Flexible microrobots for micro assembly tasks

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI:10.1109/MHS.2000.903303

H. Woern, J. Seyfried, S. Fahlbusch, A. Buerkle, F. Schmoeckel

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引用次数: 52

Abstract

A wide range of microcomponents can today be produced using various microfabrication techniques, The assembly of complex microsystems consisting of several single components (i.e., hybrid microsystems) is, however, a difficult task that is seen to be a real challenge for the robotic research community. It is necessary to conceive flexible, highly precise and fast microassembly methods. In this paper, the development of a microrobot-based microassembly station is presented. Mobile piezoelectric microrobots with dimensions of some cm/sup 3/ and with at least 5 DOF can perform various manipulations either under a light microscope or inside the vacuum chamber of a scanning electron microscope. The components of the station developed and its control system are described. The latter comprises a vision-based sensor system for automatic robot control and user interfaces for semi-automated control and teleoperation. First results of the SEM-based micro assembly, handling of biological cells and integration of force microsensors into our microrobots are presented as well.

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用于微型装配任务的柔性微型机器人

如今，使用各种微加工技术可以生产各种微组件。然而，由几个单一组件(即混合微系统)组成的复杂微系统的组装是一项艰巨的任务，这被视为机器人研究界的真正挑战。有必要设想灵活、高精度和快速的微装配方法。本文介绍了一种基于微机器人的微装配工作站的开发。尺寸约为cm/sup /，至少具有5自由度的移动压电微型机器人可以在光学显微镜下或扫描电子显微镜的真空室内执行各种操作。介绍了所研制的工作站的组成和控制系统。后者包括用于自动机器人控制的基于视觉的传感器系统和用于半自动控制和远程操作的用户界面。本文还介绍了基于扫描电镜的微装配、生物细胞处理和力微传感器集成到我们的微型机器人中的初步结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)

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