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MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)最新文献

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Proposal of braid-shape polymer microactuator 辫状聚合物微致动器的设计
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903316
H. Ishihara, T. Fukuda
{"title":"Proposal of braid-shape polymer microactuator","authors":"H. Ishihara, T. Fukuda","doi":"10.1109/MHS.2000.903316","DOIUrl":"https://doi.org/10.1109/MHS.2000.903316","url":null,"abstract":"This paper proposes a new kind of polymer actuator, braid-shape polymer microactuator, BSPM. The BSPM is braided by narrow PVDF tapes. This paper aims at analyzing the effects of the braiding method and solving the methodology of braiding. It is difficult to realize the prototype and confirm its properties by experiment. Therefore, this paper introduces ways of construction of the braided polymer films. The physical model of deformation of BSPM is described and the deformation of the BSPM is analyzed. Some prototypes of BSPM, and some basic experimental results, are presented.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124518663","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of self-supporting polysilicon thermopile 自支撑多晶硅热电堆的制造
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903332
I. Yajima, T. Toriyama, S. Sugiyama, K. Fukumasu, S. Konishi
{"title":"Fabrication of self-supporting polysilicon thermopile","authors":"I. Yajima, T. Toriyama, S. Sugiyama, K. Fukumasu, S. Konishi","doi":"10.1109/MHS.2000.903332","DOIUrl":"https://doi.org/10.1109/MHS.2000.903332","url":null,"abstract":"A prototype self-supporting polysilicon-metal junction thermopile has been developed. In order to realize ideal higher thermal isolation, a thermopile without a membrane and having self-supporting structure is proposed. The hot and cold contacts in the proposed thermopile are reversible. The thermopile can be widely used for sensing elements of power generators, temperature sensors, radiation sensors, flow sensors, and so on. The thermocouple is composed of polysilicon and Au junction. The thermopile was fabricated by MICS (Micromachine Integrated Chip Service: three polysilicon layers structure). Outputs were measured as a function of distance between hot contact of the thermopile and the radiation source. In order to confirm performance of the thermopile, the output voltages were compared with theoretical values. The experimental results were in good agreement with the calculations.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"158 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115633166","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whisker 添加单向晶须提高微零件激光光刻精度
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903287
T. Nakamoto, K. Yamaguchi, T. Obata
{"title":"Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whisker","authors":"T. Nakamoto, K. Yamaguchi, T. Obata","doi":"10.1109/MHS.2000.903287","DOIUrl":"https://doi.org/10.1109/MHS.2000.903287","url":null,"abstract":"Shrinkage and irradiated energy distribution cause manufacturing errors in laser photolithography for producing micro parts. The manufacturing accuracy when producing micro parts is calculated. The micro polymer part is reinforced by unidirectional whiskers in order to improve the manufacturing accuracy. The shrinkage ratio is decreased by the addition of unidirectional whiskers.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127779775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Electrostatic actuator with novel shaped cantilever 新型悬臂式静电致动器
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903327
Y. Hirai, Y. Marushima, S. Soda, D. Jin, H. Kawata, K. Inoue, Y. Tanaka
{"title":"Electrostatic actuator with novel shaped cantilever","authors":"Y. Hirai, Y. Marushima, S. Soda, D. Jin, H. Kawata, K. Inoue, Y. Tanaka","doi":"10.1109/MHS.2000.903327","DOIUrl":"https://doi.org/10.1109/MHS.2000.903327","url":null,"abstract":"This paper presents the deflection characteristics of electrostatic actuators, which have shape modified electrodes and cantilevers. In order to investigate how to get a large deflection with a low voltage, various structures are examined by a numerical calculation. Maximum deflections, just before a cantilever is pulled into an electrode, are evaluated. The numerical analysis shows that the triangular electrode with a triangular cantilever gives large deflection with a low applied voltage. To realize the triangular cantilever, a novel fabrication process by a double exposure method is proposed. The experimental results show that the triangular like cantilevers have excellent performance for deflection characteristics, which agrees well with the calculation results.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134054201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Physical processes in micromachining of silicon by laser /spl mu/-jet 激光/喷流微加工硅的物理过程
