sensor has high sensitivity and wide frequency response.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122981292","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Micro SMA actuator and motion control 微型SMA致动器和运动控制
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903279
K. Kuribayashi
{"title":"Micro SMA actuator and motion control","authors":"K. Kuribayashi","doi":"10.1109/MHS.2000.903279","DOIUrl":"https://doi.org/10.1109/MHS.2000.903279","url":null,"abstract":"To control a micromechatronic system, microsensors and microactuators are necessary. So far a lot of sensors made by using Si micromachining technology have been reported. On the other hand, only a few microactuators have been developed. Among these, micro SMA actuators have attracted strong attention because of their strong force, high power, faster response for their micro size and size reducibility by micromachining technology. In this plenary talk, the fabrication methods of micro SMA actuators and motion control using a micro SMA actuator are reviewed.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115715511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
Spiral-type micro-machine for medical applications 医用螺旋微型机械
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903292
K. Ishiyama, K. Arai, M. Sendoh, A. Yamazaki
{"title":"Spiral-type micro-machine for medical applications","authors":"K. Ishiyama, K. Arai, M. Sendoh, A. Yamazaki","doi":"10.1109/MHS.2000.903292","DOIUrl":"https://doi.org/10.1109/MHS.2000.903292","url":null,"abstract":"The spiral-type magnetic micro-machine, which is driven by a rotating magnetic field, is characterized by wireless operation for swimming. The machine has to swim under a lower Reynolds number environment, when the machine is downsized and working inside the human body. In this study, using various silicone oils whose kinematic viscosity ranged from 1 to 5/spl times/10/sup 5/ mm/sup 2//s, the swimming performance of the machine at low Reynolds number was examined. The machine composed of a cylindrical NdFeB magnet could swim in oils under condition of Re=10/sup -7/. This Reynolds number is the same as that of a micro-machine with micron size swimming in water. In addition, the machine could turn by controlling the external rotational magnetic field, and therefore the swimming direction of the machine could be controlled. Using these principles, a magnetic micromachine, which can run in a gel, was also fabricated.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114543828","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 105
Improvement of ultra-fine piercing by vacuum system 真空系统对超细穿孔的改进
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903294
T. Mori, K. Hirota, D. Tokumoto
{"title":"Improvement of ultra-fine piercing by vacuum system","authors":"T. Mori, K. Hirota, D. Tokumoto","doi":"10.1109/MHS.2000.903294","DOIUrl":"https://doi.org/10.1109/MHS.2000.903294","url":null,"abstract":"A new ultra-fine piercing process utilizing SiC fiber as a punch was proposed and micro holes of 14 /spl mu/m diameter were successfully pierced for three kinds of metal foils 8 to 15 /spl mu/m in thickness. In this paper, process refinement to assure the stability of piercing action and good tool life are discussed. As a result of applying a vacuum system, it is confirmed that tool life is rather improved for aluminum and beryllium copper foils and also good quality is maintained after 1000 heats.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122481285","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Probabilistic algorithm and training rule for a new identification and control kernel application to robotics systems 基于概率算法和训练规则的机器人系统识别与控制核心
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903302
A. Khoukhi
{"title":"Probabilistic algorithm and training rule for a new identification and control kernel application to robotics systems","authors":"A. Khoukhi","doi":"10.1109/MHS.2000.903302","DOIUrl":"https://doi.org/10.1109/MHS.2000.903302","url":null,"abstract":"A stochastic program is developed for adaptive control and identification of industrial design applications. Our program is executed at two levels: a stochastic trajectory planner and an on-line trajectory follower based on the complete stochastic dynamic model of the process. The modeling is first done in the deterministic case based on the Lagrangian formalism. This gives the stochastic model of the process. This study is applied to a case study of mobile robots agents. The mobility of the robot is also considered; first static mobility is given. Then we consider dynamic mobility. After that the mobility is randomized and taken as an output of our dynamic system. Our program is one of identification of the doubly stochastic process of hidden Markov chains minimizing the function of information of Kullback-Leibler convergence and the consistence of functions of parameters evaluation. Simulations for the case of the SARAH robot are given to demonstrate the efficiency of our algorithms.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"5 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121119349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Flexible microrobots for micro assembly tasks 用于微型装配任务的柔性微型机器人
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903303
H. Woern, J. Seyfried, S. Fahlbusch, A. Buerkle, F. Schmoeckel
{"title":"Flexible microrobots for micro assembly tasks","authors":"H. Woern, J. Seyfried, S. Fahlbusch, A. Buerkle, F. Schmoeckel","doi":"10.1109/MHS.2000.903303","DOIUrl":"https://doi.org/10.1109/MHS.2000.903303","url":null,"abstract":"A wide range of microcomponents can today be produced using various microfabrication techniques, The assembly of complex microsystems consisting of several single components (i.e., hybrid microsystems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise and fast microassembly methods. In this paper, the development of a microrobot-based microassembly station is presented. Mobile piezoelectric microrobots with dimensions of some cm/sup 3/ and with at least 5 DOF can perform various manipulations either under a light microscope or inside the vacuum chamber of a scanning electron microscope. The components of the station developed and its control system are described. The latter comprises a vision-based sensor system for automatic robot control and user interfaces for semi-automated control and teleoperation. First results of the SEM-based micro assembly, handling of biological cells and integration of force microsensors into our microrobots are presented as well.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116595309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 52
Electrostatic micro actuators with high-aspect-ratio driving gap for hard disk drive application 高纵横比驱动间隙静电微致动器，用于硬盘驱动器
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903330
T. Iizuka, T. Oba, H. Fujita
{"title":"Electrostatic micro actuators with high-aspect-ratio driving gap for hard disk drive application","authors":"T. Iizuka, T. Oba, H. Fujita","doi":"10.1109/MHS.2000.903330","DOIUrl":"https://doi.org/10.1109/MHS.2000.903330","url":null,"abstract":"Micro actuators are developed for hard disk drive application. The aim is high density data storage by positioning the read and write head element precisely. The desired specifications are displacement of /spl plusmn/1 /spl mu/m, operating voltage of 20 V and structural resonance frequency of 151 Hz. We fabricated a metallic actuator by using thick photoresist lithography and nickel electroplating. The electrostatic gap between the mover and the stator has high aspect ratio to achieve low voltage operation. We introduce a vertical sacrificial layer of copper to make the electrostatic gap. We utilize photoresist with thickness of 10 /spl mu/m. We completed the process and operated the actuator successfully. We also developed a silicon actuator using silicon deep etching and deposition technology. We use ICP-RIE for silicon etching and LPCVD for deposition of the vertical sacrificial layer of SiO/sub 2/ and the mover structure of polysilicon. We obtained an actuator which had thickness of 100 /spl mu/m with electrode gap of aspect ratio of 50.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130698519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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