3D nanorobotic manipulation of nano-order objects inside SEM

3D nanomanipulations of nano-order objects are realized with a 10-DOF nanorobotic manipulator, which is actuated with PZTs and Picomotors and operated inside a SEM. The coarse linear resolutions of the manipulator are better than 30 nm (X, Y, Z stages actuated by Picomotors) and the rotary one 2 mrad, while the resolutions of fine motions (actuated by PZTs) are within nano-order. AFM cantilevers are used as the end-effecters. Several kinds of manipulations are performed with the assistance of dielectrophoresis and van der Waals forces. Pick-and-place of a /spl phi/1 /spl mu/m polystyrene bead shows the effectiveness of dielectrophoresis. To show the manipulation accuracy, several letters are "written" with polystyrene /spl phi/3 /spl mu/m and /spl phi/1 /spl mu/m beads. 3D manipulations of multiwall carbon nanotubes are performed including picking up and bending single ones.