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903288
Y. Kathuria
{"title":"Physical processes in micromachining of silicon by laser /spl mu/-jet","authors":"Y. Kathuria","doi":"10.1109/MHS.2000.903288","DOIUrl":"https://doi.org/10.1109/MHS.2000.903288","url":null,"abstract":"To allow the production of small /spl mu/m order microstructures, processing with the laser /spl mu/-jet has the unique characteristics of material removal process, but its industrial application has yet to be established. This paper describes creating fine patterned microstructure in silicon using this laser /spl mu/-jet and discusses various physical phenomenon that ultimately affect the quality of the end product and explores the possibilities of current and new application areas. The present results show much better cut quality compared with the conventional technique. Grating like grove structures were created with a line and pitch width below 100 /spl mu/m.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"60 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124184934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Control circuit in an in-pipe wireless micro inspection robot 管道内无线微检测机器人的控制电路
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903290
K. Tsuruta, T. Sasaya, Takashi Shibata, N. Kawahara
{"title":"Control circuit in an in-pipe wireless micro inspection robot","authors":"K. Tsuruta, T. Sasaya, Takashi Shibata, N. Kawahara","doi":"10.1109/MHS.2000.903290","DOIUrl":"https://doi.org/10.1109/MHS.2000.903290","url":null,"abstract":"We have been developing an in-pipe wireless micro robot for inspection on inner surface of pipes. The robot consists of a CCD camera, a locomotive device, a system control circuit and wireless energy supply and communication devices. The robot moves in a 10 mm diameter pipe without wire and observes the inner surface of the pipe using the installed CCD camera. We have developed a compact control circuit which controls all the devices installed in the robot by commands from outside and transmits the image data from the CCD camera. As for the control circuit, the power consumption and the size are greatly restricted in order to be installed in the robot. In order to reduce the size of the circuit, we have newly developed an image data communication LSI based on a new architecture. The LSI is made of 0.35 /spl mu/m CMOS technology and has the size of 3.9 mm by 3.9 mm. To make the control circuit compact, we used a flip chip assembly for the LSI and eight more ICs in the robot. Through a fabricated prototype of the micro robot, we have successfully confirmed the wireless image data communication of 2.27 frames per second and control of the robot by microwave technology.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"67 E-8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121469495","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
European R&D programs for MST/MEMS-Nexus, EUROPRACTICE and European MST/MEMS success stories MST/MEMS- nexus, EUROPRACTICE和欧洲MST/MEMS成功案例的欧洲研发计划
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903277
G. Menozzi
{"title":"European R&D programs for MST/MEMS-Nexus, EUROPRACTICE and European MST/MEMS success stories","authors":"G. Menozzi","doi":"10.1109/MHS.2000.903277","DOIUrl":"https://doi.org/10.1109/MHS.2000.903277","url":null,"abstract":"The paper firstly presents the two main initiatives and programs in Europe for stimulating research and development in the microsystems field. They consist of the new phase launched in 1999 by the European commission within IST in the 5th FWP Frame Work Programme and the new strategic program Eurimus labelised in 1998 within the Eureka frame. The next section presents NEXUS the European network of excellence for microsystems, its main organisation based on USCs User Supplier Clubs and the result of the two task forces market investigations and road map. The third section is dedicated to EUROPRACTICE which aims at providing access to microsystems foundry services for European small and medium sized companies. As a conclusion of this presentation the last chapter of the paper presents the European main success stories in different field of applications such as automotive, IPC industrial process control, aeronautics, CAD tools and Ips, (bio)medical and household appliances.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123822470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Analysis of the piezoresistive effect in n-type /spl beta/-SiC based on electron transport and deformation potential theory 基于电子传递和变形势理论的n型/spl β /-SiC压阻效应分析
