{"title":"微型SMA致动器和运动控制","authors":"K. Kuribayashi","doi":"10.1109/MHS.2000.903279","DOIUrl":null,"url":null,"abstract":"To control a micromechatronic system, microsensors and microactuators are necessary. So far a lot of sensors made by using Si micromachining technology have been reported. On the other hand, only a few microactuators have been developed. Among these, micro SMA actuators have attracted strong attention because of their strong force, high power, faster response for their micro size and size reducibility by micromachining technology. In this plenary talk, the fabrication methods of micro SMA actuators and motion control using a micro SMA actuator are reviewed.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Micro SMA actuator and motion control\",\"authors\":\"K. Kuribayashi\",\"doi\":\"10.1109/MHS.2000.903279\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"To control a micromechatronic system, microsensors and microactuators are necessary. So far a lot of sensors made by using Si micromachining technology have been reported. On the other hand, only a few microactuators have been developed. Among these, micro SMA actuators have attracted strong attention because of their strong force, high power, faster response for their micro size and size reducibility by micromachining technology. In this plenary talk, the fabrication methods of micro SMA actuators and motion control using a micro SMA actuator are reviewed.\",\"PeriodicalId\":372317,\"journal\":{\"name\":\"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-10-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MHS.2000.903279\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2000.903279","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
To control a micromechatronic system, microsensors and microactuators are necessary. So far a lot of sensors made by using Si micromachining technology have been reported. On the other hand, only a few microactuators have been developed. Among these, micro SMA actuators have attracted strong attention because of their strong force, high power, faster response for their micro size and size reducibility by micromachining technology. In this plenary talk, the fabrication methods of micro SMA actuators and motion control using a micro SMA actuator are reviewed.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