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903309
T. Toriyama, S. Sugiyama
{"title":"Analysis of the piezoresistive effect in n-type /spl beta/-SiC based on electron transport and deformation potential theory","authors":"T. Toriyama, S. Sugiyama","doi":"10.1109/MHS.2000.903309","DOIUrl":"https://doi.org/10.1109/MHS.2000.903309","url":null,"abstract":"The piezoresistive effect in n type /spl beta/-SiC was analyzed on the basis of electron transport and deformation potential theory for cubic many-valley semiconductors. Two deformation potential constants, /spl Xi//sub d/ and /spl Xi//sub u/ of the n-type /spl beta/-SiC, were independently determined by Herring-Vogt theory, which is an extension of Bardeen-Shockley theory for single spherical surface energy semiconductor to the many-valley semiconductor. Shifts of conduction band edges against arbitrary stress components were explicitly formulated by using /spl Xi//sub d/ and /spl Xi//sub u/. Applying stress, the electrons transport between the many-valleys. The electron transport represents macroscopic change in electrical conductivity. Then, shifts of the conduction band edges in each valley were related to the electron transport. Finally, the origin of the piezoresistive effect was interpreted as the electron transport between the many-valleys due to stress. For practical micro mechanical sensor design, piezoresistive coefficients /spl pi//sub 11/ and /spl pi//sub 12/ and gauge factor were calculated as a function of temperature and impurity concentration.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133152035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Safety evaluation method of human-care robot control 护理机器人控制的安全性评价方法
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903301
K. Ikuta, M. Nokota, H. Ishii
{"title":"Safety evaluation method of human-care robot control","authors":"K. Ikuta, M. Nokota, H. Ishii","doi":"10.1109/MHS.2000.903301","DOIUrl":"https://doi.org/10.1109/MHS.2000.903301","url":null,"abstract":"This paper proposes safety evaluation method for use in various kinds of control strategies for human-care robots. In the case of a careless collision between a robot and a human, impact force and impact stress are chosen as evaluation values, and a danger index is defined to quantitatively evaluate the effectiveness of each safety strategy used for control. As in the previous paper on safety design, this proposed method allows us to assess the contribution of each safety control strategy to the overall safety performance of a human-care robot. In addition, a new type of robot simulation system for danger-evaluation is constructed on a workstation. The system simplifies the evaluation of danger in both the design and control of human-care robots to quantify the effectiveness of various safety strategies. Here we describe the results obtained and the successful optimization of a safety control strategy for human care robots.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114698358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Development of a macro/micro mechanism for human scale teleoperating system 人体尺度遥操作系统宏/微机构的研制
MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI: 10.1109/MHS.2000.903307
Shuxiang Guo, K. Sugimoto, S. Hata
{"title":"Development of a macro/micro mechanism for human scale teleoperating system","authors":"Shuxiang Guo, K. Sugimoto, S. Hata","doi":"10.1109/MHS.2000.903307","DOIUrl":"https://doi.org/10.1109/MHS.2000.903307","url":null,"abstract":"In the medical field and in biotechnology application, a new type of human scale teleoperating system that can carry out three-dimensional high-speed micromanipulation has urgently been demanded. It is our purpose to develop a new type of human scale operating system for microoperation that can manipulate a microobject. In this paper, we deal with a human scale teleoperating system. In order to operate microobject in human scale, the working table and micromanipulator with multi DOF are demanded to be developed. The authors describe a macro/micro mechanism for the system. Firstly, they designed a precision parallel micromechanism with 6 DOF (10 /spl mu/m Moving Range, 10nm Resolving Power), and composed the macro/micro mechanism. Then, they also designed the complex control for the macro/micro mechanism. Experimental results indicate that the proposed macro/micro mechanism can be controlled by teleoperation, and that it is very useful for human scale microperation system.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130383010","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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